QUICKCHANGE AT AND ATX DISPOSABLE FILTERS

Transcription

1 QUICKCHANGE AT AND DISPOSABLE FILTERS Nondewetting membrane technology in a prewet filter that delivers particle excursion protection, ease-of-use, rapid changeout and safety

2 QUICKCHANGE AT AND DISPOSABLE FILTERS the solution for aqueousbased chemical processes Overview Developed from the Mykrolis family of technologies, QuickChange disposable filters are designed for use in any aqueous-based chemical, are shipped water-wet and require no IPA prewetting procedures. Without an IPA prewetting requirement, QuickChange disposable filters prevent alcohol/chemical interaction, avoid potential sources of contamination and eliminate the cost and inconvenience of hazardous waste disposal. QuickChange disposable filters reduce filter change-out time, minimize system downtime and lower cost of ownership. Superior Filtration Efficiency and High Flow The combination of a nondewetting pleated membrane in a large filtration-area device allows QuickChange disposable filters to maintain high flow, even with small pore sizes. By maintaining consistent flow rates in outgassing chemistries such as SPM, SC1 and SC, QuickChange disposable filters can help stabilize process conditions. Less Handling, More Cleanliness and Safety QuickChange disposable filters eliminate handling of the filter element and decrease the possibility of contamination, making these filters ideal for critical applications that require highest purity liquids. QuickChange disposable filters feature a compact and easy-to-handle housing shell, which reduces potential exposure to hazardous chemicals during installation and disposal, and promotes a safer working environment. Leak-free connections allow easy, quick and safe filter changeout. Features Nondewetting PTFE membrane filter prewet and packaged in ultrapure DI water Designed without o-rings Available in retention ratings of.5 µm,.1 µm and. µm Compact, disposable unit High-performance membrane Many connection types available Benefits Eliminates prewetting and flushing cycles Eliminates chemical usage while reducing system downtime during filter changeouts Saves time and greatly increases equipment uptime Design incorporates no o-rings to avoid potential sources of contamination Provides excellent small particle retention for a variety of particle sizes Requires less space for changeout Minimizes downtime and simplifies changeout Rapidly reduces particle count Decreases system qualification time. Improves process parameters Connection types include: Super Type Pillar fittings, Super 3 Type Pillar fittings, Flowell fittings, FlareLock II and Flaretek compatible fittings

3 Dimensions QuickChange AT and Chem-Line TM I Disposable Filters T-Line 3 Pillar Fittings mm (.3 ) 3 mm (1. ) mm (.3 ) 9 mm (3.5 ) 1 mm (.55 ) M P5 9 mm (3.5 ) L-Line 3 Pillar Fittings 9 mm (3.5 ) 35 mm (1.3 ) mm (.3 ) 1 mm (.55 ) 9 mm (3.5 ) mm (.3 ) M P5 T-Tube 3 Super Type Pillar Fittings 3 mm (1. ) mm (1.5 ) mm (1.55 ) mm (1.5 ) 1 mm (.55 ) M P5 5.5 mm (1.7 ) AT 1 mm (. ) 1 mm (11. ) 1 39 mm (15. ) 1 mm (. ) mm ( ) AT mm (13. ) mm (. ) mm (13. ) 5 mm (.9 ) mm (.9 ) 1 mm (.5 ) mm (. ) 1 mm (. ) AT 1 mm (. ) 1 mm (11. ) 1 39 mm (15. ) AT mm (13. ) mm (. ) mm (13. ) 5 mm (.9 ) mm ( ) mm (.9 ) 1 mm (.5 ) mm (. ) AT mm (1. ) 5 mm (17.5 ) 7.5 mm (3.9 ) AT 33 mm (15. ) 37 mm (1.5 ) mm ( ) 5 mm (.9 ) mm (.9 ) 1 mm (.5 ) mm (. ) T-Tube 3 Super 3 Type Pillar Fittings 3 mm (1. ) 7 mm (1.51 ) 1 mm (.55 ) T-Tube 3 Flowell Series Fittings 3 mm (1. ) 5 mm (9. ) 1 mm (.55 ) T-Tube 3 FlareLock II Fittings 3 mm (1. ) 5 mm (9. ) 1 mm (.55 ) mm (1.5 ) M P5 mm (1.5 ) M P5 mm (1.5 ) M P5 mm (1.5 ) mm (1.5 ) mm (1.5 ) 7.5 mm (3.9 ) 5 mm (.9 ) 7 mm (. ) 5 mm (.9 ) 7 mm (. ) 5 mm (.9 ) mm (17.5 ) 37.5 mm (1.7 ) mm ( ) mm (.9 ) 1 mm (.5 ) mm (. ) AT 1 9 mm (17. ) mm 3 mm ( ) (. ) 1 3 mm (17.1 ) AT mm (13.7 ) 7 mm (9.7 ) 1 3 mm (1.17 ) mm (.9 ) 1 mm (.5 ) mm (. ) 3 mm (. ) 1 3 mm (17.1 ) 7 mm (9.7 ) 1 3 mm (1.17 ) mm ( ) mm (.9 ) 1 mm (.5 ) mm (. )

4 Chem-Line TM II Disposable Filter with Flaretek Compatible Fittings Inlet/Outlet Fittings Dim A 3 3. mm ±1.3 mm (9.1 ±.5 ) Chem-Line TM II 1 Disposable Filter with Flaretek Compatible Fittings Inlet/Outlet Fittings Dim A mm ±1.3 mm (13.59 ±.5 ) QuickChange AT and Chem-Line TM I Filter with Flaretek Compatible Fittings 37.1 mm ±.7 mm (1. ±.3 ) mm ±1.3 mm (9.5 ±.5 ) mm ±1.3 mm (13.95 ±.5 ) mm ±1.3 mm (9.5 ±.5 ) mm ±1.3 mm (1.3 ±.5 ) mm ±1.3 mm (9.9 ±.5 ) Performance Data Flow Rates mm ±1.3 mm (1.3 ±.5 ) A 13.1 mm ±1 mm (. ±. ) QuickChange AT 1 Disposable Filter with 3 Fittings Typical Flow Rate (l/min.) 1 C µm.1 µm. µm 11 mm ±.3 mm (.33 ±.1 ) QuickChange Disposable Filter with 3 Fittings Typical Flow Rate (l/min.) 1 C 3 3 QuickChange Disposable Filter with 1 Fittings Typical Flow Rate (l/min.) 1 C QuickChange Disposable Filter with 3 Fittings Typical Flow Rate (l/min.) 1 C QuickChange Disposable Filter with 1 Fittings Typical Flow Rate (l/min.) 1 C 1 1 1

5 Performance Data Flow Rates.5 µm.1 µm. µm QuickChange 1 Disposable Filter with 3 Fittings Typical Flow Rate (l/min.) 1 C 3 3 QuickChange 1 Disposable Filter with 3 Fittings Typical Flow Rate (l/min.) 1 C QuickChange 1 Disposable Filter with 1 Fittings Typical Flow Rate (l/min.) 1 C QuickChange 1 Disposable Filter with 1 Fittings Typical Flow Rate (l/min.) 1 C Specifications Materials: Membrane Prewet, nondewetting PTFE Supports Disposable shell Retention rating:.5 µm,.1 µm and. µm PFA PFA, containing ultrapure DI water Membrane area: AT 1 filter 9, cm (9.7 ft. ) filter 5, cm (5. ft. ) 1 filter 13, cm (1. ft. ) Maximum operating Maximum operating pressure.579 MPa (5.79 bar; 5 C conditions:.517 MPa (.517 bar; C Compatibility: Maximum forward.1 MPa (.1 bar; 5 C differential pressure.517 MPa (.517 bar; C Maximum reverse.35 MPa (3.5 bar; 5 5 C differential pressure Maximum operating temperature 15 C at.5 MPa (.5 bar; 7.5 PSI) Entegris recommends QuickChange disposable filters for use with aqueous-based chemicals at ambient temperatures (including H SO, H 3 PO, HNO 3, HF, HCl, BOE, NH F, H O, TMAH, NH OH and ozonated water) and elevated temperature applications (including SC1, SC, SPM and metal etch)

6 Ordering Information QuickChange AT 1 Chem-Line TM I Disposable Filter Part Number QCD X A T1 XX Retention Rating Z =.5 µm V =.1 µm G =. µm QuickChange Disposable Filter Part Number QCD X S TX XX Fitting Retention Rating Z =.5 µm V =.1 µm G =. µm QuickChange 1 Disposable Filter Part Number QCD X A TX XX Retention Rating Z =.5 µm V =.1 µm G =. µm Fitting LH = 3 inlet/outlet, L-line, 1 vent/drain, Super Type Pillar fittings TH = 3 inlet/outlet, T-line, 1 vent/drain, Super Type Pillar fittings TP = 3 inlet/outlet, T-tube, 1 vent/drain, Super Type Pillar fittings TW = 3 inlet/outlet, T-tube, 1 vent/drain, Flowell fittings CHEM-LINE TM II STYLE HOUSINGS 1F = 3 inlet/outlet, 1 vent/drain, Flaretek compatible fittings F = 1 inlet/outlet, 1 vent/drain, Flaretek compatible fittings F = 3 inlet/outlet, 1 vent/drain, Flaretek compatible fittings F = 1 inlet/outlet, 1 vent/drain, Flaretek compatible fittings CHEM-LINE TM I STYLE HOUSINGS LH = 3 inlet/outlet, L-line, 1 vent/drain, Super Type Pillar fittings TH = 3 inlet/outlet, T-line, 1 vent/drain, Super Type Pillar fittings TW = 3 inlet/outlet, T-tube, 1 vent/drain, Flowell fittings TF = 3 inlet/outlet, T-tube, 1 vent/drain, FlareLock II fittings Fitting CHEM-LINE TM II STYLE HOUSINGS 1F = 3 inlet/outlet, 1 vent/drain, Flaretek compatible fittings F = 1 inlet/outlet, 1 vent/drain, Flaretek compatible fittings F = 3 inlet/outlet, 1 vent/drain, Flaretek compatible fittings F = 1 inlet/outlet, 1 vent/drain, Flaretek compatible fittings CHEM-LINE TM I STYLE HOUSINGS LH = 3 inlet/outlet, L-line, 1 vent/drain, Super Type Pillar fittings TH = 3 inlet/outlet, T-line, 1 vent/drain, Super Type Pillar fittings TP = 3 inlet/outlet, T-tube, 1 vent/drain, Super Type Pillar fittings T3 = 3 inlet/outlet, T-tube, 1 vent/drain, Super 3 Type Pillar fittings TW = 3 inlet/outlet, T-tube, 1 vent/drain, Flowell fittings TF = 3 inlet/outlet, T-tube, 1 vent/drain, FlareLock II fittings For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit and select Regional Customer Service Centers for the center nearest you. Terms and Conditions of Sale All purchases are subject to Entegris Terms and Conditions of Sale. To view and print this information, visit Entegris website at and select the Legal Notices link from the footer found on the home page. Entegris, Mykrolis, QuickChange, FlareLock, Flaretek and Chem-Line TM are trademarks of Entegris, Inc. Flowell is a registered trademark of Flowell Corporation. Pillar is a registered trademark of Nippon Pillar Packaging Company, Ltd. ENTEGRIS, INC. Corporate Headquarters / 35 Lyman Boulevard / Chaska, Minnesota 5531 USA Customer Service Tel / Customer Service Fax The materials integrity management company Entegris, Inc. All rights reserved Printed in USA 5-513ENT-7