Company Profile & Product information

Transcription

1 Company Profile & Product information

2 About Us Foundation : February, 2000 Capital: JPY 15,000,000 Location: Daisho Bldg. 4F, Nishinakajima, Yodogawa-ku, Osaka JAPAN Main customer: Omron, Sharp, Sony, Toshiba, Panasonic, Mitsubishi, Rohm, Fujitsu, Renesas Technology Osaka University, Tohoku University, Tokyo University, Kyoto University, Nagoya University

3 History 2000 Feb. Foundation of Apollowave Corporation Aug. Development of Gyro Sensor Measurement System 2001 Jan. Development of Semi-Automatic wafer Prober Mar. Certified as SMBs Creation Act and promotion Company by Osaka pref. with R&D of vertical RF Probe Card. Apr. Set up of patent project room at Osaka Prefectural Patent Information Center Jul. Set up R&D center at Osaka Technology Research Institute and developed RF Probe and Low-leakage Probe Jan. Made prototype 6GHz Probe card Oct. Development of TDDB/EM Probe Card Apr. Certified as SMBs Creation Act and promotion company by Osaka pref. with development of Wafer level EM Evaluation System Feb. Releasing 300mm WLR probing system and Probe card Apr. New manual probe station model Alpha Series were released Mar. Releasing model PEM 300 as special manual probe station for WLR Apr. Selected as one of the Vitality Manufactures 100 of Kansai May. Received the prize of Vitality SME 300 of Kansai/Twinkling Manufactures Small scale by Ministry Economy SME Ministry Feb. In 10 year since our company was established 2011 Mar. Open a branch office in Taiwan Hsinchu county

4 RF probe card *Corresponding 6 GHz! For narrow pitch Signal PAD DC multi contact probe *Pitch:~60um Pin: 1~20pin Probe tip material: BeCu,, W, ReW,Pd Low leak probe card *Corresponding 10fA measurement! For full auto, semi auto and manual probe station EM /TDDB probe card *Measurement 300mm under 350deg.C in a lamp!

5 Alpha series a200cs RF probe station Solar cell probe station PEM300 for WLR Vacuum probe station

6 Best solution for High Voltage / High Power measurement!! Shielding Box with Inter lock Body measurement D:600mm W:600mm H:450mm Weight(Body ) Stage travel Sub stage travel Chuck dimension Wafer hold 40 kg X: 200mm, Y: 200mm X: 25mm, Y:25mm 4~8inch Vacuum absorbing (More than 400mm Hg) Selectable from variety probes, enable to measure 20 kv and 100A Providing from each parts discharge Quick position 3 steps for switching Z axis Fine adjustment Corresponding to variety testers / Agilent, KEITHLEY

7 Probe Current[A] 1.00E E E E E E E E E E E Time[Sec]

8 Needle tip diameter Current (DC) 25um 8A Hi S Hi F 50um 9A Lo S Al plate Lo F 100um 150um 12A 13A

9 Low noise, Low leak at all temperature range!! Current[A] 1.00E E E E E E E E E E E-12 Chuck Le =3kV RT 100C 200C 300C Time[Sec]

10 Up to 20kV!!

11 Just Right, Just Fit! Optimum for chip size up to 4inch wafer For Low current High frequency -a100 is the most compact manual probe station in Alpha series and has electrical measurement capabilities in analyzing and characterizing ICs, diodes, transistors, wafers, packages and etc Operators can feel usability and affordability by its performance. Selectable from variety Microscope Variety type of stage Hot Chuck Thermo Chuck Normal Chuck Chuck for film Resinous Chuck and etc.. Compact Size: W400mm D360mm H330mm Weight (Body) Stage travel Sub Stage Travel Chuck diameter 25kg X:100mm Y:100mm X: 14mm Y:14mm Maximum 4inch

12 Just Right, Just Fit! Versatile, affordable and user-friendly For Low current High frequency High power Selectable from 6inch, 8 inch, 12inch probe station The concept of Alpha series probe station is Compact, Cost Effective and Usability. Against background of 150~300 mm measurement growth, a series are designed as the most flexible model to meet various needs in analyzing and characterizing ICs, diodes, transistors, wafers, packages and etc. Precise alignment X,Y,Z, Theta stage with accurate micrometer. It also enables easy alignment for using probe card Quick positioning Operator can move XY stage freely by stage knob and hold tightly by releasing hand from the switch. XY travel range is equal to the chuck size. a 200 : W500mm D365mm H500mm ( Height is without microscope) Weight (Body) Stage travel Sub Stage Travel Chuck diameter 50kg X:150mm Y:150mm X: 14mm Y:14mm Maximum 6inch

13 New generation Manual probe station!! Possible to measure fa measuring by compact shield. It is valid for Organic EL measurement due to exchangeable inside the environment N2or Dry air LOW Current Nitrogen substitution 5.00E-15 I19 Pulse IV measurement system support Manipulator 9 sets on board It s able to mount Agilent ASU/RSU or KEITHLEY Pre-amp to the near probe 0.00E I(A) -5.00E E E-14 時間 (s) High & Low temperature and very low leakage probe card on alpha 300 Thermo chuck -55~300 It uses a high-precision stage with FineAlignment the micrometer for X,Y,Z,and θ. It is possible to do an Alignment in probe card attachment, too, easily.

14 High cost performance!! Accurate probing by high linearity (<3um) RF & DC measurement is possible a 100 RF is based on the most versatile designed a series probe station. Satisfactory low cost but powerful measurement tool. As standard use, micro manipulator M60 supports for the precise measurement such as MM Wave measurement and RF characterization test. *RF probe is enable to mount with any company s product. (Cascade Microtech, SUSS MicroTec, GGB etc ) *Manipulator can be put maximum 4 pcs on the plate. Measurement unit (Example) a 100 main body Normal chuck for 4inch Microscope arm Stereo microscope with ring light RF manipulator M60 (2pcs) Vacuum pump

15 The electrical property of the sample can be measured with sunlight irradiated. The irradiation of visible and infrared rays.. Out side purple..is also possible according to the light source. The installation of the illuminometer and the strength meter is also possible in the stage side. The stage that can be irradiated from the back is also good at the business mind. Thermo chuck / hot chuck are available on the board *for chip size to small size wafer *It is possible to do the point of view of the light irradiation variably. *Adjustable working distance of the illuminator *More than one light souse on board *Compact and cheap price Illumination of Back side α-series base Recommend Option <Shielding box> *Less than 0.00Lux * Electrical shielding

16 <Measurement type> Low current Best solution for IV/CV measurement up to 50 mm size chip!! Solar simulator High-Low temperature tank Globe box H200 mm D340 mm ( 本体 300 mm ) Enable to set under the solar simulator Enable to measure low current Small and light-weight, enable to carry around Attach to the shield box, stable and precision measurement Simple structure, Low price Probe station equipped with microscope W630mm ( 本体 400mm ) Low leak measurement unit *Configuration sample* -Body with 50mm stage -Micropositioner 3pcs -Triaxial probe 3pcs -Tungsten needle (25pcs/box) -Connector panel (TXA 4pcs) -Vacuum pump

17 Dedicated equipment for WLR For Wafer level TDDB/ EM/ NBTI etc. Measurement 300mm by 350 degree in a lump! Compact chamber for saving N2 consumption Mounting CCD camera with smooth movement and monitor. CCD travel range: X.Y 300mm Easy wafer load / unload chuck stage comes out from chamber. All operations can be made in front of operator safely and alignment as well

18 For the probe card type, it is possible to make a numerous pin. The vacuum degree corresponds to 10-1 Pa. The change of the nonmeasurement one corresponds by the exchange of the probe card. It is an Alignment with the X,Y,Z and θ of the stage. 4 Manipulator type It s able to make customized!! The vacuum degree corresponds to 10-3 Pa. The way of taking out a signal corresponds to the individual specification. It is possible to measure a very low leakage electric current. It s available to move the stage X and Y axis are 50mm Wide stage size (100mm).

19 We proposal the suitable chuck from temperature range, noise level, high power, size and measurement. Heated type Heater / Chiller combination type Peltier type For 4inch ~12inch wafer For RT ~400deg.C temperature range Lineup for low noise, low leak spec and reasonable spec. Current[A] 5.E-13 4.E-13 3.E-13 2.E-13 1.E-13 0.E+00-1.E-13-2.E-13-3.E-13-4.E-13-5.E Time[Sec] For 4inch ~12inch wafer For-55~300 deg.c temperature range Lineup for low noise, low leak Enable to control around 20 deg.c Temparature[C] For up to 5 inch wafer size. For -40~125deg.C temperature range Lineup for low noise and low leak. Enable to control around 20 deg.c Reasonable than Chiller type Attain the temperature quickly Temparature-Time Time[min]

20 MODEL:M60 M60 (R ) or (L) right or left *Fixation : Magnetic or Screw type base (with ON/OFF lever) *Stroke :X,Y,Z +-6.5mm Theta 360deg *Linearity: 1um *Movement: 0.5mm/REV MODEL:M30 M30 (R ) or (L) right or left *Fixation : Magnetic base or Vacuum base *Stroke :X,Y,Z +-3.2mm *Linearity: 1um *Movement: 0.5mm/REV Coaxial Probe Connector : SMA Tip material: W (ReW,BeCu as option) Tip diameter: 5 to 40 um Curren[A] 1.00E E E E E E E E E E E Voltage[V] MODEL:M40 M40 (R ) or (L) right or left *Fixation : Magnetic base or Vacuum base (with ON/OFF lever) *Stroke :X,Y,Z +-6.5mm *Linearity: 1um *Movement: 0.5mm/REV MODEL:M20 M20 (R ) or (L) right or left *Fixation : Magnetic rubber base *Stroke :X,Y,Z +-5mm *Linearity: 30um *Movement: 0.5mm/REV *Exclude Micrometer Triaxial probe arm Connector : TXA (P) Wiring length : ~3m Tip diameter: 1,2,5,10,30 um ( Combination with Tungsten straight needle) It s also adjustable with M20/30/40