CP-PC-2260E Kawana, Fujisawa Kanagawa Japan URL:

Transcription

1 CP-PC-E Please read the "Terms Conditions" from the following URL before ordering or use: product names, model numbers company names may be trademarks of the respective company. [Notice] Specifications are subject to change without notice. No part of this publication may be reproduced or duplicated without the prior written permission of Azbil Corporation. Yamatake Corporation changed its name to Azbil Corporation on April,. -- Kawana, Fujisawa Kanagawa - Japan URL: st Edition : July. -JBA th Edition :. - () CP-PC-E

2 Table of Contents Search by model number Accessories Select by Select by Select by shape or optical type application environment Search by type or application Search by type or application Screw Most generally used. Use by attaching to a bracket, etc. Sleeve Use to maintain a small distance between target object sensor in a limited space. Vane Suitable for installation where space is limited. Attach directly to casing. P7 P7 P Heatproof Resistant to high temperatures. Use in environments up to. Liquid level detection Lens unit accessory Liquid level detection P Long-distance lens / side view unit Cylindrical Suitable for installation where space is limited. Use by attaching with the setscrew. Side view ght emitted to the side.use to maintain a small distance between target object sensor in a limited space. reflection P P P Search by model number P Resistant to ambient influences. Use for target object detection in a limited area. Protected with PFA tubing for excellent chemical resistance. Liquid leak detection P P9 Passing chip detection P Coaxial Used for target object positioning or in combination with spot lenses. Narrow view spread minimized. Use in a place where light intrusion is undesirable. Area Wide light beam.use for target object with varying detection positions, detection of meering, etc. Vacuum Usable in a vacuum. length can be specified. Wefer Mapping P P P P P F-T _ F- T F- T F- T F- T F- T F- T F- T7 F- T F- T9 F- T F- T F- T F- T F- T7 F- T F- T9 F- T F- T F- TT F- TS F- TWT F- T F- T F- T F- TB F- T F- T F- TLF F- T9 F- T9E F- T F- T F- T F- TE F- TE-L F- T F- T F- TE F- TE-L F- T F- T F- T7 F- T F- T9 F- T F- T F- T F- T F- T7 F- T-L F- VT Page P P P7 P7 P P7 P P P P P P P P P P9 P9 P, P P7 P7 P7 P7 P7 P7 P9 P P P7 P P P P P F-D _ F- D F- D F- D F- D F- D F- D F- D9 F- D F- D F- D F- D F- D F- D F- D F- D9 F- D F- D F- D F- D F- D F- D7 F- D F- DF F- DT F- D9 F- D F- D F- DB F- D F- D F- D F- DC F- D F- D7 F- D F- D9 F- D F- D F- D F- D F- DLF F- D9 F- VD Page P P P7 P P P7 P P P P9 P P7 P7 P P P P P P P P P P P P P P P P P P7 P P P P Lens unit accessory FE- PA-F PA-FB PA-FB PA-FB PA-L PA-S F- AT AT EUA EU EU LU LU LU7 LU LU9 VA VJ VL VL X- PA Page P P P P P P P P P P P P P P P P P P P, P, P Screw Cylindrical Coaxial Sleeve Side view Narrow view reflection Area Heatproof Use Lens unit Guide Amplifiers Model F Series

3 Introducing: Combination Amplifiers Introducing: Fiber Customization Services High performance Advanced functions X-AG series <Exterior view> <Operation panel> X-EG series <Exterior view> Typical models Type Stard Space-saving (main unit) Space-saving (expansion unit) Double digital display High-sensitivity, ultra-long distance detection Multifunctional models (Alarm output, differential output, two outputs, databank, etc.) <Stards compliance> Typical models Type Stard Space-saving (main unit) Space-saving (expansion unit) X-AG-S X-AG-S X-AG-S X-AG-S X-AG-S X-AG-S Change the cable length If fiber length is insufficient, you can specify a cable length. <Example model number> F-T-L production evaluation. Applicable models F-T F-D F-T F-D F-T7 F-D <List example> Front end dia Extendable φ. Bendable (-mm radius) D E Example model number φ. For an F-T with a mm sleeve m fiber unit cable R F-T-SL is the model number. shape to Price: Determined by quantity Qty: No minimum ( cable or more) * For details on the scanning distances with a different cable length, see the Guide (page 9). * The cable cannot be lengthened on some models. For details, please contact our sales staff. Change the sleeve length A range of on-site services are available, such as emergency sensor additions changes, sample The stard (base) model No. Base model number S + -digit sleeve length. L: Fiber length m L: Fiber length m L: Fiber length m length. This can be omitted if length is stard. R R Customizable models have this label. Price: Determined by quantity Quantity: No minimum ( cable or more) Stard Volume <Operation panel> X-A series series <Exterior view> <Operation panel> Double digital display Built for usability (Sensitivity auto-change function, threshold value tracking function) <Stards compliance> Typical models Type Low hysteresis High sensitivity Sensitivity adjuster with indicator Self-diagnostic display (output) Slim mm profile <Stards compliance> X-A Introducing: Element Types Material of element Plastic Multi-component glass Performance/Feature General -purpose Bend tolerant Unbreakable Heatproof Heatproof Vacuum Two types, Bend-tolerant fiber unit R For use in moving environments Cyclic bending test (reference) <List example> Bend radius Length Amp M X-AG H R Unbreakable m X-EG X-A Indicates element type. Unbreakable fiber unit (stationary bend type) Even if the cable is bent at a small radius, the light level does not change. Thanks to multi-core structure bundling several s of fiber elements, bending the cable does not attenuate the light level. R R Bent ±9 [Measurement conditions] Roller diameter: mm ( mm in radius) Load: g For example, F-T -T9 withst,, bends under these conditions without breaking. Conventional fiber core structure Unbreakable fiber core structure F Series

4 Applications Case Studies (with actual workpiece data) This section gives application case studies along with evaluation data using actual workpieces. Liquid level detection Type Specialized use () Catalog listing F-D7, F-D Liquid level detection Type Specialized use () Catalog listing F-T_, F-T_ Target object Water Target object Water Reference data Received light level display value Combination amplifiers: X-EG series (Sensing model : ) Catalog listing F-D7 F-D Reference data Received light level display value Combination amplifiers: X-AG series (Sensing mode : For mm dia. pipe only : ) Catalog listing F-T F-TE F-T F-TE Presence of liquid Pipe diameter mm mm mm 9 mm Presence of liquid Absence of liquid Liquid level detection Absence of liquid Liquid level detection P P7 Wafer mapping Type Narrow view () Catalog listing F-T Target object Wafer projection detection Gold wire detection Silicon wafer ( mm) Type Narrow view () Catalog listing F-T Target object Silicon wafer ( mm) Type Coaxial () Catalog listing F-D9 Target object Gold wire (φ7 μm) Reference data level change characteristics Combination amplifiers: X-AG series (Sensing model : ) Double layer Diagonal installation intensity (%) Reference data Combination amplifiers: X-AG series (Sensing model: ) Parallel displacement Item σ Max - Min * intensity is % when there is no wafer. Displacement (mm) X Y Amount μm max. μm Edge detection repeatability accuracy Reference data Detection area characteristics Combination amplifiers: X-AG series (Sensing model :, ) 7 Scanning distance X (mm) Narrow view Narrow view 9 Sensing model Ft Coaxial P P P Screw Cylindrical Coaxial Sleeve Side view Narrow view reflection Area Heatproof Use Lens unit Liquid leak detection Type Specialized use () Catalog listing F-D Target object Reference data Received light level display value Combination amplifiers: X-EG series (Sensing mode: ) Catalog listing F-D Presence of liquid Absence of liquid Sensor floating Lead frame detection Type Area () Catalog listing F-D Target object Reference data Excess gain Combination amplifiers: X-AG series (Sensing model : ) Excess gain factor (times) F-D F-D Guide Amplifiers Model Water Liquid leak detection Lead frame size mm mm Area P Note: The possibility of detection, as well as the measurement performance degree of accuracy, are affected by the actual working conditions. Before using the fiber unit, carry out a careful operation check. F Series

5 Applications Case Studies (with actual workpiece data) Passing chip detection Type Specialized use () Catalog listing F-D7, F-D Target object. mm. mm mm Target object size mm. mm Thickness. mm Chip face/back discrimination Type Coaxial ()/ Micro-Spot Lens Catalog listing F-D, F-LU7 Target object (Back) Target size mm. mm Substrate "Bad" mark detection Type Coaxial () / Micro-Spot Lens Catalog listing F-D, F-LU Target object Reference data level change characteristics Combination amplifiers: X-EG series (Sensing model : ) Rate of received light level change (%) Time (ms) Notes: The characteristic changes depending on the fall velocity attitude of the chip. This chart shows data for when the adapter for a small-diameter pipe (F-AU) is attached. Reference data Received light level display value Combination amplifiers: X-EG series (Sensing model : ) - mm - mm Scanning distance Focal Distance + mm + mm Front of component Rear of component Reference data Received light level display value Combination amplifiers: X-AG series (Sensing model : Ft) Scanning distance Mark Reject mark - mm Passing chip detection Coaxial/Micro-Spot Lens P P Glass detection Type General-purpose screw () Catalog listing Fiber: F-D Amplifiers:X-AG series () Glass detection Target object Black mask Type reflection () Catalog listing F-DT Target object Glass substrate Reference data Excess gain Combination amplifiers: X-AG series (Sensing model :) Excess gain factor (times) 7 9 Reference data Excess gain Combination amplifiers: X-AG series (Sensing model : ) Excess gain factor (times) Screw AG Plain glass Vapordeposited glass Black mask reflection P P Screw Cylindrical Coaxial Sleeve Side view Narrow view reflection Area Heatproof 7 Detection of meering Type Area () Catalog listing F-TT_ Gold pattern Approx. mm dia. Reject mark *The reject mark is applied to the gold pattern using an oil-based red felt pen. Target object Opaque Sheet Reference data level change characteristics Combination amplifiers: X-MA series SENS:FINE RESP:NORMAL Rate of received light level change (%) - mm Focal Distance + mm + mm 7 - Coaxial/Micro-Spot Lens Xmm - - TWT TT T Displacement Note: Optical center is aligned at mm Area P P Excess gain Understing the graphs The excess gain indicates the magnitude of output from the light-receiving element relative to the amount of light received by the fiber unit (which varies depending on the distance). The graph shows that at a distance of, the output from the light-receiving element is times the level required for operation. This surplus is available in case there is a decrease in the incoming light level due to misalignment of the optical axis, dirt on the light-receiving element, etc. Note: On an excess gain graph, the minimum operating level of the amplifier is set at. Detection area The detection area is a characteristic used for diffuse scans. The graph shows the operation points of the fiber sensor when a stard target object (white paper) is moved perpendicular to the optical axis at the maximum sensitivity setting. This illustrates the extent of detectable light around the fiber unit. Note: For the excess gain graph, the minimum operating level of amplifier unit is set as. Detection availability, measurement performance, accuracy also depend on actual working conditions. Use the fiber unit after carrying out in advance an operation check evaluation. Excess gain factor (times).. Scanning renge Stard target object Sensing distance Use Lens unit Guide Amplifiers Model F Series

6 Screw Most generally used. Use by attaching to a bracket, etc. F-T F-T Unit mm Screw Straight type Type Straight Bolt Elbow Size M M M M Lens attachable D Lens attachable E Lens attachable F Lens attachable to +7 to +7 to +7 to +7 to +7 to +7 to +7 Bend tolerant Bend tolerant Bend radius Length Amp Mode Distance X-AG R X-EG 9 Unbreakable X-A X-AG R X-EG R R Unbreakable R R R R Unbreakable R Elbow type X-A X-AG 7 9 X-EG X-A X-AG 9 X-EG X-A Bolt type Core φ. φ. φ.7 φ. X-AG, X-EG φ. X-A X-AG,7 X-EG 77 φ. X-A X-AG 9 X-EG φ. X-A 9 X-AG X-EG φ. X-A X-AG X-EG 7 φ. X-A For combined lenses, see P For diffuse scan type, see page 9. detectable φ. φ. φ. φ. φ. φ. φ. φ. φ. *For scanning distances of the sensing modes, see the Guide (page ). *Response times for the sensing types: ms, ms, µs. *The values shown in the Minimum detectable size column were obtained with optimal scanning distance sensitivity settings (X-AG). F-T F-T F-T F-T F-T F-T F-T F-TB F-T F-T F-T F-T F-T F-TB φ. φ. φ. φ. φ. φ M(SUS) M. M(SUS) φ. Epoxy resin M(SUS) M. NOTEWORTHY φ φ. φ. E. F-T. φ.7 φ. φ. F-T φ. M(SUS) M. R M M. M φ.(sus Products allowing either nut or setscrew installation are available for flexible operability, maintenance parts consolidation, other factors. F-TB Nut installation Attachment method selectable Setscrew installation (SUS) Applicable model number (SUS) φ D φ. F φ.7(sus φ. Form Type Model no. Straight Straight Bolt F-T F-T F-TB D- cutout Cylindrical Coaxial Sleeve Side view Narrow view reflection Area Heatproof Use Lens unit Guide Amplifiers Model 9 F Series

7 Screw Most generally used. Use by attaching to a bracket, etc. Straight type Elbow type Bolt type For thru scan see page 9. Type Size Core detectable Bend radius Length Amp Mode Distance M G X-AG R X-EG emitter Unbreakable φ. X-A X-AG R X-EG emitter to +7 φ. X-A H X-AG R X-EG emitter Bend to +7 φ. tolerant X-A φ. φ. φ. F-D9 F-D F-D7 I X-AG 7 M R X-EG emitter φ. F-D to +7 φ.7 Straight X-A J X-AG 9 R X-EG emitter φ. F-D Unbreakable φ. X-A X-AG R X-EG emitter φ. F-D Bend tolerant φ. M X-A X-AG 7 R X-EG emitter φ. F-D φ. X-A X-AG R X-EG 9 emitter φ. F-D to +7 φ. X-A *For scanning distances of the sensing modes, see the Guide (page ). *Scanning distances for diffuse scan are obtained with a stard target object (plain white paper). *Response times for the sensing types: ms, ms, µs. *The values shown in the Minimum detectable size column were obtained with optimal scanning distance sensitivity settings (X-AG). F-D φ. F-D9 φ. F-D Dummy: φ. φ.7 M (SUS) M (SUS) G I F-D7 Emitter core dia.: φ. core dia.: φ. φ φ M (SUS) φ φ. F-D φ. F-D φ. F-D Emitter core dia.: φ. core dia.: φ. F-D φ. φ M (SUS) Unit mm H J Screw Cylindrical Coaxial Sleeve Side view Narrow view reflection Area Heatproof Use Lens unit Amplifiers Model F Series

8 Cylindrical Suitable for installation where space is limited. Use by attaching with the setscrew. Straight type Type Size Core detectable Bend radius Length Amp Mode Distance X-AG 7 φ R. m X-EG 7 φ. φ. F-T to +7 X-A X-AG R m X-EG φ. φ. F-T9 to +7 Bend tolerant X-A X-AG φ. R m X-EG φ. φ. F-T to +7 Bend tolerant X-A D X-AG R. m X-EG to +7 Straight X-A φ. φ. F-T E X-AG φ R m X-EG φ. φ. F-T to +7 X-A F X-AG 9 R m X-EG φ. φ. F-T to +7 Unbreakable X-A G X-AG, φ R m X-EG φ. φ. F-T to +7 X-A G X-AG,7 R m X-EG 77 φ. φ. F-T to +7 X-A Lens attachable P For head dia. of less than φ. mm (thru scan) or φ. mm (diffuse scan), select from sleeve-type sensors. P7 Side-view sensors Compatible lenses F-T φ. F-T φ. F-T φ. F-T φ. F-T φ. F-D φ. M. φ φ φ φ. (SUS) φ. Nylon resin φ.7 Polyester resin φ. φ. (SUS) φ (SUS) φ (SUS) φ (SUS) φ E G I F-T9 φ. F-T φ. F-T φ. F-D Emitter core dia.:. dia. core dia.:. dia. φ. (SUS) φ φ. (SUS) φ (SUS) φ. φ. (SUS) φ. φ (SUS) φ. Polyethylene resin D φ. Nylon resin F H φ. Polyethylene tube φ. (plastic) Cylindrical Screw Coaxial Sleeve Side view Narrow view reflection Area Heatproof Use Lens unit Type Size Core detectable Bend radius Length Amp Mode Distance H X-AG R m X-EG φ. emitter φ. F-D Bend to +7 φ. tolerant Straight X-A I X-AG R X-EG φ emitter φ. F-D to +7 φ. X-A *For scanning distances of the sensing modes, see the Guide (page ). *Scanning distances for diffuse scan are obtained with a stard target object (plain white paper). *Response times for the sensing types: ms, ms, µs. *The values shown in the Minimum detectable size column were obtained with optimal scanning distance sensitivity settings (X-AG). NOTEWORTHY Smallest fiber unit head dia. (. mm) in the industry F-T Compatible lens units are available for cylindrical types FE-PA-L(For long distance narrow beam types) F-T FE-PA-S(For side view types) Amplifiers Model F Series

9 Coaxial Used for target object positioning or in combination with spot lenses. Straight type Type Size Core detectable Bend radius Length Amp Mode Distance X-AG 9 Emitter: φ. R.m X-EG : φ. F-D Bend to +7 φ. tolerant X-A X-AG Emitter: Emitter: R φ. : R X-EG : φ. F-D Unbreakable φ. X-A X-AG Emitter: φ. Straight M R X-EG : φ. F-D to +7 φ. X-A X-AG Emitter: φ. R m X-EG : φ. F-D9 to +7 9 φ. X-A 9 D X-AG Emitter: φ. R X-EG 9 : φ. F-D to +7 9 φ. X-A E X-AG Emitter: Emitter: R Bolt M m X-EG φ. : R : φ. F-DB to +7 Unbreakable φ. X-A 9 F X-AG Emitter: φ. M R X-EG 9 : φ. F-D to +7 9 φ. X-A X-AG G Emitter: M R X-EG φ. 9 : φ. F-D9 to +7 φ. Straight X-A X-AG H Emitter: φ φ. R X-EG : φ. F-D to +7 φ. X-A 9 I X-AG Emitter: φ R X-EG φ. 9 : φ. F-DC to +7 9 φ. X-A Lens attachable Lens attachable Lens attachable Lens attachable Lens attachable Lens attachable Lens attachable Bolt type For compatible micro-spot lenses *For scanning distances of the sensing modes, see the Guide (page ). *Scanning distances for diffuse scan are obtained with a stard target object (plain white paper). *Response times for the sensing types: ms, ms, µs. *The values shown in the Minimum detectable size column were obtained with optimal scanning distance sensitivity settings (X-AG). P F-D F-D9 F-DB. F-D9 F-DC. Emitter core dia.: φ. core dia.: φ. Emitter core dia.: φ. core dia.: 9 φ. Emitter core dia.: φ. core dia.: φ. (Dummy: φ.) Emitter core dia.: φ. core dia.: φ. Emitter core dia.:φ. core dia.:9 φ. M (SUS) 9. V Groove M (SUS) φ... M (SUS) φ Epoxy resin φ. (plastic) φ.9 (Emitter) φ. () φ. φ (SUS) M (SUS) φ φ. φ. E φ. G I F-D Emitter core dia.: φ. core dia.: φ. (Dummy: φ.) F-D Emitter core dia.: φ. core dia.: φ. (Dummy: φ.) F-D Emitter core dia.: φ. core dia.: 9 φ. F-D Emitter core dia.: φ. core dia.: 9 φ. F-D Emitter core dia.: φ. core dia.: φ. M (SUS) Stard General diffuse scan type used conventionally M (SUS) M (SUS) φ (SUS) φ φ (SUS) NOTEWORTHY φ Coaxial fiber is recommended for use with micro-spot lenses applications requiring highly precise positioning. Coaxial Used in combination with micro-spot lenses, for positioning use, etc. φ. φ Detection fiber fiber D φ. F H Coaxial Screw Cylindrical Sleeve Side view Narrow view reflection Area Heatproof Use Lens unit Amplifiers Model Target Target F Series

10 Sleeve Use to maintain a small distance between target object sensor in a limited space. Front end dia. φ. Extendable φ. Extendable φ. Bendable (-mm radius) φ. Bendable (-mm radius) D Straight type to +7 to +7 to +7 to +7 Bend radius R R R R Length.m Amp X-AG X-EG X-A X-AG 7 X-EG 7 X-A X-AG, X-EG X-A Mode Distance X-AG, X-EG X-A Sleeve-length customization Core φ. detectable F-T9 F-T F-T F-T Front end dia. Core detectable Bend radius Length Amp Mode Distance X-AG E φ. R.m X-EG emitter φ. F-D9 Bend to +7 φ. tolerant X-A X-AG F φ. R.m X-EG emitter φ. F-D9 to +7 φ. X-A Extendable G X-AG φ. R X-EG emitter φ. F-D Bendable (-mm radius) to +7 φ. X-A H X-AG φ. R X-EG emitter φ. F-D to +7 φ. X-A Extendable I X-AG φ. R X-EG 9 emitter φ. F-D Bendable (-mm radius) to +7 φ. X-A φ. φ. φ. P Side-view sensing φ. φ. φ. φ. F-T9. φ. F-T φ. F-D9 φ. F-D φ. F-D φ. Note φ. (SUS) Note M (SUS) φ. (SUS) φ. Note Note Note φ. (SUS) φ. (SUS) φ. (SUS) φ. (SUS) Note: Area that cannot be bent M (SUS) φ. (SUS) Note Note: Area that cannot be bent M (SUS) φ. (Nylon resin) E G φ I Note: Area that cannot be bent F-T φ. F-T φ. F-D9 φ. F-D Note φ. (SUS) φ (SUS) Note φ D φ. (SUS) φ (SUS) φ. φ. (SUS) Note: Area that cannot be bent φ (SUS) F φ H φ. φ. (SUS) φ (SUS) φ Sleeve Screw Cylindrical Coaxial Side view Narrow view reflection Area Heatproof Use Lens unit *For scanning distances of the sensing modes, see the Guide (page ). *Scanning distances for diffuse scan are obtained with a stard target object (plain white paper). *Response times for the sensing types: ms, ms, µs. *The values shown in the Minimum detectable size column were obtained with optimal scanning distance sensitivity settings (X-AG). Amplifiers Model 7 F Series

11 Side view emitted to the side. Use to maintain a small distance between target object sensor in a limited space. Straight type Narrow view sensing Front end dia. Center of optical axis (From Core detectable front end) Bend radius Length Amp Mode Distance Extendable. X-AG φ. R m X-EG φ. φ. F-T7 to +7 X-A. X-AG φ R X-EG φ. φ. F-T to +7 Unbreakable X-A. X-AG φ R X-EG φ. φ. F-T7 to +7 X-A. D X-AG 9 φ R X-EG φ. φ. F-T to +7 X-A P Sleeve-length customization P F-T7 Enlargement D-shape cutout Optical axis... Optical axis F-T7.. Optical axis F-D.. Enlargement Optical axis D-shape cutout F-D Enlargement D-shape cutout Optical axis... Optical axis Enlargement D-shape cutout φ. φ (SUS) φ (SUS) φ. (SUS) φ. (SUS) φ φ E φ (SUS) φ G F-T ( dia.) Enlargement D-shape cutout Optical axis.. Optical axis F-T. F-D Enlargement D-shape cutout. Optical axis.. Enlargement D-shape cutout Optical axis... Optical axis. Optical axis φ(sus) φ (SUS) φ. (SUS) φ (SUS) φ. φ. (SUS) φ D F φ Side view Screw Cylindrical Coaxial Sleeve Narrow view reflection Area Heatproof 9 Front end dia. Extendable φ φ φ Center of optical axis (From front end)... E F G to +7 to +7 to +7 Bend radius Length R R R Amp Mode Distance X-AG 7 X-EG X-A X-AG X-EG 7 X-A X-AG X-EG X-A Core emitter φ. emitter φ. emitter φ. detectable φ. φ. φ. *For scanning distances of the sensing modes, see the Guide (page ). *Scanning distances for diffuse scan are obtained with a stard target object (plain white paper). *Response times for the sensing types: ms, ms, µs. *The values shown in the Minimum detectable size column were obtained with optimal scanning distance sensitivity settings (X-AG). F-D F-D F-D Optical axis Unique feature.7. Optical axis φ (SUS) NOTEWORTHY D-shape cutout All side view types have D-shape cutout on the fiber unit head. This can greatly reduce adjustment man-hours during installation. The D-shape cutout perpendicular to the optical axis facilitates alignment. Selection point The distance from the front end to the center of the optical axis depends on the product structure. Select the model that is suitable for your application. Optical axis position for side view unit. (Example) In detection of small component dislocation, the distance from the front end to the center of the optical axis is important. Use Lens unit Guide Amplifiers Model F Series

12 Narrow view spread minimized. Use in a place where light intrusion is undesirable. emitter Side ( from top) Directional angle (half angle). to +7 Bend radius R ( from side) Length Amp X-AG X-EG X-A Mode Distance 7 If a narrow beam is not required: Sleeve-type units Side-view units Effective lens diameter detectable φ. φ. P7 F-T F-T... F-T9 (Optical axis) Glass lens 7... Glass lens 9 φ (SUS) (SUS) 7.. φ. (SUS) 7 M (SUS) φ φ. F-T Glass lens F-T Enlargement D-shape cutout.. φ. (SUS) M (SUS) φ 7 D φ(sus) φ... Optical axis Narrow view Screw Cylindrical Coaxial Sleeve Side view Top Top Side.. D to +7 to +7 to +7 R R R X-AG,, X-EG 7, X-A, X-AG,, X-EG, X-A, 7 X-AG X-EG X-A,,, 9, φ.7 φ. φ. φ. φ. φ. F-T F-T9 F-T F-D Glass lens.7 φ (Aluminum) M (SUS).. φ E reflection Area Heatproof emitter Top Directional angle (half angle) E to +7 Bend radius Length R Amp Mode Distance X-AG X-EG X-A Effective lens diameter detectable φ. *For scanning distances of the sensing modes, see the Guide (page ). *Scanning distances for diffuse scan are obtained with a stard target object (plain white paper). *Response times for the sensing types: ms, ms, µs. *The values shown in the Minimum detectable size column were obtained with optimal scanning distance sensitivity settings (X-AG). F-D NOTEWORTHY Use Lens unit Narrow view types are available also by combination with long-distance lenses side-view lenses. (Typical examples) Optical configuration Lens unit Fiber unit Directional angle (half angle) Top FE-PA-L F-T Approx. Top F-VL F-T Approx. Side Side For lens units, see page. FE-PA-S F-VL F-T F-T Approx. Approx. Amplifiers Model F Series

13 Vane Suitable for installation where space is limited. Attach directly to casing. reflection Resistant to ambient influences. Use for target object detection in a limited area. Type emitter Core detectable Bend radius Length Amp Mode Distance X-AG Top R X-EG 9 to +7 Unbreakable Flat X-A φ. φ. F-T X-AG Flat R X-EG 7 φ. φ. F-TLF to +7 X-A X-AG Vane type R m X-EG φ. φ. F-T-L to +7 X-A Type Flat F-T ( from top) emitter Core detectable Bend radius Length Amp Mode Distance X-AG 9 D Flat R X-EG 7 emitter F-DLF to +7 Unbreakable φ. X-A 7 φ. (Core dia). R.. Brass (Ni plated) φ. R φ ( from flat) *For scanning distances of the sensing modes, see the Guide (page ). *Scanning distances for diffuse scan are obtained with a stard target object (plain white paper). *Response times for the sensing types: ms, ms, µs. *The values shown in the Minimum detectable size column were obtained with optimal scanning distance sensitivity settings (X-AG). F-TLF. Optical axis center:.7 SUS M φ. emitter Top Flat F-D F-DF. (optical axis). Acrylic resin. Aluminum (black anodized) 7 9 ( from top) to +7 to +7 to +7 Bend radius Length R R R Amp F-DT 9. φ. φ. φ 9 φ Mounting hole: φ. Heat-resistant ABS resin φ ( from flat) Mode Distance.±. X-AG.±. SF.±..±. 7.±. X-AG 7.±. SF 7.±. X-EG 7.±..±. X-AG.±. SF.±. X-EG.±. 9 Sensing surface φ. detectable φ. φ. φ. *For scanning distances of the sensing modes, see the Guide (page ). *Scanning distances for diffuse scan are obtained with a stard target object (plain white paper). *Response times for the sensing types: ms, ms, µs. *The values shown in the Minimum detectable size column were obtained with optimal scanning distance sensitivity settings (X-AG). Mounting hole: φ. Heat-resistant ABS resin φ F-D F-DT F-DF Screw Cylindrical Coaxial Sleeve Side view Narrow view Area Heatproof reflection Use Lens unit F-T-L Optical axis center..... Adhesive (black epoxy-based resin) 9 C. φ. Housing (black PPS) F-DLF. Optical axis center:. SUS M D... Amplifiers Model F Series

14 Area Wide light beam. Use for target object with varying detection positions, detection of meering, etc. Type Array Screen Optical configuration Flat Flat Flat Type Area width (mm). Side Optical configuration Area width (mm) Array Flat. D E NOTEWORTHY Bend radius R Bend tolerant R R R R Length Bend radius Length Amp X-AG 7 X-EG 7 X-A X-AG,, X-EG 7, X-A, X-AG X-EG X-A X-AG X-EG X-A Mode Distance 7 Amp Mode Distance X-AG X-EG X-A Small part passage sensing P,,7,,,,,,,, detectable φ. φ. φ. φ. detectable φ. *For scanning distances of the sensing modes, see the Guide (page ). *Scanning distances for diffuse scan are obtained with a stard target object (plain white paper). *Response times for the sensing types: ms, ms, µs. *The values shown in the Minimum detectable size column were obtained with optimal scanning distance sensitivity settings (X-AG). Type Array type from flat to +7 to +7 to +7 to +7 to +7 Features from side Bend tolerant Small diameter fibers are aligned in a row. Smaller slimmer sensor heads are also available. F-T F-TT F-TWT F-TS F-D F-T PBT resin. Optical axis (enlarged) φ. (core dia.) F-TS F-D Acrylic resin PBT resin Magnified view of optical axis φ. (core diameter).. M Note Material: Transparent polyester film (black print on back) F-TT comes with slits. Use the appropriate slit with the unit to achieve the desired scanning distance resolution. The slits can be bought as parts. Model No : X - PA M.. 9 SUS insert C. 9 SUS insert C.. (7.) 9. φ φ.. Heat-resistant ABS resin φ... Paper mat E F-TT F-TWT. 7 Acrylic resin. 9. Acrylic resin Accessory X-TT X-TWT φ... Note Material: Transparent polyester film (black print on back) F-TWT comes with slits. Use the appropriate slit with the unit to achieve the desired scanning distance resolution. φ φ Heat-resistant ABS resin φ. φ φ. 9 Heat-resistant ABS resin φ. D Area Screw Cylindrical Coaxial Sleeve Side view Narrow view reflection Heatproof Use Lens unit Screen type is collimated using the lens. This increases the scanning range makes the light uniform. Amplifiers Model F Series

15 Heatproof Resistant to high temperatures. Use in environments up to C. Heatproof Size Element detectable Bend radius Length Amp Mode Distance X-AG 9 Straight R X-EG φ. φ. F-T * to + X-A X-AG, Straight R X-EG φ. φ. F-T7 * to + X-A X-AG 7 Straight R m X-EG φ. φ. F-T to + X-A X-AG D 9 Straight R X-EG φ. φ. F-T to + X-A Heat resistant to Lens attachable Lens attachable Lens attachable Heat resistant to Compatible lenses P Heatproof Size Element detectable Bend radius Length Amp Mode Distance Straight X-AG 9 E R X-EG emitter φ. F-D * to + φ. X-A Straight X-AG F R X-EG 9 emitter φ. F-D * to + φ. X-A G X-AG 7 Straight R m X-EG 7 φ. φ. F-D to + X-A H X-AG 7 Straight R X-EG φ. φ. F-D to + 9 X-A *For scanning distances of the sensing modes, see the Guide (page ). *Scanning distances for diffuse scan are obtained with a stard target object (plain white paper). *Response times for the sensing types: ms, ms, µs. *The values shown in the Minimum detectable size column were obtained with optimal scanning distance sensitivity settings (X-AG). *. If a fiber unit is continuously used in an environment where it is at the upper limit of the operating temperature range, the detection distance will decrease. When selecting a fiber unit, be sure to take the ambient temperature into account so that the sensor is not continuously operating near its limits. F-T Effective dia.: φ. F-T Glass fiber: φ. (φ. ) F-D Effective dia.: φ. F-D Glass fiber: φ. ( φ. ) M. M. M (SUS) M (SUS) φ φ 7 M Note M Silicone tube Note φ (plastic) Note: Area where bending is not allowed φ9 Silicone tube φ. E φ. G Silicone tube φ (plastic) Note Note: Area where bending is not allowed F-T7 φ. F-T φ. 7 (Glass fiber) F-D φ. φ. F-D φ.( (φ. 7)) (Glass fiber) φ. M (SUS) φ. 7 M (SUS) φ M (SUS) φ 7 M. 7 φ.9 M (SUS) 7 + φ Stainless steel tube φ (plastic) φ Operating temperature range Stainless steel tube φ (SUS) + Operating temperature range NOTEWORTHY D F H φ (plastic) +7 Use the lens unit appropriate for your application. *Select a lens with the desired heat resistance. Heatproof temp. *Compatible lens units P. Lens Type Sensitivity FE-PA-L FE-PA-S F-VL F-VL Long distance Side Long distance Side Approx. Approx. Heatproof Screw Cylindrical Coaxial Sleeve Side view Narrow view reflection Area Use Lens unit Amplifiers Model 7 F Series

16 Protected with PFA tubing for excellent chemical resistance. emitter Size Top φ.7 Top φ.7 Side φ.7 from top from side Bend radius Length R to +7 R to +7 R to +7 Wet process sensors for level & leak detection P P7 Usage notes P Amp Mode Distance X-AG,, X-EG, X-A 7, X-AG X-EG 7 X-A X-AG, X-EG X-A 7 detectable φ. φ. φ. F-T9 F-T9E F-T F-T9 Lens dia.: φ. F-T Effective dia. φ..(optical axis) φ.7(pfa).7. Side view unit φ.(pfa) φ. φ.7(pfa) φ.(pfa) φ. F-T9E φ. F-D φ. φ.7(pfa) φ(pfa) φ.(pfa) φ. D φ(pfa) 9 Screw Cylindrical Coaxial Sleeve Side view Narrow view reflection Area Heatproof emitter Top Size φ D to +7 Bend radius Length PFA area: R area: R Amp Mode Distance 7 X-AG X-EG 7 X-A detectable *For scanning distances of the sensing modes, see the Guide (page ). *Scanning distances for diffuse scan are obtained with a stard target object (plain white paper). *Response times for the sensing types: ms, ms, µs. *For chemical resistance of fluorine-resin, see the Guide (page 7). *The values shown in the Minimum detectable size column were obtained with optimal scanning distance sensitivity settings (X-AG). F-D NOTEWORTHY Installation man-hours greatly reduced Simply cut the PFA-jacketed cable to length insert as is into the amplifier. Simply cut the PFA-jacketed cable. Conventionally After improvement Insert as is into the amplifier. The insertion area requires no PFA working. This is the difference! Saves space Tube has small outside diameter of. mm, which can save considerable space compared with previous models. Bend radius is also greatly improved. Use Lens unit PFA tube must be stripped off before inserting fiber. Fiber cut with a cutter can be directly connected to an amplifier. Amplifiers Model 9 F Series

17 Vacuum Usable in a vacuum. length can be specified. Product configuration Optional units Configuration of vacuum fiber model numbers F VT S S (Typical examples) Base model No. F drawing F-VD -S Heat resistant to Heat resistant to Vacuum fibers Model VT VD Head shape Optical couplers Coupler side shape S E Fiber unit for air length S S S Amp unit Straight Elbow (VT type only) Straight Elbow length mm to mm mm to mm mm to mm F-VT -S Usage notes P Description Ordering increment mm mm mm Options for vacuum fiber unit Product name Heatproof Optical coupler (two units) Fiber unit for air (two units in a pair) Long-distance lens unit (two units) Side-view unit (two units) F-VT_ Glass fiber bundle dia.: φ. (φ. ) F-VD_ Glass fiber bundle dia.: φ.7 ( φ. ) F-VT_-S Head shape (straight) M (SUS) F-VD_-S M. φ φ M.7(SUS) φ (SUS) φ.9 (SUS) φ.9 (SUS) 7 F-VT_ (straight) Glass fiber bundle dia.: φ. (φ. ) specifications length: m Bend radius: R Scanning distance: F-VT_-S Head shape (elbow) 7. M(SUS) M. F-V S-S Coupler side shape φ. End fitting: Stainless steel (SUS) Inside screw: M, depth of 7 φ 7 R φ. (SUS) φ. (SUS) F-VJ F-VA F-VL F-VL φ.9 (SUS) enlargement φ. Vacuum Screw Cylindrical Coaxial Sleeve Side view Narrow view reflection Area Heatproof Scanning distance [mm] CHART Specified cable length Scanning distance characteristics Characteristics of cable length versus scanning distance :X-AG : Scanning distance [mm] Specified cable length Plot of cable length versus scanning distance :X-AG : F-V -S Coupler side shape (Elbow) φ. enlargement F-VA : φ. φ End fitting: (SUS) Inside screw: M, depth of 7enlargement F-VA φ. φ. (SUS) φ (SUS). φ.. φ.(sus) φ (SUS) Fitting: (SUS) Inside screw: M, depth of 7 φ. F-VJ Mountable plate thickness: mm φ enlargement F-VL φ. (SUS) Vacuum side.. 7 (optical axis): φ. φ Straight knurl M.. Air side SUS. F-VL M. (9.) enlargement Glass lens φ (SUS M. Specialized Use Lens unit. (optical axis) Amplifiers Model Fiber length [mm] Fiber length [mm] *For fiber units for air, F-VA is used for calculation. *Scanning distances for diffuse-scan were obtained using a stard target object (plain white paper). *For calculations, was used as the sensing type for X-AG. F Series

18 Specialized Use Fiber Units for Small Parts Passage Detection Reliable detection of small parts moving through the pipe. Product features Attachments suited to different pipe diameters improve detection stability. (No attachment) There is an area of unreliable detection at the pipe rim due to light refraction. (With attachment) Use of a reflector matching the pipe diameter achieves reliable detection even at the rim. Recommended compatible amplifier unit X-AG (differential setting) model Exterior view Reflector Target object Pipe Reliably detects parts in the pipe. Weighs only g. For operation inside a moving device, highly bend-tolerant optical fiber cable are used. Wire lead-out follows the pipe, allowing a smaller footprint. By changing the attachment, the width of the detection area can be adjusted to match the pipe diameter. mm wide mm wide Swapping attachments easily gives the optimal area width. Unaffected by gradual light-level changes or stain buildup, this model provides stable detection. In addition, since the light level differentiation signal is transmitted as a second output, this model provides advance notice of sensitivity limitations. Conventional set value Received light intensity Options Mixing fiber unit Area width m F-T7... Bend radius Length Attachment for small-diameter pipes Product name Mixed R.m F-T7 fiver to +7 unit to +7 *Area width can be changed with attachments (sold separately). *Use F-T7 in combination with F-EUA. *Use F-EUA for scanning distances of cm or more. Mirror (Polycarbonate: evaporated aluminum) φ. F-AU (when used with F-T7). ABS resin (black) 9 Adapter φ φ. (Polyolefin resin).. F-EUA φ (Nylon resin) F-EUA F-AU (when used with F-T7) Bend radius R Length Fiber unit attach/detach lever F-AU (when used with F-T7). Adapter.. Pipe diameter mm mm mm F-AU Output F-AU F-AU F-AU F-EUA : φ. Mounting plate thickness:. -. mm Adapter Specialized Use Screw Cylindrical Coaxial Sleeve Side view Narrow view reflection Area Heatproof Vacuum Lens unit Operation panel F-T7 F-T7 F-T7 X-AG-S Output NPN Conventional output Differential output Eventually, always remains ON Appropriate output for each job Adjustment is needed Amplifiers Model F Series

19 Specialized Use Contact-Type Liquid Level Fiber Units All-resin structure ensures no metal contamination. Principle of detection Reliable detection is achieved by the proprietary structure of the fiber tip The proprietary structure provided at the tip of the fiber reduces malfunction due to liquid clinging. The lens built into the tip of the fiber ensures a large difference in light quantity between the conditions when liquid is present absent. No liquid (light received) Liquid present (no light received) companies models Problems due to liquid accumulation are reduced by Azbil corporation s innovative front end structure. Product lineup includes a small-diameter model (φ) for easier cable routing. Tip internal structure Lens Molded prism tip Fiber optic cable The molded prism fiber tip readily sheds water drops. Type φ φ to + to + F-D φ. Bend radius PFA area: R area: R PFA area: R area: R φ. (PFA) φ(pfa) Length ()(Bending not allowed) F-D F-D7 φ F-D7 φ.9. φ.(pfa) φ (PFA) () (Bending not allowed) Screw Cylindrical Coaxial Sleeve Side view Narrow view reflection Area Heatproof The principle uses the difference in the reflective index due to the presence of liquid. Recommended compatible amplifier unit Vacuum X-EG Series Exterior view Operation panel Typical models X-EG-S X-EG-S Output NPN PNP Auto sensitivity switch function This function automatically optimizes the sensitivity setting during auto tuning, affording easy operation while delivering the highest detection performance. High sensitivity Direct setting High precision SF SF SF SF Too much light for detection Contact-type liquid level detection When installing the unit, use commercially available fluorine-resin joint that matches the outside diameter of the PFA tube. Joints Operation may be unstable with the following conditions: Air bubbles adhering to the conical part of the sensing head precipitate on the conical part of the sensing head Liquids of high viscosity Usage Notes (type-specific) Some liquid properties, such as milky white color, may make the liquid undetectable. Be careful not to bump the fiber unit tip (especially the conical part). Operation may be unstable due to scratches on or deformation of the sensing head. If chattering occurs due to liquid dripping or bubbles, use a timer. Detection area of F-D7 Detection takes place within this range..7mm Liquid level detection positions vary depending on the surface tension of the liquid the wet condition of the fiber unit s detection area.. () Specialized Use Lens unit Amplifiers Model F Series

20 Specialized Use Pipe-Mounted Liquid Level Fiber Units A -axis array of light beams greatly eliminates interference from water droplets air bubbles. Principle of detection Operating principle of F-T TE Liquid present (Colorless liquid) received (Whitish liquid) received emitted emitted F-T,TE F-T,TE received Array of optical axes eliminates the effects of air bubbles water droplets Liquid absent reception is blocked when liquid is present, which prevents false detection due to a change in the liquid s color. Product features emitted Adverse effects from air bubbles water droplets are reduced, resulting in reliable detection. Product lineup includes differing detection methods for fail-safe detection. Can be used for pipe diameters of to9 mm. Operating principle of F-T TE Liquid present Liquid absent received emitted PFA-jacketed optical fiber received (When pipe contains air bubbles or is clouded.) received emitted emitted Clouding bubbles reduce the level of received light, but thanks to the operating principle (light = liquid present) they do not increase the risk of false delection. Fiber-optic cables protected by chemical-resistant resin can be run through machines equipment safely (F-T F-T only). Recommended compatible amplifier unit X-AG alarm output model Exterior view Operation panel Typical models X-AG-S X-EG-S Type Liquid-absent received light Liquid-present received light F-T F-TE F-TE-L Compatible pipe dia. (Attached to pipe) φ φ9mm /B φ φmm Output NPN PNP to +7 to +7 * Bend radius R R Alarm output model X-AG) This sensor warns if the scanning conditions are unsuitable by means of a second output (light-level drop alarm output). Sample use: surface detection of liquids such as slurry An alarm signal indicating a drop in the light level is output if the inside wall of the pipe becomes dirty, averting potential problems. Length m m F-T F-TE F-TE-L Coating material PFA Polyethylene PFA Polyethylene F-T F-TE F-TE-L F-T F-TE F-TE-L. After time passes Use with PFA transparent pipe with wall thickness of mm. Depending on the pipe actually used, as well as the liquid thru scan refractive ratios, fiber unit detection may not be reliable, so be sure to test the operation before use. If the fiber unit is used with other than the recommended pipe, material, or wall thickness, please test before use or consult our sales staff. * Specialized Use Screw Cylindrical Coaxial Sleeve Side view Narrow view reflection Area Heatproof Vacuum Lens unit Fail-safe concept Upper limit detection Liquid is present, so no light is received. Abnormality or Broken fiber, no light received Required optical system Models that receive light when there is no liquid F-T F-TE Lower limit detection Liquid is absent, so no light is received. Abnormality or Broken fiber, no light received Required optical system Models that receive light when liquid is present F-T F-TE F-T F-TE F-TE-L Pipe-mounted liquid level detection * length * dia. * mm min. mm min. mm min. φ. F-T F-TE F-TE-L Usage Notes (type-specific) Attach the unit using the supplied cable ties non-slip tubes as shown here. Securely fasten both the upper lower cable ties cut off any excess. Where additional cable ties are required, use ones which are no more than. mm wide (dimension A in the figure). A. * length * dia. * mm min. φ. mm min. mm min. Amplifiers Model 7 * The supplied cable ties (with non-slip tubing) can also be purchased separately. Model: SZ-A ( sets) F Series

21 Specialized Use Liquid Leakage Fiber Units PFA jacket affords outsting ease of routing. Principle of detection Normal state: no liquid (light received) receiver emitter Leak: liquid present (no light received) Recommended compatible amplifier unit receiver Space-saving sensor head height of only 9.9 mm Can be used in explosion atmospheres because the cable is optical fiber. emitter Abnormal state: sensor floating (no light received) receiver emitter When there is a leak, no light reaches the receiver. This is the same result as when the fiber cable breaks or is disconnected, ensuring fail-safe operation. (When using the unit in a pan, remember to secure it with a stud.) X-AG advanced function timer model Exterior view Output latching function Using the F-D the X-AG amplifier together, output can be latched. This function is effective in detection of a small leak of volatile liquid in early detection of a leak s location. When the output is latched, the display seen below blinks. Options Relay fiber unit F-D mm. to +7 Installation base (main unit) 9.9 F-EU Bend radius R Length m.9 9. Hole:.. F-D Installation base (bushing:sus). φ. PFA covering Optical fiber cable can be extended m using the optional relay unit. The relay unit can be mounted in a panel. F-EU Screw Cylindrical Coaxial Sleeve Side view Narrow view reflection Area Heatproof Vacuum X-AG Series Specialized Use Operation panel Typical models X-AG-S X-AG-S Output NPN PNP The latch can be released by the operator or by an external input. External input Usage Notes (type-specific) Lens unit Leak detection status Liquid leakage detection 9 Output status Output latch remains even OFF when latch is released if sensor power is turned off. The output latch is reset when the latch is released. To use output latching again, set the latch again. When using an SUS mounting base, insert the welded M stud bolt into the base s mounting hole fasten it with an M nut (not supplied). Then put the ridges of the mounting base into the grooves of the fiber unit, slide the base forward until it is in place. resistance of PFA See the Guide Page. M nut M stud bolt (straight type) Ridge Groove Amplifiers Model F Series

22 Specialized Use Wafer-mapping fiber Detects mm wafers stored in a FOUP or open cassette without fail. Product features beam aperture angle is ±. or less With an aperture angle of ±. or less, the effects of diffraction are insignificant, allowing reliable detection even when mapping mm wafers stored at a mm pitch. Factory alignment of light beam Working with a narrow beam of light can involve difficult adjustment of the light axis, requiring significant manpower man-hours. Therefore, the light axis of the F-T is factory aligned to within ±., greatly reducing adjustment time. Parallel displacement When used with the X-AG (set to mode sensing type) Parallel displacement mm Scanning distance mm Scanning distance mm Parallel displacement mm Narrow beam of light has an aperture angle of ±. or less Beam axis is factory-aligned Shipped after adjusting the light axis to within ±. Actual wafer mapping waveform Double layer intensity (%) Significant reduction in time required for adjustment Displacement (mm) intensity is % when there is no wafer. Diagonal installation Setting by anyone, any time The value is set to. emitter Side intensity How to install the F-T F-T Make sure the emitter receiver fiber units are on the same level. Directional angle (half angle). ±. (optical axis center) level when no wafer is detected Stainless steel tube Simply press a button when there is no wafer For example, % tuning is set to % to +7 Wafer is detected Bend radius R Length F-T Stainless steel Amp Mode Distance X-AG X-EG X-A 7 Effective lens diameter detectable φ. φ. *For scanning distances of the sensing modes, see the Guide (page ). *Response times for the sensing types: ms, ms, µs. *The values shown in the Minimum detectable size column were obtained with optimal scanning distance sensitivity settings (X-AG). Sensitivity setting (% tuning) without a wafer (workpiece) when using an X-AG Series amplifier When the received light intensity is (with no wafer), set the sensitivity by pressing the AUTO button the + or button several times. To set a value that is X % of the light level of, you simply need to enter the value of X. If you enter (%), for example, a value of will be set. Caution Before entering a percentage, be sure to check changes in the received light level both when wafers are present when absent. Once a percentage is determined, the same value can be used as the setting in the future in a similar environment. mm Wafer mm In a mapping application, reflection from the wafer surface will result in fluctuation in received light intensity. For this reason, tuning the amplifier with a percentage value should be done without a wafer. F-T Specialized Use Screw Cylindrical Coaxial Sleeve Side view Narrow view reflection Area Heatproof Vacuum Recommended compatible amplifier unit X-AG model Exterior view Operation panel Typical models X-AG-S X-AG-S Output NPN PNP With -element LED APC, light emission is twice as stable Four-element LEDs shine brightly for longer than conventional ones, LED brightness is monitored by Auto Power Control (APC), which regulates the current to maintain light emission at a constant level. emission level Without APC Time Note: APC controls the light emission level of the LED, but does not compensate for a drop in the received light level arising from other factors.... φ φ. (Effective dia) M., min. φ Lens unit Amplifiers Model F Series

23 Lens unit Micro-Spot Lens Lens unit achieving a micro-spot by combination with the coaxial type. Lenses can be selected according to the target object size. Type Micro-spot Variable spot Micro-spot For diffuse scan type D F-LU... F-LU7 CHART Distance [mm] Identification mark to +7 to +7 to +7 to +7 to +7 Spot dia. Characteristics of distance versus spot dia. [mm]. Spot dia. [mm] Distance [mm] Characteristics of distance versus spot dia Minimum spot dia. Approx.. mm Approx.. mm Approx.. mm Approx.. mm Approx.. mm F-LU.. F-LU.... Spot dia. image Spot dia. image Spot dia. image Spot dia. image Spot dia. image Focus distance. ±. 7. ±. 9 ±. F-D F-D F-D F-D F-D F-D F-D F-D F-D F-D F-D F-D Spot dia. Approx..mm Approx..m Approx..m Approx..m Approx..m Approx..mm Approx..mm Approx..mm Approx..mm Approx..mm Approx..mm Approx..mm ±. F-D Approx..mm Fiber insertion depth: 7. ±. Fiber insertion depth: 9. ±. Characteristics of distance versus spot dia. (typical example) Spot dia. Characteristics of distance versus spot dia. [mm]. 7 9 Distance [mm] Spot dia. Characteristics of distance versus spot dia. [mm]. *Values are for the lens combined with an F-D fiber unit. *Measured values are calculated at. % of the peak light level. (Only F-LU7 is calculated at %.) Distance [mm] Variable spot F-DC Combined fiber F-LU9 Set distance [mm] φ. φ. Compatible fiber units P (Coaxial) φ. to.mm Maximum scanning distance φ. φ. φ.7 7 φ. Amount of fiber unit insertion [mm] F-LU7 F-LU F-LU F-LU F-LU9 φ. φ. Minimum spot 9 The chart shows the following characteristics in relation to the amount of fiber unit insertion: The set distance spot dia. achieving the minimum spot The spot dia. at the maximum scanning distance F-LU F-LU7 Glass lens F-LU Glass lens φ. (aluminum) When attached to F-D/D (.) Straight knurl φ () M (7) When attached to F-D. (.) ( () 7. φ9. (aluminum) M NOTEWORTHY (7) When attached to F-D (.). Improving detection performance yields many positive results Because of irregular reflection inside a lens, some light is returned even when no workpiece is present, but it is a small amount compared with the light reflected when there is a workpiece. In F-LU sensors, the internal wall of the lens has a special feature that keeps this internal reflection to a minimum, so there is an increased amount of difference in light level when a workpiece is actually present. actually used for detection F-LU Glass lens F-LU9. φ. (aluminum). Straight knurl φ The micro-spot lens is made of hard glass, so problems caused by a drop in light level due to lens scratches made by collisions with workpieces can be greatly reduced. M M slot screw Hole: φ. (optical axis center) When attached to F-D/D (.) () (.) When attached to F-D (.) () () (.).... Problems due to scratches on the lens are greatly reduced. φ D.7. Lens unit Screw Cylindrical Coaxial Sleeve Side view Narrow view reflection Area Heatproof Vacuum Specialized Use Amplifiers Model F Series

24 Lens unit Long-Distance Lens / Side View Unit Longer distances alternate optical configurations are available by combination with thru-scan sensors. Use in combination with various fiber units. For use with thru scan Type Longdistance lens Side view FE-PA-L FE-PA-S (Long-distance lens) D (Two units) to + (Two units) to + (Two units) to + (Two units) to + Scaling Directional angle (half angle) Fiber unit Element type X-AG X-EG F-T F-T F-T F-T F-T F-T F-T F-T F-T F-T F-T F-T Stard Heatproof Unbreakable Stard Heatproof Unbreakable Stard Heatproof Unbreakable Stard Heatproof Unbreakable 7,,9,,,,,, 9,,, 9,, The scanning distances shown are nominal values. The actual scanning distances are limited by the fiber length (approx. m m in the case of stard type). For X-AG, the scanning distance shown is for mode (response time: ms). For X-EG, the scanning distance shown is for mode (response time: ms). The directional angles shown are typical examples obtained when the lens is combined with an F-T. Glass lens φ (Brass (Ni plated)) Straight knurl φ (Brass (Ni plated)) Straight knurl M. φ. (optical axis) M. (optical axis center) (Side view) F-VL F-VL Glass lens.7. (optical axis center) 9.9 φ(sus φ.(sus) φ. (optical axis) For combined fibers: (screw) P (cylindrical) (heatproof) P (vacuum proof) Straight knurl X-A,,, M. M. FE-PA-L F-VL FE-PA-S F-VL D Product name Angle adjustment bracket Fiber-optic extender Fiber head bracket Small-diameter attachment (Two units) Fiber cutter X-PA FE-PA-FB Hole A dia.: φ. FE-PA-FB Hole A dia.: φ. FE-PA-FB Hole A dia.: φ A Slot screw: M M screw 9 Hole: φ.. C. Hole: φ.. Hole A Hole: φ. Description Use with a thru-scan fiber unit to limit reflection, or use as side view type brackets. Use to extend fibers by linking them. For scanning range see p.. Suitable for attaching a fiber head. Use in combination with small-dia. fiber units. *Supplied with applicable fibers. Use to cut fibers. *Supplied with applicable fibers. F-EU F-EU 9 9 F-EU F-EU specifications Used for M M heads, φ φ length: m. Bend: mm in radius length: m. Bend: mm in radius For fibers with dia. of φ. For fibers with dia. of φ. Used for freeh cuttable fibers Fiber unit attach/detach lever... For M head For M head For M head * length *, mm min., mm min. X-PA F-EU F-EU FE-PA-FB FE-PA-FB FE-PA-FB F-AT F-AT FE-PA-F : φ. Thickness of attachable plate:. to. mm Lens unit Screw Cylindrical Coaxial Sleeve Side view Narrow view reflection Area Heatproof Vacuum Specialized Use Amplifiers Model F Series

25 Guide Detection Method Optical Fiber Types Characteristics Cutting of fibers Use under explosion atmospheres Optical fiber sensor Fiber part Amplifier part Refraction index Cladding Detection target Usage Notes (general) A fiber is composed of a central core circumferential cladding where the refraction index is low. travels inside the core, with repeated total reflection along the boundaries between the core the cladding. emerging from the fiber is emitted spreads out at an angle of approximately. Fiber covering resin Core Fiber conductor How to attach the amplifier unit Insert one rail of the bracket or DIN rail into the slot at point A. Push the unit downwards until the second rail clicks into place at point B. When attaching the amplifier to a DIN rail, be sure to secure both ends with the end plate (X-PA, sold separately). How to remove the amplifier unit emitted Approx. received Cladding Core Fiber conductor LED The optical fiber does not have any electrical properties so is excellent in an environment where reduced electrical noise is required. Different fiber variations allow for various applications. Attach the amplifier unit to the dedicated bracket (X-PA, supplied or sold separately) or to the DIN rail. Push the amplifier forward firmly ( ) so that the front lock releases. Lift the unit as shown in the figure ( ) to remove the unit. Expansion unit attachment to the main unit for reduced-wiring models (X-AG/EG series) Remove the stickers affixed to the connectors of the units to be attached. Mount the expansion units side by side on the DIN rail. Slide the expansion units together so that the connectors connect. Use end plates (X-PA, sold separately) to hold the expansion units in place. To remove expansion units, slide off one by one. A B Cross-section Structure Features Useful applications Typical model number Stationary bend type (multi-core) (The inner elements are grouped into one.) : F-T : F-D Stard type (single core) Used frequently for general purposes. Low price. : F-T : F-D Bend-tolerant type (bundle) (The internal elements are not attached to each other.) Good bend tolerance Bend repetition of one million times or Bending causes a small variation in the light level. Allowable bend radius: or mm Good light transmission efficiency (relatively long scanning distance) Allowable bend more (typical) Allowable bend radius: or mm radius: mm Comparison with the previous stard type: Soft capable of cabling like electric wires No worries about bend radius Touching the fiber does not affect the light level. Attaching the fiber unit to an amplifier Open the cover. Caution Resistant to break even when used in a moving environment : F-T : F-D7 Tilt the fiber clamp lever forwards to the release position. Firmly insert the fiber tips into the holes in the amplifier as far as they will go. For the insertion depth of the fiber, refer to the mark on the side of the unit. Close the cover. if the fiber is thin, first insert it into the thin fiber adapter so that the fiber projects approximately. to mm from the top of the adapter. Then insert the adapter into the hole in the amplifier as far as it will go, then fix it firmly. Because a cable break tends to easily occur around the fiber unit s sensing head junction with the amplifier unit, do not bend the cable within mm ( mm for a thin fiber unit). In other cabling areas, use the fiber cable at the allowed bending radius or more specified for each product. If the cable is bent beyond the allowed bend radius, the rated scanning distance may be unavailable or a cable break may occur. When attaching a coaxial diffuse Single core Multi-core Emitter side side Fiber unit Reference mark for fiber insertion depth mm or more mm or more scan fiber unit to a main unit, attach the single-core fiber cable to the insertion hole s emitter side, attach the multi-core fiber cable to the receiver side. Amplifier unit To cut a fiber, use the dedicated cutter (supplied with the fiber unit). Note that cold heatproof fibers cannot be cut. Insert the fiber into the cutter hole set the fiber to the specified length. Press the blade straight down in a strong smooth motion. Cut one fiber cable at a time do not reuse the blade on another optical fiber. When the detecting surface of the fiber unit gets dirty, gently wipe it with a soft clean cloth. Do not use organic solvents such as benzine or thinner. Caution Fiber The scanning distance may be reduced approximately % depending on how the fiber is inserted into the amplifier unit how the fiber is cut. For specifications, usage notes other information for the fiber unit, see the product specifications. Use Cautions (type specific) Vacuum fiber Never disassemble the cutter. The blade may cause injury. Vacuum fiber F-V series The flange, fibers for vacuum the lens unit are cleaned with IPA, but baking treatment etc. should be carried out before use. Cautions for attaching the optical coupler The optical coupler uses an O-ring as shown below. Do not weld it to the vacuum chamber wall, as this may cloud the inside glass rod. Fiber unit for vacuum Attachable plate thickness: to mm +. Recommended mounting hole: dia. mm. Recommended surface roughness for O-ring s contact area:. Ry Vacuum chamber wall Vacuum side For air Flat washer Spring washer M nut O-ring Fiber unit for air Optical coupler Generally, the fiber unit is structured only to transmit light so cannot cause electrical explosions or ignite fires. Therefore, the fiber amplifier units can be used with the fiber unit placed in a dangerous place, the amplifier unit in a non-dangerous place. Nevertheless, check the explosion regulations required for the equipment used before using the sensor. Dangerous environment Fiber unit proof Non-dangerous environment Amplifier unit When installing the unit, use commercially-available fluorine-resin joint that matches the outside diameter of the PFA tube. The bend radius of the protective tube must be greater than the bend radius specified for each fiber unit. If the bend radius is below the specified Fluorine-resin joint value, the fiber unit may break. Do apply excessive tension to the fiber-optic cable. Screw Cylindrical Coaxial Sleeve Side view Narrow view reflection Area Heatproof Use Lens unit Amplifiers Model 7 Scanning distances display readouts may differ depending on variations in individual unit characteristics, installation states fiber unit types. F Series

26 Guide PFA Proof Characteristics of Scanning Combination with Fiber Extender (typical values) Substance Heavy oils A/B/C Aniline CHNH Acrylonitrile CHCN Asphalt Acetone (CH)CO Methanol CHOH Ammonia NH Isooctane i-ch Isobutyl alcohol i-ch9oh Isobutyl methyl ketone CH9COCH Ethanol CHOH Ether (CH)O Ethylene glycol CH(OH) Enamel paint Ammonium chloride NHCl Calcium chloride CaCl Sodium chloride NaCl Barium chloride BaCl Chlorine Cl Gasoline Glass ingredients Dilute hydrochloric acid HCl Dilute sodium hydroxide NaOH Dilute acetic acid CHCOH Dilute nitric acid HNO Dilute sulfuric acid HSO Citric acid CH OH COOH Glycerin CH OH Cresol CH OH CH Chloroform CHCl *For information on hydrofluoric acid, contact our sales staff. PFA chemical proof Additional Notes The above table is not a guarantee that the product can be used with the indicated substance. Substances such as strong acids ammonia may penetrate PFA (fluororesin). Fiber Length vs. Scanning Distance Characteristics Note that extending fiber length reduces scanning distance. Stard fiber element Substance oil Paraffinum liquidum Sodium dichromate NaC O7 Barium nitrate Ba(NO) Silicone oil Plant oil Thinner Barium hydroxide Ba(OH) Phenol CHOH Turbine oil Sodium carbonate NaCO Turpentine Natural volatile oil Kerosine petroleum Trichloroethane CHCl Trichlorethylene CHCl Toluene CHCH Naphtha C7H Acidum lacticum Nitrobenzene CHNO Hydrofluoric acid (hydrogen fluoride) HF Ferrosilicon Freon FCCl Propyl alcohol CH(OH) Propylene glycol CH(OH) Benzene CH Methyl violet Water HO Carbon tetrachloride CCl Ammonium sulfate (NH)SO PFA chemical proof Element type Distance change ratio for each element length Bend radius m m m m m m m. R % % % % Unavailable Unavailable Unavailable. R % % % 7% Unavailable Unavailable Unavailable R % % % 9% 7% % %.7 R % % % 9% 7% % % R % 7% % % 9% % Unavailable R % % % Unavailable Unavailable Unavailable Unavailable R % % % 9% 7% % % Heatproof fiber element Element type Heatproof m % m % % 9% % m 7% % 7% % Distance change ratio for each element length m m m % Unavailable Unavailable % Unavailable Unavailable % % 7% % % 9% m Unavailable Unavailable 9% % * m Unavailable Unavailable % % Type Stard fiber Heatproof Area Unbreakable fiber Pipe-mounted liquid level Type Stard fiber Heatproof Unbreakable fiber Liquid leakage Contact liquid level F-T F-T F-TT F-T F-T TE F-T TE F-D F-D F-D9 F-D F-D7 P P7 P P P Scanning distance cable length when combined with fiber extender: X-AG ( mode: ms in response time)* No extender F-EU m F-EU m mm length: % mm length: m % mm length: % mm length: % Available* length: m mm 7mm mm mm length: 7m 9% m length: m % mm length: 7m % 7mm length: 7m 7% 7mm 7mm mm mm length: 7% 9mm length: m % mm length: % mm length: % Scanning distance cable length when combined with fiber extender: X-AG ( mode: ms in response time)* No extender F-EU m F-EU m length: % length: m % length: % Available* Available* Available* length: m length: 7m % length: m % length: 7m % Available* Available* Unavailable length: m mm length: % mm length: m % mm length: % Unavailable length: m length: m length: m Unavailable length: m length: m length: m Screw Cylindrical Coaxial Sleeve Side view Narrow view reflection Area Heatproof Use Lens unit Amplifiers Model 9 * For combinations other than with X-AG, please contact us. * Even where availability is indicated, detection may not be possible depending on the liquid. Please check operation before use. F Series