mirrors in motion positioning and focusing laser beams

Transcription

1 mirrors in motion positioning and focusing laser beams

2 SCANLAB enables Single-Axis Modules XY Scan Modules SCANcube SCANgine intelliscan hurryscan hurryscan II SCANLAB s industry-proven galvano- This combination of two single-axis Scan heads of this series integrate Featuring a uniform housing format, Scan heads of this series are equipped meter scanners and servo amplifiers modules enables the deflection of all scan components in a sealed these compatible scan heads enable with an innovative fully digital are the core components for reliable laser beams in two dimensions. ultra-compact housing. a broad range of applications. They servo electronics. Advanced status laser positioning systems. deliver excellent dynamics and signals create new control and superior product quality. remote-diagnosis possibilities. Apertures in mm 7, 10, 14, 20, 25, 30, 33, 50, 70 7, 10, 14, 20, 25, 30 7, 10 7, 10, 14 10

3 positioning and focusing laser beams hurryscan 20 / 25 / 30 powerscan varioscan Optical Components Maximum dynamic performance Scan systems of this product line The modular design of These focusing devices dynamically SCANLAB scan systems can be sup- and high laser power capability are enable new applications in the multi- powerscan 50 and 70 allows easy vary the focal length and thereby plied with a wide range of objec- delivered by these compatible scan kw laser power range. Large working exchange of individual components. extend XY scan heads into versatile tives and mirrors. Customer-specific heads. Their innovative design also fields and volumes are achievable 3D beam deflection systems. The designs are available. includes air and water cooling. together with small spot diameters. varioscan FLEX enables a continuous variation of the image field size. 20, 25, 30 33, 50, 70 8 / 20, 16 / 40, 16 / 60, 16 / 80

4 and advanced control RTC PC Control Boards SCANLAB s RTC PC interface boards and the RTC standalone board are easy-to-use, solutions for controlling laser scan systems. Simple software commands enable the RTC boards to achieve synchronized, real-time control of scan systems and lasers. Additional RTC features and options include: 2D and 3D image field correction Status signal evaluation Processing-on-the-fly functionality for moving objects Control of 3-axis scan systems Dual-head functionality for simultaneously controlling two scan systems I/O extension for customer-specific signals Optical fiber data interface Legend 1 RTC PC interface board or RTC standalone board 2 Digital interface board 3 Digital or analog servo amplifier boards

5 for a wide range of applications. Application Matrix SCAN cube SCANgine hurryscan hurryscan II intelliscan hurryscan powerscan Scan Head hurryscan 20 / 25 / 30 with with varioscan 20 varioscan 40 powerscan 33 with varioscan 40 powerscan 50 / 70 with varioscan 60 / 80 Entrance aperture [mm] max. 8 max. 16 max. 16 max. 16 Max. laser power [W] Nd:YAG@1064 nm / 4000 / / - CO / 1000 / / 2000 Writing speed good quality [cps] (1) high quality Laser Materials Processing Marking Welding Coding Remote welding Cutting Drilling Scribing, deep-engraving Soldering Trimming Texturing Structuring Perforating Heat treatment Processing of curved surfaces Micro-machining Rapid Manufacturing Stereolithography Laser sintering Rapid tooling Laser engraving Processing-on-the-fly Inspection, identification Large field scanning Precision display systems Material sorting Product individualizing Medical Systems Biomedical systems Ophthalmology Science and Research 06 / 2005 Information is subject to change without notice. (1) characters per second with single-stroke characters of 1 mm height, f = 160 mm F-Theta objective (f = 163 mm F-Theta objective for hurryscan 20 / 25 / 30)

6 system components for integrators dynaxis XS, dynaxis S, dynaxis M, dynaxis L dynaxis galvanometer scanners are high-performance rotary motors for optical applications. They consist of a motor section based on moving magnet technology and a high-precision position detector (PD). The primary area of application is the fast and precise positioning of mirrors for the deflection of laser beams. The exceptional dynamics of SCANLAB s dynaxis scanners are the result of more than twelve years of experience in developing and manufacturing scanners, scan systems and scan solutions for industrial use. The motor section of each dynaxis is ideally matched to the inertial load presented by the mirror. The optimized rotor design is largely responsible for the favorable dynamic properties and resonance characteristics. Axially pre-loaded precision ball bearings guarantee a backlash-free rotor assembly with high stiffness and low friction. Special attention has been paid to long bearing lifetimes. The optical position detector system is characterized by high resolution, as well as good repeatability and drift values. The scanners are equipped with heaters and temperature sensors (optional for dynaxis XS). This allows temperature stabilization for further enhancing long-term stability, even under fluctuating ambient conditions. SCANLAB provides all dynaxis scanners with suitable mirrors and mirror coatings for all typical laser wavelengths. In addition to very good reflection properties, the mirrors are also optimized with respect to inertial load, stiffness and flatness. The high quality of SCANLAB s galvanometer scanners enables error-free operation in long-term and continuous use. Comprehensive measurements on custom test benches assure that the highest level of quality is continuously maintained.

7 dynaxis XS dynaxis S dynaxis M dynaxis L Mounting The rotationally symmetrical flange facilitates mounting. The scanner housing must be electrically insulated from the machine structure. Mirror stops are already integrated in the scanners. The mirror is directly bonded to the scanner s shaft; the mirrors of the dynaxis M and dynaxis L are attached via a mirror mount to the shaft. Type-Dependent Specifications dynaxis XS dynaxis S dynaxis M dynaxis L Rotor inertia g cm g cm g cm g cm 2 Torque constant 2.3 N mm/a 7.5 N mm/a 15 N mm/a 24 N mm/a Coil resistance 3.9 Ω 2.7 Ω 2.2 Ω 0.85 Ω Coil inductance 90 µh 165 µh 275 µh 300 µh Max. RMS current 1.8 A 2.5 A 3.5 A 5 A (max. case temp. 50 C) Peak current 6 A 10 A 10 A 15 A Weight 48 g 263 g 340 g 425 g without cable 22 g Connector (1) SD-9 plug with heater (1) SD-15 socket SD-15 socket SD-15 socket SD-15 socket Inertial Load recommended 0.02 g cm g cm g cm 2 8 g cm 2 maximum 0.05 g cm g cm 2 6 g cm 2 25 g cm 2 Recommended Aperture 7 mm 10 mm 14 mm 20 mm / 25 mm Step Response Time (with SSV30) (settling to 1/1000 of full scale, with recommended inertial load) 1% of full scale 0.23 ms 0.25 ms 0.40 ms 0.80 ms Dynamic Performance (with SSV30) Tracking error 0.13 ms 0.14 ms 0.22 ms 0.40 ms (1) optional for dynaxis XS Common Specifications (all angles are in mechanical degrees) Optical Performance Maximum scan angle ±12 Nonlinearity < 0.4 % ptp Offset drift < 15 µrad/k Gain drift < 50 ppm/k Repeatability 5 µrad Position Detector Typical PD output signal - differential mode 11 µa/ - common mode 140 µa PD supply voltage 6.5 V V PD supply current 35 ma - 60 ma Heater (1) Heater resistance 120 Ω Temperature sensor resistance C C Cable (1) Installation Active Temperature Control 0.22 m long electrically insulated possible (1) Operating Temperature 25 ± 20 C Electrical Connections (with SSV30) Power supply voltage Input signals Output signals Long-term drift over 8 hours (with SSV30) with temperature stabilization (after warm-up) without temperature stabilization Operating Temperature (with SSV30) ±(15+1.5) V DC alternatively: ±4.8 V; ±9.6 V; ±4.8 ma; ±9.6 ma 3 status signals, TTL level < 0.6 mrad optical < 0.3 mrad optical plus temperatureinduced gain and offset drift 25 ± 10 C SCANLAB AG Benzstrasse Puchheim Germany Tel. +49 (89) Fax +49 (89) info@scanlab.de SCANLAB America, Inc. Suite Reed Hartman Highway Cincinnati, OH USA Tel. +1 (513) Fax +1 (513) info@scanlab-america.com 10 / 2004 Information is subject to change without notice.

8 high speed in pocket size SCAN cube 7, SCAN cube 10 The ultra-compact scan heads of the SCAN cube series deliver excellent dynamics and superior SCANLAB product quality in a minimum-size package. The solid performance of these scan heads is made possible by SCANLAB s new, miniaturized servo amplifiers and industryproven dynaxis galvanometer scanners. Sealed against water and dust, the SCAN cube s robust and exceptionally compact housing facilitates straightforward integration into production environments even confined, difficultto-access locations. A wide variety of objectives can be used with these scan heads. Versions with analog or digital interfaces are available. The digital version can be simply controlled via an RTC PC interface board or SCANLAB s PC-independent RTC SCAN alone board. SCAN cube scan heads are ideally suited for solutions requiring very high marking speeds and integration in confined spaces. Applications include coding in the packaging industry or the marking of electronic components areas traditionally served by inkjet systems. Typical Fields of Application: Marking in the packaging sector Semiconductor industry Electronics industry true-to-scale

9 SCAN cube 7 SCAN cube 10 Optics SCANLAB precisely optimizes and tunes all optical components to one another to ensure maximum focus quality and stable process parameters. Optical components offered by SCANLAB include exceptionally compact objectives, as well as objective adapters for standard objectives. Optics for various wavelengths, power densities, focal lengths and image fields are available. Common Specifications (all angles are in optical degrees) Dynamic Performance Repeatability Offset drift Gain drift Long-term drift over 8 hours Optical Performance Typical scan angle Gain error Zero offset Nonlinearity Interface < 22 µrad 30 µrad/k 80 ppm/k < 0.3 mrad plus temperatureinduced gain and offset drift ±0.35 rad < 3.5 mrad ±4.8 V XY2-100 standard Operating Temperature 25 C ± 10 C Control SCAN cube scan heads are equipped with either an analog or a digital standard interface accessible via a 25-pin D-SUB connector. They are easily controlled via SCANLAB s RTC PC interface board or the PC-independent RTC SCAN alone board from SCANLAB. Quality Type-Dependent Specifications (all angles are in optical degrees) The high quality of SCANLAB s scan solutions is the result of more than fourteen years of experience in the development and manufacture of galvanometer scanners and scan systems. In addition, every scan system must first pass the SCAN check burn-in test before it is released for shipment to the customer. SCAN cube 7 SCAN cube 10 Aperture 7 mm 10 mm Beam displacement 9.98 mm mm Dynamic Performance Tracking error 0.14 ms 0.18 ms Optical Performance Skew < 6 mrad < 1.5 mrad Step Response Time (settling to 1/1000 of full scale) 1% of full scale 0.25 ms 0.40 ms 10% of full scale 0.90 ms 1.2 ms Typical Speeds (1) Marking speed 2.5 m/s 2.0 m/s Positioning speed 12.0 m/s 7.0 m/s Writing speed (2) good writing quality 900 cps 640 cps high writing quality 600 cps 400 cps Power Requirements ±15 V DC, max. 2 A each Weight (without objective) 650 g 1.9 kg (1) with F-Theta objective, f = 160 mm (2) single-stroke characters of 1 mm height ±15 V DC, max. 3 A each Legend 1 Beam in 2 Screws (M5 thread) * 3 Flange * 4 Alignment pins (4h6) * 5 Connector 6 Beam out * not included SCANLAB AG Benzstrasse Puchheim Germany Tel. +49 (89) Fax +49 (89) info@scanlab.de SCANLAB America, Inc. Suite Reed Hartman Highway Cincinnati, OH USA Tel. +1 (513) Fax +1 (513) info@scanlab-america.com 06 / 2005 Information is subject to change without notice.

10 universal and compatible hurryscan II, hurryscan, SCAN gine These compact scan heads from SCANLAB provide optimal solutions for nearly all challenges found in industrial laser materials processing. The mechanically and electrically intercompatible scan heads have apertures ranging from 10 to 14 mm and various levels of dynamics. High long-term stability and low drift values are ensured via integrated temperature stabilization. A uniform housing concept as well as tight manufacturing and assembly tolerances bring high flexibility and certainty to the design and operation of laser materials processing systems. This also enables speedy adaptation to individual customer requirements. The hurryscan II scan heads set new high-end performance standards with their optimized combination of dynaxis galvanometer scanners, mirror designs and high-performance electronics. The high quality of SCANLAB s scan heads is the result of more than 15 years of experience in the development and manufacture of galvanometer scanners and scan systems. In addition, each scan head must first pass the SCAN check burn-in test before it is released for shipment to the customer. Typical Fields of Application: Industry: marking, laser materials processing (e.g. deep engraving, drilling, ablation, cutting, welding), electronics production (e.g. trimming, drilling, structuring), microstructuring, rapid manufacturing, stereolithography Medicine Science and research

11 hurryscan II hurryscan SCAN gine Optics Galvanometer mirrors and objectives with optimized mounts are available for all typical laser types and image fields. Control All scan heads of these series are equipped with either analog or digital standard interfaces and are easily controlled via SCANLAB s RTC PC interface boards. All scan heads are optionally available with an optical fiber data interface. Type-Dependent Specifications (all angles are in optical degrees) hurryscan II hurryscan SCAN gine Aperture 10 mm 14 mm 10 mm 14 mm 10 mm 14 mm Beam Displacement (dimension a) mm mm mm mm mm mm Step Response Time (settling to 1/1000 of full scale) 1 % of full scale 0.25 ms 0.40 ms 0.35 ms 0.80 ms 0.80 ms 1.10 ms 10 % of full scale ms 0.90 ms 2.20 ms 2.00 ms 2.60 ms Typical Speeds (1) Marking speed 2.5 m/s 1.5 m/s 2.0 m/s 1.0 m/s 1.0 m/s 0.7 m/s Positioning speed 10.0 m/s 7.0 m/s 7.0 m/s 7.0 m/s 7.0 m/s 5.0 m/s Writing speed (2) good quality 800 cps 500 cps 640 cps 350 cps 300 cps 220 cps high quality 500 cps 340 cps 400 cps 220 cps 200 cps 140 cps Dynamic Performance Tracking error 0.14 ms 0.24 ms 0.18 ms 0.42 ms 0.42 ms 0.55 ms Long-term drift over 8 hours (after warm-up) < 0.6 mrad <0.6 mrad < 0.6 mrad < 0.6 mrad < 0.6 mrad < 0.6 mrad Nonlinearity < 3.5 mrad <3.5 mrad < 3.5 mrad < 2.1 mrad < 2.1 mrad < 2.1 mrad (1) with F-Theta objective, f = 160 mm Options (2) single-stroke characters of 1 mm height A varioscan can extend all SCANLAB compact scan heads into three-axis scan systems. Scan heads with 14 mm apertures can be equipped with an additional reference sensor system for automatic self-calibration in scan systems requiring extremely high long-term positioning stability. All of SCANLAB s compact scan heads are also available without a housing as scan modules. Common Specifications (all angles are in optical degrees) Dynamic Performance Repeatability Optical Performance Typical scan angle Gain error Zero offset Skew Power Requirements Input Signals Output Signals Weight (without objective) < 22 µrad ±0.35 rad < 1.5 mrad ±(15+1.5) V DC, max. 3 A each alternatively: ±4.8 V; ±9.6 V; ±4.8 ma; ±9.6 ma XY2-100 standard or optical data transfer 3 status signals per axis TTL level XY2-100 standard or optical data transfer approx. 3 kg Operating Temperature 25 C ± 10 C Legend 1 Beam in 2 Screws (M6 thread) * 3 Flange * 4 Alignment pins (6 h6 ) * 5 Mounting bracket 6 Connectors 7 Objective 8 Beam out * not included SCANLAB AG Benzstrasse Puchheim Germany Tel. +49 (89) Fax +49 (89) info@scanlab.de SCANLAB America, Inc. Suite Reed Hartman Highway Cincinnati, OH USA Tel. +1 (513) Fax +1 (513) info@scanlab-america.com 02 / 2005 Information is subject to change without notice.

12 universal and compatible hurryscan II 7 The hurryscan II 7 provides outstanding dynamics for system integrators, making it the ideal choice for applications requiring maximum scan speed and on-the-fly processing. Marking speeds well in excess of 1000 chars/s can be achieved in combination with appropriate lasers. The hurryscan II 7 utilizes SCANLAB s new-generation dynaxis XS galvanometer scanners and offers mechanical and electrical compatibility with all other scan heads of the hurryscan II series. The high quality of SCANLAB s scan heads is the result of more than 15 years of experience in the development and manufacture of galvanometer scanners and scan systems. In addition, each scan head must first pass the SCAN check burn-in test before it is released for shipment to the customer. Typical Fields of Application: Applications requiring maximum writing speeds, e.g. processing-on-thefly in packaging industry Semiconductor industry Electronics industry

13 hurryscan II 7 Optics SCANLAB precisely optimizes and tunes all optical components to one another to ensure maximum focus quality and stable process parameters. Optics for various wavelengths, power densities, focal lengths and image fields are available. Control The hurryscan II 7 is equipped with either an analog or a digital standard interface and is easily controlled via a SCANLAB RTC interface board. The RTC s processor performs vital steps such as micro-vectorization, coordinate transformations and image field correction. The hurryscan II 7 is optionally available with an optical fiber data interface. Options The varioscan 20 extends the hurryscan II 7 into a three-axis scan system. The hurryscan II 7 is also available without a housing as a scan module. Specifications (all angles are in optical degrees) Aperture Step Response Time (settling to 1/1000 of full scale) 7 mm 1% of full scale 0.30 ms 10% of full scale 1.00 ms Typical Speeds (1) Marking speed Positioning speed Writing speed (2) good quality high quality Dynamic Performance Tracking error Repeatability Long-term drift over 8 hours (at constant ambient conditions) Offset drift Gain drift Optical Performance Typical scan angle Gain error Zero offset Skew Nonlinearity Power Requirements Input Signals Output Signals Weight (without objective) 3.5 m/s 15.0 m/s 1100 cps 800 cps 0.11 ms < 22 µrad < 0.3 mrad < 30 µrad/k < 100 ppm/k ±0.35 rad < 1.5 mrad < 3.5 mrad ±(15+1.5) V DC, max. 3 A each alternatively: ±4.8 V; ±9.6 V; ±4.8 ma; ±9.6 ma XY2-100 standard or optical data transfer 3 status signals per axis TTL level XY2-100 standard or optical data transfer 3 kg Operating Temperature 25 C ± 10 C Legend 1 Beam in 2 Screws (M6 thread) * 3 Flange * 4 Alignment pins (6 h6 ) * 5 Mounting bracket 6 Connectors 7 Objective 8 Beam out * not included (1) with F-Theta objective, f =160 mm (2) single-stroke characters of 1 mm height SCANLAB AG Benzstrasse Puchheim Germany Tel. +49 (89) Fax +49 (89) info@scanlab.de SCANLAB America, Inc. Suite Reed Hartman Highway Cincinnati, OH USA Tel. +1 (513) Fax +1 (513) info@scanlab-america.com 06 / 2005 Information is subject to change without notice.

14 smart scanning intelliscan 10 The intelliscan 10 scan head is the first member of a new, digitally controlled generation of scan heads. Newly developed digital servo amplifiers control the industry-proven dynaxis S galvanometer scanners. Employing a high-performance control algorithm, these digital servos enable improved dynamics and marking quality as well as extensive possibilities for diagnosis and for communication between the scan system and the customer s control computer. The intelliscan allows real-time monitoring of all important scan system operational states such as mirror positions and speeds, drive currents, supply voltage and temperature. As a result, processing operations can be monitored, protocolled and modified if required these abilities are especially welcome in safety-critical applications. The intelliscan creates new remote-diagnosis possibilities. It has the necessary facilities to support software-querying from any location to determine accumulated operating hours, serial number, date-of-manufacture and essential operational states. Thus, deviations can be quickly detected and corrected. The product s electronics architecture also enables functionality extensions via firmware modification, such as the planned ability to change scan head dynamics during processing and thereby optimally adapt the scan head to particular task requirements.

15 intelliscan 10 Optics Galvanometer mirrors and objectives with optimized mounts are available for all typical laser types and image fields. Control The intelliscan is equipped with a digital interface and is easily controlled via SCANLAB s RTC 4 PC interface board. Scan head diagnosis and all essential configuration parameters are controlled via software commands. The intelliscan is optionally available with an optical fiber data interface. Quality The high quality of SCANLAB s scan solutions is the result of more than twelve years of experience in the development and manufacture of galvanometer scanners and scan systems. In addition, every scan system must first pass the SCAN check burn-in test before it is released for shipment to the customer. Preliminary Specifications (all angles are in optical degrees) Aperture Beam Displacement Step Response Time (settling to 1/1000 of full scale) 10 mm mm 1% of full scale 0.35 ms 10% of full scale 0.90 ms Typical Speeds (1) Marking speed Positioning speed Writing speed (2) good quality high quality Dynamic Performance Tracking error Repeatability Long-term drift over 8 hours (after warm-up) Optical Performance Typical scan angle 2.0 m/s 7.0 m/s 640 cps 400 cps 0.18 ms < 22 µrad < 0.6 mrad ±0.35 rad Legend Gain error Zero offset Skew Nonlinearity Power Requirements Interface Weight (without objective) < 1.5 mrad < 3.5 mrad ±15 V DC, max. 3 A each or 30 V DC, max. 3 A XY2-100 Enhanced or optical data transfer 2.7 kg Operating Temperature 25 C ± 10 C 1 Beam in 2 Screws (M6 thread) * 3 Flange * 4 Alignment pins (6h6) * 5 Mounting bracket 6 Connectors 7 Objective 8 Beam out * not included (1) with F-Theta objective, f =160 mm (2) single-stroke characters of 1 mm height SCANLAB AG Benzstrasse Puchheim Germany Tel. +49 (89) Fax +49 (89) info@scanlab.de SCANLAB America, Inc. Suite Reed Hartman Highway Cincinnati, OH USA Tel. +1 (513) Fax +1 (513) info@scanlab-america.com 08 / 2003 Information is subject to change without notice.

16 high performance meets high power hurryscan 20, hurryscan 25 These scan heads are designed to quickly and precisely deflect and position laser beams with powers up to the kilowatt range. With apertures of 20 and 25 mm, small spot sizes are achieved along with large image fields. Stable operating conditions and high long-term stability are provided by water cooling of the entrance aperture, electronics and galvanometer scanners, supplemented by air cooling of the deflection mirrors. This also ensures reliable operation with applications requiring high laser powers. The compact housing is dustproof and water spray resistant. Attachment provisions at the water-cooled beam entrance and at the beam exit ease installation of add-on components such as focusing lenses and cross jets. The hurryscan 20 and hurryscan 25 are inter-compatible and can be controlled via SCANLAB s RTC PC interface boards. The high quality of SCANLAB s scan heads is the result of more than twelve years of experience in the development and manufacture of galvanometer scanners and scan systems. In addition, every scan system must first pass the SCANcheck burn-in test before it is released for shipment to the customer. Typical Fields of Application: Laser materials processing: welding, cutting, drilling, texturing, marking, hardening, deep engraving, microstructuring Rapid prototyping, rapid tooling 3D applications Processing-on-the-fly

17 hurryscan 20 hurryscan 25 Optics Galvanometer mirrors and objectives with optimized mounts are available for all typical laser types and working fields. To optimally utilize standard objectives, the hurryscan 25 s two scan axes have differing maximum scan angles. This results in an elliptical image field with the larger semi-axis perpendicular to the entrance beam axis. Type-Dependent Specifications (all angles are in optical degrees) hurryscan 20 hurryscan 25 Aperture 20 mm 25 mm Beam displacement (dimension a) mm mm Dimension b mm mm Optical Performance Typical scan angle of scanner 1 ±0.35 rad ±0.26 rad Typical scan angle of scanner 2 ±0.35 rad ±0.40 rad Typical field size ellipse (1), (2) - 80 mm x 130 mm Typical field size square (1), (2) 90 mm x 90 mm 75 mm x 75 mm Dynamic Performance Tracking error 0.40 ms 0.50 ms Step Response Time (settling to 1/1000 of full scale) 1% of full scale 0.8 ms 0.9 ms 10% of full scale 2.5 ms 3.2 ms Typical Speeds (1) Marking speed 1.0 m/s 0.8 m/s Positioning speed 6.0 m/s 5.0 m/s Writing speed (3) Attachment Provisions The housing s beam entrance side provides a tight-tolerance beam entrance hole with a fine-pitched thread for attaching focusing lenses and apertures. Additional threaded and non-threaded holes facilitate mounting of the scan head and installation of fiber optic outputs. On the beam exit side, threaded holes are available for attaching add-on components such as cross jets, illumination, distance sensors or thermal shields. good writing quality 320 cps 260 cps high writing quality 210 cps 170 cps (1) with F-Theta objective, f = 163 mm (2) limited by vignetting at objective (3) single-stroke characters of 1 mm height Options A varioscan can extend the hurryscan scan heads into 3D scan systems. These scan heads can be equipped with an additional reference sensor system for automatic self-calibration to obtain extremely high long-term stability. Common Specifications (all angles are in optical degrees) Dynamic Performance Repeatability Offset drift Gain drift < 22 µrad < 25 µrad/k < 80 ppm/k Long-term drift over 8 hours < 0.3 mrad (constant ambient conditions) Optical Performance Gain error Zero offset Skew Nonlinearity Power Requirements Input Signals Output Signals Weight (without objective) < 1.5 mrad < 2.1 mrad ±(15+1.5) V DC, max. 6 A each alternatively: ±4.8 V; ±9.6 V; ±4.8 ma; ±9.6 ma XY2-100 standard or optical data transfer 3 status signals per axis TTL level XY2-100 standard or optical data transfer approx. 5.8 kg Operating Temperature 25 C ± 10 C Typical Air Requirements Typical Water Requirements clean, filtered air 20 l/min at p < 2 bar 5 l/min at p < 0.1 bar, p < 4 bar Legend 1 Beam in 2 Mounting screws (M6 threads) * 3 Flange * 4 Alignment pins (6 h6 ) * 5 Objective 6 Beam out E Electrical connectors A Connector for cooling air W Connector for cooling water * not included SCANLAB AG Benzstrasse Puchheim Germany Tel. +49 (89) Fax +49 (89) info@scanlab.de SCANLAB America, Inc. Suite Reed Hartman Highway Cincinnati, OH USA Tel. +1 (513) Fax +1 (513) info@scanlab-america.com 08 / 2003 Information is subject to change without notice.

18 high performance meets high power hurryscan 30 This scan head is designed to quickly and precisely deflect and position laser beams with powers up to the kilowatt range. With an aperture of 30 mm, small spot sizes are achieved along with large image fields. Stable operating conditions and high long-term stability are provided by water cooling of the entrance aperture, electronics and galvanometer scanners, supplemented by air cooling of the deflection mirrors. This also ensures reliable operation with applications requiring high laser powers. The compact housing is dustproof and water spray resistant. Attachment provisions at the water-cooled beam entrance and at the beam exit ease installation of add-on components such as focusing lenses and cross jets. The hurryscan 30 offers mechanical and electrical compatibility with the hurryscan 20 and hurryscan 25 and can be controlled via SCANLAB s RTC interface boards. The high quality of SCANLAB s scan heads is the result of more than 15 years of experience in the development and manufacture of galvanometer scanners and scan systems. In addition, every scan system must first pass the SCANcheck burn-in test before it is released for shipment to the customer. Typical Fields of Application: Laser materials processing: welding, cutting, drilling, texturing, marking, hardening, deep engraving, microstructuring Processing of organic materials such as paper, textiles, foils, leather Rapid prototyping, rapid tooling 3D applications Processing-on-the-fly

19 hurryscan 30 Optics Objectives, varioscan devices and galvanometer mirrors are available for all typical laser types and working fields. Attachment Provisions The housing s beam entrance side provides a tight-tolerance beam entrance hole with a fine-pitched thread for attaching focusing lenses and apertures. Additional threaded and non-threaded holes facilitate mounting of the scan head and installation of fiber optic outputs. On the beam exit side, threaded holes are available for attaching add-on components such as cross jets, illumination, distance sensors or thermal shields. Control The hurryscan 30 is equipped with either an analog or a digital standard interface and is easily controlled via a SCANLAB RTC interface board. The RTC s processor performs vital steps such as micro-vectorization, coordinate transformations and image field correction. Options A varioscan 40 or varioscan 40 FLEX can extend the hurryscan 30 into a 3D scan system. This scan head can be equipped with an additional reference sensor system for automatic self-calibration to obtain extremely high long-term stability. Specifications (all angles are in optical degrees) Aperture Step Response Time (settling to 1/1000 of full scale) 30 mm 1% of full scale 1.2 ms 10% of full scale 4.5 ms Typical Speeds (1) Marking speed Positioning speed Writing speed (2) good quality high quality Dynamic Performance Tracking error Repeatability Long-term drift over 8 hours (after warm-up) Optical Performance Typical scan angle Gain error Zero offset Skew Nonlinearity Power Requirements 0.7 m/s 4.5 m/s 220 cps 150 cps 0.55 ms < 22 µrad < 0.6 mrad ±0.35 rad < 1.5 mrad < 3.5 mrad ±(15+1.5) V DC, max. 6 A each Legend 1 Beam in 2 Mounting screws (M6 threads) * 3 Flange * 4 Alignment pins (6 h6 ) * 5 Objective 6 Beam out E Electrical connectors A Connector for cooling air W Connector for cooling water * not included Input Signals Output Signals Weight (without objective) alternatively: ±4.8 V; ±9.6 V; ±4.8 ma; ±9.6 ma XY2-100 standard or optical data transfer 3 status signals per axis TTL level XY2-100 standard or optical data transfer 5.8 kg Operating Temperature 25 C ± 10 C Typical Air Requirements Typical Water Requirements clean, filtered air 20 l/min at p < 2 bar 5 l/min at p < 0.1 bar, p < 4 bar (1) with F-Theta objective, f =163 mm (2) single-stroke characters of 1 mm height SCANLAB AG Benzstrasse Puchheim Germany Tel. +49 (89) Fax +49 (89) info@scanlab.de SCANLAB America, Inc. Suite Reed Hartman Highway Cincinnati, OH USA Tel. +1 (513) Fax +1 (513) info@scanlab-america.com 06 / 2005 Information is subject to change without notice.

20 maximum-power laser scanning powerscan The scan systems of the powerscan series enable positioning multiple kilowatts of laser power onto a workpiece in just a few milliseconds. In combination with a varioscan, the laser beam can be dynamically focused within working volumes, thus allowing non-flat workpieces to be processed. Apertures up to 70 mm allow small spot sizes and therefore high power densities even with large working distances. The XY mirrors and the varioscan s optics are air cooled, while the scanners, electronics and varioscan are water cooled. This ensures reliable operation with excellent long-term stability even under challenging environmental conditions and with high laser powers. Each axis of powerscan 50 and powerscan 70 is individually implemented as a sealed submodule a calibrated and tuned unit containing a galvanometer scanner with a mirror and the scanner s driver electronics. Thus, rapid exchangability of individual axes is ensured. Located in a separate sealed base module, the modularly-designed main electronics provide functions such as a digital interface and the power management system with comprehensive monitoring functions. Typical Fields of Application: Welding, cutting, drilling, hardening, perforating, texturing, surface treatment Laser processing of organic materials such as paper, textiles, foils, leather Rapid manufacturing: laser sintering, rapid tooling 3D applications, large field processing Processing-on-the-fly

21 Optics SCANLAB precisely optimizes and tunes all optical components to one another to ensure maximum focus quality and stable process parameters. Numerous optical configurations specially developed for the varioscan and matched to the powerscan are available for various wavelengths, laser powers and image fields or working volumes. Customers can easily self-install these exchangeable optics sets to adapt the scan system for each of their applications. Quality The high quality of SCANLAB s scan solutions is the result of more than 15 years of experience in the development and manufacture of galvanometer scanners and scan systems. In addition, every scan system must first pass the SCANcheck burn-in test before it is released for shipment to the customer. Typical optical configurations powerscan 33 with varioscan 40 powerscan 33 with varioscan 40 Specifications powerscan 33 (all angles are in optical degrees) Aperture Beam Displacement Step Response Time (settling to 1/1000 of full scale) 33 mm mm 1% of full scale 1.3 ms 10% of full scale 4.5 ms Typical Processing Speed 3 rad/s Typical Positioning Speed 18 rad/s Dynamic Performance Tracking error Repeatability Long-term drift over 8 hours (after warm-up) Optical Performance Typical scan angle Gain error Zero offset Skew Nonlinearity Power Requirements Input Signals Output Signals Weight 0.75 ms < 22 µrad < 0.6 mrad ±0.35 rad < 1.5 mrad < 2.1 mrad ±(15+1.5) V DC, max. 4.5 A each alternatively: ±4.8 V; ±9.6 V; ±4.8 ma; ±9.6 ma XY2-100 standard or optionally optical data transfer 3 status signals per axis TTL level XY2-100 standard or optionally optical data transfer approx. 10 kg Operating Temperature 25 C ± 10 C Typical Air Requirements Typ. Water Requirements clean, filtered air, 1.6 bar max. 4.5 bar Wavelength 10.6 µm 10.6 µm 10.6 µm 10.6 µm 1064 nm 1064 nm Max. Laser Power cw Max. Laser Power for 50% Duty Cycle 2000 W 4000 W 2000 W 4000 W 2000 W 4000 W 2000 W 4000 W 2000 W 4000 W 2000 W 4000 W Image Field Size (170 x 170) mm 2 (270 x 270) mm 2 (500 x 500) mm 2 (1.5 x 1.5) m 2 (130 x 130) mm 2 (250 x 250) mm 2 Typical Processing Speed 0.8 m/s 1.0 m/s 2.0 m/s 6.0 m/s 0.7 m/s 1.0 m/s Focus Range in Z Direction ± 4 mm ± 5 mm ± 35 mm ± 75 mm ± 5 mm ± 5 mm Focus Diameter (1/e 2 ) 210 µm (M 2 =1) 275 µm (M 2 =1) 450 µm (M 2 =1) 1.3 mm (M 2 =1) 150 µm (M 2 =12) 200 µm (M 2 =12) Beam Expansion Factor Focal Length (414 ± 15) mm (515 ± 28) mm (850 ± 75) mm (2300 ± 500) mm (365 ± 18) mm (490 ± 32) mm powerscan 33 with varioscan 40 Legend 1 Beam in 2 Entrance aperture (water-cooled) 3 varioscan 40 4 Clamping block (water-cooled) 5 Base plate 6 Beam out 7 Galvanometer scanner E Electrical connectors A Connector for cooling air W Connectors for cooling water

22 Legend 1 Beam in 2 Entrance aperture (water-cooled) 3 varioscan 60 4 Clamping block (water-cooled) 5 Base plate 6 Beam out 7, 8 Submodules 9 Base module with main electronics D Fiber connector for optical data transfer P Power supply connector A Connectors for cooling air W Connectors for cooling water powerscan 50 with varioscan 60 Specifications powerscan 50 (all angles are in optical degrees) Aperture Beam Displacement Step Response Time (settling to 1/1000 of full scale) 50 mm mm 1% of full scale 1.5 ms Typical Processing Speed 2.5 rad/s Typical Positioning Speed 15 rad/s Dynamic Performance Tracking error Repeatability Long-term drift over 8 hours (after warm-up) Optical Performance Typical scan angle Gain error Zero offset Skew Nonlinearity Power Requirements Input Signals Output Signals Weight 0.9 ms < 22 µrad < 0.6 mrad ±0.35 rad < 1.5 mrad < 2.1 mrad ±(24+1.5) V DC, max. 10 A each (20 A peak current) optical data transfer or optionally XY2-100 standard 4 status signals, optical data transfer or optionally XY2-100 standard approx. 29 kg Operating Temperature 25 C ± 10 C Typical Air Requirements Typ. Water Requirements clean, filtered air, 1.5 bar to 2.0 bar max. 4.5 bar powerscan 50 with varioscan 60 Control The powerscan systems can be controlled via a SCANLAB RTC interface board.this facilitates straight-forward implementation of applications even complex ones. powerscan 50 and powerscan 70 scan systems are equipped with interfaces for data transfer via optical fiber. The RTC board automatically performs all required computations, such as micro-vectorization and image field correction, and synchronously controls the powerscan, varioscan and laser. Processing-on-the-fly functionality is optionally available. Typical optical configurations powerscan 50 with varioscan 60 Wavelength 10.6 µm 10.6 µm 10.6 µm 10.6 µm Max. Laser Power cw Max. Laser Power for 50% Duty Cycle 2000 W 4000 W 2000 W 4000 W 2000 W 4000 W 2000 W 4000 W Image Field Size (400 x 400) mm 2 (600 x 600) mm 2 (800 x 800) mm 2 (1000 x 1000) mm 2 Typical Processing Speed 1.3 m/s 2.0 m/s 2.7 m/s 3.2 m/s Focus Range in Z Direction ± 10 mm ± 40 mm ± 50 mm ± 100 mm Focus Diameter (1/e 2 ) 250 µm (M 2 =1) 375 µm (M 2 =1) 500 µm (M 2 =1) 600 µm (M 2 =1) Beam Expansion Factor Focal Length (750 ± 50) mm (1050 ± 90) mm (1350 ± 150) mm (1650 ± 250) mm

23 Options All powerscan systems can be equipped with an additional reference sensor system for automatic self-calibration for applications requiring extremely high long-term stability. The powerscan 33 can be equipped with sensors for monitoring the cooling air (standard for powerscan 50 and powerscan 70). Beryllium mirrors are optionally available for maximized powerscan 33 dynamic performance. powerscan 70 Typical optical configurations powerscan 70 with varioscan 80 Wavelength 10.6 µm 10.6 µm 10.6 µm Max. Laser Power cw Max. Laser Power for 50% Duty Cycle 2000 W 4000 W 2000 W 4000 W 2000 W 4000 W Image Field Size (440 x 440) mm 2 (1.0 x 1.0) m 2 (1.6 x 1.6) m 2 Typical Processing Speed 0.9 m/s 2.0 m/s 3.2 m/s Focus Range in Z Direction ± 10 mm ± 75 mm ± 200 mm Focus Diameter (1/e 2 ) 220 µm (M 2 =1) 450 µm (M 2 =1) 650 µm (M 2 =1) Beam Expansion Factor Focal Length (860 ± 45) mm (1680 ± 200) mm (2440 ± 400) mm Specifications powerscan 70 (all angles are in optical degrees) Aperture Beam Displacement Step Response Time (settling to 1/1000 of full scale) 70 mm 98.2 mm 1% of full scale 2.8 ms Typical Processing Speed 1.5 rad/s Typical Positioning Speed 12 rad/s Dynamic Performance Tracking error Repeatability Long-term drift over 8 hours (after warm-up) Optical Performance Typical scan angle Gain error Zero offset Skew Nonlinearity Power Requirements Input Signals Output Signals Weight 1.6 ms < 22 µrad < 0.6 mrad ±0.35 rad < 1.5 mrad < 2.1 mrad ±(24+1.5) V DC, max. 10 A each (20 A peak current) optical data transfer or optionally XY2-100 standard 4 status signals, optical data transfer or optionally XY2-100 standard approx. 29 kg Operating Temperature 25 C ± 10 C Typical Air Requirements Mirrors Electronics Typical Water Requirements clean, filtered air, 0.9 bar to 1.4 bar 0.4 bar to 0.8 bar max. 4.5 bar Legend 1 Beam in 2 Beam out 3, 4 Submodules 5 Base module with main electronics D Fiber connector for optical data transfer P Power supply connector A Connectors for cooling air W Connectors for cooling water powerscan 70 SCANLAB AG Benzstrasse Puchheim Germany Tel. +49 (89) Fax +49 (89) info@scanlab.de SCANLAB America, Inc. Suite Reed Hartman Highway Cincinnati, OH USA Tel. +1 (513) Fax +1 (513) info@scanlab-america.com 06 / 2005 Information is subject to change without notice.

24 new dimensions optics in motion varioscan, varioscan FLEX varioscan dynamic focusing devices enable the laser focus to be moved quickly and precisely along the optical axis. This is achieved via an optical element driven by a high-performance, tilt-free linear motor. In XY scan systems, the varioscan can replace costly flat field objectives. The varioscan is an exceptionally ideal solution in applications for which standard flat field objectives are unavailable. The varioscan can also extend XY scan systems into 3D beam deflection systems. The laser focus is guided along the contour of the workpiece being processed, thus enabling processing in three dimensions. The varioscan FLEX additionally allows continuously adjusting the image field size and working distance. Controlling both an XY scan unit and the varioscan is easily achieved via SCANLAB s RTC interface boards. SCANLAB offers optical configurations for a wide variety of working distances, image field sizes, beam diameters, wavelengths and laser powers. For fiber-coupled lasers, SCANLAB offers the varioscan FC (see special data sheet). Typical Fields of Application: Laser materials processing: welding, cutting, drilling Laser deep engraving Rapid prototyping, rapid tooling Microstructuring 3D workpiece processing

25 How It Works The varioscan is an opto-mechanical system. Relative to a fixed-position focusing lens, a diverging lens is moved along the optical axis by a tilt-free linear motor (see illustration). This changes the overall system s focal length. Laser beams of two kilowatts (CO 2 ) or four kilowatts average power (YAG) can be focused. 2D Applications In an XY scan system, the varioscan replaces a flat field objective. During the scan process, the focal length is dynamically readjusted in synchronisation with the mirror movement to maintain the laser focus within a flat image field. 3D Applications A 3-axis system consisting of a varioscan, an XY scan unit and an RTC interface board enables processing of non-flat workpieces. The position of the laser focus can be adapted to the contours of the part being processed. Particularly for short focal lengths, the 3-axis scan system can be combined with a flat field objective to achieve the smallest possible spot size and a large focus range in Z direction. varioscan 20 XY scan systems with apertures up to 20 mm can be extended by the varioscan 20 into a 3-axis scan system. The varioscan 20 features exceptionally dynamic performance. Optics are available for laser wavelengths up to 266 nm. For high-laser-power applications, the varioscan 20 can be equipped with a water-cooled entrance aperture. Specifications varioscan 20 (all angles are in optical degrees) Beam Input Aperture Output Aperture Dynamic Performance Tracking error Typical processing speed (with XY scan system) Typical positioning speed (with XY scan system) up to max. 8 mm up to max. 20 mm 1.0 ms 8 rad/s 18 rad/s Electrical Connections (with SSV30) Power Requirements Input Signals Output Signals Weight ±(15+1.5) V DC, max. 1.5 A each alternatively: ±4.8 V; ±9.6 V; ±4.8 ma; ±9.6 ma XY2-100 standard or optical data interface status signals TTL level XY2-100 standard or optical data transfer varioscan g bis 700 g (1) SSV30 servo amplifier board 190 g Operating Temperature 25 C ± 10 C Installation Position (1) depending on optical configuration horizontal Dimensions varioscan 20 Optical Setup varioscan 20 with Scan Head Legend 1 Water-cooled aperture (optional for varioscan 20) 2 Motor block 3 Clamping surface 4 Objective adapter 5 Objective 6 Focusing ring A Connector for cooling air W Connector for cooling water All dimensions in mm Typical 3-axis scan system optical configurations varioscan 20 varioscan 40 Laser Nd:YAG x 3 Nd:YAG CO 2 Nd:YAG Nd:YAG Wavelength 355 nm 1064 nm 10.6 µm 1064 nm 1064 nm XY Scan Unit 10 mm aperture 14 mm aperture 14 mm aperture 20 mm aperture 25 mm aperture Flat Field Objective without with f = 163 mm with f = 100 mm with f = 163 mm with f = 254 mm Image Field Size (600 x 600) mm 2 (110 x 110) mm 2 (70 x 70) mm 2 (90 x 90) mm 2 (115 x 115) mm 2 Focus Range in Z Direction ± 20 mm ± 16 mm ± 7.5 mm ± 5 mm ± 12 mm Focus Diameter (1/e 2 ) 110 µm (M 2 =1.3) 110 µm (M 2 =5) 180 µm (M 2 =1) 80 µm (M 2 =5) 100 µm (M 2 =5) Beam Expansion Factor Focal Length varioscan (1350 ± 60) mm Max. Laser Power cw 25 W 200 W 200 W 500 W 500 W

26 Dimensions varioscan 40 / 60 / 80 Specifications varioscan 40 / 60 / 80 varioscan 40 varioscan 60 varioscan 80 Total length (Dimension l) (1) ca. 190 mm ca. 220 mm ca. 240 mm Objective diameter (Dimension d) (1) ca. 60 mm ca. 81 mm ca. 98 mm (1) depending on optical configuration Optical Setup varioscan 40 / 60 / 80 with powerscan (all angles are in optical degrees) Beam Input Aperture Output Aperture varioscan 40 varioscan 60 varioscan 80 Dynamic Performance Tracking error Typical processing speed (with XY scan system) Typical positioning speed (with XY scan system) up to max.16 mm up to max. 40 mm up to max. 60 mm up to max. 80 mm 1.4 ms 5 rad/s 9 rad/s Electrical Connections (with SSV30) Power Requirements Input Signals Output Signals Weight ±(15+1.5) V DC, max. 1.5 A each alternatively: ±4.8 V; ±9.6 V; ±4.8 ma; ±9.6 ma XY2-100 standard or optical data interface status signals TTL level XY2-100 standard or optical data transfer varioscan 40 approx. 2.4 kg (1) varioscan 60 approx. 2.7 kg (1) varioscan 80 approx. 3 kg (1) SSV30 servo amplifier board 190 g Operating Temperature 25 C ± 10 C Installation Position (1) depending on optical configuration horizontal varioscan 40 / 60 / 80 These three varioscan employ the same motor unit and therefore exhibit identical dynamics. Customers can change the varioscan 40 / 60 / 80 s image field size by self-installing various optics sets. Integrated air and water cooling ensure stable operation, even with very high laser powers. Optics SCANLAB develops and designs the optical configurations for varioscan and XY scan systems individually, based on the customer s specific application. Thus, a maximum image field size is achieved with the minimum spot size. Control In a 3-axis system, the servo amplifier boards of the varioscan and the XY scan system are linked with the RTC interface board by a common digital interface. The RTC s processor performs vital steps such as micro-vectorization, coordinate transformations and image field correction. Quality The high quality of SCANLAB s scan solutions is the result of more than 15 years of experience in the development and manufacture of galvanometer scanners and scan systems. In addition, every scan system must first pass a final burnin test before it is released for shipment to the customer. varioscan 40 varioscan 60 varioscan 80 CO 2 CO 2 CO 2 CO 2 CO 2 CO µm 10.6 µm 10.6 µm 10.6 µm 10.6 µm 10.6 µm 33 mm aperture 33 mm aperture 50 mm aperture 50 mm aperture 70 mm aperture 70 mm aperture without without without without without without (270 x 270) mm 2 (1500 x 1500) mm 2 (400 x 400) mm 2 (800 x 800) mm 2 (1000 x 1000) mm 2 (1600 x 1600) mm 2 ± 5 mm ± 75 mm ± 10 mm ± 50 mm ± 75 mm ± 200 mm 275 µm (M 2 =1) 1.3 mm (M 2 =1) 250 µm (M 2 =1) 500 µm (M 2 =1) 450 µm (M 2 =1) 650 µm (M 2 =1) (515 ± 28) mm (2300 ± 500) mm (750 ± 50) mm (1350 ± 150) mm (1680 ± 200) mm (2440 ± 400) mm 2000 W 2000 W 2000 W 2000 W 2000 W 2000 W

27 varioscan 40 FLEX The varioscan 40 FLEX combines the varioscan 40 s high-performance focusing (for positioning the laser focus along the optical axis) with an additional motorized lens for continuously varying the image field size and working distance. Both dynamic focusing and image field size can be controlled via the SCANLAB RTC 4 PC Interface Board in combination with an extension card. The varioscan 40 FLEX s housing contains the optical components and electronics. The bore layout at the varioscan 40 FLEX s beam exit side is designed for mounting to a SCANLAB hurryscan 20/25/30 scan head. Specifications varioscan 40 FLEX (all angles are in optical degrees) Beam Input Aperture Output Aperture Dynamic Performance Tracking error Typical processing speed (with XY scan system) Typical positioning speed (with XY scan system) Power Requirements Input Signals Output Signals up to max.16 mm up to max. 39 mm 1.4 ms 5 rad/s 9 rad/s ±(15+1.5) V DC, max. 1.5 A each alternatively: ±4.8 V; ±9.6 V; ±4.8 ma; ±9.6 ma XY2-100 standard or optical data interface status signals TTL level XY2-100 standard or optical data transfer Weight approx. 4.5 kg (1) Operating Temperature 25 C ± 10 C (1) depending on optical configuration Typical optical configurations varioscan 40 FLEX with hurryscan 30 Type A Type B Wavelength 10.6 µm 10.6 µm Image Field Size (200 x 200) mm 2 - (600 x 600) mm 2 (600 x 600) mm 2 - (2000 x 2000) mm 2 Working Distance 240 mm to 735 mm 735 mm to 2500 mm Focus Range in Z Direction±2 mm to ±40 mm ±2 mm to ±400 mm Focus Diameter (1/e 2 ) 200 µm (M 2 =1) to 550 µm (M 2 =1) 550 µm (M 2 =1) to 1.8 mm (M 2 =1) Beam Expansion Factor 2.4 to to 1.9 Focal Length (395 ± 18) mm to (940 ± 140) mm (940 ± 60) mm to (2850 ± 600) mm hurryscan 20 / 25 / 30 varioscan 40 FLEX Legend 1 Beam in with water-cooled aperture 2 Linear motor with diverging optic 3 Motorized focusing optic 4 Deflection mirrors 5 Beam out A Connectors for cooling air W Connectors for cooling water All dimensions in mm SCANLAB AG Benzstrasse Puchheim Germany Tel. +49 (89) Fax +49 (89) info@scanlab.de SCANLAB America, Inc. Suite Reed Hartman Highway Cincinnati, OH USA Tel. +1 (513) Fax +1 (513) info@scanlab-america.com 06 / 2005 Information is subject to change without notice.

28 maximum-power laser scanning varioscan FC The varioscan FC is a new type of dynamic focusing unit that can be combined with a powerscan to realize a 3D beam deflection system for fiber-coupled multi-kilowatt lasers. Beam delivery is based on a variable collimator, with optical elements driven by the linaxis linear axis from SCANLAB. The laser focus can thus be moved quickly and precisely along the optical axis. The beam focus is optimized to remain a virtually constant focus diameter throughout the entire working volume. Adaptation to various fiber connector types and numerical apertures is possible. The varioscan FC is designed to handle a laser power of up to five kilowatts. To ensure reliable operation also with very high laser powers, the varioscan FC is equipped for water cooling. The varioscan FC s dynamics and optical layout are designed for use with SCANLAB s powerscan systems. Both, the varioscan FC and the powerscan are easily controlled with SCANLAB s RTC PC interface boards. Typical Applications: Remote welding Laser materials processing: welding, soldering, surface treatment (hardening, texturing...) Rapid manufacturing 3D applications Processing-on-the-fly

29 varioscan FC How it works The varioscan FC is an opto-mechanical system consisting of a variable collimator, a beam expander and focusing optics. The variable collimator s optics is dynamically driven along the optical axis by the linaxis linear axis. This allows the laser beam s divergence, and thus the overall system s focal length, to be varied. In addition, there are provisions for manual adjustment of the nominal working distance. Two deflection mirrors fold the beam path to keep the total system dimensions of the powerscan and varioscan FC as compact as possible. SCANLAB offers a variety of optical configurations for adapting the system to the customer s particular application. Working distance and field size can be adjusted by the selection of focusing optics. By exchanging the fiber adapter or collimator optics the varioscan FC can be adapted to various laser types. Control In a 3-axis system, the servo amplifier boards of the varioscan and the XY scan system are linked with a SCANLAB RTC PC interface board by a common digital interface. The RTC s processor performs vital steps such as micro-vectorization, coordinate transformations and image field correction. Applications In 2D applications, the varioscan as a dynamic focusing unit replaces a flat field objective. During the scan process, the focal length is dynamically readjusted to maintain the laser focus within a flat image field. In 3D applications, the varioscan enables processing of non-flat workpieces. The position of the laser focus can be adapted to the contours of the part being processed. Preliminary Specifications for varioscan FC with powerscan 50 (all angles are in optical degrees) Beam Input Coupler direct connection to fiber cable Connector type Optoskand QBH, Optoskand MMI or Trumpf LLK-B (1) Numerical aperture 0.12 or 0.20 (1) Dynamic Performance Tracking error Typical processing speed Typical positioning speed Power Requirements Interface 0.9 ms 2.5 rad/s 15 rad/s ±(24+1.5) V DC, max. 10 A each (20 A peak current) optical data transfer or XY2-100 standard Weight approx. 50 kg (2) Operating Temperature Typical Water Requirements (1) other customizations possible (2) depending on optical configuration 25 C ± 10 C max. 4.5 bar Typical optical configurations with powerscan 50 Wavelength Range 1030 nm nm Working Volume (200 x 200 x 100) mm 3 Focus Diameter (3) approx. 625 µm Max. Laser Power cw Working Distance (4) From lower edge From protective window 5 kw 450 mm 465 mm Legend 1 Fiber cable * 2 Fiber connector * 3 Fiber adapter 4 Variable collimator with linaxis linear axis 5 Beam expander 6 Focusing optics 7 powerscan 50 8 Base plate * not included (3) with the following beam parameter product at the fiber output: - BPP = 12 mm mrad (M 2 = 36) for top hat intensity profile or - BPP = 8 mm mrad (M 2 = 24) for gaussian intensity profile (4) distance to central working plane SCANLAB AG Benzstrasse Puchheim Germany Tel. +49 (89) Fax +49 (89) info@scanlab.de SCANLAB America, Inc. Suite Reed Hartman Highway Cincinnati, OH USA Tel. +1 (513) Fax +1 (513) info@scanlab-america.com 07 / 2004 Information is subject to change without notice.

30 control and versatility RTC 3, RTC 4 SCANLAB s RTC PC interface boards provide synchronous, interferenceresistant control of scan systems and lasers in real time. A high-performance signal processor and the supplied DLL simplify programming under Windows. Alternatively, industry-proven software packages from various third-party vendors are also available for handling a palette of standard applications. Software instructions are loaded alternately in the RTC s two list buffers, processed by the DSP, and output as 16-bit control signals every 10 µs to the scan system. The RTC s processor automatically performs vital steps such as micro-vectorization and image field correction. Laser control is synchronized with the scanner movements. Various programmable laser signals are available for vector and bitmap processing (see diagram on reverse side). The RTC 4 is downward-compatible with the RTC 3. Additionally, the RTC 4 is capable of communicating with the processors onboard SCAN- LAB s new intelliscan scan heads thus, it furnishes to the control PC the real-time stream of scan head axis status parameters and enables extensive scan system diagnosis possibilities. Optimized intelliscan scan head tuning profiles for diverse processing tasks can be selected via software commands. Compared to the RTC 3, the RTC 4 offers more memory, faster performance and additional software instructions (e.g. arc command). For controlling external components, the RTC 4 provides 16 digital input ports and 16 digital output ports. SCANLAB s RTC PC interface boards are available with numerous options, providing the extensive flexibility system integrators need for meeting diverse customer requirements. Furthermore, an I/O extension board is available for controlling additional external components.

31 RTC 3, RTC 4 Specifications PCI bus interface 16-bit positioning resolution 10 µs output period Software drivers (DLL) for Windows XP / 2000 / NT4 / Me / 9x Outputs for control of one scan head and one laser Various laser modes selectable (e.g. YAG modes, CO 2 mode, polarity) Two analog outputs with 10-bit resolution; one 8-bit digital output Up to four RTC boards in one PC RTC 4 Enhanced Features Scan system diagnosis and selection of intelliscan tuning profiles Additional software instructions (e.g. arc command) One 16-bit digital input and one 16-bit digital output for controlling external components Options Control of 3-axis scan systems Optical data transfer via optical fiber interface Processing-on-the-fly functionality for objects in motion Dual-head capability for simultaneous control of two scan systems I/O Extension Board (optional) 16-bit digital input, 4 bits are opto-decoupled 16-bit digital output, 4 bits are opto-decoupled 4 differential analog inputs, each with 10-bit resolution 4 analog outputs, each with 10-bit resolution SCANLAB AG Benzstrasse Puchheim Germany Tel. +49 (89) Fax +49 (89) info@scanlab.de SCANLAB America, Inc. Suite Reed Hartman Highway Cincinnati, OH USA Tel. +1 (513) Fax +1 (513) info@scanlab-america.com 08 / 2003 Information is subject to change without notice.

32 independent control RTC SCANalone SCANLAB s RTC SCANalone Board enables real-time control of scan systems and lasers without requiring a PC. The board s high-performance signal processor and extensive internal memory make this possible. The only item required for operation is an external power supply. Marking data can be loaded via a removable MMC memory card or by using the built-in USB 1.1 interface. The board s internal memory can accommodate up to one million list commands a capacity that meets the needs of both today s and tomorrow s complex applications. External control signals can be used to start or otherwise influence the execution of applications loaded in memory. For this purpose, the board is equipped with an additional 16-bit digital input and 16-bit digital output. Control commands to the scan system are issued synchronously every 10 µs as 16-bit digital output signals. The RTC SCANalone can also be operated via a PC connected to the board s USB interface. In this mode, the RTC SCANalone offers the same functionality as an RTC 4 PC interface board. The RTC SCANalone software interface and hardware connection capabilities are largely compatible with those of the RTC 4 PC interface board. All options offered for the RTC 4 PC interface board (e.g. 3D or processing on the fly) are also available for the RTC SCANalone.