Efficient Characterization and Testing of MRAM Devices. Parametric Testing for In-Line Monitoring
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1 Efficient Characterization and Testing of MRAM Devices Parametric Testing for In-Line Monitoring Siamak SALIMY, Gilles ZAHND, Nathalie LAMARD, Eric MONTREDON, Laurent LEBRUN, Jean-Pierre NOZIERES Antoine CHAVENT, Isabelle JOUMARD Santa Clara, CA 1
2 MRAM Control & Monitoring Flow - MTJ is integrated in standard CMOS BEOL masks - Manufacturing Process & Yield Optimization require Characterization & Testing under magnetic field Packaging Final Test FEOL Process Metal Dep. + Barrier Magnetic Tunnel Junction Formation Tunnel- Ox Magnetic Dep Blanket Test MTJ Etch Pad Magnetic Initialization Device Test WAT/PCM Parametric SoC Test WS/Binning Functional P-MOKE 3 levels of control under magnetic field for MRAM Santa Clara, CA 2
3 Test Equipment for Device Parametric Testing We developed a dedicated MTJ Electrical/Magnetic Parametric ATE Wafer Level testing under magnetic field Compatible with R&D and production requirements Santa Clara, CA 3
4 Pulse Amplitude (V) Pulse Amplitude (V) Ultra-Fast MRAM Parametric Test Program Proposed Efficient test Program at device level on MTJ test structures RH Loop Switching TMR Field Switching Probability Stability Factor, Anisotropic Field IV-Pulsed Sweep Test Current Switching Probability Breakdown Test MTJ Breakdown voltage Time(sec) Time(sec) Santa Clara, CA 4
5 Test setup for MTJ Device Parametric Test Setup The probing is done with RF Ground Signal Probe By 2 and 4 point probe measurements 3D Magnetic Generator AWG Magnet Field Control V/I LP Filter MTJ Source and Sense Control HP Filter Pulse/AWG Electrical Pulsing Control Santa Clara, CA 5
6 XYpole XYpole Test Protocols Magnetic Field Sweep 3D Magnetic Generator TM Area under test Perpendicular Configuration Z- pole Wafer under test Operates in 1D, 2D, 3D with each spatial axis controlled independently Magnetic field lines Santa Clara, CA 6
7 Test Protocols Magnetic Field Sweep Demonstration of performant field sweeping capability + Rmtj synchronized measurement at high field Chosen Point of Operation Measurement time Synchronized R mtj measurement at each field amplitude steps Field Excitation Trigger Signal Santa Clara, CA 7 Time
8 Test Protocols Magnetic Field Sweep Hysteresis test at sweep frequency of 10Hz / 10kSamples/sec 1 RH cycle sweep w/ 1,000 field steps in 100 milliseconds 10 RH Cycles w/ 1,000 field steps in 1 second Testing Time (sec) = (1/Sf) x Nbc Sf = Magnetic field sweep frequency Nbc = Number of magnetic sweep Cycles Santa Clara, CA 8
9 Test Protocols Electrical Pulsed Sweep - Current pulsing switching test with accurate resistance measurement - Rmtj measurements synchronized with pulse sweep steps Santa Clara, CA 9
10 Test Protocols Electrical Pulsed Sweep Testing Time (sec) = (Tin + Pw + Td) x Nbc Tin = Rmtj Integration Time Pw = Pulse Width Td = Delay between pulse and Rmtj measurement Nbc = Number of sweep cycles Leads to 300msec/cycle for +100sweep steps Pw = 10nsec Td = 1msec Tin = 0.5msec Santa Clara, CA 10
11 Summary Magnetic ATE for parametric testing of MRAM MTJ Fast magnetic sweeping capability synchronized with acquisition Competitive Testing Time ~1sec for magnetic sweep and current pulsing test Santa Clara, CA 11
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Proposed Adaptive Optics system for Vainu Bappu Telescope Essential requirements of an adaptive optics system Adaptive Optics is a real time wave front error measurement and correction system The essential
Parameter Conditions & Remarks Min Typical Max Unit. Warm up Steady 25 C Load Output to Ground pf
Model 1380100XXX Features Industry standard 20 x 12.7 mm SMT package Stratum 3E per GR1244CORE 3.3V operation Low Phase Noise Tape and Reel packaging Applications Telecom Switching Wireless Communication
SET - 1 1. a) Write the application of attenuator b) State the clamping theorem c) Write the application of Monostable multi vibrator d) Draw the diagram for Diode two input AND gate e) Define the terms