Non-contact conveyance is possible.

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1 Courtesy of CMA/Flodyne/Hydradyne Motion Control Hydraulic Pneumatic Electrical Mechanical (8) Cyclone Pad Non-contact conveyance is possible. Workpiece with uneven and/or viscous surface Solar battery cell Electrode line Substrate Workpiece sensitive to scars or suction traces Liquid crystal glass Film, Copper film, etc. Prevents deflection Thin workpiece Series XT661 Substrate Air layer Reflection prevention (viscous) film Workpiece with holes Note) Open hole ratio within 1% Porous workpiece Paper, Cardboard box, Lumber, etc. Supply port Working Principle Nozzle Negative pressure (vacuum part) Whirlwind flow Workpiece Air from the supply port is ejected from a nozzle on the cylindrical side to generate a whirlwind flow inside the cylinder and leading to the vacuum. (Cyclone effect.) Supply air is discharged to the atmosphere from between the suction surface and the workpiece. As a result, an air layer is generated between the cyclone pad and the workpiece, resulting in the workpiece being lifted without contact. Be sure to prepare a guide prior to use. For holding and positioning a workpiece, and for preventing collision between the workpiece and pad during lifting, provide a guide. See page for details. P-E7-8A

2 Courtesy of CMA/Flodyne/Hydradyne Motion Control Hydraulic Pneumatic Electrical Mechanical (8) Original groove-channel design (PAT.PEND) provides cyclone effect with larger suction area and more even pressure dispersion! 1 Pressure dispersion in height direction Lifting force % improved, Air consumption % reduced ( comparison with conventional SMC cyclone method with an outer size of 6 mm) Outer body diameter (mm) Lifting force N Air consumption l/min (ANR) Grease-free Pressure dispersion in diameter direction (Supply pressure. MPa) Cyclone Pad Large vacuum area, even pressure dispersion Conventional SMC cyclone method Small vacuum area, highervacuum in the central part

3 Courtesy of CMA/Flodyne/Hydradyne Motion Control Hydraulic Pneumatic Electrical Mechanical (8) XT661-2A XT661-6A XT661-1A Lifting Force XT661-A XT661-8A

4 Courtesy of CMA/Flodyne/Hydradyne Motion Control Hydraulic Pneumatic Electrical Mechanical (8) P Depth PL Air supply port 11.6 ød XT661 Model XT661-2-R (L) XT661--R (L) XT661-6-R (L) XT661-8-R (L) XT661-1-R (L) 2 x M Depth ML P M x.8 M x.8 M x.8 Rc1/8 Rc1/8 A Outer body diameter 2A 2 mm A mm 6A 6 mm 8A 8 mm 1A 1 mm PL R Direction of whirling air R Clockwise L Counterclockwise Outer body diameter (mm) Piping port size M x.8 Rc1/8 Fluid Air Operating pressure Proof pressure Ambient and operating temperature Grease.1 to. MPa.7 MPa to 6 C (with no condensation) Grease-free Air purification rating: JIS B (ISO873-1) Quality Degree,, 2 XT661-2-R (L) How to Order Specifications Dimensions M M2 x. M x.7 M x.7 M x.7 M x ML 3.2 P Depth PL Air supply port C ød (mm) D Cyclone Pad Series XT661 ø2, ø, ø6, ø8, ø1 XT661- -R (L) p.c.d. C x M Depth ML 3

5 Courtesy of CMA/Flodyne/Hydradyne Motion Control Hydraulic Pneumatic Electrical Mechanical (8) Guide Provide a guide in accordance with the application and/or configuration of a workpiece. q Holding/Positioning a Workpiece Due to non-contact, a workpiece may slide during conveyance. To hold the workpiece, provide a guide, etc. for the side of the workpiece. w Preventing Contact Depending on the operating conditions, the workpiece surface may contact the pad when lifted. To prevent contact, provide a guide to distance the workpiece. e Preventing Rotation 1) When using a single pad, the workpiece tends to rotate due to the cyclone effect. Provide a guide to prevent the workpiece from rotating. 2) When using more than one pad, use even numbered, clockwise or counterclockwise whirling pads. This can prevent the workpiece from rotating. Example of Guide Installation Workpiece Vacuum pad (Workpiece positioning) Guide Example of Vacuum Pad Application The cyclone pad can reduce the amount of surface contact while fixing the workpiece.

6 Courtesy of CMA/Flodyne/Hydradyne Motion Control Hydraulic Pneumatic Electrical Mechanical (8) Air Dryer / Series IDF Decreases the dew point of compressed air. Limits moisture generation which can lead to damage. Digital Flow Switch / Series PF2A Decreases the air consumption by flow control. Related Products SMC can provide all pneumatic equipment required for supplying air to the cyclone pad. Recommended pneumatic circuit Air Filter / Series AF 3 Eliminates solid foreign matters such as powder particles in the compressed air. Mist Separator / Series AFM Eliminates oil mist which is difficult to eliminate with an air filter. 2-Color Display Digital Flow Switch / Series PFM Regulator / Series AR/SRH Decreases the air consumption by setting to an appropriate pressure. 6 Digital Pressure Switch / Series ISE3 Remote Type Digital Pressure Switch / Series PSE 7 2 Port Valve / Series VCA-X1/LVA 8 Restrictor / Series AS-X21 Regulates to the appropriate air volume depending upon the installation condition. Decreases the air consumption. Oil-free (Seal material: PTFE coat treated) Akihabara UDX 1F, -1-1, Sotokanda, Chiyoda-ku, Tokyo 11-21, JAPAN Phone: Fax: URL 27 SMC Corporation All Rights Reserved PSE3 PSE AR 9 Clean Air Filter / Series SFD Built-in capillary element Nominal filtration rating:.1 µm Adopted hollow fiber elements with over 99.99% filtering efficiency don't contaminate workpieces. 1 VCA-X1 (Oil-free) SRH LVA Clean Air Module / Series LLB Modularizes clean equipment. Nominal filtration rating:.1 µm Wetted parts: Grease-free, Silicon-free Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-KS 1st printing LY printing LY 13KS Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Non-contact conveyance is possible.

Non-contact conveyance is possible. Cyclone Pad Non-contact conveyance is possible. Supply port Nozzle Workpiece with uneven and/or viscous surface Solar battery cell Whirlwind flow Air layer Electrode line Reflection prevention (viscous)

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