EDUCATION PROFESSIONAL EXPERIENCE
|
|
- Ethel Holt
- 6 years ago
- Views:
Transcription
1 Matteo Rinaldi Department of Electrical and Computer Engineering Northeastern University 360 Huntington Ave., Boston, Massachusetts Mobile: Web: EDUCATION Ph.D. in Electrical and Systems Engineering, December University of Pennsylvania, Philadelphia, PA, USA. Dissertation: Piezoelectric Aluminum Nitride Nano Plate Resonant Sensors for Next Generation Miniaturized Sensing Platforms. Committee: Prof. Gianluca Piazza (academic advisor), Prof. Nader Engheta (University of Pennsylvania), Prof. Sunil Bhave (Cornell University), Prof. Jan Van der Spiegel (University of Pennsylvania), Prof. Cherie R. Kagan (University of Pennsylvania). Second Level Laurea Degree (M.Sc.) in Electronic Engineering, May University of Rome Tor Vergata, Rome, Italy. Dissertation: Micromachined Hydrogen sensors based on the variation of Work Function and interface circuits. Advisor: Prof. Arnaldo D Amico Graduated cum laude First Level Laurea Degree (B.Sc.) in Electronic Engineering, October University of Rome Tor Vergata, Rome, Italy. Dissertation: Fabrication and characterization of Carbon Nanotube based poly(1,8-dan) and poly(orto-anisidina) nanocomposed films for Organic Electronic Devices. Advisor: Prof. Aldo Di Carlo Graduated cum laude PROFESSIONAL EXPERIENCE Assistant Professor in the Department of Electrical and Computer Engineering. Northeastern University, Boston, MA, USA, January 2012-present. Research interests: Micro/Nano Electro Mechanical Systems (MEMS/NEMS) devices with particular emphasis on piezoelectric NEMS sensors for physical, chemical and biological detection, Radio Frequency MEMS/NEMS devices, MEMS/NEMS based oscillators and advanced timing solutions, micro/nano fabrication techniques and integration of MEMS/NEMS devices with electronics. Postdoctoral Researcher in Prof. Gianluca Piazza s Group (PMaNS Lab). University of Pennsylvania, Philadelphia, PA, USA, December 2010-December Worked on the development of PiezoElectric Non-Linear Nanomechanical Temperature and Acceleration Insensitive Clocks (PENNTAC) Dynamics Enabled Frequency Sources (DEFYS) DARPA program.
2 Matteo Rinaldi Page 2 Demonstrated AlN MEMS based oscillators operating at 1 GHz with extended dynamic range (up to 6 dbm driving power) and unprecedented phase noise performance (-90 dbc/hz at 1 khz offset and -170 dbc/hz phase noise floor). Demonstrated 1 GHz oscillators based on temperature compensated AlN MEMS resonators (temperature coefficient of frequency, TCF, ~ 3 ppm/k) with extended dynamic range and low phase noise performance (-85 dbc/hz at 1 khz offset and -170 dbc/hz phase noise floor). Demonstrated an innovative and high performance micro-ovenized MEMS resonator technology based on an AlN resonant plate and a suspended thin-film micro-heater separated by a sub-micron air gap (only 3 mw are necessary to operate the AlN resonator at ~100 C. Thermal time constant is in the order of 100s of s). Demonstrated the highest frequency (970 MHz) and best performance ever reported oscillator based on a micro-ovenized MEMS resonator technology (measured phase noise of -85 dbc/hz at 1 khz offset and -170 dbc/hz floor while operating the AlN resonator at ~100 C). Graduate Research Fellow in Prof. Gianluca Piazza s Group (PMaNS Lab). University of Pennsylvania, Philadelphia, PA, USA, July 2007-December Developed an innovative gravimetric sensor technology called AlN Nano Plate Resonant Sensor (NCMR funded project): Fabricated Nanoelectromechanical (NEMS) resonant sensors with frequencies of operation ranging between 100 MHz and 10 GHz. Demonstrated large scale integration of nano-biocoating layers, such as Single Wall Carbon Nanotubes (SWNTs), ssdna functionalized SWNTs and thiol-terminated ss- DNA, with the NEMS resonant sensors. Demonstrated arrays of NEMS resonant sensors functionalized with ss-dna and connected to chip-based, low power, self-sustaining multiplexed oscillator (fabricated in the ON Semiconductor 0.5 m CMOS process) for direct frequency read-out. Demonstrated capability to selectively detect concentrations of explosive and toxic agent vapors in the part per trillion (ppt) range. Selected as finalist of the 2010 PennVention Competition and writing a business plan for SmartSense a start-up company aiming to bring to market highly differentiated sensor solutions, based on Aluminum Nitride Nano Plate Resonant Sensor (NPR-S) (proprietary technology - US patent application), for homeland security and proteomics analysis applications. Graduate Research Fellow in Prof. A. D Amico s Group (Sensors and Microsystems Lab). University of Rome Tor Vergata, Rome, Italy, May 2006-June Micromachined Hydrogen Sensors: Fabricated capacitive hydrogen sensors based on the variation of work function. Designed and prototyped low-noise read-out circuit for a micromachined Kelvin Probe based sensor.
3 Matteo Rinaldi Page 3 Undergraduate Research Assistant in Prof. A. Di Carlo s Group (OptoLab). University of Rome Tor Vergata, Rome, Italy, March 2004-October Fabricates and carachterized carbon nanotube based nanocomposed polymers for organic thin film transistors (OTFT). HONORS AND AWARDS - Elected member of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society Administrative Committee (AdCom) 1 January December DARPA Young Faculty Award Class of 2012 (2012). - IEEE International Frequency Control Symposium 2011 Best Student Paper Award (2011). - The S. J. Stein Prize Awarded for the superior achievements in the field of new or unique materials or applications for materials in electronics (2011). - IEEE International Ultrasonics Symposium 2010 nominated for Best Student Paper Award (2010). - Weiss Tech House Innovation Fund as student inventor of SmartSense technology (2010). - IEEE International Frequency Control Symposium 2009 Best Student Paper Award (2009). - IEEE International Frequency Control Symposium 2008 nominated for Best Student Paper Award (2008). - Sebastiano and Rita Raeli Award ( 5,000), after M.Sc. graduation Awarded for the excellence in the average mark (2007). - Accenture S.p.A. Best Thesis Dissertation Award ( 2,500), with the (M.Sc.) dissertation: Micromachined Hydrogen sensors based on the variation of Work Function and interface circuits, (2007). - Micron Technology Foundation Inc. Biannual Research Fellowship ( 4,000), for study in the Sensor and Microsystems Group at the University of Rome Tor Vergata ( ). - Didactic assistance part-time internship at the Engineering School of the University of Rome Tor Vergata, awarded for the excellence in class grades ( ). - University of Rome Tor Vergata Tuition Free Scholarship, awarded for the excellence in class grades ( ). RESEACRH GRANTS AND FUNDING External Funding as a PI: 1. DARPA-YFA-N , "Young Faculty Award": Un-cooled Nanomechanical Infrared/THz Detectors Based on Piezoelectric Resonant Nano Plates", $300,000. STUDENT TRAINING PhD STUDENTS Yu Hui (Summer 2012 start)
4 Matteo Rinaldi Page 4 MASTER STUDENTS Zhenyun Qian (Summer 2012 start) Raul Vyas (Summer 2012 start) Giovanni Lanzilli (co-examiner) M.Sc. (laurea degree) in EE, University of Rome Tor Vergata, October 2011 Thesis: The AlN Nano Plate NEMS Resonant Sensor Technology: Experimental Characterization and Functionalization Using Metalloporphyrins. OTHER GRADUATE STUDENT DEFENSE COMMITTEES: Thaddaeus Webster, Ph.D., Northeastern University, ChE (October 2012) Ufuk Muncuk, MS., Northeastern University, ECE (June 2012) TEACHING EXPERIENCE Northeastern University, Boston, MA, USA. - Microelectromechanical Systems, EECE 7244, Fall Micro and Nano Fabrication, EECE 5606, Spring University of Pennsylvania, Philadelphia, PA, USA. - Special Guest Lecturer, ESE 529 RF MEMS (graduate), Fall Teaching Assistant, ESE 218 Physics and Models of Semiconductor Devices (undergraduate), Spring Teaching Assistant, ESE 529 RF MEMS (graduate), Fall Supervisor of several undergraduate and graduate research projects, RELEVANT TALKS T1. High Frequency AlN MEMS Resonators with Integrated Nano Hot Plate for Temperature Controlled Operation, IEEE International Frequency Control Symposium (IFCS) 2012, Baltimore, USA, May 23 rd, 2012 T2. The Aluminum Nitride Nano Plate Resonant Sensor Technology for Chemical, Physical and Biological Detection. University of Rome Tor Vergata EE Department, Rome, Italy, December 19 th 2011 [Invited Seminar]. T3. Piezoelectric Aluminum Nitride Nano Plate Resonant Devices for Next Generation Miniaturized Sensing Platforms, Northeastern University ECE Department, Boston, MA, USA, April 12 th 2011 [Invited Seminar]. T4. Use of a Single Multiplexed CMOS Oscillator As Direct Frequency Read-Out for an Array of Eight AlN Contour-Mode NEMS Resonant Sensors, IEEE Sensors Conference 2010, Waikoloa, Hawaii, USA, 1-4 November 2010.
5 Matteo Rinaldi Page 5 T5. Reconfigurable 4-Frequency CMOS Oscillator Based on AlN Conotur-Mode MEMS Resonators, IEEE International Ultrasonics Symposium 2010, San Diego, USA, October 2010 [Nominated for the Best Student Paper Award]. T6. SS-DNA Functionalized Ultra-Thin-Film AlN Contour-Mode Resonators with Self- Sustained Oscillator for Volatile Organic Chemical Detection, 23rd IEEE Conference on Micro Electro Mechanical Systems (MEMS 2010), Hong Kong SAR, China, January 26, T7. Ultra-Thin-Film AlN Contour-Mode Resonators for Sensing Applications, IEEE International Ultrasonics Symposium 2009, Rome, Italy, September 22, T8. AlN Contour-Mode Resonators for Narrow-Band Filters above 3 GHz, IEEE International Frequency Control Symposium 2009, Besancon, France, April 22, 2009 [Winner of the Best Student Paper Award]. T9. Gravimetric Chemical Sensor Based on the Direct Integration of SWNTs on AlN Contour- Mode MEMS Resonators, IEEE International Frequency Control Symposium 2008, Honolulu, Hawaii, USA, May 20, 2008 [Nominated for the Best Student Paper Award]. PUBLICATIONS BOOK CHAPTERS B1. M. Rinaldi, "NEMS Resonant Chemical Sensors", in Encyclopedia of Nanotechnology, Springer, 2012, in press (invited contribution). PEER-REVIEWED JOURNAL PAPERS J1. A. Tazzoli, M. Rinaldi, G. Piazza, "Experimental Investigation of Thermally Induced Non-Linearities in Aluminum Nitride Contour Mode MEMS Resonators", IEEE Electron Device Letters, pp , J2. M. Rinaldi, C. Zuo, J. Van der Spiegel and G. Piazza, "Reconfigurable CMOS Oscillator based on Multi-Frequency AlN Contour-Mode MEMS Resonators ", IEEE Transactions on Electron Devices, vol. 58, issue 5, pp , J3. M. Rinaldi, C. Zuniga, C. Zuo, and G. Piazza, "Super High Frequency Two-Port AlN Contour-Mode Resonators for RF Applications", IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 57, n. 1, pp , [A combination of Figure 4 and Figure 9 of this manuscript appears as cover image of the January 2010 issue of IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control].
6 Matteo Rinaldi Page 6 J4. C. Zuniga*, M. Rinaldi*, S. M. Khamis, A. T. Johnson, and G. Piazza, "Nanoenabled Microelectromechanical Sensor for Volatile Organic Chemical Detection", Applied Physics Letters, vol. 94, , *First Author. [This manuscript was selected for the Virtual Journal of Nanoscale Science & Technology -- June 22, 2009, Volume 19, Issue 25 and for the Virtual Journal of Biological Physics Research -- June 15, 2009, Volume 17 Issue 12]. PEER-REVIEWED CONFERENCE PROCEEDING PAPERS C1. Y. Hui and M. Rinaldi, " Ultra-Fast and High Resolution NEMS Thermal Detector Based on a Nano-Air-Gap Piezoelectric Resonant Structure", Proceedings of the IEEE Sensors 2012 Conference, Taipei, Taiwan, October 2012, in press [Late News Paper]. C2. A. Tazzoli, N. Kuo, M. Rinaldi, H. Pak, D. Fry, D. Bail, D. Stevens, and G. Piazza, "A 586 MHz Microcontroller Compensated MEMS Oscillator based on Ovenized Aluminum Nitride Contour-Mode Resonators", Proceedings of the IEEE International Ultrasonics Symposium (IUS) 2012, Dresden, Germany, 7-10 October 2012, in press. C3. M. Rinaldi, A. Tazzoli, C. Zuniga, G. Piazza, "970 MHz Ovenized Oscillator Based on an ALN MEMS Resonator with Monolithically Integrated Suspended Nano Hot Plate", Proceedings of the 2012 Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head 2012), Hilton Head Island, 3-7 June 2012, pp C4. C. Zuniga, M. Rinaldi, A. Tazzoli, G. Piazza, "Single Transistor Oscillator Based on Piezoelectric Resonant Nanochannel for Operation in Liquids", Proceedings of the 2012 Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head 2012), Hilton Head Island, 3-7 June 2012, C5. M. Rinaldi, Y. Hui, C. Zuniga, A. Tazzoli, G. Piazza, "High Frequency AlN MEMS Resonators with Integrated Nano Hot Plate for Temperature Controlled Operation", Proceedings of the IEEE International Frequency Control Symposium (IFCS) 2012, Baltimore, USA, May 21-24, 2012, pp C6. A. Tazzoli, M. Rinaldi, G. Piazza, "Ultra High Frequency Temperature Compensated Oscillators Based on Ovenized AlN Contour-Mode MEMS Resonators", Proceedings of the IEEE International Frequency Control Symposium (IFCS) 2012, Baltimore, USA, May 21-24, 2012, pp C7. A. Tazzoli, G. Piazza, M. Rinaldi, J. Segovia, C. Cassella, B. Otis, J. Shi, K. Turner, C. Burgner, K. McNaul, D. Bail, and V. Felmetsger, "Piezoelectric Nonlinear Nanomechanical Temperature and Acceleration Insensitive Clocks", Proceeding of SPIE 8373, 83730A, Baltimore, USA, April 23, 2012.
7 Matteo Rinaldi Page 7 C8. M. Rinaldi, A. Tazzoli, J. Segovia-Fernandez, V. Felmetsger and G. Piazza, "High Power and Low Temperature Coefficient of Frequency Oscillator Based on a Fully Anchored and Oxide Compensated AlN Contour-Mode MEMS Resonator", Proceedings of the 25 th IEEE Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France, 29 January 2 February 2012, pp C9. A. Tazzoli*, M. Rinaldi*, G. Piazza, "Ovenized High Frequency Oscillators Based on Aluminum Nitride Contour-Mode MEMS Resonators", Proceedings of the IEEE International Electron Devices Meeting (IEDM) 2011, Washington, USA, December 5-7, 2011, pp *First Author. C10. A. Tazzoli*, M. Rinaldi*, C. Zuo, N. Sinha, J. Van der Spiegel, G. Piazza*, "Aluminum Nitride Reconfigurable RF-MEMS Front-Ends", Proceedings of the IEEE 9 th International Conference on ASIC (ASICON 2011), Xiamen, China, October 25-28, 2011, pp [invited paper]. *First Author. C11. J. Segovia-Fernandez, A. Tazzoli, M. Rinaldi, and G. Piazza, "Nonlinear Lumped Electrical Model for Contour Mode AlN Resonators", Proceedings of the IEEE International Ultrasonics Symposium (IUS) 2011, Orlando, USA, October 2011, in press. C12. M. Rinaldi and G. Piazza, " Effects of Volume and Frequency Scaling in AlN Contour Mode NEMS Resonators on Oscillator Phase Noise", Proceedings of the IEEE International Frequency Control Symposium 2011, San Francisco, USA, 1-5 May 2011, pp. 1-5, [Winner of the Best Student Paper Award]. C13. M. Rinaldi, C. Zuniga and G. Piazza, "ss-dna Functionalized Array of AlN Contour- Mode NEMS Resonant Sensors with Single CMOS Multiplexed Oscillator for sub-ppb Detection of Volatile Organic Chemicals ", Proceedings of the 24 th IEEE Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico, January 2011, pp C14. C. Zuniga, M. Rinaldi and G. Piazza, " Reduced Viscous Damping in High Frequency Piezoelectric Resonant Nanochannels for Sensing in Fluids", Proceedings of the 24 th IEEE Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico, January 2011, pp C15. M. Rinaldi, C. Zuniga, B. Duick, and G. Piazza, "Use of a Single Multiplexed CMOS Oscillator As Direct Frequency Read-Out for an Array of Eight AlN Contour-Mode NEMS Resonant Sensors", Proceedings of the IEEE Sensors Conference 2010, Waikoloa, Hawaii, USA, 1-4 November 2010, pp C16. C. Zuniga, M. Rinaldi, and G. Piazza, "High Frequency Piezoelectric Resonant Nanochannel for Bio-Sensing Applications in Liquid Environment", Proceedings of the IEEE Sensors Conference 2010, Waikoloa, Hawaii, USA, 1-4 November 2010, pp
8 Matteo Rinaldi Page 8 C17. G. Piazza, M. Rinaldi, C. Zuniga, " Nanoscaled Piezoelectric Aluminum Nitride Contour-Mode Resonant Sensors ", Proceedings of the IEEE Sensors Conference 2010, Waikoloa, Hawaii, USA, 1-4 November 2010, pp [invited paper]. C18. M. Rinaldi, C. Zuo, J. Van der Spiegel and G. Piazza, "Reconfigurable 4-Frequency CMOS Oscillator Based on AlN Contour-Mode MEMS Resonators", Proceedings of the IEEE International Ultrasonics Symposium 2010, San Diego, USA, October 2010, in press [nominated for Best Student Paper Award]. C19. M. Rinaldi, C. Zuniga, C. Zuo and G. Piazza, "GHz Range Nanoscaled AlN Contour- Mode Resonant Sensors (CMR-S) with Self-Sustained CMOS Oscillator", Proceedings of the Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head 2010), Hilton Head Island, June 2010, pp C20. M. Rinaldi, B. Duick, C. Zuniga, C. Zuo and G. Piazza, "ss-dna Functionalized Ultra- Thin-Film AlN Contour-Mode Resonators with Self-Sustained Oscillator for Volatile Organic Chemical Detection", Proceedings of the 23rd IEEE Conference on Micro Electro Mechanical Systems (MEMS 2010), Hong Kong SAR, China, January 2010, pp C21. M. Rinaldi, C. Zuniga and G. Piazza, "Ultra-Thin-Film AlN Contour-Mode Resonators for Sensing Applications", Proceedings of the IEEE International Ultrasonics Symposium 2009, Rome, Italy, September 2009, pp C22. C. Zuniga, M. Rinaldi and G. Piazza, "Quality Factor of MEMS and NEMS AlN Contour-Mode Resonators in Liquid Media", Proceedings of the IEEE International Ultrasonics Symposium 2009, Rome, Italy, September 2009, pp C23. C. Zuo, M. Rinaldi and G. Piazza, "Power Handling and Related Frequency Scaling Advantages in Piezoelectric AlN Contour-Mode MEMS Resonators", Proceedings of the IEEE International Ultrasonics Symposium 2009, Rome, Italy, September 2009, pp C24. M. Rinaldi, C. Zuniga, C. Zuo, and G. Piazza, "AlN Contour-Mode Resonators for Narrow-Band Filters above 3 GHz", Proceedings of the IEEE International Frequency Control Symposium 2009, Besancon, France, April 2009, pg [Winner of the Best Student Paper Award]. C25. M. Rinaldi, C. Zuniga, C. Zuo, and G. Piazza, "Ultra-Thin Super High Frequency twoport AlN Contour-Mode Resonators and Filters", Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Tranducers 2009), Denver, Colorado, USA, June 2009, pg
9 Matteo Rinaldi Page 9 C26. M. Rinaldi, C. Zuniga, and G. Piazza, "5-10 GHz AlN Contour-Mode Nanoelectromechanical Resonators", Proceedings of the 22nd IEEE Conference on Micro Electro Mechanical Systems (MEMS 2009), Sorrento, Italy, January 2009, pg C27. C. Zuniga, M. Rinaldi, S. M. Khamis, T. S. Jones, A. T. Johnson, and G. Piazza, "DNA- Decorated Carbon Nanotubes as Sensitive Layer for AlN Contour-Mode Resonant- MEMS Gravimetric Sensor", Proceedings of the 22nd IEEE Conference on Micro Electro Mechanical Systems (MEMS 2009), Sorrento, Italy, January 2009, pg C28. M. Rinaldi, C. Zuniga, N. Sinha, M. Taheri, S. M. Khamis, A. T. Johnson, and G. Piazza, "Gravimetric Chemical Sensor Based on the Direct Integration of SWNTs on AlN Contour-Mode MEMS Resonators", Proceedings of the IEEE International Frequency Control Symposium 2008, Honolulu, Hawaii, USA, May 2008, pg, [nominated for Best Student Paper Award]. THESIS DISSERTATIONS D1. M. Rinaldi, "Piezoelectric Aluminum Nitride Nano Plate Resonant Sensors for Next Generation Miniaturized Sensing Platforms", Ph.D. thesis dissertation in Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, USA, December D2. M. Rinaldi, "Micromachined Hydrogen sensors based on the variation of Work Function and interface circuits", Second Level Laurea (M.Sc.) thesis dissertation in Electronic Engineering, University of Rome Tor Vergata, Rome, Italy, May D3. M. Rinaldi, "Fabrication and characterization of Carbon Nanotube based poly(1,8-dan) and poly(orto-anisidina) nanocomposed films for Organic Electronic Devices", First Level Laurea (B.Sc.) thesis dissertation in Electronic Engineering, University of Rome Tor Vergata, Rome, Italy, October PATENTS P1. G. Piazza, A. T. Johnson, M. Rinaldi, C. Zuniga, "System and Method for Detecting a Gaseous Analyte in a Gas", United States Patent Application , publication date: 07/29/2010, application number: 12/ P2. C. Zuniga, M. Rinaldi, G. Piazza, Piezoelectric Gravimetric Label-Free Sensor, United States Non-Provisional Patent Application , filed in November P3. A. Tazzoli, M. Rinaldi, G. Piazza, Ovenized High Frequency Oscillators Based on AlN Contour-Mode MEMS Resonators, United States Provisional Patent Application , filed in July 2011.
10 Matteo Rinaldi Page 10 P4. M. Rinaldi, Y. Hui, Ovenized Piezoelectric Resonators with Monotonically Integrated Suspended Heater, Northeastern University Disclosure of invention, filed in April MICRO/NANO FABRICATION SKILLS Skilled user of many micro/nano fabrication tools including: Elionix ELS-7500EX e-beam lithography tool, Stepper Nikon G4, Mask aligner Karl Suss MA4, Tegal AMS 2004 SMT AlN reactive sputtering tool, Atomic Layer Deposition Cambridge Nanotech Savannah 200, ICP Trion Phantom III, XeF 2 etcher Xactix Xetch e1, Wire Bonder KNS 4253, FEI Strata DB235 Focused Ion Beam, DI Dimension 3000 Atomic Force Microscope. Served as tool guru (super-user in charge of new users training) of different tools in the Wolf Nanofabrication Facility at the University of Pennsylvania, including: XeF 2 etcher Xactix Xetch e1, Wire Bonder KNS 4253, Stress measurement Tencor FCX-2320 and The Explorer-14 Denton Vacuum Sputterer. PROFESSIONAL AFFILIATIONS - Institute of Electrical and Electronics Engineering (IEEE), Student Member , Member 2011-present. - IEEE Ultrasonics, Ferroelectrics and Frequency Control Society (UFFC), Student Member , Member 2011-present. - IEEE Electron Devices Society (EDS), Student Member , Member 2011-present. - SPIE International Society for Optics and Photonics, Member 2012-present. REVIEWER FOR INTERNATIONAL CONFERENCES - Elected member of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society Administrative Committee (AdCom) 1 January December IEEE-AESS International Conference on Space and Satellite Telecommunications (ESTEL 2012), Rome, Italy, October Technical Program Committee (TPC) Member IEEE International Symposium on Circuits and Systems (ISCAS 2010), Paris, France, May 30 th June 2 nd IEEE International Symposium on Circuits and Systems (ISCAS 2009), Taipei, Taiwan, May 24 th 27 th 2009 ACTIVE PEER REVIEWER - IEEE Transactions on Electron Devices - IEEE Electron Device Letters - IEEE Transactions on Ultrasonic Ferroelectrics and Frequency Control - IEEE/ASME Journal of Microelectromechanical Systems - Journal of Micromechanics and Microengineering - IEEE Sensors Journal
11 Matteo Rinaldi Page 11 - Sensors & Actuators: B. Chemical - IEEE Antennas and Wireless Propagation Letters ADDITIONAL INFORMATION Nationality: Italian Current US Immigration Status: H-1B Visa.
Zhenyun Qian. Education. Research Experience
Zhenyun Qian Education 09/2013 05/2017: Ph.D. in Electrical Engineering, Northeastern University (NEU), Boston, MA, USA. Dissertation: Micro and Nano Electromechanical Systems for Near-Zero Power Infrared
More informationAlN Contour-Mode Resonators for Narrow-Band Filters above 3 GHz
From the SelectedWorks of Chengjie Zuo April, 2009 AlN Contour-Mode Resonators for Narrow-Band Filters above 3 GHz Matteo Rinaldi, University of Pennsylvania Chiara Zuniga, University of Pennsylvania Chengjie
More informationSwitch-less Dual-frequency Reconfigurable CMOS Oscillator using One Single Piezoelectric AlN MEMS Resonator with Co-existing S0 and S1 Lamb-wave Modes
From the SelectedWorks of Chengjie Zuo January, 11 Switch-less Dual-frequency Reconfigurable CMOS Oscillator using One Single Piezoelectric AlN MEMS Resonator with Co-existing S and S1 Lamb-wave Modes
More informationAluminum Nitride Reconfigurable RF-MEMS Front-Ends
From the SelectedWorks of Chengjie Zuo October 2011 Aluminum Nitride Reconfigurable RF-MEMS Front-Ends Augusto Tazzoli University of Pennsylvania Matteo Rinaldi University of Pennsylvania Chengjie Zuo
More informationReconfigurable 4-Frequency CMOS Oscillator Based on AlN Contour-Mode MEMS Resonators
From the SelectedWorks of Chengjie Zuo October, 2010 Reconfigurable 4-Frequency CMOS Oscillator Based on AlN Contour-Mode MEMS Resonators Matteo Rinaldi, University of Pennsylvania Chengjie Zuo, University
More informationIntegration of AlN Micromechanical Contour- Mode Technology Filters with Three-Finger Dual Beam AlN MEMS Switches
University of Pennsylvania From the SelectedWorks of Nipun Sinha 29 Integration of AlN Micromechanical Contour- Mode Technology Filters with Three-Finger Dual Beam AlN MEMS Switches Nipun Sinha, University
More informationHybrid Ultra-Compact 4th Order Band-Pass Filters Based On Piezoelectric AlN Contour- Mode MEMS Resonators
From the Selectedorks of Chengjie Zuo Summer June 1, 2008 Hybrid Ultra-Compact 4th Order Band-Pass Filters Based On Piezoelectric AlN Contour- Mode MEMS Resonators Chengjie Zuo, University of Pennsylvania
More informationReconfigurable CMOS Oscillator Based on Multifrequency AlN Contour-Mode MEMS Resonators
From the SelectedWorks of Chengjie Zuo May, 2011 Reconfigurable CMOS Oscillator Based on Multifrequency AlN Contour-Mode MEMS Resonators Matteo Rinaldi, University of Pennsylvania Chengjie Zuo, University
More information100nm Thick Aluminum Nitride Based Piezoelectric Nano Switches Exhibiting 1mV Threshold Voltage Via Body-Biasing
University of Pennsylvania From the SelectedWorks of Nipun Sinha 2010 100nm Thick Aluminum Nitride Based Piezoelectric Nano Switches Exhibiting 1mV Threshold Voltage Via Body-Biasing Nipun Sinha, University
More informationEE C245 ME C218 Introduction to MEMS Design
EE C245 ME C218 Introduction to MEMS Design Fall 2008 Prof. Clark T.-C. Nguyen Dept. of Electrical Engineering & Computer Sciences University of California at Berkeley Berkeley, CA 94720 Lecture 1: Definition
More informationEE C245 ME C218 Introduction to MEMS Design Fall 2007
EE C245 ME C218 Introduction to MEMS Design Fall 2007 Prof. Clark T.-C. Nguyen Dept. of Electrical Engineering & Computer Sciences University of California at Berkeley Berkeley, CA 94720 Lecture 1: Definition
More informationEE C245 ME C218 Introduction to MEMS Design Fall 2010
Instructor: Prof. Clark T.-C. Nguyen EE C245 ME C218 Introduction to MEMS Design Fall 2010 Prof. Clark T.-C. Nguyen Dept. of Electrical Engineering & Computer Sciences University of California at Berkeley
More informationProf. Matteo Rinaldi
MATTEO RINALDI Prof. Matteo Rinaldi Northeastern SMART Vision and Mission Northeastern SMART Vision Conceive and pilot disruptive technological innovation in smart devices and systems to make everyday
More informationBody-Biased Complementary Logic Implemented Using AlN Piezoelectric MEMS Switches
University of Pennsylvania From the SelectedWorks of Nipun Sinha 29 Body-Biased Complementary Logic Implemented Using AlN Piezoelectric MEMS Switches Nipun Sinha, University of Pennsylvania Timothy S.
More informationNanoFabrication Kingston. Seminar and Webinar January 31, 2017 Rob Knobel Associate Professor, Dept. of Physics Queen s University
NanoFabrication Kingston Seminar and Webinar January 31, 2017 Rob Knobel Associate Professor, Dept. of Physics Queen s University What is NFK? It s a place, an team of experts and a service. The goal of
More informationDemonstration of Inverse Acoustic Band Gap Structures in AlN and Integration with Piezoelectric Contour Mode Transducers
From the SelectedWorks of Chengjie Zuo June, 29 Demonstration of Inverse Acoustic Band Gap Structures in AlN and Integration with Piezoelectric Contour Mode Transducers Nai-Kuei Kuo, University of Pennsylvania
More informationRF Micro/Nano Resonators for Signal Processing
RF Micro/Nano Resonators for Signal Processing Roger T. Howe Depts. of EECS and ME Berkeley Sensor & Actuator Center University of California at Berkeley Outline FBARs vs. lateral bulk resonators Electrical
More informationDemonstration of Inverse Acoustic Band Gap Structures in AlN and Integration with Piezoelectric Contour Mode Wideband Transducers
From the SelectedWorks of Chengjie Zuo April, 2009 Demonstration of Inverse Acoustic Band Gap Structures in AlN and Integration with Piezoelectric Contour Mode Wideband Transducers Nai-Kuei Kuo, University
More informationPiezoelectric Aluminum Nitride Micro Electromechanical System Resonator for RF Application
Piezoelectric Aluminum Nitride Micro Electromechanical System Resonator for RF Application Prasanna P. Deshpande *, Pranali M. Talekar, Deepak G. Khushalani and Rajesh S. Pande Shri Ramdeobaba College
More informationCMOS-Electromechanical Systems Microsensor Resonator with High Q-Factor at Low Voltage
CMOS-Electromechanical Systems Microsensor Resonator with High Q-Factor at Low Voltage S.Thenappan 1, N.Porutchelvam 2 1,2 Department of ECE, Gnanamani College of Technology, India Abstract The paper presents
More informationVery High Frequency Channel-Select MEMS Filters Based on Self-Coupled Piezoelectric AlN Contour-Mode Resonators
From the SelectedWorks of Chengjie Zuo May, 2010 Very High Frequency Channel-Select MEMS Filters Based on Self-Coupled Piezoelectric AlN Contour-Mode Resonators Chengjie Zuo, University of Pennsylvania
More informationNew Type of RF Switches for Signal Frequencies of up to 75 GHz
New Type of RF Switches for Signal Frequencies of up to 75 GHz Steffen Kurth Fraunhofer ENAS, Chemnitz, Germany Page 1 Contents Introduction and motivation RF MEMS technology Design and simulation Test
More informationMEMS for RF, Micro Optics and Scanning Probe Nanotechnology Applications
MEMS for RF, Micro Optics and Scanning Probe Nanotechnology Applications Part I: RF Applications Introductions and Motivations What are RF MEMS? Example Devices RFIC RFIC consists of Active components
More informationIN-CHIP DEVICE-LAYER THERMAL ISOLATION OF MEMS RESONATOR FOR LOWER POWER BUDGET
Proceedings of IMECE006 006 ASME International Mechanical Engineering Congress and Exposition November 5-10, 006, Chicago, Illinois, USA IMECE006-15176 IN-CHIP DEVICE-LAYER THERMAL ISOLATION OF MEMS RESONATOR
More informationYa WANG, Ph.D Assistant Professor State University of New York, Stony Brook
Ya WANG, Ph.D Assistant Professor State University of New York, Stony Brook Department of Mechanical Engineering State University of New York, Stony Brook 153 Light Engineering, Stony Brook, NY 11790 Phone:
More informationTae-Kwang Jang. Electrical Engineering, University of Michigan
Education Tae-Kwang Jang Electrical Engineering, University of Michigan E-Mail: tkjang@umich.edu Ph.D. in Electrical Engineering, University of Michigan September 2013 November 2017 Dissertation title:
More informationDEVELOPMENT OF RF MEMS SYSTEMS
DEVELOPMENT OF RF MEMS SYSTEMS Ivan Puchades, Ph.D. Research Assistant Professor Electrical and Microelectronic Engineering Kate Gleason College of Engineering Rochester Institute of Technology 82 Lomb
More informationNeurocomputing and Associative Memories Based on Ovenized Aluminum Nitride Resonators
Proceedings of International Joint Conference on Neural Networks, Dallas, Texas, USA, August 4-9, 013 Neurocomputing and Associative Memories Based on Ovenized Aluminum Nitride Resonators Vehbi Calayir,
More informationAssociate Professor, University of Central Florida, Orlando, FL Department of Electrical Engineering and Computer Science
CURRICULUM VITAE Reza Abdolvand Associate Professor Phone (cell): 404-429-4780 Department of Electrical Engineering and Computer Science Phone (office): 407-823-1760 417 HEC, University of Central Florida
More informationA Self-Sustaining Ultra High Frequency Nanoelectromechanical Oscillator
Online Supplementary Information A Self-Sustaining Ultra High Frequency Nanoelectromechanical Oscillator X.L. Feng 1,2, C.J. White 2, A. Hajimiri 2, M.L. Roukes 1* 1 Kavli Nanoscience Institute, MC 114-36,
More informationMulti-Frequency Pierce Oscillators Based On Piezoelectric AlN Contour-Mode MEMS Resonators
From the SelectedWorks of Chengjie Zuo September, 008 Multi-Frequency Pierce Oscillators Based On Piezoelectric AlN Contour-Mode MEMS Resonators Chengjie Zuo, University of Pennsylvania Nipun Sinha, University
More informationThe Cornell NanoScale Facility: NNCI Overview
The Cornell NanoScale Facility: NNCI Overview Prof. Christopher Ober Lester B. Knight Director CNF: founded 1977 CNF Highlights 2017 is CNF s 40 th Anniversary as an NSF funded User Facility Using NNCI
More informationLow Actuation Wideband RF MEMS Shunt Capacitive Switch
Available online at www.sciencedirect.com Procedia Engineering 29 (2012) 1292 1297 2012 International Workshop on Information and Electronics Engineering (IWIEE) Low Actuation Wideband RF MEMS Shunt Capacitive
More informationIBM Research - Zurich Research Laboratory
October 28, 2010 IBM Research - Zurich Research Laboratory Walter Riess Science & Technology Department IBM Research - Zurich wri@zurich.ibm.com Outline IBM Research IBM Research Zurich Science & Technology
More informationCURRICULUM VITAE I. EARNED DEGREES II. EMPLOYMENT III. HONORS AND AWARDS IV. PUBLICATIONS
CURRICULUM VITAE Mina Rais-Zadeh Assistant Professor School of Electrical Engineering and Computer Science University of Michigan Ann Arbor, MI 48109 Email: minar@umich.edu Tel: (734) 764-4249, Fax: (734)
More informationNanotechnology, the infrastructure, and IBM s research projects
Nanotechnology, the infrastructure, and IBM s research projects Dr. Paul Seidler Coordinator Nanotechnology Center, IBM Research - Zurich Nanotechnology is the understanding and control of matter at dimensions
More informationLow-Power Ovenization of Fused Silica Resonators for Temperature-Stable Oscillators
Low-Power Ovenization of Fused Silica Resonators for Temperature-Stable Oscillators Zhengzheng Wu zzwu@umich.edu Adam Peczalski peczalsk@umich.edu Mina Rais-Zadeh minar@umich.edu Abstract In this paper,
More informationMYUNGHWAN PARK Westchester Park Drive, APT 1510, College Park, Maryland MOBILE : (+1) ,
RESEARCH INTERESTS MYUNGHWAN PARK 6200 Westchester Park Drive, APT 1510, College Park, Maryland 20740 MOBILE : (+1) 240-678-9863, EMAIL : mhpark@umd.edu My overall research interest is the physics of integrated
More informationSiGe based Grating Light Valves: A leap towards monolithic integration of MOEMS
SiGe based Grating Light Valves: A leap towards monolithic integration of MOEMS S. Rudra a, J. Roels a, G. Bryce b, L. Haspeslagh b, A. Witvrouw b, D. Van Thourhout a a Photonics Research Group, INTEC
More informationMicro-sensors - what happens when you make "classical" devices "small": MEMS devices and integrated bolometric IR detectors
Micro-sensors - what happens when you make "classical" devices "small": MEMS devices and integrated bolometric IR detectors Dean P. Neikirk 1 MURI bio-ir sensors kick-off 6/16/98 Where are the targets
More informationSEMINAR ON PERSPECTIVES OF NANOTECHNOLOGY FOR RF AND TERAHERTZ ELECTRONICS. February 1, 2013
SEMINAR ON PERSPECTIVES OF NANOTECHNOLOGY FOR RF AND TERAHERTZ ELECTRONICS February 1, 2013 GuideMr.Harikrishnan A.IAsst ProfessorANJUSEMINAR MICHAEL ONPERSPECTIVES (NSAJEEC013) OF NANOTECHNOLOGY FOR February
More informationNTU RECIPIENTS OF NRF S PROOF OF CONCEPT SCHEME GRANTS. 1. A Semantics-Based and Service-Oriented Framework for the Virtualisation of Sensor Networks
Reg. No. 200604393R FACT SHEET For immediate release Total: 7 pages including this page Singapore, 21 August 2009 NTU RECIPIENTS OF NRF S PROOF OF CONCEPT SCHEME GRANTS 1. A Semantics-Based and Service-Oriented
More informationHolographic Augmented Reality: Towards Near-to-Eye Electroholography
+1 (617) 452-5644 +1 (770) 316-2569 sjolly@media.mit.edu http://www.sundeepjolly.com Ph.D. student and researcher at the MIT Media Lab with primary research interests in computational optical methods and
More informationMEMS in ECE at CMU. Gary K. Fedder
MEMS in ECE at CMU Gary K. Fedder Department of Electrical and Computer Engineering and The Robotics Institute Carnegie Mellon University Pittsburgh, PA 15213-3890 fedder@ece.cmu.edu http://www.ece.cmu.edu/~mems
More informationIntroduction to MEMS. I) Course goals Information sources III) Course outline. Course Goals. Introduction to Micro/nano world.
Introduction to MEMS Instructor: Prof. T.S. Leu ( 呂宗行 ) Department of Aeronautics and Astranautics Course ID: P49170 Email: tsleu@mail.ncku.edu.tw Sep. 2014~Jan. 2015 Lecture hours: Office hours: Friday
More informationMEMS BASED QUARTZ OSCILLATORS and FILTERS for on-chip INTEGRATION
MEMS BASED QUARTZ OSCILLATORS and FILTERS for on-chip INTEGRATION R. L. Kubena, F. P. Stratton, D. T. Chang, R. J. Joyce, and T. Y. Hsu Sensors and Materials Laboratory, HRL Laboratories, LLC Malibu, CA
More informationDual Beam Actuation of Piezoelectric AlN RF MEMS Switches Integrated with AlN Contourmode
University of Pennsylvania From the SelectedWorks of Nipun Sinha June 2, 28 Dual Beam Actuation of Piezoelectric RF MEMS Switches Integrated with Contourmode Resonators Nipun Sinha, University of Pennsylvania
More informationCharacterization of Rotational Mode Disk Resonator Quality Factors in Liquid
Characterization of Rotational Mode Disk Resonator Quality Factors in Liquid Amir Rahafrooz and Siavash Pourkamali Department of Electrical and Computer Engineering University of Denver Denver, CO, USA
More informationSensitivity Analysis of MEMS Flexure FET with Multiple Gates
Sensitivity Analysis of MEMS Flexure FET with Multiple Gates K.Spandana *1, N.Nagendra Reddy *2, N.Siddaiah #3 # 1 PG Student Department of ECE in K.L.University Green fields-522502, AP, India # 2 PG Student
More informationSurface Micromachining
Surface Micromachining An IC-Compatible Sensor Technology Bernhard E. Boser Berkeley Sensor & Actuator Center Dept. of Electrical Engineering and Computer Sciences University of California, Berkeley Sensor
More informationMicromechanical Circuits for Wireless Communications
Micromechanical Circuits for Wireless Communications Clark T.-C. Nguyen Center for Integrated Microsystems Dept. of Electrical Engineering and Computer Science University of Michigan Ann Arbor, Michigan
More informationDesign and Fabrication of RF MEMS Switch by the CMOS Process
Tamkang Journal of Science and Engineering, Vol. 8, No 3, pp. 197 202 (2005) 197 Design and Fabrication of RF MEMS Switch by the CMOS Process Ching-Liang Dai 1 *, Hsuan-Jung Peng 1, Mao-Chen Liu 1, Chyan-Chyi
More informationCascaded Channel-Select Filter Array Architecture Using High-K Transducers for Spectrum Analysis
Cascaded Channel-Select Filter Array Architecture Using High-K Transducers for Spectrum Analysis Eugene Hwang, Tanay A. Gosavi, Sunil A. Bhave School of Electrical and Computer Engineering Cornell University
More informationHwaider Lin
Summary Hwaider Lin 626-375-3269 whyderlin@gmail.com Hwaider Lin has been working on designing, fabricating, and testing in RF microwave projects funded by different agencies, like NSF ERC, DARPA, AFOSR
More informationDual-Mode Piezo-on-Silicon Resonant Temperature and Humidity Sensor for Portable Air Quality Monitoring Systems
Dual-Mode Piezo-on-Silicon Resonant Temperature and Humidity Sensor for Portable Air Quality Monitoring Systems Jenna L. Fu and Farrokh Ayazi School of Electrical and Computer Engineering Georgia Institute
More information3-Day Short Course on Terahertz Technologies and Applications June 2016 City University of Hong Kong
3-Day Short Course on Terahertz Technologies and Applications 14 16 June 2016 City University of Hong Kong About the workshop The 3-Day Short Course on Terahertz Technologies and Applications is organized
More informationSensitivity Enhancement of Bimaterial MOEMS Thermal Imaging Sensor Array using 2-λ readout
Sensitivity Enhancement of Bimaterial MOEMS Thermal Imaging Sensor Array using -λ readout O. Ferhanoğlu, H. Urey Koç University, Electrical Engineering, Istanbul-TURKEY ABSTRACT Diffraction gratings integrated
More informationDes MEMS aux NEMS : évolution des technologies et des concepts aux travers des développements menés au LETI
Des MEMS aux NEMS : évolution des technologies et des concepts aux travers des développements menés au LETI Ph. Robert 1 Content LETI at a glance From MEMS to NEMS: 30 years of technological evolution
More informationElectrostatic actuation of silicon optomechanical resonators Suresh Sridaran and Sunil A. Bhave OxideMEMS Lab, Cornell University, Ithaca, NY, USA
Electrostatic actuation of silicon optomechanical resonators Suresh Sridaran and Sunil A. Bhave OxideMEMS Lab, Cornell University, Ithaca, NY, USA Optomechanical systems offer one of the most sensitive
More informationEducation Massachusetts Institute of Technology present Ph.D. student in Mechanical Engineering, advised by Prof.
Ashley E. Morishige February 7, 2014 Contact Information Photovoltaic Research Laboratory Massachusetts Institute of Technology 77 Massachusetts Ave, Building 35-211 Cambridge, MA 02139 aemorish@mit.edu
More informationRF MEMS Simulation High Isolation CPW Shunt Switches
RF MEMS Simulation High Isolation CPW Shunt Switches Authored by: Desmond Tan James Chow Ansoft Corporation Ansoft 2003 / Global Seminars: Delivering Performance Presentation #4 What s MEMS Micro-Electro-Mechanical
More informationRF MEMS for Low-Power Communications
RF MEMS for Low-Power Communications Clark T.-C. Nguyen Center for Wireless Integrated Microsystems Dept. of Electrical Engineering and Computer Science University of Michigan Ann Arbor, Michigan 48109-2122
More informationWelcome to. A facility within the Nanometer Structure Consortium (nmc) at Lund University. nanolab. lund
lund nanolab Welcome to A facility within the Nanometer Structure Consortium (nmc) at Lund University »It s a dream come true. This is the lab I always dreamt of. I didn t know it would ever exist.«ivan
More informationJoshua Kovitz. Best Way to Contact:
EDUCATION Joshua Kovitz Best Way to Contact: jmkovitz@ucla.edu University of California Los Angeles - Los Angeles, CA PhD in Electrical Engineering 4.0 / 4.0 GPA 2012-Present Research focus on antenna
More informationConference Paper Cantilever Beam Metal-Contact MEMS Switch
Conference Papers in Engineering Volume 2013, Article ID 265709, 4 pages http://dx.doi.org/10.1155/2013/265709 Conference Paper Cantilever Beam Metal-Contact MEMS Switch Adel Saad Emhemmed and Abdulmagid
More informationLecture 20: Optical Tools for MEMS Imaging
MECH 466 Microelectromechanical Systems University of Victoria Dept. of Mechanical Engineering Lecture 20: Optical Tools for MEMS Imaging 1 Overview Optical Microscopes Video Microscopes Scanning Electron
More informationSilicon-Based Resonant Microsensors O. Brand, K. Naeli, K.S. Demirci, S. Truax, J.H. Seo, L.A. Beardslee
Silicon-Based Resonant Microsensors O. Brand, K. Naeli, K.S. Demirci, S. Truax, J.H. Seo, L.A. Beardslee School of Electrical and Computer Engineering g Georgia Institute of Technology Atlanta, GA 30332-0250,
More informationMEMS Technologies for Communications
MEMS Technologies for Communications Clark T.-C. Nguyen Program Manager, MPG/CSAC/MX Microsystems Technology Office () Defense Advanced Research Projects Agency Nanotech 03 Feb. 25, 2003 Outline Introduction:
More informationOne and Two Port Piezoelectric Higher Order Contour-Mode MEMS Resonators for Mechanical Signal Processing
University of Pennsylvania ScholarlyCommons Departmental Papers (ESE) Department of Electrical & Systems Engineering December 2007 One and Two Port Piezoelectric Higher Order Contour-Mode MEMS Resonators
More informationIndustrialization of Micro-Electro-Mechanical Systems. Werner Weber Infineon Technologies
Industrialization of Micro-Electro-Mechanical Systems Werner Weber Infineon Technologies Semiconductor-based MEMS market MEMS Market 2004 (total 22.7 BUS$) Others mostly Digital Light Projection IR Sensors
More informationCurriculum Vitae. Min Wang
Curriculum Vitae Min Wang Assistant Professor in Operations Management Department of Decision Sciences and MIS LeBow College of Business Drexel University Email: min.wang@drexel.edu Tel: (+1)215-571-4203
More informationPROFILE CONTROL OF A BOROSILICATE-GLASS GROOVE FORMED BY DEEP REACTIVE ION ETCHING. Teruhisa Akashi and Yasuhiro Yoshimura
Stresa, Italy, 25-27 April 2007 PROFILE CONTROL OF A BOROSILICATE-GLASS GROOVE FORMED BY DEEP REACTIVE ION ETCHING Teruhisa Akashi and Yasuhiro Yoshimura Mechanical Engineering Research Laboratory (MERL),
More informationMicrosystems and Nanosystems
Microsystems and Nanosystems Series editors Roger T. Howe, Stanford, CA, USA Antonio J. Ricco, Moffett Field, CA, USA More information about this series at http://www.springer.com/series/11483 Harmeet
More informationSilicon on Insulator CMOS and Microelectromechanical Systems: Mechanical Devices, Sensing Techniques and System Electronics
Silicon on Insulator CMOS and Microelectromechanical Systems: Mechanical Devices, Sensing Techniques and System Electronics Dissertation Defense Francisco Tejada Research Advisor A.G. Andreou Department
More informationDesign of Micro robotic Detector Inspiration from the fly s eye
Design of Micro robotic Detector Inspiration from the fly s eye Anshi Liang and Jie Zhou Dept. of Electrical Engineering and Computer Science University of California, Berkeley, CA 947 ABSTRACT This paper
More informationDTU DANCHIP an open access micro/nanofabrication facility bridging academic research and small scale production
DTU DANCHIP an open access micro/nanofabrication facility bridging academic research and small scale production DTU Danchip National Center for Micro- and Nanofabrication DTU Danchip DTU Danchip is Denmark
More informationAssistant Professor, Electrical Engineering and Computer Science
Steven S. Holland Assistant Professor, Electrical Engineering and Computer Science Degree with Fields, Institution, and Date Doctor of Philosophy, Electrical and Computer Engineering, University of MA:
More informationLarge Scale Silicon Photonic MEMS Switch
Large Scale Silicon Photonic MEMS Switch Sangyoon Han Electrical Engineering and Computer Sciences University of California at Berkeley Technical Report No. UCB/EECS-2015-40 http://www.eecs.berkeley.edu/pubs/techrpts/2015/eecs-2015-40.html
More informationMEMS Real-Time Clocks: small footprint timekeeping. Paolo Frigerio November 15 th, 2018
: small footprint timekeeping Paolo Frigerio paolo.frigerio@polimi.it November 15 th, 2018 Who? 2 Paolo Frigerio paolo.frigerio@polimi.it BSc & MSc in Electronics Engineering PhD with Prof. Langfelder
More informationCenter for Intelligent Sensors and MEMS
Center for Intelligent Sensors and MEMS The 1 st NEMS School Presented by Center for Intelligent Sensors and MEMS, NUS and Organizing Committee of IEEE NEMS 2018 The 1 st NEMS School Joint-Sponsored by
More informationThe Department of Advanced Materials Engineering. Materials and Processes in Polymeric Microelectronics
The Department of Advanced Materials Engineering Materials and Processes in Polymeric Microelectronics 1 Outline Materials and Processes in Polymeric Microelectronics Polymeric Microelectronics Process
More informationB.S. (2010) in Communication Engineering from Yuan Ze University, Taiwan.
Yu-Han Hung ( ), PhD Post-doctoral Researcher Department of Photonics National Cheng Kung University (NCKU), Tainan, Taiwan Tel: +886-911-172-468 Email: yhhung@mail.ncku.edu.tw Yhh19880411@gmail.com Education
More informationAcademic Course Description SRM University Faculty of Engineering and Technology Department of Electronics and Communication Engineering
Academic Course Description SRM University Faculty of Engineering and Technology Department of Electronics and Communication Engineering EC0032 Introduction to MEMS Eighth semester, 2014-15 (Even Semester)
More informationIntroduction to Microdevices and Microsystems
PHYS 534 (Fall 2008) Module on Microsystems & Microfabrication Lecture 1 Introduction to Microdevices and Microsystems Srikar Vengallatore, McGill University 1 Introduction to Microsystems Outline of Lecture
More informationDTU DANCHIP an open access micro/nanofabrication facility bridging academic research and small scale production
DTU DANCHIP an open access micro/nanofabrication facility bridging academic research and small scale production DTU Danchip National Center for Micro- and Nanofabrication DTU Danchip DTU Danchip is Denmark
More informationSven Schmitz. Assistant Professor
Assistant Professor Department of Aerospace Engineering The Pennsylvania State University, University Park, PA 16802 phone: 814-863-0778 email: sus52@engr.psu.edu EDUCATION Ph.D., Mechanical and Aeronautical
More informationPrinciples of Measurement Systems
Principles of Measurement Systems Fourth Edition John P. Bentley Emeritus Professor of Measurement Systems University of Teesside PEARSON Prentice Hall Harlow, England London New York Boston San Francisco
More informationMajor Fabrication Steps in MOS Process Flow
Major Fabrication Steps in MOS Process Flow UV light Mask oxygen Silicon dioxide photoresist exposed photoresist oxide Silicon substrate Oxidation (Field oxide) Photoresist Coating Mask-Wafer Alignment
More informationTwo-Port Stacked Piezoelectric Aluminum Nitride Contour-Mode Resonant MEMS
University of Pennsylvania ScholarlyCommons Departmental Papers (ESE) Department of Electrical & Systems Engineering May 007 Two-Port Stacked Piezoelectric Aluminum Nitride Contour-Mode Resonant MEMS Gianluca
More informationALTHOUGH zero-if and low-if architectures have been
IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 40, NO. 6, JUNE 2005 1249 A 110-MHz 84-dB CMOS Programmable Gain Amplifier With Integrated RSSI Function Chun-Pang Wu and Hen-Wai Tsao Abstract This paper describes
More informationNOISE IN MEMS PIEZORESISTIVE CANTILEVER
NOISE IN MEMS PIEZORESISTIVE CANTILEVER Udit Narayan Bera Mechatronics, IIITDM Jabalpur, (India) ABSTRACT Though pezoresistive cantilevers are very popular for various reasons, they are prone to noise
More informationTesca Fitzgerald. Graduate Research Assistant Aug
Tesca Fitzgerald Webpage www.tescafitzgerald.com Email tesca.fitzgerald@cc.gatech.edu Last updated April 2018 School of Interactive Computing Georgia Institute of Technology 801 Atlantic Drive, Atlanta,
More informationEmerging MEMS & Sensor Technologies to Watch: Alissa M. Fitzgerald, Ph.D., Founder & CEO Semicon West 2018
Emerging MEMS & Sensor Technologies to Watch: 2018 Alissa M. Fitzgerald, Ph.D., Founder & CEO amf@amfitzgerald.com Outline About AMFitzgerald What emerging means in this presentation Emerging MEMS & sensor
More informationZHAOXIAN ZHOU. Curriculum Vitae. Updated: May 28, 2007
ZHAOXIAN ZHOU Curriculum Vitae Updated: May 28, 2007 1 Experience Assistant Professor, School of Computing, University of Southern Mississippi 2005-2007 Postdoctoral Fellow, Dept. Electrical and Computer
More informationMEMS BASED QUARTZ OSCILLATORS and FILTERS for on-chip INTEGRATION
MEMS BASED QUARTZ OSCILLATORS and FILTERS for on-chip INTEGRATION R. L. Kubena, F. P. Stratton, D. T. Chang, R. J. Joyce, and T. Y. Hsu Sensors and Materials Laboratory, HRL Laboratories, LLC Malibu, CA
More informationDESIGN AND ANALYSIS OF RF MEMS SWITCHABLE LPF L. Sirisha Vinjavarapu* 1, P. Venumadhav 2
ISSN 2277-2685 IJESR/November 214/ Vol-4/Issue-11/825-835 L. Sirisha Vinjavarapu et al./ International Journal of Engineering & Science Research ABSTRACT DESIGN AND ANALYSIS OF RF MEMS SWITCHABLE LPF L.
More informationCharacterization of Silicon-based Ultrasonic Nozzles
Tamkang Journal of Science and Engineering, Vol. 7, No. 2, pp. 123 127 (24) 123 Characterization of licon-based Ultrasonic Nozzles Y. L. Song 1,2 *, S. C. Tsai 1,3, Y. F. Chou 4, W. J. Chen 1, T. K. Tseng
More informationProcess Technology to Fabricate High Performance MEMS on Top of Advanced LSI. Shuji Tanaka Tohoku University, Sendai, Japan
Process Technology to Fabricate High Performance MEMS on Top of Advanced LSI Shuji Tanaka Tohoku University, Sendai, Japan 1 JSAP Integrated MEMS Technology Roadmap More than Moore: Diversification More
More informationXYZ Stage. Surface Profile Image. Generator. Servo System. Driving Signal. Scanning Data. Contact Signal. Probe. Workpiece.
Jpn. J. Appl. Phys. Vol. 40 (2001) pp. 3646 3651 Part 1, No. 5B, May 2001 c 2001 The Japan Society of Applied Physics Estimation of Resolution and Contact Force of a Longitudinally Vibrating Touch Probe
More informationCONDUCTIVITY sensors are required in many application
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, VOL. 54, NO. 6, DECEMBER 2005 2433 A Low-Cost and Accurate Interface for Four-Electrode Conductivity Sensors Xiujun Li, Senior Member, IEEE, and Gerard
More information