Atlantic. Industrial High Power Picosecond Lasers. features

Transcription

1 Industrial High Picosecond Lasers lasers have been designed as a versatile tool for a variety of industrial material processing applications. They are compact, OEM rugged, with up to 6 W output power at 164 nm. Featuring short pulse duration lasers offers minimized thermal damage to the material, what is becoming more and more important in wide range of industries: photovoltaics, electronics, biomedicine, automotive. Innovative design, employing fiber based oscillator ensured excellent output beam parameters: M²<1.3 with pulse energy fluctuations < 1 %. All optical components are placed into sealed monolithic block thus ensuring reliable 24/7 operation. High, up to 1 MHz repetition rate, combined with low maintenance requirements establishes this laser as good choice for industrial, high throughput material processing systems, requiring speed and precision. Optical components are installed in a robust, precisely machined monolithic aluminum block, which could be used as a separate module for customized solutions. The system is sealed to provide long term stable operation in manufacturing environments. Designed for robust, low maintenance operation, the offers maximum reliability due to an optimized layout, PC controlled operation, a built-in self-diagnostics system and advanced status reporting. Superior beam quality allows easy focusing of the laser beam into the smallest spot size at various working distances and enables processing of practically any material. The has been designed as a low-maintenancecosts solution. All replacement of consumables can be performed at user facilities by trained technicians. features Up to 6 W at 164 nm output power Up to 1 MHz repetition rate Up to 2 µj pulse energy Short pulse duration 1 ps Excellent beam quality M²<1.3 Individual pulse control Smart triggering for synchronous operation with polygon scanner Compact, sealed and rugged design Low maintenance Single-phase powering No external cooling water APPLICATIONS Drilling Cutting Patterning Structuring Ablation Micromachining Savanoriu AV. 237, lt-23 Vilnius, Lithuania tel fax sales@ekspla.com 5

2 Specifications Wavelength 164 nm Repetition rate 2 khz to 1 khz (tunable within full range) 3 khz to 1 khz (fixed at single frequency) Average output power at 2 khz > 2 W > 12 W > 6 W Pulse energy at 2 khz > 1 µj > 6 µj > 3 µj Pulse energy contrast > 1 : 1 > 5 : 1 > 1 : 1 fluctuations < 2. % < 2.5 % < 3. % Pulse energy stability at 2 khz (Std. dev.) < 1. % < 2. % < 2.5 % 1 ± 3 ps Polarization linear, vertical 1 : 1 Elipticity >.85 Beam divergence (full angle) < 1.5 mrad < 1. mrad < 1. mrad < 5 µrad at 5 cm distance from laser aperture 1.5 ±.3 mm 1.3 ±.3 mm 1.3 ±.3 mm 28/23 V AC selectable, single phase 5 or 6 Hz < 2.8 kw 1 8 % (non-condensing) Laser head size (W H L) mm mm supply unit size (W H L) mm according EN6825-1, W nm are measured at 164 nm nm Fundamental wavelength and lower harmonics are also available with full specifications. Automatically switched outputs. Pulse repetition rate can be factory pre-set to single requested frequency or tunable in all specified range. Lower pulse repetition rates are available using pulse gating system (included in standard configuration). rates are 2 µj at 164 nm, 12 µj at, 75 µj at. Measured at 164 nm fundamental wavelength. Defined as short term < 2 min beam angular stability Nd:YAG 164 nm,, Max. 2 W, pulse 1 ps 6 Savanoriu AV. 237, lt-23 Vilnius, Lithuania tel fax sales@ekspla.com

3 Specifications Wavelength 164 nm Repetition rate 3 khz to 1 khz (tunable within full range) 2 khz to 1 khz (fixed at single frequency) Average output power at 3 khz > 4 W > 2 W > 12 W Pulse energy at 3 khz > 13 µj > 7 µj > 4 µj Pulse energy contrast > 1 : 1 > 5 : 1 > 1 : 1 fluctuations < 2. % < 2.5 % < 3. % Pulse energy stability at 3 khz (Std. dev.) < 1. % < 2. % < 2.5 % 1 ± 3 ps Polarization linear, vertical 1 : 1 Elipticity >.85 Beam divergence (full angle) < 1.5 mrad < 1. mrad < 1. mrad at 5 cm distance from laser aperture < 5 µrad 1.5 ±.3 mm 1.4 ±.3 mm 1.4 ±.3 mm 28/23 V AC selectable, single phase 5 or 6 Hz < 3.1 kw 1 8 % (non-condensing) Laser head size (W H L) mm mm supply unit size (W H L) according EN mm, W nm are measured at 164 nm nm Fundamental wavelength and lower harmonics are also available with full specifications. Automatically switched outputs. Pulse repetition rate can be factory pre-set to single requested frequency or tunable in all specified range. Lower pulse repetition rates are available using pulse gating system (included in standard configuration). rates are 2 µj at 164 nm, 1 µj at, 6 µj at. Measured at 164 nm fundamental wavelength. Defined as short term < 2 min. beam angular stability. Nd:YAG 164 nm,, Max. 4 W, pulse 1 ps Savanoriu AV. 237, lt-23 Vilnius, Lithuania tel fax sales@ekspla.com 7

4 Specifications Wavelength 164 nm Repetition rate 4 khz to 1 khz (tunable within full range) 3 khz to 1 khz (fixed at single frequency) Average output power at 4 khz > 6 W > 35 W > 2 W Pulse energy at 4 khz > µj > 85 µj > 5 µj Pulse energy contrast > 1 : 1 > 5 : 1 > 1 : 1 fluctuations < 2. % < 2.5 % < 3. % Pulse energy stability at 4 khz (Std. dev.) < 1. % < 2. % < 2.5 % 1 ± 3 ps Polarization linear, vertical 1 : 1 Elipticity >.85 Beam divergence (full angle) < 1.5 mrad < 1. mrad < 1. mrad at 5 cm distance from laser aperture < 5 µrad 1.5 ±.3 mm 28/23 V AC selectable, single phase 5 or 6 Hz < 3.5 kw 1 8 % (non-condensing) Laser head size (W H L) mm mm supply unit size (W H L) according EN mm, W nm are measured at 164 nm nm Fundamental wavelength and lower harmonics are also available with full specifications. Automatically switched outputs. Pulse repetition rate can be factory pre-set to single requested frequency or tunable in all specified range. Lower pulse repetition rates are available using pulse gating system (included in standard configuration). rates are 2 µj at 164 nm, 12 µj at, 75 µj at. Measured at 164 nm fundamental wavelength. Defined as short term < 2 min. beam angular stability. Nd:YAG 164 nm,, Max. 6 W, pulse 1 ps 8 Savanoriu AV. 237, lt-23 Vilnius, Lithuania tel fax sales@ekspla.com

5 Laser Head IMAGE Typical view of 2-164, 4-164, Laser Head Outline Drawings max Output 37 2 Side view panel Back view Umbilical cord to power supply Minimal curvature radius of umbilical mm , 4-164, laser head outline Side view Back view 27 max Output 1H Output 2H Output 3H Umbilical cord to power supply Minimal curvature radius of umbilical mm panel 2-532/355, 4-532/355, 6-532/355 laser head outline Supply Outline Drawings air inlet minimal curvature radius of umbilical mm air outlet air inlet /532/355, 4-164/532/355, 6-164/532/355 power supply outline 852 Left side view air outlet Rear view air flow and Savanoriu AV. 237, lt-23 Vilnius, Lithuania tel fax sales@ekspla.com 9