Micro Cantilever. OMCL/BL Series SINCE 1991

Transcription

1 Micro Cantilever OMCL/L Series SINCE 1991

2 Cantilevers Leveraging Ctting Edge MEMS Technolog for Otstanding Consistenc and Precision diverse linep to spport nanotech research and other advanced applications. In Mode Defect Inspection DVD disc Electrical Characteristics FET srface potential change between drain and sorce* 1 Consistent ccrac Shape Evalation 3D image of polmer film Mode Nano-Level Material nalsis Carbon nanotbes on mica sbstrate in water* 2 High Resoltion Observation of iological Samples acteriorhodopsin, contact mode FM in bffer soltion* 3 In *1 Cortes of Dr. H.Yamada, Koto Univ., Japan *2 Cortes of Mitsbishi Chemical Grop Science and Technolog Research Center Inc. *3 Cortes of Drs. D.Fotiadis and. Engel, M. E. Müller, Institte, iozentrm, Universit of asel, Switzerland Environments Usable in varing measrement environments in water and air. Modes Soft cantilever for contact mode; high resonance freqenc cantilever for mode. Detection Signals Cantilevers for measring electrical characteristics, friction, and force crve, in addition to srface irreglarities. Mechanical Properties Range of cantilevers from N/m and 1100 khz. Resonance Freqenc Mode Mode Electric Electrical Force Crve Force Crve Fres Stiffness Spring Constant Friction Nmber of cantilevers extended from chip Mode Mode Friction OlmpsDedicated to Delivering Greater Precision and Ease of Use New Concept New Concept Perpendiclar chip sidewalls greatl facilitate tweezer grabbing and handling. Difference in Lateral Cross-sections of Cantilever s Novel Rectanglar Cross-section Conventional Trapezoidal Design Sharp probe is placed at the ver end of the cantilever. design facilitates exact probe positioning.

3 New Silicon Cantilever for Mode New Silicon Cantilever for Mode Eas to Grab and Handle Tpe3 500 nm Point Terminated Probe for Highresoltion Observation Uses a tetrahedral probe to achieve a point terminated tip with consistent sharpness. The probe tip is sharpened over a length of more than one micron, making it sitable for high-resoltion observation. Spring Constant (N/m) Mechanical Properties of New OMCL Series Cantilevers OMCL-200 OMCL-160 Three cantilever options offered for different hardness and srface condition of samples. 0 OMCL Resonance Freqenc (khz) Standard Silicon Cantilever OMCL-160TS-R3 Medim-soft Silicon Cantilever OMCL-0TS-R3 New Concept 300 khz New 26 N/m Concept Electric 70 khz 2 N/m High Q Factor for High-resoltion Resonance freqenc of 300 khz (tp.) with spring constant of 26 N/m (tp.). Stiffer middle cantilever to minimize damage to samples. For the s of Soft Samples Spring constant of 2 N/m (tp.) is smallest of silicon cantilevers for mode, sitable for observing srface topograph and viscoelasticit of soft samples. nodic lminm Oxide, 2.5 micron sq. scan N-tpe Doped Silicon Sbstrate Cantilever base material emplos silicon with a srface resistance of Ω cm (1/200th the srface resistance of or other base materials). Use for measring srface potential and other applications. General Prpose Silicon Cantilever OMCL-200TS-R3 New Concept pplication for Varios Sample Srfaces Mid-range mechanical properties with 0 khz (tp.) resonance freqenc and 9 N/m (tp.) spring constant, for measring srface profile and topolog of samples with a wide range of hardness. 0 khz 9 N/m Platinm-deposited Option for 0 Cantilever OMCL-0TM-R3 0TM Series Cantilevers cantilever is available with Resistance Vale Comparison platinm-deposited probe for 1.E+09 enhanced electrical 1.E+08 characteristics of samples. Resistance Vale (Ω) 1.E+07 1.E+06 1.E+05 1.E+04 Conventional prodcts Tpe Probe Radis (nm) *Silicon cantilever for mode comes standard with alminm coating on its reflex side srface. For cstomers with concerns abot contamination of alminm dring measrement in water, we recommend or noncoated (160TN, 200TN and 0TN) cantilevers. 3

4 Silicon Cantilevers for Mode High-Qalit Cantilevers with Carbon Nano Fiber Probes to Minimize Image Qalit Degradation nder Repetitive Scanning Standard Carbon Nano Fiber Probe Cantilever OMCL-160FS-2 lade Tetrahedral Probe Silicon Cantilever OMCL-160N khz 300 khz 42 N/m 42 N/m Greatl Minimizes Changes in Image Qalit fter Repetitive Scanning Featres a high aspect ratio carbon nano fiber (CNF) probe formed at the apex of the silicon probe spport. Prodces scanned images with excellent reprodction, b minimizing changes in probe diameter at the apex of the rod-shaped CNF probe even in case of wear, so that cantilevers do not need to be replaced and exchanged as often. Image Retention of Polsilicon Thin Film Micro Cantilever with Carbon Nano Fiber Probe High spect Ratio Sitable for Groove Featres a sharper, blade-like tip with a 7:1 aspect ratio viewed along the cantilever axis, corresponding to a half tip angle of six degrees or less (over last 2 µm of tip). Common applications inclde measring the electrode patterns of ICs and pits of optical discs, and precise imaging of grains on a thin film srface. Front View of lade Tetrahedral Tip First scan 60th scan Conventional Silicon Probe Cantilever Comparison of lade Tetrahedral Silicon Probe (red) and Standard Silicon Probe (ellow) Thinner probe reaches the bottom of grooves b avoiding contact with the probe flank. We also offer the following cantilevers from or existing prodct range, for data compatibilit. First scan 60th scan Standard Silicon Cantilever OMCL-160TS-C2 300 khz 42 N/m Medim-soft Carbon Nano Fiber Probe Cantilever OMCL-0FS-2 70 khz 2 N/m Excellent Reprodction for Viscoelasticit Shape of CNF probe enables viscoelasticit measrement with excellent reprodction. Medim-soft Silicon Cantilever OMCL-0TS-C2 70 khz 2 N/m Silicon Cantilever for Electrical OMCL-0TM-2 Electric 70 khz 2 N/m 4

5 Silicon Nitride Cantilevers Silicon Nitride Cantilevers with Sperior Drabilit Standard Silicon Nitride Cantilevers OMCL-TR800PS-1 Small Spring Constant Silicon Nitride Cantilevers OMCL-TR400PS-1 /73 khz 11/ khz 0./0.57 N/m x2 x2 0.02/0.08 N/m Cantilevers for Mode Widel sed in contact mode measrements, de to the cantilever softness and probe wear resistance. Each chip has two cantilevers of differing lengths ( µm and 200 µm). Remains the standard for contact mode measrement, after nearl two decades since its introdction. 400 nm For Mode s in Uses silicon nitride cantilevers with a small spring constant, offering half the cantilever thickness of or standard silicon nitride cantilever. Offers high sensitivit for force measrement, and contact mode measrements of ver weak forces. With a µm length and resonance freqenc of approximatel 7 khz in water, the cantilevers are sited for mode measrements of specimens in water, particlarl for obtaining images of live specimens that are onl active in water. Rectanglar Silicon Nitride Cantilevers OMCL-RC800PS-1 ~71 khz Cantilevers for LFM Each chip has for cantilevers with different spring constants, enabling the ser to select the cantilever according to the sample. Simple rectanglar cantilever shape facilitates calclation of its mechanical properties with analsis formla. Friction 0.05~0.76 N/m oth V- and -shaped cantilevers have a large enogh trianglar area near the apex to ensre laser light reflection. * Srfaces of silicon nitride cantilevers shown on this page are coated with a reflective gold coating. We also offer TR400P, TR800P and RC800P cantilevers with gold-coated srfaces on both sides, for probe srface modification and electrical measrement. Probes Made of Hard Material, Sitable for Rotine Inspections Using FM Low-Wear Silicon Nitride Cantilever OMCL-HWS khz N/m Low-wear Si3N4 Ratio Recommended for measring nano-indentations of polmer samples and for rotine measrements, sch as thin film inspection of semicondctors where reprodcibilit is reqired. Wear Depth (nm) Silicon SiN(Si rich) Si3N4 DLC 10 0 Loading Force (µn) Lnch ox Wear Test of Varios Probe Material Pramidal Probe with Two Protrsions 5

6 Cantilevers for iological Sample s In Silicon Nitride iolevers to Meet the Demands of iological Sample and Observation iolever L-RC0V-C1 iolever mini L-40TS-C2 Force Crve x2 13/37 khz 0.006/0.03 N/m Force Crve 110 khz 0.1 N/m Force Crve of iological Samples in Extremel soft and flexible with a small spring constant, delivering a light, soft toch for contact with biological samples. Nanometer of iological Samples in Featres a high aspect ratio silicon probe formed on a mini-cantilever, to deliver ltra-precise nanometer measrement for observation of biological samples in water. Stretching Crve of DN Strand Data: Cortes of Dr. R. Kratbaer, LMU -lever (60 µm length): Low noise model The -lever can make accrate force crve measrements in water, while its redced overall area has the effect of redcing the rownian motion noise in water.s a reslt, the slight differences which are generall overlooked, can now be captred. -lever ( µm length): Small spring constant (6 pn/nm) model The -lever's softness with small spring constant less than 10 pn/nm, can captre even weak interaction forces so that the convert to sbstantial deflection changes. oth the and models featre gold coating applied to the probe and reflex side of the cantilever. This improves the fnctionalit and operabilit of the tip in sch procedres as making tip modifications sing thiol chemistr. Streptavidin Silicon probe with 8 nm (tp.) probe radis enables high-resoltion measrements in water. Uses a small silicon nitride cantilever to keep the resonance freqenc high at a range of 2030 khz in water, even with a small spring constant of 0.1 N/m. iolever fast L-10DS-2 00 khz 0.1 N/m High-speed of iological Samples in Featres an ltra-small 9 µm cantilever with a high resonance freqenc of 1.5 MHz in air and a small spring constant of 0.1 N/m. Delivers a resonance freqenc of approximatel 500 KHz in water, enabling high-speed measrement in water. Corner of thin trianglar plate on bird beak probe fnctions as actal probe portion. *Ma not be compatible with some commercial large-spot laser sensors, de to the small size of the cantilever. 5 s 10 s ird eak Probe Video Clip of DN Plasmid 6

7 Specifications 1 Co: mode 2 : mode 3 i: In air 4 Wa: In water Prodct Name OMCL-160TS-R3 OMCL-160TS-C3 OMCL-160TN-R3 OMCL-160TN-C3 OMCL-200TS-R3 OMCL-200TS-C3 OMCL-200TN-R3 OMCL-200TN-C3 OMCL-0TS-R3 OMCL-0TS-C3 OMCL-0TN-R3 OMCL-0TN-C3 OMCL-0TM-R3 OMCL-0TM-3 z Resonance Freqenc (khz) Cantilever Spring Constant Shape (N/m) Rectanglar Thickness (µm) Nmber Illstration Illstration Shape Tetrahedral Probe Height (µm) Radis (nm) 7 Material Coating Metal Probe / Lever Probe Reflex side / side Si / Si Non / l Non / Non Non / l Non / Non Non / l Non / Non Pt / l Mode Co i Package 4 Wa OMCL-160FS-2 OMCL-160FS-Q2 OMCL-0FS-2 OMCL-0FS-Q2 OMCL-160N-W2 OMCL-160N-2 OMCL-160TS-W2 OMCL-160TS-C2 OMCL-0TS-W2 OMCL-0TS-C2 OMCL-0TM-W2 OMCL-0TM x Rectanglar Tetrahedral with colmnar CNF probe lade-like tetrahedral Tetrahedral 0.2 (14) 0.2 () CNF / Si Si / Si Non / l Non / Non Non / l Pt / l C C C C OMCL-TR400PS-HW OMCL-TR400PS-1 OMCL-TR800PS-W (OTR8-PS-W) OMCL-TR800PS-1 OMCL-RC800PS-W (ORC8-PS-W) OMCL-RC800PS-1 OMCL-TR400P-1 OMCL-TR800P-1 OMCL-RC800P-1 OMCL-HWS-HW OMCL-HWS c v c v b Trianglar Rectanglar Trianglar Rectanglar i o!0!1 i o!0!1!2 Pramidal Wedge Two protrsions (12) 30 SiN / SiN SiN / SiN Si3N4 / SiN Non / / Non / D L-RC0V-HW L-RC0V-C1 L-40TS-C2 L-10DS n m Rectanglar !3!4!5!6 V shape Tetrahedral ird beak (7) 30 8 SiN / SiN Si / SiN SiN / SiN / Non / D * The end notation following the last hphen of the prodct name indicates the set qantit (letter) and chip tpe (nmeral) of the cantilever. Letter (Q = 3 chips, = 12 chips, = chips, C = chips, R = chips, HW = Half-wafer, W = Wafer, None = Strip) Nmeral (1 = Prex chip, 2 = Conventional silicon chip, 3 = New concept chip). Dimensions and mechanical properties above are tpical vales. Packages Pre-separated chips available, to se right ot of the case. C D Pre-separated chips (Large qantit package) Pre-separated chips (Small qantit package) Wafer Tpe Strip Tpe

8 Dimensions OMCL- Tpe 3 series Rectanglar cantilever with tetrahedral probe q L=160 w L=200 W=40 W= e L=0 W=40 44 size of silicon lever One cantilever extends from side edge of each chip *Perpendiclar chip sidewalls z OMCL- series Rectanglar cantilever with tetrahedral probe L=160 W=50 r 55 L=0 W=30 t 33 size of silicon lever One cantilever extends from side edge of each chip x OMCL-TR series Trianglar cantilevers with pramidal probes OMCL-RC series Rectanglar cantilevers with pramidal probes L= W=27.9 W= arra size of silicon nitride levers Two cantilevers extend from each side of a glass chip c 1. L= L= L= W=20 i W=20 o W=40!0 W=40!1 L=200 L=200 arra size of silicon nitride levers Two cantilevers extend from each side of a glass chip v OMCL-H Rectanglar cantilever with wedge probe (two protrsions) L-RC0 Rectanglar cantilevers with V shape probes W=50 W=22 L=108!2 11 t=2 arra size of silicon nitride lever One cantilever extends from side of each glass chip b L=60!3 W=30!4 W=30 L= size of silicon nitride levers For cantilevers extend from side edge of each chip n L-40, -10 Rectanglar cantilever!5 W=16 size of silicon nitride lever One cantilever extends from side edge of each chip L=38 m!6 W=2 3.4 L=9 0.3 Specifications are sbject to change withot an obligation on the part of the manfactrer. For prchasing information, please contact below b or fax. 2-3 Kboama-cho, Hachioji-shi, Toko Japan tel: fax: For more technical information, please access or web site below. MEMS13E-0810