Nmark AGV-HPO. High Accuracy, Open Frame, Thermally Stable Galvo Scanner. Highest accuracy scanner available attains singledigit,
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1 Nmark AGV-HPO Galvanometer Nmark AGV-HPO High Accuracy, Open Frame, Thermally Stable Galvo Scanner Highest accuracy scanner available attains singledigit, micron-level accuracy over the field of view Optical feedback technology significantly improves thermal stability Industry-best resolution of >24 bits when used with Aerotech s Nmark GCL controller AGV-HPO galvo scanner offers micron-level accuracy over the field of view. 1 Wide range of apertures and focal lengths, and many choices of mirror surface treatments for a variety of laser wavelengths Open-frame design reduces cost and allows for more flexible laser entry Right side and left side aperture options for side-by-side parallel processing The Ultimate in Accuracy and Stability The highly repeatable and thermally stable feedback sensors used on the AGV-HPO scanner systems can be calibrated down to single-digit, micron-level accuracy over the field of view (see figure below). With the extremely low thermal gain drift performance of the position transducers, complex, high-density laser machining applications that take long periods of time to complete will maintain consistent micron-level feature placement accuracy over the lifetime of the process. Likewise, high throughput applications will maintain consistent part-to-part quality without having to re-calibrate between parts. Integration Flexibility Most scanner control interfaces are on the same surface as the laser input aperture which can create interference problems if the Nmark AGV-HPO provides industry-best micron-level 2D accuracy over the entire field of view. laser beam path approaches the scanner from the top. The AGV- HPO control connections consist of two mm cables terminated in 25-pin D-style connectors. These cables can be oriented in any direction and terminated on the machine to ensure there is no interference with beam delivery. The AGV-HPO is also available with right-side and left-side input apertures for mirror image machine builds or side-by-side scanner mounting with a single laser beam split to source both scanners. Real-Time Process Visibility The location of the AGV mirrors can be captured and analyzed in real time. With direct access to the positions of the scanner, the user no longer has to program delay parameters to compensate for lag and tracking errors in the servo system. The process can be optimized prior to marking the part, saving time and reducing material waste. The state of the laser can also be controlled based on in-position and velocity criteria, further reducing programming complexity. Advanced Programming Features The AGV utilizes all of Aerotech s advanced motion and PSO (Position Synchronized Output) capabilities that have been developed for traditional servo-based laser processing applications. Contouring functions such as Acceleration Limiting can be used to automatically reduce speeds in tight corners or small radii to minimize overshoot. The laser can be triggered based on the position feedback of the mirrors with PSO to ensure consistent spot overlap as the scanner changes speed. Aerotech s Infinite Field of View (IFOV) function seamlessly combines servo and scanner motion to extend the marking capability of the scanner across the entire travel of the servo stages, eliminating stitching errors that can occur in a more traditional move-exposerepeat process. Design Choices The AGV family is available with 10, 14,, and 30 mm input apertures and can be equipped with an F-Theta or telecentric lens directly from Aerotech. Users can also acquire the focusing optic directly from a trusted supplier with Aerotech supplying a spacer ring to ensure that back reflections through the optic do not damage the scanner mirrors. Mirror coatings for a wide range of UV, visible, IR and CO2 wavelengths are supported.
2 Nmark AGV-HPO SPECIFICATIONS Mechanical Specifications AGV 10HPO AGV 14HPO AGV HPO AGV 30HPO Optical Performance Beam Aperture 10 mm 14 mm mm 30 mm Maximum Scan Angle ± Beam Displacement 13.0 mm 18.0 mm 25.1 mm 35.7 mm Feedback Resolution µrad (26 bit) Dither (Min. Incremental Motion) 0.2 µrad rms Accuracy 50 µrad pk pk Repeatability (2) 0.4 µrad rms Gain Error 0.05 mrad Non Linearity 0.005% Dynamic Performance Tracking Error 0 µsec Galvanometer Nmark AGV-HPO Peak Acceleration (3,4) 288,000 m/s 2 224,000 m/s 2 80,000 m/s 2 56,000 m/s 2 Continuous Acceleration (3,5) 75,0 m/s 2 56,000 m/s 2,800 m/s 2 19,0 m/s 2 Positioning Speed (3) 75 m/s 75 m/s 50 m/s m/s Marking Speed (3, 6, 7) 5 m/s 5 m/s 5 m/s 5 m/s Jump & Settle Time, 1 mm Move (3,8) 270 µsec 270 µsec 450 µsec 700 µsec Stability Offset 10 µrad/12 hrs Long Term Drift (2) 15 µrad/24 hrs Gain 10 ppm/24 hrs Offset 10 µrad/ C Thermal Drift Gain 1 ppm/ C Mechanical Specifications Weight 2.3 kg 2.4 kg 2.7 kg 3.1 kg Material Aluminum (Black Anodize and Blue Paint) MTBF (Mean Time Between Failure),000 Hours Notes: 1. All angles are optical unless otherwise specified. 2. After initial 3 hour warm up, ambient temperature variation <±0.5 C. 3. Typical performance with f = 1 mm F Theta objective. 4. Based on maximum rated current of the motor. 5. Based on rated rms current of the motor with WC water cooling option; maximum continuous acceleration is 70% of this value without water cooling. 6. Achievable with <1% velocity error over continuous velocity portion of move. 7. Marking speed is dependent on allowable tracking error. 8. Settled to within 1% of move distance. 9. All specifications are per axis unless otherwise noted. Electrical Specifications AGV 10HPO AGV 14HPO AGV HPO AGV 30HPO Drive System Feedback Maximum Bus Voltage Limit Switches Home Switch Brushless Direct Drive Galvano Motor Noncontact Rotary Encoder ±40 VDC Software Limits Only At Center 2
3 Nmark AGV-HPO Galvanometer AGV-10HPO-LSE FOR SQR ( ) OPTICS CONFIGURATION
4 AGV-10HPO-RSE Galvanometer Nmark AGV-HPO FOR SQR ( ) OPTICS CONFIGURATION
5 Nmark AGV-HPO Galvanometer AGV-14HPO-LSE FOR SQR ( ) OPTICS CONFIGURATION
6 AGV-14HPO-RSE Galvanometer Nmark AGV-HPO FOR SQR ( ) OPTICS CONFIGURATION
7 Nmark AGV-HPO Galvanometer AGV-HPO-LSE FOR ( ) OPTICS CONFIGURATION
8 AGV-HPO-RSE Galvanometer Nmark AGV-HPO FOR ( ) OPTICS CONFIGURATION
9 Nmark AGV-HPO Galvanometer AGV-30HPO-LSE FOR SQR. 90 (8) PLACES ( ) OPTICS CONFIGURATION
10 AGV-30HPO-RSE Galvanometer Nmark AGV-HPO FOR SQR. (8) PLACES ( ) OPTICS CONFIGURATION
11 Nmark AGV-HPO ORDERING INFORMATION Ordering Example Nmark AGV-HPO Galvanometer AGV 14HPO RSE Series Beam Entry Orientation Optic Configuration AGV 10HPO AGV 14HPO AGV HPO AGV 30HPO RSE LSE CO2 DS /532/ /515/ T T CO2 100T T T T T T T CO T T T T T T T CO AGV-HPO Series Galvanometer Scanner AGV-10HPO 2-axis open-frame galvanometer scanner with 10 mm diameter beam aperture and integral high-precision feedback AGV-14HPO 2-axis open-frame galvanometer scanner with 14 mm diameter beam aperture and integral high-precision feedback AGV-HPO 2-axis open frame galvanometer scanner with mm diameter beam aperture and integral high-precision feedback AGV-30HPO 2-axis open frame galvanometer scanner with 30 mm diameter beam aperture and integral high-precision feedback Beam Entry Orientation -RSE Right-side laser beam entry (standard) -LSE Left-side laser beam entry 11
12 Nmark AGV-HPO ORDERING INFORMATION Optics Configuration (Partial listing. Please consult Aerotech for other supported wavelengths and lens combinations.) No Lens Options, F Theta Not Included Option AGV 10HPO AGV 14HPO AGV HPO AGV 30HPO CO2 Mirrors for 10.6 µm wavelength; no focal lens DS Durable silver coated mirrors; 450 nm 10.6 µm wavelength; limited operating power; no focal lens 1552 Mirrors for 1552 nm wavelength; no focal lens 1064 Mirrors for 1064 nm wavelength; no focal lens 1030 Mirrors for 1030 nm wavelength; no focal lens 532 Mirrors for 532 nm wavelength; no focal lens 515 Mirrors for 515 nm wavelength; no focal lens 355 Mirrors for 355 nm wavelength; no focal lens 343 Mirrors for 343 nm wavelength; no focal lens 1064/532/355 Mirrors for 1064, 532, and 355 nm wavelengths; no focal lens 1030/515/343 Mirrors for 1030, 515, and 343 nm wavelengths; no focal lens Notes: 1. Custom coatings available. Contact factory for details. 2. DS option only available with AGV 10HPO RSE option not available with AGV 30HPO LSE and 1030/515/343 options not available with LSE. 5. AGV HPO LSE only available with CO2, 1064, and 532 options. Galvanometer Nmark AGV-HPO F Theta Included Options (1,2) T Option AGV 10HPO AGV 14HPO AGV HPO AGV 30HPO 53 mm Focal Length 17.2 x 17.2 mm FOV T (3) 66.9 x 66.9 mm FOV Non (3) 57.2 x 57.2 mm FOV Non 53 mm Focal Length 8.2 x 8.2 mm FOV 343 nm Wavelength 53 mm Focal Length 8.0 x 8.0 mm FOV 37.0 x 37.0 mm FOV Non CO2 100T T T (3) T T (3) T 1552 nm Wavelength 55.2 x 55.2 mm FOV 69.8 x 69.8 mm FOV 1030 nm Wavelength.6 x.6 mm FOV 64.6 x 64.6 mm FOV 515 nm Wavelength.4 x.4 mm FOV 1552 nm Wavelength 49.4 x 49.4 mm FOV 61.6 x 61.6 mm FOV 1030 nm Wavelength 34.8 x 34.8 mm FOV 57.0 x 57.0 mm FOV 515 nm Wavelength 34.6 x 34.6 mm FOV 10.6 µm Wavelength 38.6 x 38.6 mm FOV 44.0 x 44.0 mm FOV 12
13 Nmark AGV-HPO ORDERING INFORMATION Nmark AGV-HPO Galvanometer F Theta Included Options (1,2) (Continued) T Option AGV 10HPO AGV 14HPO AGV HPO AGV 30HPO 51.6 x 51.6 mm FOV CO mm Focal Length (3) x mm FOV Non mm Focal Length (3) x mm FOV Non mm Focal Length 92.4 x 92.4 mm FOV Non 1 mm Focal Length 78.4 x 78.4 mm FOV Non 1 mm Focal Length 77.2 X 77.2 mm FOV Non (3) T T T T T T 1552 nm Wavelength 93.8 x 93.8 mm FOV 92.0 x 92.0 mm FOV 1030 nm Wavelength 92.0 x 92.0 mm FOV 79.6 x 79.6 mm FOV 515 nm Wavelength 79.2 x 79.2 mm FOV 80.8 x 80.8 mm FOV T (3) (3) 10.6 µm Wavelength 1 mm Focal Length 76.0 x 76.0 mm FOV Non 1552 nm Wavelength 87.2 x 87.2 mm FOV 85.2 x 85.2 mm FOV 1030 nm Wavelength 85.0 x 85.0 mm FOV 66.0 x 66.0 mm FOV 515 nm Wavelength 65.8 x 65.8 mm FOV 74.6 x 74.6 mm FOV 343 nm Wavelength 74.0 x 74.0 mm FOV 170 mm Focal Length x mm FOV Non 170 mm Focal Length x mm FOV Non 72.4 x 72.4 mm FOV Non 71.6 x 71.6 mm FOV (3) CO µm Wavelength x mm FOV Non 0 mm Focal Length 68.0 x 68.0 mm FOV Non 10.6 µm Wavelength x mm FOV Non 13
14 Nmark AGV-HPO ORDERING INFORMATION F Theta Included Options (1,2) (Continued) Option AGV 10HPO AGV 14HPO AGV HPO AGV 30HPO (3) (3) x 143 mm FOV Non x mm FOV Non 343 nm Wavelength x mm FOV Non x mm FOV Non x mm FOV Non x 91.6 mm FOV Non 500 mm Focal Length x mm FOV Non Galvanometer Nmark AGV-HPO Notes: 1. Input beam diameter is assumed to be equal to scan head entrance aperture at 1/e 2 Gaussian profile. 2. Reported field size is minimum achievable based on zero beam vignetting. 3. F Theta lens is not recommended for use with short pulse lasers (ps and fs pulse durations). Please consult factory for lens options that are compatible with short pulse lasers. 4. Custom coatings available. Contact factory for details nm wavelength options not available with AGV 30HPO LSE nm wavelength options not available with LSE. Lens Mounting Adapters (order as separate line item) LM10HP-XXX Lens mount adapter for AGV-10HP and AGV-10HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request LM14HP-XXX Lens mount adapter for AGV-14HP and AGV-14HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request LMHP-XXX Lens mount adapter for AGV-HP and AGV-HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request LM30HP-XXX Lens mount adapter for AGV-30HP and AGV-30HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request 14
Nmark AGV-HP. High Accuracy, Thermally Stable Galvo Scanner
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