Rigaku Innovative Technologies Europe (RITE) Presented by: Dr.Peter Oberta

Transcription

1 Rigaku Innovative Technologies Europe (RITE) Presented by: Dr.Peter Oberta 1

2 Introducing Rigaku Since its inception in Japan in 1951, Rigaku has been at the forefront of analytical and industrial instrumentation technology. In fact, Rigaku means physical science in Japanese, the core of instrumentation. Rigaku Facts: Over 1600 employees worldwide Consolidated worldwide sales 270M Presence in 57 countries Explicitly focused on X-ray technologies Our expertise allows us to provide complete X-ray analysis solutions we make everything from X-ray sources, to optics and detectors. 2

3 Rigaku Global Operations Rigaku Headquarters Rigaku Innovative Technologies Auburn Hills, MI RAI RIT NSI ART RRT RAC RUK RESE RITE Rigaku Beijing Corporation Beijing, China RBC Japan Osaka Factory RAP Yamanashi Plant Rigaku Americas Corp. The Woodlands, Texas RLA Rigaku Europe SE Ettlingen, Germany - Wholly Owned Subsidiaries 3 Copyright 2014 Rigaku Corporation and its Global Subsidiaries. All Rights Reserved.

4 Rigaku product line XRD XRF SMX SAXS Sources Stress Analysers Optics Detectors Raman 4

5 From O2 U92 ppm detection limits Benchtop WD-XRF He type avalable 12 Sample positions Approx. 80kEuro Standardless application Micro- and UltraCarry available ppb detection limits 200W Pd tube Supermini200 - Mα Bi-Mα, Zr- Lβ Zr- P- Lα Kα Nb- 1 Lα W- Mβ S- Kα Pb Bi-Mβ Cl-Kα Sr- Lα Pb-Mβ k e V 5

6 Primus 4 From Be4 U95 Sub-ppm detection 3kW or 4kW Rh X-ray tube Tube above and below configuration APC (5 Pa 2% B) 30 m Be window Auto wire cleaning Mapping 12 analytical crystals Curved synthetic crystals 48 sample positions Up to 96 samples 6

7 Light Element Analysis X-ray intensity ratio to 3kW tube Sn-K Zr-K Cu-K Ti-K K-K P-K Al-K Na-K F-K O-K N-K C-K B-K Thin Window X-ray Tube Highest Sensitivity Analysis of Light Elements using High Power X-ray Tube with Ultra Thin Window (Be 30μm) kW Ultra-thin Window tube Be 30 m 2.0 Conventional 4kW tube Be 75 m kW tube Wavelength [nm] Be 127 m 7

8 Mapping Analysis of Granite Multi-element 2-dimentional mapping image

9 Simultix14 From Be4 U95 Sub-ppm detection 3kW or 4kW Rh X-ray tube Tube above and below configuration APC (5 Pa 2% B) 30 m Be window Auto wire cleaning 30 channels (40 channels optional) Curved synthetic crystals 8 sample positions Up to 48 samples Log spiral crystals (Rigaku patent) BG measurement (Rigaku patent) Different pumping speed Different vacuum level 9

10 Benchtop XRD system 600W tube, water cooled Movable knife edge and receiving slits Up to 8 samples 1D and 2D detector BTS 150 C and 500 C Transmission measurement Air tight sample holder Low BG sample holder MiniFlex600 10

11 SmartLab 11

12 X-ray sources 3kW sealed tube 9kW rotating anode 12

13 Attachments (for standard base) Universal Z axis 13

14 Attachments (for Eulerian cradle) Eulerian cradle 14

15 Cross Beam Optics Rigaku Patented Technology US Patent # BB and PB geometries are simultaneously mounted, aligned, and selectable. X-ray source Sample Bragg-Brentano focusing geometry (BB) Parallel beam geometry (PB) 15

16 Optical component sensors Photo sensors Ge(220)x2 + Soller slit Marks 16 16

17 SmartMessage TM / optics 17 US Patent # B2 17

18 AutoAlign TM Source height Incident beam direction Mirror angle Divergence slit height Sample height 2q zero point Double slit alignment Detector setting 18

19 Powder analysis optics Brag-Brentano Parallel beam CBO-E for transmission CBO-f for micro-diffraction 19

20 Kα1 HR powder analysis optics Reflection focusing Transmission focusing General purpose parallel 20

21 HyPix D detector 21

22 USPs Ultra-high dynamic range and high sensitivity Seamless switching from 2D-TDI (Time Delay and Integration) mode to 2D snapshot mode to 1D-TDI mode to 0D mode with a single detector XRF suppression by high and low energy discrimination High spatial resolution, direct-detection pixel array detector Copyright 2014 Rigaku 2

23 強度 (counts) Intensity (counts) X 線反射強度 ( 相対値 ) Wide Area Reciprocal Space Map Epitaxial relation, domain structure,.. Film Sub. In-Plane XRD Direct observation of in-plane crystal structure, orientation and lattice constant 2D-Pole Figure Texture, orientation distribution 2D Wide Area Rocking Curve Mosaicity analysis of sample having preferred orientation 0D Wide Dynamic Range GI-SAXS In-situ high 400 temperature XRD Phase transition, reaction, 600 dehydration Nano-structured surface analysis 1e+4 1e+3 1e Pixel SmartLab + HyPix-3000 Multi-Dimensional Applications 1D High Speed High Speed Powder XRD (Time Delay Integration) High speed measurement of phase identification, quantitative analysis, crystallite quality Reflectivity Thickness, density, roughness of thin film High-speed Reciprocal Space Map (high-resolution) Lattice constant and strain analysis for epitaxial film SAXS and U-SAXS Particle size and its distribution for nm/sub- m scale particles x x 10? x 10 X 線反射率プロファイル θ(deg) High-resolution Rocking Curve Thickness, composition and lattice mismatch of epitaxial film θ (deg) High-speed residual stress High-speed residual stress analysis mainly for bulk sample Copyright 2014 Rigaku 2

24 2-ways of Detector Mount Horizontal mount (normal setting) Vertical mount Copyright 2014 Rigaku 2

25 SmartLab with HyPix-3000 Copyright 2014 Rigaku 2

26 Temperature ( C) 2theta (deg) Application Example In-situ XRPD Corundum (Al 2 O 3 ) +Quartz (SiO 2 ) +Calcite (CaCO 3 ) Intermediate phase Gehlenite (Ca 2 Al 2 SiO 7 ) RT 1010 C 1252 C 1353 C RT Temp. increased linearly with rate: 5 C / min. Time Copyright 2014 Rigaku 2

27 Domo arigato! Rigaku Innovative Technologies Europe s.r.o. 27