CCD-array with RTSC. Laserdiode. Multi-lens optics. Filter

Transcription

1 Laser-Wegsensoren optoncdt Options (Triangulation)

2 2 Table of Contents optoncdt 7-2 / 72-2 / optoncdt 7-(6)... optoncdt optoncdt 7-2/ optoncdt 7-2()... 7 optoncdt 22-2(235)... 8 optoncdt 22-2(223)... 9 optoncdt 22-22(236)LL9... optoncdt 22-22(2)LL9... optoncdt optoncdt optoncdt 22-(2)... optoncdt 22-(237)... optoncdt 22-2(23)... 6 optoncdt optoncdt 222-2(2)... 8 optoncdt 22-2(22)/ optoncdt 7Z CCD-array with RTSC Multi-lens optics Filter Start of measuring Measuring Laserdiode Leadership in laser displacement measurement Micro-Epsilon has a long-standing success of developing laser displacement sensors. lready a pioneer in the field of CCD sensors, Micro-Epsilon has continually raised the bar in industrial laser displacement measurement. Measurement principle: Laser triangulation Laser triangulation sensors operate with a laser diode which projects a visible light spot onto the surface of the measurement target. The light reflected from the spot is imaged by an optical receiving system onto a position-sensitive element. If the light spot changes its position, this change is imaged on the receiving element and evaluated. With the 67 Series an analogue PSD module is used as the positionsensitive measuring element, whereas with the remaining sensors CMOS elements and CCD elements are used. Custom Sensor Modifications For applications where the above standard sensors do not meet your requirements, it may be possible to supply a sensor with modified specifications: - Measuring and stand off - Custom housing or mounting geometry / 5 / / 2kHz - Non standard signal interfaces - Special cable length of electrical connector - 9 beam deflection - Vacuum suitability - Reduced mass - Increased shock and vibration resistance optoncdt sensors uses a semiconductor laser with a wavelength of 67nm (visible/red). The maximum optical output power is mw. The sensor is classified as laser class II. warning sign is attached to the sensor housing. End of measuring LSER RDITION Do not stare into the beam CLSS 2 LSER PRODUCT IEC 6825-: 28-5 P mw; λ=67nm IEC - Standard

3 3 Optimised for shiny metallic surfaces optoncdt 7-2 / 72-2 / x Mounting holes ø.5mm 7 8 Model α ϕ ε ILD ø ILD ILD Start of measuring End of measuring ( in mm, not to scale) Model ILD7-2 ILD72-2 ILD7-3 rticle no Measuring 2mm 2mm 3mm Start of measuring () 25mm 3mm 2mm Mid (M) 35mm 23mm 35mm End of measuring (E) 5mm 33mm 5mm Linearity ( ±.8% FSO) 6μm 6μm 2µm µm µm µm M µm µm µm E µm µm µm Resolution (at 2.5kHz without averaging) 2μm 2μm 8µm (adjustable) (at 2.5kHz) 2.5kHz /.25kHz / 625Hz / 32.5Hz semiconductor laser <mw, 67nm (red),lx Laser safety class class 2 IEC : 2- Temperature stability* Measurement outputs (selectable) Switching outputs (programmable) Switch input (configurable) Operation.% FSO/ C C C -2 C C... 2m /... V / RS 22 / US (option with cable PC7-3/US) x error or 2 x limit Laser ON-OFF, Zero, Trigger/Sync via touch screen on sensor or via PC with ILD 7 tool 2VDC (... 3VDC), max. m Electromagnetic compatibility (EMC) EN 6-6-3; EN Sensor cable length (with connector) Further functions (programmable) standard.25m integrated Synchronisation possible for simultaneous or alternating measurements, Trigger possible Protection class IP 65 2g / Hz (IEC ) g / 6ms (IEC ) Weight (with 25cm cable) FSO = Full scale output ll specifications apply for a diffusely reflecting matt white ceramic target *based to digital output = Start of measuring ; M = Mid; E = End of measuring appr. 6 g

4 Vacuum fit sensor optoncdt 7-(6) x Mounting holes ø.5 mm ø 3. ø8 Start of measuring End of measuring ( in mm, not to scale) Model ILD 7-(6) - Vacuum fit sensor Measuring Start of measuring Mid End of measuring mm (other measuring s on request) 3mm 35mm mm Linearity ±.8% FSO 8µm Resolution (at 2.5kHz without averaging) (at 2.5kHz).5µm 2.5kHz /.25kHz / 625Hz / 32.5Hz (adjustable) semiconductor laser <mw, 67nm (red),lx Laser safety class class 2 IEC : 2- µm; M 5µm; E µm Temperature stability*.% FSO/ C C C measurements RS 22 Operation via PC with ILD 7 tool 2VDC (... 3VDC), max. m Electromagnetic compatibility (EMC) EN 6-6-3; EN Sensor cable length (with connector) Synchronisation standard.25m integrated / optional: extension 3m or m possible for simultaneous or alternating measurements Protection class IP Weight (with 25cm cable) 2g / Hz g / 6ms appr. 55g FSO = Full scale output ll specifications apply for a diffusely reflecting matt white ceramic target *based to digital output = Start of measuring M = Mid E = End of measuring

5 5 Extended measuring optoncdt x Mounting holes ø.5 mm ø 3. ø8 Start of measuring End of measuring ( in mm, not to scale) Model ILD 7-2 Measuring Start of measuring Mid End of measuring 2mm 7mm 3mm 9mm Linearity ±.8% FSO µm Resolution (at 2.5kHz without averaging) 6µm (at 2.5kHz) 2.5kHz /.25kHz / 625Hz / 32.5Hz (adjustable) semiconductor laser <mw, 67nm (red),lx Laser safety class class 2 IEC : 2-7µm; M 6µm; E 7µm Temperature stability* Switch input Operation measurements switching outputs.% FSO/ C C C -2 C C selectable:... 2m /... V / RS 22 / US (option with cable PC7-3/US) x error or 2 x limit (each programmable) Laser ON-OFF / Zero via touch screen on sensor or via PC with ILD 7 tool 2VDC (... 3VDC), max. m Electromagnetic compatibility (EMC) EN 6-6-3; EN Sensor cable length (with connector) Synchronisation standard.25m integrated / optional: extension 3m or m possible for simultaneous or alternating measurements Protection class IP 65 Weight (with 25cm cable) 2g / Hz g / 6ms appr. 55g FSO = Full scale output ll specifications apply for a diffusely reflecting matt white ceramic target *based to digital output = Start of measuring M = Mid E = End of measuring

6 6 Extended measuring, tiny offset optoncdt 7-2/ Mounting holes Mx pin Flange socket Fischer DEU mm measuring 39 Start of measuring Laser beam Laser beam End of measuring status-led ( in mm, not to scale) Model ILD 7-2/9 Measuring Start of measuring Mid End of measuring 2mm.5mm 7.5mm 3.5mm Linearity ±.8% FSO µm Resolution (at 2.5kHz without averaging) 6µm (at 2.5kHz) 2.5kHz /.25kHz / 625Hz / 32.5Hz (adjustable) semiconductor laser <mw, 67nm (red),lx Laser safety class class 2 IEC : 2-7µm; M 6µm; E 7µm Temperature stability* Switch input Operation measurements switching outputs.% FSO/ C C C -2 C C selectable:... 2m /... V / RS 22 / US (option with cable PC7-3/US) x error or 2 x limit (each pogrammable) Laser ON-OFF / Zero via touch screen on sensor or via PC with ILD 7 tool 2VDC (... 3VDC), max. m Electromagnetic compatibility (EMC) EN 6-6-3; EN Sensor cable length (with connector) Synchronisation standard.25m integrated / optional: extension 3m or m possible for simultaneous or alternating measurements Protection class IP 65 Weight (with 25cm cable) 2g / Hz g / 6ms appr. 55g FSO = Full scale output ll specifications apply for a diffusely reflecting matt white ceramic target *based to digital output ; = Start of measuring M = Mid E = End of measuring

7 7 Large offset sensor optoncdt 7-2() x Mounting holes ø.5 mm ø 3. ø8 Start of measuring End of measuring ( in mm, not to scale) Model ILD7-2() Measuring Start of measuring Mid End of measuring 25mm mm 2mm 3mm Linearity ±.8% FSO 6µm Resolution (at 2.5kHz without averaging) µm (at 2.5kHz) 2.5kHz /.25kHz / 625Hz / 32.5Hz (adjustable) semiconductor laser <mw, 67nm (red),lx Laser safety class class 2 IEC : 2-7µm; M 6µm; E 7µm Temperature stability* Switch input Operation measurements switching outputs.% FSO/ C C C selectable:... 2m /... V / RS 22 / US (option with cable PC7-3/US) x error or 2 x limit (each pogrammable) Laser ON-OFF / Zero via touch screen on sensor or via PC with ILD 7 tool 2VDC (... 3VDC), max. m Electromagnetic compatibility (EMC) EN 6-6-3; EN Sensor cable length (with connector) Synchronisation standard.25m integrated / optional: extension 3m or m possible for simultaneous or alternating measurements Protection class IP 65 Weight (with 25cm cable) 2g / Hz g / 6ms appr. 55g FSO = Full scale output ll specifications apply for a diffusely reflecting matt white ceramic target *based to digital output = Start of measuring M = Mid E = End of measuring

8 8 Vacuum fit sensor optoncdt 22-2(235) x Mounting holes ø.5 mm ø sensor state power avg zero avg reset avg 3 avg 2 in/out , ILD 22 mounting clips ø 3. Start of measuring ø ( in mm, not to scale) End of measuring Model ILD 22-2(235) Measuring Start of measuring Mid End of measuring 2mm (other measuring s on request) 2mm 25mm 26mm Linearity ±.8% FSO µm Resolution (at khz without averaging).% FSO.3µm khz 3,lx 8µm; M 35µm; E 8µm; semiconductor laser <mw, 67nm (red) DIN EN 6825-/ 2.99 / IEC 825-/ 2.99 / FD Protection class sensor: IP / controller: IP 5 Temperature stability.% FSO/ C C C analogue ±5V digital RS 22 / 69.2kaud 2VDC (±%), max. 5m Sensor cable modified cable 3m with connector for vacuum feed through ) functions: auto zero / signal averaging Electromagnetic compatibility (EMC) EN 55/2.998 and EN 582-2/ g / Hz g / 6ms / 3 axis FSO = Full scale output ll specifications apply for a diffusely reflecting matt white ceramic target = Start of measuring M = Mid E = End of measuring ) Vacuum feed through and cable are included in delivery

9 9 Sensor with aluminium housing optoncdt 22-2(223) x Mounting holes ø.5 mm ø sensor state power avg zero avg reset avg 3 avg 2 in/out , ILD 22 mounting clips ø 3. Start of measuring ø ( in mm, not to scale) End of measuring Model ILD 22-2(223) Measuring Start of measuring Mid End of measuring 2mm mm 5mm 6mm Linearity ±.3% FSO 6µm Resolution (at khz without averaging).% FSO.3µm khz 3,lx 6µm; M 6µm; E 6µm; semiconductor laser <mw, 67nm (red) DIN EN 6825-/ 2.99 / IEC 825-/ 2.99 / FD Protection class sensor: IP 65 / controller: IP 5 Temperature stability Sensor cable.% FSO/ C C C analogue ±5V digital RS 22 / 69.2kaud 2VDC (±%), max. 5m standard: 2m - integrated ; option: 5m/m functions: auto zero / signal averaging Electromagnetic compatibility (EMC) EN 55/2.998 and EN 582-2/ g / Hz g / 6ms / 3 axis FSO = Full scale output ll specifications apply for a diffusely reflecting matt white ceramic target *based to digital output = Start of measuring M = Mid E = End of measuring

10 9 optics for tiny installation rooms with digital output optoncdt 22-22(236)LL9 status - LED Sensor and target 8min target Laser beam E mounting axis Laser beam sensor ILD22-22(236)LL/ : Start of measuring E - End of measuring ( in mm, not to scale) Model ILD 22-22(236)LL9 Measuring Start of measuring Mid End of measuring 22 mm 5.5mm 6.5mm 27.5mm Linearity ±.3%FSO 7µm Resolution (at khz without averaging).% FSO.µm 2.5kHz,lx 6µm; M 6µm; E 6µm; semiconductor laser <mw, 67nm (red) DIN EN 6825-/ 2.99 / IEC 825-/ 2.99 / FD Protection class sensor: IP 65 / controller: IP 5 Temperature stability.% FSO/ C C C digital RS 85 /.2kaud Sensor cable 2VDC (±%), max. 5m standard:.3m (integrated) ; option: 5.3m/.3m functions: auto zero / signal averaging dimensions: 3mm x 5mm x 52mm Electromagnetic compatibility (EMC) EN 55/2.998 and EN 582-2/ FSO = Full scale output ll specifications apply for a diffusely reflecting matt white ceramic target = Start of measuring M = Mid E = End of measuring 2g / Hz g / 6ms / 3 axis

11 9 optics for tiny installation rooms optoncdt 22-22(2)LL9 status - LED Sensor and target 8min target Laser beam E mounting axis Laser beam sensor ILD22-22(2)LL/ : Start of measuring E - End of measuring ( in mm, not to scale) Model ILD 22-22(2)LL9 Measuring Start of measuring Mid End of measuring 22mm 5.5mm 6.5mm 27.5mm Linearity ±.3%FSO 7µm Resolution (at khz without averaging).% FSO.µm khz,lx 6µm; M 6µm; E 6µm; semiconductor laser <mw, 67nm (red) DIN EN 6825-/ 2.99 / IEC 825-/ 2.99 / FD Protection class sensor: IP 65 / controller: IP 5 Temperature stability Sensor cable.% FSO/ C C C analogue ±5V digital RS85 /.2kaud 2VDC (±%), max. 5m standard: 2m (integrated) functions: auto zero / signal averaging; dimensions: 3mm x 5mm x 52mm Electromagnetic compatibility (EMC) EN 55/2.998 and EN 582-2/ g / Hz g / 6ms / 3 axis FSO = Full scale output ll specifications apply for a diffusely reflecting matt white ceramic target = Start of measuring M = Mid E = End of measuring

12 2 Measuring option optoncdt x Mounting holes ø.5 mm ø sensor state power avg zero avg reset avg 3 avg 2 in/out , ILD 22 mounting clips ø 3. Start of measuring ø ( in mm, not to scale) End of measuring Model ILD 22-3 Measuring Start of measuring Mid End of measuring 3mm 3mm 5mm 6mm Linearity ±.3%FSO 9µm Resolution (at khz without averaging).% FSO.µm khz 3,lx 6µm; M 6µm; E 6µm; semiconductor laser <mw, 67nm (red) DIN EN 6825-/ 2.99 / IEC 825-/ 2.99 / FD Protection class sensor: IP 65 / controller: IP 5 Temperature stability Sensor cable.% FSO/ C C C -2 C C analogue ±5V digital RS 22 / 69.2kaud 2VDC (±%), max. 5m standard: 2m (integrated); option: 5m/m functions: auto zero / signal averaging Electromagnetic compatibility (EMC) EN 55/2.998 and EN 582-2/ g / Hz g / 6ms / 3 axis FSO = Full scale output ll specifications apply for a diffusely reflecting matt white ceramic target = Start of measuring M = Mid E = End of measuring

13 3 Extended measuring optoncdt x Mounting holes ø.5 mm ø sensor state power avg zero avg reset avg 3 avg 2 in/out , ILD 22 mounting clips ø 3. Start of measuring ø ( in mm, not to scale) End of measuring Model ILD 22-6 Measuring Start of measuring Mid End of measuring 6mm 5mm mm 5mm Linearity ±.3%FSO 8µm Resolution (at khz without averaging).% FSO.9µm khz 3,lx 6µm; M 6µm; E 6µm; semiconductor laser <mw, 67nm (red) DIN EN 6825-/ 2.99 / IEC 825-/ 2.99 / FD Protection class sensor: IP 65 / controller: IP 5 Temperature stability Sensor cable.% FSO/ C C C analogue ±5V digital RS 22 / 69.2kaud 2VDC (±%), max. 5m standard: 2m (integrated); option: 5m/m functions: auto zero / signal averaging Electromagnetic compatibility (EMC) EN 55/2.998 and EN 582-2/ g / Hz g / 6ms / 3 axis FSO = Full scale output ll specifications apply for a diffusely reflecting matt white ceramic target = Start of measuring M = Mid E = End of measuring rang

14 nalogue output, measuring rate 2.5kHz optoncdt 22-(2) x Mounting holes ø.5 mm ø sensor state power avg zero avg reset avg 3 avg 2 in/out , ILD 22 mounting clips ø 3. Start of measuring ø ( in mm, not to scale) End of measuring Model ILD 22-(2) Measuring Start of measuring Mid End of measuring mm 7mm 2mm 7mm Linearity ±.3%FSO 3µm Resolution (at khz without averaging).% FSO.5µm 2.5kHz,lx 35µm; M 3µm; E 35µm; semiconductor laser <mw, 67nm (red) DIN EN 6825-/ 2.99 / IEC 825-/ 2.99 / FD Protection class sensor: IP 65 / controller: IP 5 Temperature stability.% FSO/ C C C -2 C C analogue ±5V Sensor cable 2VDC (±%), max. 5m standard: 2m (integrated); option: 5m/m functions: auto zero / signal averaging Electromagnetic compatibility (EMC) EN 55/2.998 and EN 582-2/ g / Hz g / 6ms / 3 axis FSO = Full scale output ll specifications apply for a diffusely reflecting matt white ceramic target = Start of measuring M = Mid E = End of measuring rang

15 2.5 khz optoncdt 22-(237) x Mounting holes ø.5 mm ø sensor state power avg zero avg reset avg 3 avg 2 in/out , ILD 22 mounting clips ø 3. Start of measuring ø ( in mm, not to scale) End of measuring Model ILD 22-(237) Measuring Start of measuring Mid End of measuring mm 7mm 2mm 7mm Linearity ±.3%FSO 3µm Resolution (at khz without averaging).% FSO.5µm 2.5 khz,lx 35µm; M 3µm; E 35µm; semiconductor laser <mw, 67nm (red) DIN EN 6825-/ 2.99 / IEC 825-/ 2.99 / FD Protection class sensor: IP 65 / controller: IP 5 Temperature stability Sensor cable.% FSO/ C C C -2 C C analogue ±5V digital RS 22 / 69.2kaud 2VDC (±%), max. 5m standard: 2m (integrated); option: 5m/m functions: auto zero / signal averaging Electromagnetic compatibility (EMC) EN 55/2.998 and EN 582-2/ g / Hz g / 6ms / 3 axis FSO = Full scale output ll specifications apply for a diffusely reflecting matt white ceramic target = Start of measuring M = Mid E = End of measuring rang

16 6 Extended offset optoncdt 22-2(23) x Mounting holes ø.5 mm ø sensor state power avg zero avg reset avg 3 avg 2 in/out ø ILD 22 mounting clips Start of measuring End of measuring ( in mm, not to scale) Model ILD 22-2(23) Measuring Start of measuring Mid End of measuring 2mm 25mm 35mm 5mm Linearity ±.3%FSO 6µm Resolution (at khz without averaging).% FSO 3µm khz 3,lx 3µm; M 3µm; E 3µm semiconductor laser <mw, 67nm (red) DIN EN 6825-/ 2.99 / IEC 825-/ 2.99 / FD Protection class sensor: IP 65 / controller: IP 5 Temperature stability Sensor cable.% FSO/ C C C analogue ±5V digital RS 22 / 69.2kaud 2VDC (±%), max. 5m standard:.3m (integrated) functions: auto zero / signal averaging Electromagnetic compatibility (EMC) EN 55/2.998 and EN 582-2/ g / Hz g / 6ms / 3 axis FSO = Full scale output ll specifications apply for a diffusely reflecting matt white ceramic target = Start of measuring M = Mid E = End of measuring rang

17 7 Extended measuring optoncdt ø.5 3x Mounting holes ø.5 mm sensor state power avg zero avg reset avg 3 avg 2 in/out ILD mounting clips Laser beamemission ( in mm, not to scale) Model ILD 22-5 Measuring Start of measuring Mid End of measuring 5mm 2mm 5mm 7mm Linearity ±.8 % FSO ±µm Resolution. % FSO 5 µm (at 2.5kHz without averaging) khz, lx µm (option with smaller spot diameter) semiconductor laser <mw, 67nm (red) class 2 acc. DIN EN / IEC / FD Protection class sensor: IP 65 / controller: IP C C standard: ±5 V / option: RS 232 or RS 85 Sensor cable Weight functions dimensions 2 VDC (± %), max. 5m standard: 2m (integrated); option: 5m/m auto zero / signal averaging 3 x 5 x 52mm - without mounting clips sensor.6kg / controller:.kg Electromagnetic compatibility (EMC) EN 58- and EN g / Hz g / 6ms FSO = Full scale output

18 8 dditional intensity signal optoncdt 222-2(2) x Mounting holes ø.5 mm ø sensor state power avg zero avg reset avg 3 avg 2 in/out , ILD 22 mounting clips ø 3. Start of measuring ø ( in mm, not to scale) End of measuring Model ILD 22-2(2) Measuring Start of measuring Mid End of measuring 2mm (other measuring s on request) mm 5mm 6mm Linearity ±.3%FSO 6µm Resolution (at khz without averaging).% FSO.3µm khz 3,lx 6µm; M 6µm; E 6µm; semiconductor laser <mw, 67nm (red) DIN EN 6825-/ 2.99 / IEC 825-/ 2.99 / FD Protection class sensor: IP 65 / sontroller: IP 5 Temperature stability Sensor cable.% FSO/ C C C -2 C C analogue ±5V digital RS 22 /.5Maud, intensity 2VDC (±%), max. 5m standard: 2m (integrated); option: 5m/m functions: auto zero / signal averaging Electromagnetic compatibility (EMC) EN 55/2.998 and EN 582-2/ g / Hz g / 6ms / 3 axis FSO = Full scale output ll specifications apply for a diffusely reflecting matt white ceramic target = Start of measuring M = Mid E = End of measuring rang

19 complete depth) M =2 measuring 6±.5 (9) (7) (.7) 9 Sensor with 9 beam deflection and dust 32 protector optoncdt 22-2(22)/9 6±.5 (9) (7) (.7) (5.6) 99.8 (9.6) 29. (9.) (.7) (29.6) (= max. Eintauchtiefe) (2.) (2) 2 (ø 62).8 (6) (6.3) (min. R23) ø.5 29 ( in mm, not to scale) ø ( ( optoncdt 22-2(22)-9 (5.6) 99.8 (9.6) 3 min. R 3 (inner radius at complete depth) M =2 measuring min. R 3 (inner radius at complete depth) M =2 measuring 6±.5 (9) (7) 6 (5.6) 99.8 (9.6) view with protector (6) (6.3) min. R 3 (inner radius at complete depth) M =2 measuring (min. R23) (9.) ±.5 (9) (7) ø view with tube laser beam (.7) view with protector 33.7 (29.6) (6) (6.3) (min. R23) 29 view with protector ø.5 view with tube 5 laser beam.8 (6) (6.3) (= max. Eintauchtiefe) (2.) (2) 2 (ø 62) ø (min. R23) R 3 ø.5 las view with tube 29 moving direction tube or sensor Control R 3 moving direction tube or sensor view with protector view with tube mounting clips Model ILD (22)/9 R 3 73 Measuring moving direction tube or sensor 2mm Start of measuring mm to laser mounting output clips Linearity ±µm ±.5% FSO khz 3,lx 3µm M 6µm E 3µm semiconductor laser <mw, 67nm (red) class 2 acc. DIN EN : 2- / Class 2 (IEC 6825-) Class II (FD) Protection class sensor: IP 65 / controller: IP 5 Temperature stability.% FSO/ C... 5 C C digital RS 85 / 687.5kaud Sensor cable (separate) 2VDC (±%), max. 5m standard: 2m (integrated) controller with aluminium housing IP5 functions: auto zero / signal averaging dimensions (mm): 3 x 5 x 52 - without mounting clips FSO = Full scale output ll specifications apply for a diffusely reflecting matt white ceramic target = Start of measuring M = Mid E = End of measuring

20 2 Measurement of an object towards projection screen optoncdt 7Z M2 x M3 3x ø3 M M ( in mm, not to scale) Mounting holes M (mm deep); aligning pin ø 3mm (2mm high) Model ILD7Z- Measuring (diffuse reflexion) Measuring (mirror reflexion) mm 5mm Start of measuring mm ) Mid 2mm ) End of measuring 25mm ) Linearity Resolution (at 2.5kHz without averaging) veraging ±.% FSO.5μm 2.5kHz,.25kHz/ 625Hz/ 32.5Hz (adjustable) median, recursive, gliding (switchable) semiconductor laser <mw, 67nm (red) Laser safety class class 2 IEC : 2- Connector Housing dimensions (mm) Temperature stability (zero point) Protection class (IEC ) (IEC ) Weight measurements switching outputs : 2μm; M: 5μm; E: 2μm,lx 35cm integrated cable wih -pin. circular connector 29 x 6.5 x 5.5mm.% FSO/ C C +5 C, dry -2 C...7 C, dry IP2 2g/ 2 5Hz g/ 6ms selectable:... 2m /... V / RS 22 / US x error or 2 x limit (configurable) 3VDC, m 5g (with connector cable and connector) ) Related to the bottom edge of the sensor housing

21 2 Measurement of an object towards projection screen optoncdt 7Z- projection lens transmitter receiver The sensor ILD7Z- is designed for displacement measurement in direct reflection (mirror reflection). The sensor consists of a massive housing for the transmitter and the receiver including sheet covering. There is a free space for the projection lens between the transmitter (laser diode) and the receiver. The complete measurement of mm can only be achieved in the case of diffuse reflection. In the case of reflective targets a reduced measurement of 5mm (± 2.5mm related to the offset distance) applies. dvantage - High measuring rate for fast position detection - High measuring accuracy and resolution - Direct measurement against the relevant place of positioning - djustable measuring rate - Switchable filter functions Pin Description colour 5 +U supply voltage (... 3VDC) red 6 GND system for power supply and switching signals (Laser on/off, Zero, Limits) black 3 analog output current... 2m or voltage... V coaxial inner conductor, white GND reference potential for analog output coaxial shield 9 Laser on/off switching input Laser on/off red-blue Zero switching input Zero white-green 8 switching output error exit or limit value output grey-pink 7 switching output 2 limit value output violett Sync + Sync - Tx + Tx - Rx + Rx - symmetrical synchronous-output (Master) or input (Slave) RS22 - output (symmetric) RS22 - input (symmetric) blue pink green brown grey yellow

22 High performance sensors made by Micro-Epsilon Sensors and systems for displacement and position Sensors and measurement devices for non-contact temperature measurement 2D/3D profile sensors (laser scanner) Measurement and inspection systems for quality assurance Optical micrometers, fiber optic sensors and optical fibers Color recognition sensors, LED analyzers and color online spectrometer Modifications reserved / Y SGO MICRO-EPSILON Headquarters Koenigbacher Str. 996 Ortenburg / Germany Tel. +9 () 852 / 68- Fax +9 () 852 / 68-9 info@micro-epsilon.com