Nmark AGV-HP. High Accuracy, Thermally Stable Galvo Scanner

Transcription

1 Nmark AGV-HP High Accuracy, Thermally Stable Galvo Scanner Highest accuracy scanner available attains single-digit, micron-level accuracy over the field of view Optical feedback technology significantly improves thermal stability Industry-best resolution of >24 bits when used with Aerotech s Nmark CLS controller Wide range of apertures and focal lengths Many choices of mirror surface treatments for a variety of laser wavelengths The Ultimate in Accuracy and Stability The highly repeatable and thermally stable feedback sensors used on the AGV-HP scanner systems can be calibrated down to single-digit, micron-level accuracy over the field of view (see figure below). With the extremely low thermal gain drift performance of the position transducers, complex, high-density laser machining applications that take long periods of time to complete will maintain consistent micron-level feature placement accuracy over the lifetime of the process. Likewise, high throughput applications will maintain consistent part-to-part quality without having to re-calibrate between parts. For the highest level of thermal stability, the AGV-HP scanners can be equipped with water cooling to stabilize the operating AGV-HP galvo scanner offers micron-level accuracy over the field of view. temperature of the device under varying loads, changes in ambient temperature or beam clipping on the input aperture. Real-Time Process Visibility The location of the AGV-HP mirrors can be captured and analyzed in real time. With direct access to the positions of the scanner the user no longer has to program delay parameters to compensate for lag and tracking errors in the servo system. The process can be optimized prior to marking the part, saving time and reducing material waste. The state of the laser can also be controlled based on inposition and velocity criteria, further reducing programming complexity. Advanced Programming Features The AGV-HP utilizes all of Aerotech s advanced motion and PSO (Position Synchronized Output) capabilities that have been developed for traditional servo-based laser processing applications. Contouring functions such as Acceleration Limiting can be used to automatically reduce speeds in tight corners or small radii to minimize overshoot. The laser can be triggered based on the position feedback of the mirrors with PSO to ensure consistent spot overlap as the scanner changes speed. Aerotech s Infinite Field of View (IFOV TM ) function seamlessly combines servo and scanner motion to extend the marking capability of the scanner across the entire travel of the servo stages, eliminating stitching errors that can occur in a more traditional move-expose-repeat process. Nmark AGV-HP provides industry-best micron-level 2D accuracy over the entire field of view. Design Choices The AGV-HP family is available with 10,, 20, and 30 mm input apertures and can be equipped with an F-Theta or telecentric lens directly from Aerotech. Users can also acquire the focusing optic directly from a trusted supplier with Aerotech supplying a spacer ring to ensure that back reflections through the optic do not damage the scanner mirrors. Mirror coatings for a wide range of UV, visible, IR and CO2 wavelengths are supported. Coatings optimized for ultra-fast lasers are also available. 1

2 Nmark AGV-HP SPECIFICATIONS Mechanical Specifications AGV-10HP AGV-HP AGV-20HP AGV-30HP Beam Aperture 10 mm mm 20 mm 30 mm Maximum Scan Angle ±20 Beam Displacement 13.0 mm 18.0 mm.1 mm 35.7 mm Feedback Resolution µrad Repeatability (1)(2) 2 µrad Dither (3) 0.2 µrad rms Non-Linearity <0.01% Gain Error 0.1 mrad Offset Drift (4) 20 µrad/ C Thermal Drift Gain Drift (4) 1 ppm/ C Galvanometer Nmark AGV-HP Long-Term Offset Drift (2)(4) 10 µrad/12 hrs Small Angle Response Time (5) 400 µs 800 µs Marking Speed (6) 3 m/s 2.5 m/s 1.5 m/s 0.9 m/s Positioning Speed (6) 12.0 m/s 9.5 m/s 4.5 m/s 3.0 m/s Tracking Error (7) 0 µs Operating Temperature ± 10 C Mass 4.0 kg 4.3 kg 5.0 kg 5.8 kg Material Aluminum (Black Anodize and Blue Paint) MTBF (Mean Time Between Failure) 20,000 Hours Notes: 1. Uni-directional; 3-sigma from mean position. 2. After initial 4 hour warm-up, ambient temperature variation <0.5 C. 3. Without -AC air cooling option. 4. Measured with galvo motors mounted in scan head mechanical step, settling to within of final position. 6. Typical performance with f = 160 mm F-Theta objective. 7. In traditional scanning systems the tracking error is used to set the delays between laser pulses in order to compensate for the lag between command and response. The Nmark CLS features Position Synchronized Output (PSO) capability that permits laser pulse commands to be tied directly to the position feedback of the galvo motors, thus providing laser scanner control with 0 (or near 0) tracking error. 8. All angles are optical unless otherwise noted. 9. All specifications are per axis unless otherwise noted. Electrical Specifications AGV-10HP AGV-HP AGV-20HP AGV-30HP Drive System Feedback Maximum Bus Voltage Limit Switches Home Switch Brushless Direct-Drive Galvano Motor Noncontact Rotary Encoder ±40 VDC Software Limits Only At Center Mirror Specifications (1) Wavelength 355 nm 532 nm 1064 nm 9.4 µm (2) 10.6 µm Substrate Beryllium Coating Dielectric Reflectance >99% Flatness Wavelength of Use AGV-10HP 120 W (3) 120 W (3) 120 W (3) 60 W (3) 0 W (3) Maximum CW Laser Power (3) AGV-HP 180 W (3) 180 W (3) 4 W (3) 90 W (3) 2 W (3) AGV-20HP 600 W (3) 600 W (3) 00 W (3) 300 W (3) 7 W (3) AGV-30HP 900 W (3) 900 W (3) 22 W (3) 4 W (3) 11 W (3) Pulsed (8 ns) 2 J/cm 2 4 J/cm 2 10 J/cm Damage Threshold of Coating Pulsed (120 ns) J/cm 2 2 J/cm 2 Pulsed (3 fs) 0.04 J/cm J/cm J/cm CW 0.1 MW/cm MW/cm 2 1 MW/cm 2 2 kw/cm 2 5 kw/cm 2 Notes: 1. Partial listing of supported wavelengths. Please consult Aerotech for a complete list of available mirrors. 2. Values shown use the same mirror coating for both 10.6 µm and 9.4 µm wavelengths. A higher power 9.4 µm optimized coating is available upon request. Consult Aerotech for pricing and availability. 3. With -AC air cooling option; maximum average laser power is 1/3 this value without air cooling. 2

3 AGV-10HP-RSE FOR SQR ( ) OPTICS CONFIGURATION

4 AGV-10HP-LSE COMPRESSION FITTING Galvanometer Nmark AGV-HP 7 11 FOR SQR ( ) OPTICS CONFIGURATION

5 AGV-HP-RSE FOR 71 SQR ( ) OPTICS CONFIGURATION

6 AGV-HP-LSE Galvanometer Nmark AGV-HP FOR SQR ( ) OPTICS CONFIGURATION

7 AGV-20HP-RSE FOR ( ) OPTICS CONFIGURATION

8 AGV-20HP-LSE Galvanometer Nmark AGV-HP FOR ( ) OPTICS CONFIGURATION

9 AGV-30HP-RSE FOR SQR (8) PLACES ( ) OPTICS CONFIGURATION C'BORE AS SHOWN () PLACES

10 AGV-30HP-LSE Galvanometer Nmark AGV-HP 31 FOR SQR (8) PLACES ( ) OPTICS CONFIGURATION

11 Nmark AGV-HP ORDERING INFORMATION AGV-HP Series Galvanometer Scanner AGV-HP -RSE MP -NC Series Beam Entry Orientation Optics Configuration Mounting Option Cooling Options AGV-10HP AGV-HP AGV-20HP AGV-30HP -RSE -LSE -CO2 -DS /532/ /5/ T CO2-100T T T T T T T -CO T T T T T T CO MP -NC -AC -WC -AC-WC AGV-HP Series Galvanometer Scanner AGV-10HP 2-axis galvanometer scanner with 10 mm diameter beam aperture and integral high-precision feedback AGV-HP 2-axis galvanometer scanner with mm diameter beam aperture and integral high-precision feedback AGV-20HP 2-axis galvanometer scanner with 20 mm diameter beam aperture and integral high-precision feedback AGV-30HP 2-axis galvanometer scanner with 30 mm diameter beam aperture and integral high-precision feedback Beam Entry Orientation -RSE Right-side laser beam entry (standard) -LSE Left-side laser beam entry Optics Configuration (Partial listing. Please consult Aerotech for other supported wavelengths and lens combinations.) -CO2 Mirrors for 10.6 micron wavelength; no focal lens -DS Durable silver coating; 4 nm-10.6 µm wavelength; limited operating power; no focal lens (AGV-10HP, -HP, and -20HP -52 Mirrors for 52 nm wavelength; no focal lens (AGV-10HP, -HP, and -20HP Mirrors for 1064 nm wavelength; no focal lens Mirrors for 1030 nm wavelength; no focal lens (AGV-10HP, -HP, and -20HP -532 Mirrors for 532 nm wavelength; no focal lens -5 Mirrors for 5 nm wavelength; no focal lens (AGV-10HP, -HP, and -20HP -355 Mirrors for 355 nm wavelength; no focal lens -1064/532/355 Mirrors for 1064 nm, 532 nm, and 355 nm wavelengths; multi-band dielectric coating; limited operating power; no focal lens (AGV-10HP and -HP -1030/5/343 Mirrors for 1030 nm, 5 nm, and 343 nm wavelengths; multi-band dielectric coating; limited operating power; no focal lens (AGV-10HP and -HP 11

12 Nmark AGV-HP ORDERING INFORMATION T Mirrors for 355 nm wavelength; telecentric 53 mm focal length lens with 17.2 mm x 17.2 mm typical field size (AGV-10HP and -HP only; 10 mm or smaller entrance beam diameter recommended) Mirrors for 1064 nm wavelength; standard 100 mm focal lens with 48 mm x 48 mm typical field size (AGV-10HP and -HP Mirrors for 532 nm wavelength; standard 100 mm focal lens with 46 mm x 46 mm typical field size (AGV-10HP Mirrors for 355 nm wavelength; standard 100 mm focal lens with 54 mm x 54 mm typical field size (AGV-10HP only; 6 mm or smaller entrance beam diameter recommended) -CO2-100T Mirrors for 10.6 micron wavelength; telecentric 100 mm focal lens with mm x mm field size for AGV- HP and 40 mm x 40 mm field size for AGV-20HP T Mirrors for 52 nm wavelength; telecentric 100 mm focal lens with 55 mm x 55 mm field size for AGV-10HP and mm x mm for AGV-HP T Mirrors for 1064 nm wavelength; telecentric 100 mm focal lens with 70 mm x 70 mm typical field size (AGV- 10HP, -HP, and -20HP T Mirrors for 1030 nm wavelength; telecentric 100 mm focal lens with 35 mm x 35 mm field size for AGV-10HP and 30 mm x 30 mm field size for AGV-HP T Mirrors for 532 nm wavelength; telecentric 100 mm focal lens with 64 mm x 64 mm typical field size (AGV-10HP and -HP T Mirrors for 5 nm wavelength; telecentric 100 mm focal lens with 35 mm x 35 mm field size for AGV-10HP and 30 mm x 30 mm field size for AGV-HP T Mirrors for 355 nm wavelength; telecentric 100 mm focal lens with 51 mm x 51 mm typical field size (AGV-10HP -CO2-160 Mirrors for 10.6 micron wavelength; standard 160 mm focal lens with 80 mm x 80 mm field size for AGV-HP and 75 mm x 75 mm field size for AGV-20HP Mirrors for 1064 nm wavelength; standard 160 mm focal lens with 79 mm x 79 mm typical field size (AGV-10HP and -HP Mirrors for 532 nm wavelength; standard 160 mm focal lens with 78 mm x 78 mm typical field size (AGV-10HP and -HP Mirrors for 355 nm wavelength; standard 160 mm focal lens with 79 mm x 79 mm typical field size (AGV-10HP Mirrors for 1064 nm wavelength; standard 163 mm focal lens with 77 mm x 77 mm typical field size (AGV-20HP T T T T T T Mirrors for 52 nm wavelength; telecentric 163 mm focal lens with 90 mm x 90 mm field size for AGV-10HP and 87 mm x 87 mm for AGV-HP Mirrors for 1064 nm wavelength; telecentric 163 mm focal lens with 87 mm x 87 mm typical field size (AGV- 10HP, -HP, and -20HP Mirrors for 1030 nm wavelength; telecentric 163 mm focal lens with 87 mm x 87 mm field size for AGV-10HP and 85 mm x 85 mm field size for AGV-HP Mirrors for 532 nm wavelength; telecentric 163 mm focal lens with 80 mm x 80 mm typical field size (AGV-10HP and -HP Mirrors for 5 nm wavelength; telecentric 163 mm focal lens with 80 mm x 80 mm field size for AGV-10HP and 70 mm x 70 mm field size for AGV-HP Mirrors for 355 nm wavelength; telecentric 163 mm focal lens with 80 mm x 80 mm typical field size for AGV-10HP and 74 mm x 74 mm for AGV-HP Mirrors for 1064 nm wavelength; standard 170 mm focal lens with 111 mm x 111 mm typical field size (AGV-HP Mirrors for 532 nm wavelength; standard 170 mm focal lens with 103 mm x 103 mm typical field size (AGV-HP Mirrors for 1064 nm wavelength; standard 200 mm focal lens with 70 mm x 70 mm typical field size (AGV-30HP -CO2-5 Mirrors for 10.6 micron wavelength; standard 5 mm focal lens with 160 mm x 160 mm field size for AGV- 20HP and 105 mm x 105 mm field size for AGV-30HP Mirrors for 1064 nm wavelength; standard 5 mm focal lens with 5 mm x 5 mm field size for AGV- 20HP and 91 mm x 91 mm field size for AGV-30HP Mirrors for 532 nm wavelength; standard 5 mm focal lens with 8 mm x 8 mm typical field size (AGV-20HP Mirrors for 355 nm wavelength; standard 5 mm focal lens with 1 mm x 1 mm typical field size (AGV-10HP and -HP Mirrors for 1064 nm wavelength; standard 0 mm focal lens with up to 2 mm x 2 mm field size (AGV-30HP Notes: 1. Field size of focal lens is dependent on entrance beam diameter and scanner model. Consult factory for the maximum field size achievable. 2. Additional optics configurations are available upon request. Consult factory for range of obtainable mirrors and focal lenses. Galvanometer Nmark AGV-HP 12

13 Nmark AGV-HP ORDERING INFORMATION Mounting Option -MP Cooling Options -NC -AC -WC -AC-WC Optional mounting plate with integral flanges for bridge/gantry installation No air cooling of mirrors and no water cooling of beam entrance plate and motors (standard) Air cooling of mirrors for high-powered laser applications Water cooling of beam entrance plate and motors for high-powered laser, high duty cycle and thermal drift intolerant applications Air cooling of mirrors and water cooling of beam entrance plate and motors for high-powered laser, high duty cycle and thermal drift intolerant applications Lens Mounting Adapters (order as separate line item) LM10HP-XXX Lens mount adapter for AGV-10HP and AGV-10HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request LMHP-XXX Lens mount adapter for AGV-HP and AGV-HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request LM20HP-XXX Lens mount adapter for AGV-20HP and AGV-20HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request LM30HP-XXX Lens mount adapter for AGV-30HP and AGV-30HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request 13