Protego Plus DI Water Purifiers

Transcription

1 MIROONTMINTION ONTROL Protego Plus DI Water Purifiers ll-in-one purifier/filter devices that deliver ultimate protection from metal ion contamination in critical DI water cleaning applications at low and high temperatures Protego Plus DI water, advanced clean purifier/filter devices enable superior flow rate performance and contaminant retention capabilities in critical cleaning DI water applications. The ultraclean product design promotes fast startups and high yields at both low (LT series) and high (HT series) temperature ranges. Protego Plus DI water devices enable superior removal rates of multiple metallic cation contamination in single-pass or recirculation DI water applications. The high-ion exchange capability delivers proven particles performance and low metals extractables with fewer particles on wafer, and the metal ion removal technology minimizes system downtime. PPLITIONS artridges Disposables FETURES & ENEFITS ulk Point-of-tool purification Point-of-use Lab-scale Ultraclean purifier/filter design Enables superior flow rate performance and contaminant retention capabilities in critical cleaning DI water applications Promotes fast startups and high yields at low (LT series) and high (HT series) temperatures High-ion exchange capability Proven particles performance and low metals extractables with fewer particles on wafer Metal ion removal technology minimizing system downtime Superior removal rates of multiple metallic cation contamination in single-pass or recirculation DI water applications

2 SPEIFITIONS LT SERIES (LOW TEMPERTURE) Materials Membrane 2 nm Hydrophilic polysulfone.,.5 µm Hydrophilic ultrahigh molecular weight polyethylene HT SERIES (HIGH TEMPERTURE) 7 nm Hydrophilic polysulfone media Polyethylene Polyethylene Supports, core/sleeve High-density polyethylene Polypropylene Shell* Polypropylene O-rings** Fluoropolymer encapsulated fluoroelastomer (E-FKM) Fluoropolymer encapsulated fluoroelastomer (E-FKM) E-EPT Kalrez 6375UP Kalrez 6375UP hemlock key** PF Polypropylene onnections artridges ode (2-222 o-rings) ode (2-222 o-rings) Disposables LT (short type) Super Type Pillar and ompression seal fittings ode 7 (2-226 o-rings/spear) for 3" HT LTL (long type) Super Type Pillar and Flaretek fittings Operating conditions Maximum inlet pressure*.34 MPa (3.4 bar, 5 psi).34 MPa (3.4 bar, 5 psi) Maximum forward differential pressure.27 MPa (2.7 bar, 4 psid).27 MPa (2.7 bar, 4 psid) Membrane surface area capacity Maximum reverse pressure Maximum operating temperature.5 MPa (.5 bar, 7 6 (4 F).27 MPa (2.7 bar, 4 psi) 6 (4 F) at the above conditions.5 MPa (.5 bar, 7 8 (76 F).27 MPa (2.7 bar, 4 psi) 8 (76 F) at the above conditions cartridge LT.54 m 2 (5.8 ft 2 ) HT.52 m 2 (5.6 ft 2 ) LTX.68 m 2 (7.32 ft 2 ) HTX.93 m 2 (. ft 2 ) 2 cartridge LT.8 m 2 (.63 ft 2 ) HT.4 m 2 (.9 ft 2 ) LTX.38 m 2 (4.85 ft 2 ) HTX.67 m 2 (7.98 ft 2 ) 3 cartridge HT 6 m 2 (6.79 ft 2 ) Short disposable LT.2 m 2 (.29 ft 2 ) Long disposable LTL.22 m 2 (2.37 ft 2 ) cartridge LT 82 meq/unit HT 74 meq/unit LTX 5 meq/unit HTX meq/unit 2 cartridge LT 64 meq/unit HT 48 meq/unit LTX 2 meq/unit HTX 22 meq/unit 3 cartridge LT 246 meq/unit HT 222 meq/unit Short disposable LT 6 meq/unit Long disposable LTL 3 meq/unit *Disposable filters only **artridge filters only Please refer to Ordering Information for configuration details. 2

3 Protego Plus DI Water LT (Low-Temperature) Series Filters LT and 2 artridges ode with hemlock Key Ø95.3 mm (3.75 ) Ø7 mm (2.75 ) cartridge 262 mm (.3 ) 245 mm (9.65 ) mm (.42 ) 2 cartridge 56 mm (9.92 ) 489 mm (9.25 ) 58.6 mm (2.2 ) LTX and 2 artridges ode with hemlock Key Ø95.3 mm (3.75 ) Ø83 mm (3.27 ) cartridge 242 mm (9.53 ) 225 mm (8.86 ) mm (9.63 ) 2 cartridge 47 mm (8.54 ) 454 mm (7.87 ) mm (8.65 ) 3

4 PERFORMNE DT Protego Plus LT Filters nm. µm.5 µm Typical Flow Rate (L/min) cp Protego Plus LTX Filters nm. µm.5 µm Typical Flow Rate (L/min) cp Protego Plus LT 2 Filters nm. µm.5 µm Typical Flow Rate (L/min) cp Protego Plus LTX 2 Filters nm. µm.5 µm Typical Flow Rate (L/min) cp ORDERING INFORMTION Protego Plus LT/LTX artridge Filters: part number PRL P Length = 2 = 2 Retention rating/type X = 2 nm Z =.5 μm V =. μm = hemlock key K = Optional hemlock PF key lank = Without hemlock key Type LQ = LT with EKFM o-ring Q = LTX with EKFM o-ring LR = LT with Kalrez 6375UP o-ring R = LTX with Kalrez 6375UP o-ring 4

5 Protego Plus LT/LTL Disposable Filters LT Disposable (Short Type) In/out 4", / 4" ompression Seal Fitting In/out 4", / 4" Super Type Pillar Fitting 24 mm (.94 ) Ø 69 mm (2.7 ) 24 mm (.94 ) Ø7 mm (2.8 ) Ø 65 mm (2.6 ) 9 mm (3.58 ) 2 mm (4.4 ) Ø 66 mm (2.6 ) 97 mm (3.8 ) 22 mm (4.8 ) LTL Disposable (Long Type) In/out 2", / 4" Super Type Pillar Fitting In/out 8 mm, / 4 mm Super Type Pillar Fitting In/out 3 8", / 4" Flaretek Fitting 3 mm (.24 ) 24 mm (.94 ) 27 mm (.6 ) Ø 82 mm (3.23 ) Ø 8 mm (3.5 ) 69 mm (6.65 ) 85 mm (7.28 ) Ø7 mm (2.8 ) Ø 66 mm (2.6 ) 75 mm (6.89 ) 25 mm (8.7 ) Ø7 mm (2.8 ) Ø 66 mm (2.6 ) 7 mm (6.69 ) 228 mm (8.98 ) PERFORMNE DT Protego Plus LT Disposable nm 5.5 µm µm Typical Flow Rate (L/min) cp Protego Plus LTL Disposable nm 5.5 µm µm Typical Flow Rate (L/min) cp

6 ORDERING INFORMTION Protego Plus LT Short Disposable Filters: part number PRL Quantity = /pk Fitting SS = PE shell; 4 compression seal fittings SP = PP shell; 4 Super Type Pillar fittings SS = PP shell; 4 compression seal fittings Retention rating/type X = 2 nm Z =.5 μm V =. μm = * Protego Plus LTL Long Disposable Filters: part number PRL Quantity = /pk Fitting 2LP = PP shell; /2 Super Type Pillar fittings** 3LF = PP shell; 3/8 Flaretek fittings*** 8LP = PP shell; 8 mm Super Type Pillar fittings*** Retention rating/type X = 2 nm Z =.5 μm V =. μm * ompression seal fitting type only **. and.5 μm only *** 2 nm only Protego Plus DI Water HT (High-Temperature) Series Filters HT and 2 artridges ode with hemlock Key Ø95.3 mm (3.75 ) Ø7 mm (2.75 ) cartridge 262 mm (.3 ) 245 mm (9.65 ) mm (.42 ) 2 cartridge 56 mm (9.92 ) 489 mm (9.25 ) 58.6 mm (2.2 ) 6

7 HTX and 2 artridges ode with hemlock Key Ø95.3 mm (3.75 ) Ø83 mm (3.27 ) cartridge 242 mm (9.53 ) 225 mm (8.86 ) mm (9.63 ) 2 cartridge 47 mm (8.54 ) 454 mm (7.87 ) mm (8.65 ) HT 3 artridge ode 7 Ø7 mm (2.75 ) 3 cartridge mm (29.63 ) 73 mm (28.78 ) 84 mm (3.65 ) 7

8 PERFORMNE DT Protego Plus HT Filters Typical Flow Rate (L/min) cp Protego Plus HTX Filters nm Typical Flow Rate (L/min) cp Protego Plus HT 2 Filters Typical Flow Rate (L/min) cp Protego Plus HTX 2 Filters nm Typical Flow Rate (L/min) cp Protego Plus HT 3 Filters Typical Flow Rate (L/min) cp

9 ORDERING INFORMTION Protego Plus HT/HTX artridge Filters: part number PRH P hemlock key Y = Optional hemlock polypropylene key ( and 2 cartridges only) Length = 2 = 2 3 = 3 Type LQ = HT with EKFM o-ring Q = HTX with EKFM o-ring PR = HTX with Kalrez 6475 o-ring ode = ode 7 = ode 7 (3 HT only) Retention rating/type M = 7 nm = FOR MORE INFORMTION Please call your Regional ustomer Service enter today to learn what Entegris can do for you. Visit entegris.com and select the ontact Us link to find the customer service center nearest you. TERMS ND ONDITIONS OF SLE ll purchases are subject to Entegris Terms and onditions of Sale. To view and print this information, visit entegris.com and select the Terms & onditions link in the footer. orporate Headquarters 29 oncord Road illerica, M 82 US ustomer Service Tel Fax Toll Free Entegris, the Entegris Rings Design, Pure dvantage, hemlock, Flaretek, and Protego are trademarks of Entegris, Inc. Kalrez is a registered trademark of E.I. du Pont de Nemours and ompany. Pillar is a registered trademark of Nippon Pillar Packing ompany, Ltd. Swagelok is a registered trademark of Swagelok ompany Entegris, Inc. ll rights reserved. Printed in the US ENT-97