Center for Intelligent Sensors and MEMS

Transcription

1 Center for Intelligent Sensors and MEMS The 1 st NEMS School Presented by Center for Intelligent Sensors and MEMS, NUS and Organizing Committee of IEEE NEMS 2018 The 1 st NEMS School Joint-Sponsored by IEEE NEMS 2018 and Center for Intelligent Sensors and MEMS

2 Welcome Message Welcome to Center for Intelligent Sensor and MEMS (CISM) at National University of Singapore. Under the Smart Nation vision of Singapore, we work together to establish better living environment and intelligent city by harnessing ICT, networks, sensors and big data. Intelligent Sensors, MEMS and NEMS are the keys for enabling the Smart Nation framework and service. By hosting the NEMS school, the CISM aims at promoting the MEMS/NEMS education to high school students, university students, researchers and engineers from various institutions and companies. Moreover, professors, principal investigators and researchers at CISM are ready to provide service to local industry and multi-national corporations for joint-development of translational research and commercialization of advanced Sensors, MEMS and NEMS technologies. Dr. Chengkuo Lee Director of CISM, NUS 2

3 Welcome Message The International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) will be held from 22-26, April 2018 at Grand Hyatt, Singapore. The IEEE- NEMS is a premier conference series sponsored by the IEEE Nanotechnology Council focusing on the promotion of advanced research areas related to MEMS, NEMS, nanotechnology, and molecular technology. Prior conferences were held in Los Angeles (USA, 2017), Matsushima Bay and Sendai (Japan, 2016), Xian (China, 2015), Hawaii (USA, 2014), Suzhou (China, 2013), Kyoto (Japan, 2012), Kaohsiung (Taiwan, 2011), Xiamen (China, 2010), Shenzhen (China, 2009), Hainan Island (China, 2008), Bangkok (Thailand, 2007), and Zhuhai (China, 2006). We are very happy to present you the 1 st NEMS School joint-sponsored by Center for Intelligent Sensors and MEMS (CISM), NUS, Singapore. We welcome NEMS attendees join this event together and enjoy beautiful campus of NUS. Prof. Chengkuo Lee General Chair of IEEE NEMS

4 Opening Session Venue: LT6, E4 (Engineering Building 4), NUS 12:00-12:20 12:30-13:15 13:15-14:00 The 1st NEMS School Opening Lecture - Trends in MEMS/NEMS/Wearable Electronics Technologies and Future Applications in Smart Nation Lecturer: Chengkuo LEE / NUS / Singapore Session I Venue: LT6, E4 (Engineering Building 4), NUS NEMS/MEMS Tunable Nanophotonics Lecturer: Guangya ZHOU / NUS / Singapore MEMS/NEMS Resonators Lecturer: Bhaskar CHOUBEY / U Oxford / UK 14:00-14:30 Tea Break at LT6 Foyer 14:30-15:15 12:30-13:15 13:15-14:00 Optogenetics and Neural Interfaces Lecturer: Wen LI / Michigan State Univ / USA Session II Venue: E and E , NUS Droplet based Microfluidics Lecturer: Chia-Hung CHEN / NUS / Singapore Wireless Power Transferring and Applications in Optogenetics Lecturer: John S HO / NUS / Singapore 14:00-14:30 Tea Break at LT6 Foyer Agenda of NEMS School Session III Venue: E , NUS 12:30-13:15 13:15-14:00 Dielectric elastomers as stretchable generators to harvest motions: Fundamentals, design and prototyping Lecturer: Adrian S J KOH / NUS / Singapore Toward Implanted Microsystems A Case Study from Actuators, Sensors to Energy Harvesting Lecturer: Faezeh Arab Hassani / NUS / Singapore 14:00-14:30 Tea Break at LT6 Foyer 14:30-15:15 Session IV Venue: E , NUS 12:30-13:15 13:15-14:00 Vibration Based Energy Harvesters Lecturer: Yi CHIU / NCTU / Taiwan FBAR and Phononic Crystal Engineered Resonators Lecturer: Nan WANG / IME A-STAR / Singapore 2D Materials and Applications in Photonics and Electronics Lecturer: Kah Wee ANG / NUS / Singapore 14:00-14:30 Tea Break at LT6 Foyer 14:30-15:15 CMOS-MEMS and Interfacing with ASIC Lecturer: Sheng Shian LI / NTHU / Taiwan 14:30-15:15 Microscale Tunable Metamaterials/MOEMS Lecturer: Prakash Pitchappa / NTU / Singapore 4

5 Opening Lecture Trends in MEMS/NEMS/Wearable Electronics Technologies and Future Applications in Smart Nation Venue: LT6, E4 (Engineering Building 4), NUS Time: 12:00 12:20 Chengkuo Lee is the director of Center for Intelligent Sensors and MEMS at National University of Singapore. He received M.Sc. in Department of Materials Science & Engineer, National Tsing Hua University, Taiwan in 1991, M.Sc. in Department of Industrial & System Engineering, the State University of New Jersey, Rutgers, USA in 1993, and Ph.D. in Department of Precision Engineering, University of Tokyo, Japan in He was the co-founder and vice-president of Asia Pacific Microsystems (APM) from 2000 to He was the general chair of IEEE OMN He is general chair of IEEE NEMS He has published more than 250 peer-reviewed journal articles. His research interests include energy harvesting, biomedical devices, flexible electronics, photonics, MEMS and NEMS. ORCID: Lab of Sensors, MEMS and NEMS for Internet of Things (IoT) Applications Center for Intelligent Sensors and MEMShttps:// 5

6 Session I Lecture 1 Venue: LT6, E4 (Engineering Building 4), NUS Time: 12:30 13:15 NEMS/MEMS Tunable Nanophotonics Guangya ZHOU is an Associate Professor in the Department of Mechanical Engineering, Faculty of Engineering, National University of Singapore. He received his Ph.D in optical instrumentation engineering at Zhejiang University in His research interests include MEMS/NEMS, nanophotonics, miniature imaging optics, micro optical devices and applications, etc. mpezgy@nus.edu.sg Website: 6

7 Session I Lecture 2 Venue: LT6, E4 (Engineering Building 4), NUS Time: 13:15 14:00 MEMS/NEMS Resonators Bhaskar CHOUBEY is an Associate Professor in the department of Engineering Science and a tutorial fellow of Somerville College. Along with Prof. Steve Collins, he leads the microelectronics circuits and systems group at Oxford. He received his Ph.D in Engineering Science at Hertford College, University of Oxford. His research interests span a broad spectrum of analogue circuits and sensors for biomedical as well as commercial applications. bhaskar.choubey@eng.ox.ac.uk 7

8 Session I Lecture 3 Venue: LT6, E4 (Engineering Building 4), NUS Time: 14:30 15:15 Optogenetics and Neural Interfaces Wen LI is an Associate Professor in Michigan State University. She received her Ph.D. degree (2008) and M.S. degree (2004) in Electrical Engineering from California Institute of Technology. Before that, she studied in Tsinghua University and received her M.S. degree in Microelectronics (2003) and B.S. degree in Material Science and Engineering (2001). Her research interests include MEMS/NEMS technologies and systems, micro sensors and actuators, biomimetic devices and systems, microfluidic and lab-on-chip systems, and microsystem integration and packaging technologies. wenli@egr.msu.edu 8

9 Session II Lecture 1 Venue: E ,07 (Engineering Building 4, 4 th Floor), NUS Time: 12:30 13:15 Droplet Based Microfluidics Chia-Hung CHEN is an Assistant Professors at Department of Biomedical Engineering, National University of Singapore (NUS). He obtained his Ph.D. degree from the University of Cambridge, M.S. from Harvard Univerisyt, B.S. from National Taiwan University and postdoctoral training at Massachusetts Institute of Technology before joining NUS. He is currently a Principal Investigator in the Integrated Microfluidic Biotechnology Laboratory at NUS. His research is focused on integrated microfluidics bioassay, droplet based microfluidics, high throughput diagnostic, bio-medical chips for point of care testing and advanced biomaterials. Several of his research works are potentially in commercial development including an integrated microfluidic platform used for lung cancer biomarker detections. biecch@nus.edu.sg 9

10 Session II Lecture 2 Wireless Power Transferring and Applications in Optogenetics Venue: E ,07 (Engineering Building 4, 4 th Floor), NUS Time: 13:15 14:00 John S HO is an assistant professor in the Department of Electrical and Computer Engineering at the National University of Singapore. He received his PhD in electrical engineering at Stanford University where he was a National Defense Science and Engineering Graduate Fellow. He is a recipient of the NRF Fellowship and the NUS Young Investigator Award, and has appeared on the MIT TR35 Innovator Under 35 Asia and Forbes 30 Under 30 Asia lists. His current research interests are centered on the development of wireless technologies for miniaturized bioelectronic devices and their application to human health. johnho@nus.edu.sg 10

11 Session II Lecture 3 Venue: E ,07 (Engineering Building 4, 4 th Floor), NUS Time: 14:30 15:15 Microscale Tunable Metamaterials/MOEMS Prakash Pitchappa received his B.Eng. degree in Electronics and Communications from Faculty of Engineering at College of Engineering, Guindy, India and his M.Sc and PhD degrees from Department of Electrical and Computer Engineering at National University of Singapore. He is currently working as Research Fellow at the Centre for Disruptive Photonic Technologies (CDPT) at the Nanyang Technological University, Singapore. His research interests include development and fabrication MEMS, superconductor and phase change based reconfigurable metamaterials. ppitchappa@ntu.edu.sg 11

12 Session III Lecture 1 Dielectric Elastomer as Stretchable Generators to Harvest Motions: Fundamentals, Design and Prototyping Venue: E (Engineering Building 4, 4 th Floor), NUS Time: 12:30 13:15 Adrian S. J. KOH received his PhD degree in Mechanical Engineering and Integrative Sciences from the National University of Singapore in He is currently an Assistant Professor at the Department of Mechanical Engineering, National University of Singapore, and an Adjunct Scientist at A*STAR, Institute of High Performance Computing. He was a post-doctoral fellow at Harvard University, School of Engineering and Applied Sciences, between 2008 and His current research interest is in soft electroactive polymer systems, in particular, using soft materials like dielectric elastomers as artificial muscles for soft robots, and generators for motion-based energy harvesting. He is the recipient of the inaugural Philip Yeo Prize in 2007, which recognizes outstanding research performed by a graduate student or post-doctoral fellow in Singapore. In 2013, he was awarded the Promising International Researcher Award by the European Scientific Network for Artificial Muscles (ESNAM), for his contributions in the field of electroactive polymers. espksja@nus.edu.sg 12

13 Session III Lecture 2 Toward Implanted Microsystems A Case Study for Actuators, Sensors to Energy Harvesting Venue: E (Engineering Building 4, 4 th Floor), NUS Time: 13:15 14:00 Faezeh Arab Hassani received the Bachelor's and M.Sc. degrees of Electronic Engineering in 2004 and 2008, respectively. After finishing her Ph.D. degree in Electronics Engineering from the University of Southampton, United Kingdom, in 2012, she joined Japan Advanced Institute of Science and Technology, Japan, for her Japan Society for the Promotion of Science (JSPS) post-doctoral research fellowship. In 2013, she joined the Department of Electrical and Computer Engineering, National University of Singapore (NUS), Singapore, as a research fellow. From 2014 to 2016, she was a post-doctoral research associate with the University of Sheffield, United Kingdom. She is currently working as a research fellow at the Singapore Institute for Neurotechnology (SINAPSE), NUS, Singapore. Her research interests include micro/nano-electronics, micro/nano-electromechanical hybrid devices, sensors and actuators for biological and chemical applications, and energy harvesters. ORCID ID: lsifah@nus.edu.sg 13

14 Session III Lecture 3 Venue: E (Engineering Building 4, 4 th Floor), NUS Time: 14:30 15:15 Vibration Based Energy Hargesters Yi CHIU received the B.S. degree in Electrical Engineering from National Taiwan University, Taiwan, ROC, in 1988, and the M.S. and Ph.D. degrees in Electrical and Computer Engineering from Carnegie Mellon University, Pittsburgh, PA, USA, in 1991 and 1996, respectively. Dr. Chiu is currently a Professor in the Department of Electrical and Computer Engineering, National Chiao Tung University, Taiwan, ROC. His research interests include energy harvesting, CMOS-MEMS sensors, and optical MEMS. yichiu@mail.nctu.edu.tw 14

15 Session IV Lecture 1 Venue: E (Engineering Building 4, 4 th Floor), NUS Time: 12:30 13:15 FBAR and Phononic Crystal Engineered Resonators Dr. Nan WANG is currently a scientist with the Sensors, Actuators and Microsystems Programme at Institute of Microelectronics (IME), A*STAR, where his research focuses on aluminum nitride (AlN) and scandium aluminium nitride (ScAlN) based micro-electromechanical systems (MEMS) resonating devices, including resonators for timing and gas sensing applications, FBAR and Lamb wave filters for mobile communications, etc.. He received his B.Eng. (Hons.) and Ph.D. degrees from the Department of Electrical and Computer Engineering, National University of Singapore (NUS), Singapore, in 2009 and 2013, respectively. 15

16 Session IV Lecture 2 2D Materials and Applications in Photonics and Electronics Venue: E (Engineering Building 4, 4 th Floor), NUS Time: 13:15 14:00 Kah-Wee ANG received the B.Eng. (1st class honors) degree in electrical and electronic engineering from Nanyang Technological University in 2002, the S.M. degree in advanced materials under the Singapore-MIT Alliance (SMA) program in 2004, and the Ph.D. degree in electrical and computer engineering from the National University of Singapore in He was a manager for the non-planar CMOS scaling project at SEMATECH, USA, where he led a team to develop advanced CMOS manufacturing technology for sub-22nm node and beyond. In 2012, he led the development of silicon photonics technology at GLOBALFOUNDRIES (Technology Development Department). He was the Head of Research Office at the Institute of Microelectronics, A*STAR, prior to his move to the National University of Singapore where he is currently an Assistant Professor of Electrical and Computer Engineering. kahwee.ang@nus.edu.sg ORCID:

17 Session IV Lecture 3 Venue: E (Engineering Building 4, 4 th Floor), NUS Time: 14:30 15:15 CMOS-MEMS and Interfacing with ASIC Sheng Shian LI (S 04 M 07-SM 17) received the M.S. and Ph.D. degrees from the University of Michigan, Ann Arbor, MI, USA, in 2004 and 2007, respectively, both in electrical engineering and computer science. In 2007, he joined RF Micro Devices, Greensboro, NC, USA, for the development of MEMS resonators and filters. In 2008, he joined the Institute of NanoEngineering and MicroSystems (inems), National Tsing Hua University, Hsinchu, Taiwan, where he is currently a Professor and Director of inems. His research interests include integrated resonators and sensors, RF MEMS, CMOS-MEMS technology, and integrated circuit design and technology. In 2013, Dr. Li received the Ta-Yu Wu Memorial Award, National Science Council, Taiwan. Together with his students, he received the Best Paper Awards at the 2011 IEEE International Frequency Control Symposium, 2012 IEEE Sensors Conference, and 2017 Transducers Conference. He served as the TPC/ETPC of the IEEE International Frequency Control Symposium, IEEE Sensors Conference, Transducers Conference, and IEEE MEMS Conference. ssli@mx.nthu.edu.tw RF MicroSystems Lab: ORICD: