On-Wafer Measurement and Analysis of Flicker Noise and Random Telegraph Noise
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1 On-Wafer Measurement and Analysis of Flicker Noise and Random Telegraph Noise Raj Sodhi, Keysight Technologies EEsof EDA, Device Modeling Group Device Noise Measurements Page 1
2 Outline Importance of low-frequency noise Device Noise Measurements Page 2 Measurement and analysis techniques The Advanced Low-Frequency Noise Analyzer (A-LFNA) How to get clean data Conclusions
3 Low-Frequency Noise Frequency and Time Domain - 1/f Noise and Random Telegraph Noise Power Spectral Density Minute fluctuation of DC voltage and current observed in an electronic device at the low frequencies Its power spectral density usually exhibits 1/f behavior known as 1/f noise Random telegraph noise (RTN) noise represented in the time domain exhibiting two or more stable levels Power Spectral Density [ "! /%& or '! /%&] Log 1/( White noise Frequency [Hz] Log Device Noise Measurements Page 3
4 Analysis of RTN Data Various data analysis techniques to determine trap properties Measuring Capture and Emission Times from RTN Data Example of Calculation of Capture and Emission Time Constants * *K. Abe, et al., Understanding of Traps Causing Random Telegraph Noise Based on Experimentally Extracted Time Constants and Amplitude, Proc. IEEE IRPS 2011, Monterey, CA. Device Noise Measurements Page 4
5 Importance and Increasing Impact on Circuit Performance OCXO Device Noise Measurements Page 5
6 Example Sid Analysis vs Ibias - NMOS Device 2N7002K Device Noise Measurements Page 6
7 Example RTN Data - NMOS Device, 2N7002K Device Noise Measurements Page 7
8 Measurement Results Resistor and Diode RESISTOR I2 V2 Rout AMP 1m VAMP_LF 2m VAMP_LF 5m VAMP_LF 10m VAMP_LF DIODE I2 V2 Rout AMP 1u VAMP_LF 10u VAMP_LF 100u VAMP_LF Theoretical Inoise = )*+/- = //0 Device Noise Measurements Page 8
9 Measurement Results OP07D Op Amp Circuit Device Noise Measurements Page 9
10 Outline Importance of low-frequency noise Measurement and analysis techniques Device Noise Measurements Page 10 The Advanced Low-Frequency Noise Analyzer (A-LFNA) How to get clean data Conclusions
11 Measuring 1/f Noise and RTN Either voltage LNA or current (trans-impedance) LNA can be used FFT 2 1/f noise Postprocessing RTN Device Noise Measurements Page 11
12 Outline Importance of low-frequency noise Measurement and analysis techniques Device Noise Measurements Page 12 The Advanced Low-Frequency Noise Analyzer (A-LFNA) How to get clean data Conclusions
13 New Release Advanced Low-Frequency Noise Analyzer now with WaferPro Express Test Fixture Module Connect to packaged thru-hole device Output Module Output Resistor LPF VAMP CAMP Input Module Input Resistor LPF SG Substrate Module LPF PXIe Chassis Embedded PC Interface Module Digitizer (ADC) Device Noise Measurements Page 13
14 Integration with WaferPro Express! Get or receive wafer map to or from Velox software. Control prober from A-LFNA. Leverage factory defined measurement routines and settings to suit specific needs Control biasing in many ways: set current, Vgs offset beyond threshold-voltage, Vgs, etc. A-LFNA Routines à Measurement platform that is flexible and expandable. WPE Routines Device Noise Measurements Page 14
15 A-LFNA Connections Device Noise Measurements Page 15
16 Input, Output, and Substrate Module Block Diagram LPF Output Module DC Noise SMU2 Input Module Drain DC RLOAD CA SMU1 DC Noise LPF DC RSOURCE Noise Gate Noise VA VAMP RF AMP To Digitizer SG CA CAMP SMU3 Substrate Module LPF Back Gate Source VA Device Noise Measurements Page 16
17 S i d ( A 2 / H z ) 1/f Noise Measurements - NMOS Device, 2N7002K Vds = 2 V 10-5 Smoothed Sid vs Frequency and Id ULF Data G D S Id=50.00u Id=100.0u Id=200.0u Id=500.0u Id=1.000m Id=2.000m Id=5.000m Id=10.00m m 100m k 10k 100k 1M 10M 100M Frequency (Hz) From 0.03 Hz To 40 MHz Device Noise Measurements Page 17
18 Outline Importance of low-frequency noise Device Noise Measurements Page 18 Measurement and analysis techniques The Advanced Low-Frequency Noise Analyzer (A-LFNA) How to get clean data Conclusions
19 Don t Add Instrument Noise to Your Measured Data use floating ground Noise power adds as RSS Noise at output? Measured_noise = _3: ;<*_3:249 2 Instrument noise needs to be much better than DUT noise Device Noise Measurements Page 19
20 I n p u t N o i s e D e n s i t y ( d B V 2 / H z ) State-of-the-art Custom-Designed LNAs 3 Voltage Amplifiers (VAMP) + 2 Current-to-Voltage Amplifiers (CAMP) LNA Noise of A-LFNA Systems Current E4727A Previous Generation E4725A Other System ULF VAMP LF VAMP HF VAMP ULF CAMP LF CAMP LNA type Voltage Voltage Voltage Current Current 0.03 Hz to Frequency range 0.03 Hz to 1 MHz 1 Hz to 1 MHz 1 Hz to 40 MHz 100 khz 1 Hz to 100 khz Input voltage noise density Input current noise density (max) khz khz khz khz MHz khz 3 10 khz 3 10 khz Corner frequency 20 Hz 200 Hz 200 Hz 200 Hz 200 Hz Maximum input voltage ± 200 VDC ± 200 VDC ± 200 VDC ± 5 VDC ± 5 VDC Maximum input current ± 30 ma ± 30 ma Output impedance 220 Ω 220 Ω 220 Ω 220 Ω 220 Ω Drain DC RLOAD CA LPF Output Module DC Noise SMU Noise VA VAMP RF AMP To Digitizer CA CAMP k 10k 100k 1M Frequency (Hz) Source VA Device Noise Measurements Page 20
21 Quality Check on 1/f Noise Data Valid Data Needs to be above system noise floor and thermal noise of load resistance and below roll-off frequency Roll-off Frequency Frequency where the gain of the voltage LNA quickly deteriorates because of equivalent resistance and capacitance on the output node Thermal Noise = 4kTR LOAD Invalid Data Ignore after roll-off frequency System Noise - VAMP Determined by LNA s spec and measurement environment Device Noise Measurements Page 21
22 Shield From Air Currents Thermoelectric voltage noise caused by uneven airflow from ambient room air turbulence causes significant noise at low frequencies. Device Noise Measurements Page 22
23 Triple Shielding Design to Minimize External Noise Electromagnetic Shield 1 st layer GND Shield 2 nd Layer GND Shield Device Noise Measurements Page 23
24 Benefits of Unique Modular Design Poor Grounding seen with competitor product Modular design features small footprint Easy to mount on and remove from the prober surface through magnetic attachment Shortest possible cables to reduce parasitic capacitances and increased roll-off frequency Device Noise Measurements Page 24
25 Hardware Averaging User may trade off trace noise for measurement speed -130 Noise vs Frequency -140 Ave=1, Time=00:38 Ave=10, Time=01:35 Ave=99, Time=10: N o i s e P o w e r ( d B V 2 / H z ) Npts = = k 10k 100k 1M Frequency (Hz) Device Noise Measurements Page 25
26 Outline Device Noise Measurements Page 26 Importance of low-frequency noise Measurement and analysis techniques The Advanced Low-Frequency Noise Analyzer (A-LFNA) How to get clean data Conclusions
27 Conclusions Device noise is becoming increasing important for analog, RF and digital design. Measuring noise is hard. Lots of ways data can be corrupted (interference, oscillations, etc.) The Advanced Low-Frequency Noise Analyzer (A-LFNA) adopts a modular architecture to minimize hardware footprint, improve its portability, and reduce parasitic capacitances to improve the roll-off frequency. This has now been integrated with WaferPro Express, enabling you to fully automate noise measurements as a part of a larger and broader suite of measurements. Device Noise Measurements Page 27
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