Basic module X-TIO FAIL/RUN RX/TX EVENT1 EVENT2 EVENT3 EVENT4 X10 FAIL/RUN RX/TX EVENT1 EVENT2 EVENT3 EVENT4 X10. Communications (RS-485)

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Module type High-speed Digital ler SRX SRX General Description The SRX is a module type digital controller with a super high speed sampling of control updating cycle time of ms (0.0 sec).

Communication and power supply for extension modules are snapped together via mating s.

1 Module type High-speed Digital ler SRX SRX General Description The SRX is a module type digital controller with a super high speed sampling of control updating cycle time of ms (0.0 sec). Dual loop control can be performed with a single compact module. A maximum of modules can be connected for -loop control. Communication and power supply for extension modules are snapped together via mating s. Distributed installation via RS- is possible to allow formation of a multi-zone distributed control system in a compact size. Features High-speed feedback control Multi-zone space-saving Ramp/Soak program function High-speed Feedback The SRX sampling of the control updating cycle time is a rapid ms (0.0sec.) Supplied with high resolution input and parameters settable in /00 sec. for process applications with fast response. Applications in RTP (Rapid Thermal Process), RTA (Rapid Thermal Anneal) and pulse heat temperature control of flip chip bonders in semiconductor manufacturing can be controlled by the SRX. The high speed sampling function also makes it suitable for additional application requirements such as pressure and flow rate. 00ms sampling controller ( C) ( C) SRX ms sampling controller Multi-Zone Space-Saving Dual loop control can be performed with a single compact module. Side connectivity for power supply and communications eliminates the need for wiring and offers close mounting. Distributed installation via RS- is possible to form a multi-zone distributed control system in a compact size. The digital input module is used to accomplish operation mode changes. module outputs operating state or various event conditions. mm 00 SV PV 00 SV PV 00 sec 00 sec 0mm (RS-) Output Output Output Output - - asic module Extension module module module (RS-) (RS-) (RS-) Pulse heat temperature control of flip chip bonding. (DC V) Input Input (DC V) (DC V) Input Input - Extension modules can be added to a basic module. (DC V) - SRX_0E

2 Module type High-speed Digital ler SRX Features Ramp/Soak Program Function Ramp/Soak program control of segments by patterns is supplied as standard. can be selected from a standard fixed-setpoint control or ramp/soak program control. Easy DIN Rail Mounting The SRX controller utilizes DIN rail mounting for flexible installation. systems can be customized and expanded to meet specific application requirements simply by attaching additional modules on the rail. patterns Temp. segments Time Module The DI-A module has input points on the terminal block. The DI- module has additional inputs on the front face as well as inputs on the terminal block. The DI module is used to facilitate operation mode changes (temperature control module, program pattern selection, start/stop of autotuning) < Operation modes change > RESET RUN FIX MANUAL HOLD STEP < Program pattern selection > < Start / Stop of autotuning > DI-A DI- Terminal base (Terminal unit) Main unit Main unit can be easily removed from a terminal base unit. Module connecting status lamp Communication send/receive lamp Event status lamp Module address setting rotary switch 9 Module The DO-A module has outputs from the terminal block. The The DO- module has additional outputs from the front face as well as outputs from the terminal block. < Function of DO module > urn-out state Event output state Event output state Heater break alarm state Loop break alarm state Program end state Pattern end state Program wait state Time signal to output state DI module CH to input state DO-A DO- Compliance with Standards CE Mark UL/cUL Recognized RCM Mark 9 SRX_0E

3 POWER SYSTEM F F F F F OPC-V0 System Configuration Module type High-speed Digital ler SRX Host computer panel computer Serial port (RS- or RS-C) is required. RS-C RS-C/RS- Converter RS- RS- When using with Windows 9/9/NT/000/XP, An RSC/RS- converter with automatic send/receive switching function is required. Recommended products : CD, CDV (Data Link Co. Ltd) Alternative products ( OI 9T, etc) may be available from and -Electronics through Temperature control module unit, output module MODUS or ANSI X.. A (Changing is possible) RS- RS- output CT input output CT input CT input output output CT input to to to to TIO-A TIO- TIO- DI-A DI- DO-A DO- (DCV) Measured input Measured input Measured input Measured input to to to to * Each module can perform maximum -loop control. * Extension modules are powered from a basic module via a. * Communication of extension modules is via a. * Input and output types can be freely specified for each module and channel. * Time signal outputs (in program control mode) are provided from a DO module. * s/outputs are effective for only unit of connected module. < When nd input is used as a remote setpoint input > output CT input CT input output TIO-A TIO- CT-0 (Matsushita Electric Works, Ltd.) CT-0 (Matsushita Electric Works, Ltd.) W-Q-0 to W-Q-0 to (Open collector output) Remote input Remote input Measured input Measured input RS- RS- TIO-A DI-A DI- DO-A DO- and relay terminal either selection. Relay terminal RTS-OD-V-S (Matsushita Electric Works, Ltd.) W-Q-0 to (Relay contact output) This system is accessible to other TIO-A module with a multi-drop. ( module maximum ) (Address selection possible limit is 0 to 99.) SRX_0E

4 Module type High-speed Digital ler SRX Specifications Temperature control module (TIO-A/) Input Number of Inputs points nd input can be used as a remote input. Input a) Thermocouple, DC low voltage group Thermocouple : K, J, E, T, R, S,, N (JIS/IEC) PLII (NS), WRe/WRe(ASTM) Input impedance : Approx.MΩ Influence of external resistance : Approx. 0.μV/Ω Input break action : Up-scale DC low voltage : 0 to V DC, 0 to 00mV DC, 0 to 0mV DC Input break action : Up-scale (0 to 00mV, 0 to 0mV) Value around 0V (0 to V) b) RTD group Pt00 (JIS/IEC), JPt00 (JIS) Influence of lead resistance : Approx. 0.0[%/Ω] of reading Maximum 0Ω per wire Input break action : Up-scale Input short action : Down-scale c) DC high voltage, DC current group DC high voltage : 0 to V DC, to V DC, 0 to 0V DC Input break action : Value around 0V DC current : 0 to 0mA DC, to 0mA DC Input break action : Value around 0V Sampling Time 0.0 sec. PV ias - span to +span (Within -999 to 9999) Digital Filter 0.0 to 0.00 sec. (OFF when 0 is set.) Performance Measuring Accuracy a) Thermocouple : K, J, T, E, PLII Less than -00 C (- F) : ±.0 C (±. F) -00 to 00 C (- to 9 F) : ±0. C (±0.9 F) More than 00 C (9 F) : ±(0.% of Reading + digit) : N, S, R, WRe/WRe -0 to 000 C (- to F) : ±.0 C (±. F) More than 000 C ( F) : ±(0.% of Reading + digit) : Less than 00 C ( F) : ±0.0 C (± F) 00 to 000 C ( to F) :.0 C (. F) More than 000 C ( F) : ±(0.% of Reading + digit) Cold junction temperature compensation error ±.0 C (. F) [at C± C (. F±. F)] Within ±. C (±. F) [etween 0 and 0 C ( to F)] b) RTD Less than 00 C (9 F) : ±0. C (±0. F) More than 00 C (9 F) : ±(0.% of Reading + digit) c) DC voltage and DC current ±(0.% of span + digit) Insulation Resistance More than 0MΩ (00V DC) between each isolation block Dielectric Strength More than 00V AC for one minute between each isolation block Method rilliant PID control (with autotuning) Direct action/reverse action (selectable) Major Setting Range Set value : Same as input range. Proportional band : 0 to span or 0. to span (Temperature) 0.0 to 000.0% of input span (Voltage, Current) (ON/OFF action when P=0) Integral time : 0.0 to 0.00 sec. or 0. to 00.0 sec. Derivative time : 0.00 to 0.00 sec. or 0.0 to 00.0 sec. response : Slow, Medium, Fast Output limiter : -.0 to +0.0% (High/Low individual setting) Output change rate limiter : 0.0 to 00.0% / sec. Proportional cycle time : 0. to 0.0 sec. Level PID : sets of PID parameters can be assigned to set values at different points. Output Relay output : Voltage pulse output : Current output : Form A contact, 0V AC A (resistive load) 0/V DC (Load resistance : More than 00Ω) 0 to 0mA, to 0mA DC (Load resistance : Less than 00Ω) Continuous voltage output : 0 to V, 0 to 0V, to V DC (Load resistance : More than kω) Alarms Event (Alarm ) Output a) Number of alarm : Up to points/channel b) : Deviation High, Low, High/Low, and, Process High, Low Hold action is available except for and Alarm. c) Setting range : Deviation alarm : -span to +span Deviation High/Low, and : 0 to span Process alarm : Same as input range d) Differential gap : 0 to 0 C ( F) or 0.0 to 0.0 C ( F) (Temperature input) 0 to 00 digits (Voltage, Current input) e) Output : Communication data output Loop break alarm (LA) a) Number of alarm : points ( point/channel) b) LA time setting : 0 to 00 sec. (LA is OFF when 0 is set) c) LA deadband : 0 to input span d) Output : Communication data output Heater reak Alarm (HA) : (Optional) a) Number of alarm : points b) CT type : CTL--P-N (0A), CTL--S-0L-N (00A) (Specify when ordering) c) Display range : 0.0 to 00.0A d) Accuracy : ±% of input value or ±A (whichever is larger) e) Output : Communication data output Program Storage Program Pattern : Max. patterns ( segments per pattern) Storage Segments : Max. segments ( patterns x segments) Program Setting : Setting Range : Program Repeat : Time Accuracy : Start Mode : Level setting (Setting per channel) Segment time (Setting per channel) Level : Same as input range Segment time : 0.00 to sec. / 0.0 to sec. / 0 to 0000 sec. / 0 to 0000 min (selectable) to 000 times (Continuous when 000 times is set) ± (0.0% of reading + digit) Zero start, Fixed time type PV start, Time shorting/constant slope type PV start (selectable) Functions : HOLD, STEP, WAIT Mode : Reset, Program, Fixed, Manual Time Signal : points per pattern Contact outputs of time signals are provided from a DO module. (available soon) SRX_0E

5 Module type High-speed Digital ler SRX module (DI-A/) Number of Inputs DI-A module : points ( points/common) Terminal block DI- module : points ( points/common) Terminal block points ( points/common) Connector Input Rating Non-voltage contact input (OPEN : 00kΩ or more, CLOSE : 0Ω or less) Contact current : Less than 0mA Open voltage : Approx. V DC Input The function of each channel is programmable. a) Program control mode RESET, RUN, FIX, MAN, HOLD, STEP b) Program start pattern selection c) Auto-tuning START / STOP Isolation type Photo-coupler isolation Setting method Setting by digital communication. module (DO-A/) Number of Outputs DO-A module : points ( points/common) Terminal block DO- module : points ( points/common) Terminal block points ( points/common) Connector Output Rating Transistor output (sink type) Rated load : V DC Maximum load current : 0mA ( point ) ON voltage : Maximum V DC Output The function of each channel is programmable. urn-out state, Event state, Event state, Heater break out state, Loop break out (LA) state, Pattern end state, Wait state, Time signal CH to output state, DI module CH to input state Isolation type Photo-coupler isolation Setting method Setting by digital communication. Common specification a) Communication method : ased on RS- (-wire) b) Communication speed : 00, 900, 900, 00 PS c) Protocol : ANSI X.(9). A MODUS d) it format Start bit : Data bit : or For MODUS bit only Parity bit : Without, Odd or Even Stop bit : e) Communication code : ASCII(JIS) -bit code f ) Maximum connection : ( Address can be set from 0 to 99.) General Specifications Supply Voltage. to.v DC (Ripple rate 0% p-p or less) [ Rating : V DC ] Power Consumption TIO-A module : Less than 0mA TIO- module : Less than 0mA DI-A module : Less than ma DI- module : Less than 0mA DO-A module : Less than 0mA DO- module : Less than 90mA Power Failure Effect A power failure of 0 msec or less will not affect the control action. If power failure of more than 0 msec occurs, controller will restart. HOT or COLD start is selectable. (Only TIO module) Operating Environments : -0 to 0ºC [ to ºF] to 9% RH (Non-condensing) Absolute humidity : 9g/m dry air at 0.kPa Memory ackup : acked up by non-volatile memory (FRAM). Data retaining period : Approx. 0 years. Number of writing : Approx. 0,000,000,000 times (TIO module) Approx.,000,000 times (DI/DO module) Depending on storage and operating conditions. Net Weight TIO-A module : Approx. 0g TIO- module : Approx. 90g DI-A module : Approx. g DI- module : Approx. g DO-A module : Approx. g DO- mokule : Approx. g External Dimensions See external dimensions. Operating Environment Free from corrosive or flammable gas, and dust. Other Conditions Free from external noise, vibration, shock and exposure to direct sunlight. Compliance with Standards CE Mark UL/cUL Recognized RCM Mark SRX_0E

6 Module type High-speed Digital ler SRX Temperature Module Specifications Model Measured input (CH) Measured input (CH) output (CH) output (CH) Current Transformer Input (CH) Current Transformer Input (CH) asic module Extension module See Range and Input Code Table See Range and Input Code Table Relay output Voltage pules DC voltage : 0 to V DC voltage : 0 to 0V DC voltage : to V DC current : 0 to 0mA DC current : to 0mA Relay output Voltage pules DC voltage : 0 to V DC voltage : 0 to 0V DC voltage : to V DC current : 0 to 0mA DC current : to 0mA Not supplied CTL--P-N CTL--S-0L-N Not supplied CTL--P-N CTL--S-0L-N Extension module cannot be used alone. The second PV input can be also used as a remote setpoint input (voltage / current input only). When a heater break alarm (HA) is used, please specify relay output or voltage pulse output for the relevant channel output. A M V M V N PS N P S Range and Input Table Thermocouple and Low voltage group Input K J T E PLII N S R WRe/WRe 0 0mV DC 0 00mV DC 0 V DC RTD group Input Pt00 JPt00 Code K J T E A N S R W Range -00 C - 0 F C - 9 F C - F C - F 0 90 C F 0 00 C F -0 C F -0 C F 0 00 C 000 F 0 00 C 000 F (Programmable within 0,000 span) (Field-programmable) Code Range C D - F C P - F (Field-programmable) Resolution C, 0. C, F, 0. F (Selectable), 0., 0.0, 0.00, (Programmable) Resolution C, 0. C, F, 0. F (Selectable) High voltage and Current group (Field-programmable) 0 V DC 0 0V DC , 0., 0.0, 0.00, V DC (Programmable (Programmable) 0 0mA DC within 0,000 span) 0mA DC Module Specifications Model points input (Terminal) points input (Terminal and Connector) - Conector Terminal Cable Cable for terminal connection (Length:m) W-Q Cable for terminal connection (Length:m) W-Q Cable for terminal connection (Length:m) W-Q Module Specifications Model points input (Terminal) A points input (Terminal and Connector) - Conector Terminal Cable ( Length : m ) Cable for terminal connection (Length:m) W-Q Cable for terminal connection (Length:m) W-Q Cable for terminal connection (Length:m) W-Q Cable for relay terminal connection (Length:m) W-Q Cable for relay terminal connection (Length:m) W-Q Cable for relay terminal connection (Length:m) W-Q Connector Terminal RSDS-0V (Yoshida Electric Industry CO.,LTD.) Relay Terminal Y-shaped solderless terminal type PCRY-H0--FD Round shaped/y-shaped solderless terminal type PCRYR-H0--FD (TOYOGIKEN CO.,LTD.) A SRX_0E

7 Module type High-speed Digital ler SRX External Dimensions and Terminals asic Module Extension Module Unit : mm -A Mounting brackets.±0. 0±0. ø.(m) ±0. ( when installed with screws ) /Output Module -A -A /Output Module * Mounting brackets Each module is supplied with one mounting brackets as a joint. Additional mounting brackets must be ordered separately. asic Module -A NO NO Extension Module - NO NO T/R(A) SG RS- T/R() CT CT OUT Relay contact OUT Relay contact CT CT OUT Relay contact OUT Relay contact CT : CH CT : CH CT input for heater break alarm OUT Voltage pulse/ output (CH) OUT Voltage pulse/ output (CH) CT : CH CT : CH CT input for heater break alarm OUT Voltage pulse/ output (CH) OUT Voltage pulse/ output (CH) FG Ground 9 DCV Power supply 0 A RTD RTD TC * nd input can be used as a remote setpoint. (voltage/current input only) In this setup, control output and CT input are not available. Thermocouple IN Measured input (CH) 9 A RTD RTD TC Thermocouple IN Measured input (CH) A RTD RTD TC Thermocouple IN Measured input (CH) 9 A RTD RTD TC Thermocouple IN Measured input (CH) * nd input can be used as a remote setpoint. (voltage/current input only) In this setup, control output and CT input are not available. SRX_0E

8 Module type High-speed Digital ler SRX -A/ Terminals -A/ Terminals DI DI DI DI DI DI 0 DI 9 DI DI DI DI DI 0 9 DO DO DO V DC DO DO DO 0 9 V DC DO 9 DO DO DO DO DO CT-0 0 A0 A DI 0 DI 9 DI DI DI DI DI DI A0 DI 0 A9 DI 9 A DI A DI A A DI A DI A DI A DI A 0 0 DI DI DI DI DI DI DI 9 9 DI 0 0 W-Q DI DI DI DI DI DI DI DI CT-0 0 A0 A DO DO DO DO DO DO DO DO 0 9 A0 A9 A A A A A A A A DO 0 DO 9 DO DO DO DO DO DO V DC V DC V DC DO DO DO DO DO DO DO DO DCV DCV DO DO DO DO 9 DO 9 9 DO 0 DO 0 0 DO W-Q-0 W-Q-0 RTS-OD-V-S F+ F - VCC GND DO DO DO DO DO DO DO DO DO 0 DO 9 DO DO DO DO DO DO DCV F + E + D + C + + A VCC + F - E - D - C - - A NC GND SRX_0E

SRX. General Description. Features. Module type High-speed Digital Controller SRX. Multi-Zone Space-Saving. High-speed Feedback Control

SRX. General Description. Features. Module type High-speed Digital Controller SRX. Multi-Zone Space-Saving. High-speed Feedback Control SX General Description The SX is a module type digital controller with a super high speed sampling of control updating cycle time of ms (0.0 sec). Dual loop control can be performed with a single compact