Beam deflection technologies for ultra short pulse lasers June 5th, 2018

Transcription

1 Beam deflection technologies for ultra short pulse lasers June 5th, 2018

2 Agenda SCANLAB GmbH XL Scan excellishift precsys 2

3 SCANLAB at a Glance Worldwide leading OEM manufacturer of scan solutions for deflecting and positioning laser beams Our high-performance components are the core of e.g.: 3D printers Laser welding robots Laser systems for medical treatments Micro-structuring systems 30,000+ units manufactured annually and installed in 38 countries worldwide Trendsetting developments in the fields of electronics, mechanics and optics Go to history 3

4 SCANLAB in Figures Sales 2017: 110 million Around half of our highly qualified team are engineers and scientists About 350 employees from 36 countries Go to organization 4

5 A Strong Global Team SCANLAB GmbH Headquarters in Puchheim, Germany (near Munich) SCANLAB America, Inc. Based in St. Charles, IL, USA Blackbird Robotics, Co., Ltd Based in Shanghai, China Blackbird Robotics, Inc. Based in Sterling Heights, MI, USA Next Scan Technology Based in Evergem, Belgium (near Gent) Blackbird Robotersysteme GmbH Based in Garching, Germany (near Munich) 5

6 Agenda SCANLAB GmbH XL Scan excellishift precsys 6

7 XL SCAN Joint development of ACS Motion Control SCANLAB Target Applications Large field marking Glass and foil processing PCB board drilling 7

8 XL SCAN: Unlimited field of view Simultaneous 2D motion Control: syncaxis control & RTC6 Scanner: excelliscan Axis control system: ACS Motion Control 8

9 Scan system Scan system: excelliscan Lens f = 100 mm telecentric (FoV 54 x 54 mm) Speed < 20 m/s Acceleration < m/s² Accuracy at the edge of the field: 25 µm (non optimal alignment) Control error dynamic < 5 µm (typically < 3µm) XY-Table 300 x 300 mm² Speed < 1 m/s Acceleration < 10 m/s² Accuracy < 2 µm Control error dynamic < 1µm ACS control system A controller and drives to fit the stage specifications 9

10 Scan system Video 10

11 Accuracy x-axis y-axis radial Min µm -5.0 µm 0.0 µm Max. 5.0 µm 1.0 µm 5.4 µm Standard deviation 1.3 µm 1.1 µm 1.4 µm Mean 0.9 µm -0.7 µm 1.6 µm x-axis y-axis radial Min µm -5.1 µm 0.0 µm Max. 6.1 µm 4.7 µm 6.6 µm Standard deviation 1.6 µm 1.8 µm 1.2 µm Mean 0.1 µm 0.8 µm 2.2 µm x-axis y-axis radial Min µm -9.7 µm 0.0 µm Max. 8.9 µm 4.1 µm 11.0 µm Standard deviation 2.9 µm 3.1 µm 2.6 µm Mean -0.8 µm -3.5 µm 4.9 µm 11

12 Conclusion Extra large field of view Depending on the pattern significant increase of throughput (up to 41%) Reduction of stitching errors Increase of accuracy No vibrations Applications: Large area marking Glass and foil processing Drilling of large area PCB s 12

13 Agenda SCANLAB GmbH XL Scan excellishift precsys 13

14 excellishift Performance compared to varioscan at λ = nm excellishift varioscan 20i (typical data) Scanning Technology galvo-based moving lens Optical Concept reflective transmissive Input Aperture 14 mm 7 mm Max. Velocity in z* ~ 30 m/s 4.2 m/s Max. Laser Power 200 W typ. 200 W Acceleration Time min. 0.1 ms 0.8 ms * with focusing optics f = 160 mm 14

15 excellishift Key-features Extends 2D scan heads into 3D scan systems without dynamic limitations Designed without transmissive optical components Ensures highest reliability due to fieldproven galvanometer technology Enables high-dynamic processing of complex 3D-surfaces Enables flat field correction of pre-focused systems without dynamic limitations The new z-axis system can be perfectly combined with the excelliscan, as well as the intelliscan and SCANcube 2D scan system families. excellishift 15

16 High-speed z-axis Set-up excelliscan excellishift F-Theta f=160 mm F-Theta f=160 mm y x z y +15 mm x working plane working volume -15 mm 16

17 excellishift Performance The new High-speed z-axis enables ultra-fast processing of complex 3-dimensional surfaces The z-shifting range and the scanning speed depend on the focal length of the F-Theta lens, e.g.: f = 160 mm: - v scan,z 30 m/s - z-shifting range ± 15 mm excelliscan F-Theta f = 160 mm excellishift y z +15 mm x working volume -15 mm 17

18 excellishift Operating Principle Topview output input Varying optical power as a function of the galvo position Double-pass configuration (folded beam path) Position and angle of the output beam remains constant 18

19 Agenda SCANLAB GmbH XL Scan excellishift precsys 19

20 Introduction Miniaturization of products or components in several sectors Automotive, Aerospace, Textiles, Medical technology, Precision engineering etc. Typical applications: Drilling, Ablation, Structuring, Cutting Market requirements: Efficient, precise and flexible micro machining technologies 20

21 Motivation Laser ablation Fast, contact and force free, independet workpiece material choice (hardness/conductivity), no additional fluids are needed, low-wear, fast and flexible laser path movement etc. Laser machining challenge High precision manufacturing with high aspect ratios and perpendicular shaped wall angles, i.e. drilling of cylindrical or even negative tapered walls Technology Conventional laser drilling 5 Axis drilling Result: Positive tapered wall angle Demand: Perpendicular / negative tapered wall angles

22 precsys 5-Axis Laser Focussing Modification of focus position and inclination Factory calibration in carthesic coordinates with an accuracy ofv+/- 2µm

23 Modification of the inclination Modification of focus position Z-position of focus precsys: Principle of work AOI ±7.5 Field of view: : 2.5 mm Marking: 5 mm z ±1.0 mm

24 precsys: DrillControl Software Job- Manager Parameter along the path 3D path

25 Results Results Hole Diameter: 0.1 mm Depth: 0.5 mm Material: Ceramics Straightness: ±0.7 µm Hole entrance Exit 100µm Results provided by Posalux SA 25

26 Results Swiss Cross surrounded by square holes. Width 40 µm, grid spacing 55 µm in 350 µm thick PPS Results provided by Posalux SA 26

27 Results Square Holes in Si 3 N 4 Width of the squares: 40 µm Grid spacing: 50 µm Wall thickness: 10 µm Radius <= 5 µm Process time: 1,2 sec per hole Thickness: 250 µm Results provided by Posalux SA 27

28 Results SEM of injection nozzle hole, Laser In = 88 µm Laser Out = 104 µm in 1 mm wall thickness Results provided by Posalux SA 28

29 Conclusion SCANLAB GmbH XL Scan enables arbitrary large fields of view excellishift enables highly dynamic 3D processing precsys enables cutting and drilling with accuracy in the range of single µm 29

30 mirrors in motion