Most Suitable for a Variety of High-precision Displacement Measurements. Regular Reflective Sensors. Line Beam Sensors.

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1 / Length (2D CMOS Laser Type) Advanced Functions Integrated into a Compact Sensor for Easy Handling of High-grade Applications A Controller the size of a business card combined with the smallest Sensor Head in its class. Stable detection with reduced color and gloss error. Super-high-speed sampling of 110 μs. Navigate operations on the LCD screen. Equipped with USB as a standard feature. Setting Software for personal computer provided. Be sure to read the Safety Precautions on page 424. Features Most Suitable for a Variety of High-precision Measurements Line Beam for Emphasis on Stable Measurement Measuring center distance Diffuse Reflective D350S D200 Regular Reflective Line beams produce an averaging affect that is less likely to be affected by surface irregularities, creating stable measurements. Ideal for stable measurements that do not rely on the surface of the target workpiece. Beam width Travel Travel distance Beam diameter Amount of displacement D130 D80 Line Beam Beam diameter ZS- LD20T ZS- LD40T ZS- LD50 ZS- LD80 ZS- LD130 ZS- LD µm 35 µm 60 µm 60 µm 70 µm 100 µm Beam width 0.9 mm 2 mm 0.9 mm 0.9 mm mm 0.9 mm Spot beam Line beam Line beam Line beam Line/spot beam D50/-LD50S D40T D20T/ -LD20ST Line beam Line/ spot beam Spot Beam Ideal for Minute Workpieces and Shape Measurement Ideal for measurements requiring minute shape repeatability while matching laser beam position with a minute target measurement area. Travel Beam diameter Travel distance Amount of displacement Spot Beam D20ST D50S D350S Beam width 25 µm dia. 50 µm dia. 240 µm dia. 412

2 Ordering / Length Sensor Sensor Heads Optical system distance Beam diameter Resolution * Model Regular models Diffuse models * No. of samples to average: 128 when set to High-precision Mode. Line beam: mm 5 µm D20T 20±1 mm Spot beam: 25 µm dia. 5 µm D20ST 40±2.5 mm Line beam: µm 5 µm D40T 50±15 mm Line beam: µm µm D50 Spot beam: 50 µm dia. µm D50S 80±15 mm Line beam: µm 2 µm D80 130±15 mm Line beam: µm 3 µm D ±50 mm Line beam: µm 5 µm D ±135 mm Spot beam: 240 µm dia. 20 µm D350S Sensor Controllers Appearance Supply voltage Control outputs Model Data Storage Units Appearance Supply voltage Control outputs Model 24 VDC NPN outputs PNP outputs DC11 DC41 24 VDC NPN output PNP output ZS-DSU11 ZS-DSU41 Note: Compatible connection with the Sensor Head. Multi-Controllers Appearance Supply voltage Control outputs Model NPN outputs ZS-MDC11 24 VDC PNP outputs ZS-MDC41 Accessories (Sold separately) Controller Link Unit Panel Mount Adapter RS-232C Cables Extension Cables for Sensor Heads Logging Software Programmable Terminal (PT) Software Memory Card Refer to Accessories (sold separately) on page 395 for details. Stable Measurement for D40T Measuring Surfaces Stable Measurement for PCBs, Black Resin and Metal D50 D80 Measuring the Shape of Black Resin Workpieces Measuring the Shape of PCB Surfaces Ideal for measuring glass thickness and slit nozzle gaps when coating glass with resist or sealer. Measuring for Moving [μm] Response for glass 8ms μm Complete measurement data will be obtained at angle of up to 40. Height (mm) Gain setting: 5 Number of data PCB shapes can be measured without burs or waveform disruptions. Response: 8 ms, High-precision mode, Black gain: 0, red gain: 5 (max.) Height (mm) Penetration mode and gain settings used. 413

3 / Length Ratings and Specifications Sensor Controllers Item Model DC11 DC41 No. of samples to average 1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1,024, 2,048, or 4,096 Number of Mounted 1 per Sensor Controller Connection method Serial I/O connector, s: pre-wired (Standard cable length: 2 m) External interface Functions Serial I/O Output Input USB 1 port, Full Speed (12 Mbps max.), MINI-B RS-232C Judgement output Linear output Laser OFF, ZERO reset timing, RESET 1 port, 115,200 bps max. HIGH/PASS/LOW 3 outputs NPN open collector, 30 VDC, 50 ma max., residual voltage 1.2 V max. HIGH/PASS/LOW 3 outputs PNP open collector, 50 ma max., residual voltage 1.2 V max. Selectable from 2 types of output, voltage or current (selected by slide switch on bottom). Voltage output: -10 to 10 V, output impedance: 40 Ω Current output: 4 to 20 ma, maximum load resistance: 300 Ω ON: Short-circuited with 0 V terminal or 1.5 V or less OFF: Open (leakage current: ma max.) ON: Short-circuited to supply voltage or within 1.5 V of supply voltage. OFF: Open (leakage current: ma max.) Display: Measured value, threshold value, voltage/current, received light amount, and resolution/terminal block output : Mode, gain, measurement object, head installation Measurement point: Average, peak, bottom, thickness, step, and calculations Filter: Smooth, average, and differentiation Outputs: Scaling, various hold values, and zero reset I/O settings: Linear (focus/correction), judgments (hysteresis and timer), non-measurement, and bank (switching and clear) System: Save, initialization, measurement information display, communications settings, key lock, language, and data load Status indicators Segment display LCD Setting inputs Power supply voltage Current consumption Ambient temperature Ambient humidity Materials Weight Accessories Main digital Sub-digital Setting keys Slide switch HIGH (orange), PASS (green), LOW (orange), LD ON (green), ZERO (orange), and ENABLE (green) 8-segment red LED, 6 digits 8-segment green LEDs, 6 digits 16 digits 2 rows, Color of characters: green, Resolution per character: 5 8 pixel matrix Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys (1 to 4) Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and RUN) 2 to 26.4 VDC (including ripple) 0.5 A max. (when Sensor Head is connected) Operating: 0 to 50 C, Storage: -15 to 60 C (with no icing or condensation) Operating and storage: 35% to 85% (with no condensation) Case: Polycarbonate (PC) Approx. 280 g (excluding packing materials and accessories) Ferrite core (1), instruction sheet 414

4 / Length Sensor Heads Item Model D20T D20ST D40T Applicable Controllers DC/LD Series Optical system Regular Diffuse Regular Diffuse Regular Diffuse Measuring center distance 20 mm 6.3 mm 20 mm 6.3 mm 40 mm 30 mm Measuring range ±1 mm ±1 mm ±1 mm ±1 mm ±2.5 mm ±2 mm Light source Visible semiconductor laser (wavelength: 650 nm, 1 mw max., JIS Class 2) Beam shape Line beam Spot beam Line beam Beam diameter * µm 25 µm dia µm Linearity *2 ±% F.S. Resolution *3 5 µm Temperature characteristics *4 Sampling cycle LED Indicator NEAR indicator FAR indicator Operating ambient illumination Ambient temperature Ambient humidity Degree of protection Materials Cable length Weight Accessories 4% F.S./ C 2% F.S./ C 110 µs (High-speed Mode), 500 µs (Standard Mode), 2.2 ms (High-precision Mode), 4.4 ms (High-sensitivity Mode) Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range. Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient. Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range. Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient. Illumination on received light surface: 3000 lx or less (incandescent light) Operating: 0 to 50 C, Storage: -15 to 60 C (with no icing or condensation) Operating and storage: 35% to 85% (with no condensation) Cable length 0.5 m: IP66, cable length 2 m: IP67 Case: die-cast, Front cover: 0.5 m, 2 m Approx. 350 g Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2), instruction sheet *1. Defined as 1/e² (13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam. *2. This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics and glass in the regular mode. Linearity may change according to the workpiece. *3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics and glass in the regular mode. *4. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig. 415

5 / Length Item Model D50 D50S D80 D130 D200 D350S Applicable Controllers Optical system DC/LDC Series Diffuse Regular Diffuse Regular Diffuse Regular Diffuse Regular Diffuse Regular Diffuse Measuring center distance 50 mm 47 mm 50 mm 47 mm 80 mm 78 mm 130 mm 130 mm 200 mm 200 mm 350 mm Measuring range ±5 mm ±4 mm ±5 mm ±4 mm ±15 mm ±14 mm ±15 mm ±12 mm ±50 mm ±48 mm ±135 mm Light source Visible semiconductor laser (wavelength: 650 nm, 1 mw max., JIS Class 2) Beam shape Line beam Spot beam Line beam Line beam Line beam Spot beam Beam diameter * µm 50-µm dia µm µm µm 240-µm dia. Linearity *2 ±% F.S. ±5% F.S. ±% F.S. ±5% F.S. ±% F.S. Resolution *3 µm µm 2 µm 3 µm 5 µm 20 µm Temperature characteristics *4 Sampling cycle *5 LED indicator NEAR indicator FAR indicator Operating ambient illumination Ambient temperature Ambient humidity Degree of protection Materials Cable length Weight Accessories 2% F.S./ C 2% F.S./ C 1% F.S./ C 2% F.S./ C 2% F.S./ C 4% F.S./ C 110 µs (High-speed Mode), 500 µs (Standard Mode), 2.2 ms (High-precision Mode), 4.4 ms (High-sensitivity Mode) Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range. Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient. Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range. Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient. Illumination on received light surface: 3000 lx or less (incandescent light) Illumination on received light surface: 2000 lx or less (incandescent light) Operating: 0 to 50 C, Storage: -15 to 60 C (with no icing or condensation) Operating and storage: 35% to 85% (with no condensation) Cable length 0.5 m: IP66, cable length 2 m: IP67 Case: die-cast, Front cover: 0.5 m, 2 m Approx. 350 g Illumination on received light surface: 3000 lx or less (incandescent light) Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2), instruction sheet *1. Defined as 1/e² (13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam. *2. This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics and glass in the D50/LD50S regular mode. Linearity may change according to the workpiece. *3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics and glass in the D50/LD50S regular mode. *4. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig. *5. This value is obtained when the measuring mode is set to the high-speed mode. ZS-MDC@1 Multi Controllers Controller Link Units ZS-DSU@1 Data Storage Units Refer to page 403 for details. 416

6 Engineering Data / Length Linearity Characteristics by Material D20T (Mode: Standard) D20ST (Mode: Standard) Regular Reflective Diffuse Reflective Regular Reflective Inclination Angle: 0 Inclination Angle: 0 Inclination Angle: Inclination Angle: Horizontal +0.5 Inclination Angle: Horizontal +15 Inclination Angle: Horizontal Inclination Angle: Horizontal -0.5 Inclination Angle: Horizontal -15 Inclination Angle: Horizontal -0.5 Inclination angle: -0.5 Inclination angle: -15 Inclination angle: Inclination Angle: Vertical ±0.5 Inclination Angle: Vertical ±0.5 Inclination Angle: Vertical ±

7 / Length D20ST (Mode: Standard) D40T (Mode: Standard) Diffuse Reflective Regular Reflective Diffuse Reflective Inclination Angle: 0 Inclination Angle: 0 Inclination Angle: Inclination Angle: Horizontal +15 Inclination Angle: Horizontal +0.5 Inclination Angle: Horizontal Inclination Angle: Horizontal -15 Inclination Angle: Horizontal -0.5 Inclination Angle: Horizontal -15 Inclination angle: -15 Inclination angle: Inclination angle: Inclination Angle: Vertical ±15 Inclination Angle: Vertical ±0.5 Inclination Angle: Vertical ±

8 D50 (Mode: Standard) D50S (Mode: Standard) Diffuse Reflective Regular Reflective Diffuse Reflective Inclination Angle: 0 Inclination Angle: 0 Inclination Angle: 0 Inclination Angle: Horizontal +15 Inclination Angle: Horizontal +0.5 Inclination Angle: Horizontal +15 / Length Inclination Angle: Horizontal -15 Inclination Angle: Horizontal -0.5 Inclination Angle: Horizontal -15 Inclination angle: -15 Inclination angle: -0.5 Inclination angle: -15 Inclination Angle: Vertical ±15 Inclination Angle: Vertical ±0.5 Inclination Angle: Vertical ±15 419

9 / Length D50S (Mode: Standard) D80 (Mode: Standard) Regular Reflective Diffuse Reflective Regular Reflective Inclination Angle: 0 Inclination Angle: 0 Inclination Angle: Inclination Angle: Horizontal +0.5 Inclination Angle: Horizontal +15 Inclination Angle: Horizontal Inclination Angle: Horizontal -0.5 Inclination Angle: Horizontal -15 Inclination Angle: Horizontal -0.5 Inclination angle: -0.5 Inclination angle: Inclination angle: Inclination Angle: Vertical ±0.5 Inclination Angle: Vertical ±15 Inclination Angle: Vertical ±

10 D130 (Mode: Standard) D200 (Mode: Standard) Diffuse Reflective Regular Reflective Diffuse Reflective Inclination Angle: 0 Inclination Angle: 0 Inclination Angle: Inclination Angle: Horizontal +15 Inclination Angle: Horizontal +0.5 Inclination Angle: Horizontal / Length Inclination Angle: Horizontal -15 Inclination Angle: Horizontal -0.5 Inclination Angle: Horizontal -15 Inclination angle: Inclination angle: Inclination angle: Inclination Angle: Vertical ±15 Inclination Angle: Vertical ±0.5 Inclination Angle: Horizontal ±

11 / Length D200 (Mode: Standard) D350ST (Mode: Standard) Regular Reflective Diffuse Reflective Inclination Angle: 0 Inclination Angle: Inclination Angle: Horizontal +0.5 Inclination Angle: Horizontal Inclination Angle: Horizontal -0.5 Inclination Angle: Horizontal Inclination angle: Inclination angle: Inclination Angle: Vertical ±0.5 Inclination Angle: Vertical ±

12 Internal circuit I/O Circuit Diagram NPN Type (DC11) / Length Brown 24 VDC Red OUT0 Green Black OUT1 OUT2 Pink Gray OUT3 OUT4 24 VDC Blue GND (0 V) Yellow IN0 Aqua IN1 Purple IN2 White IN3 Orange Current output 4 to 20 ma Current/voltage output switch Coaxial (black) Linear output 40 Ω Voltage output ±10 V Shield Linear GND Current output: 300 Ω max. Voltage output: 10 kω min. PNP Type (DC41) Brown 24 VDC Red Green Black Pink Gray OUT0 OUT1 OUT2 OUT3 OUT4 24 VDC Internal circuit Blue GND (0 V) Yellow IN0 Aqua IN1 Purple IN2 White IN3 Orange Current/voltage output switch Current output 4 to 20 ma Coaxial (black) Linear output 40 Ω Voltage output ±10 V Shield Linear GND Current output 300 Ω max. Voltage output 10 kω min. 423

13 / Length Safety Precautions Refer to Warranty and Limitations of Liability on page F-2. This product is not designed or rated for ensuring safety of persons. Do not use it for such purpose. Dimensions Sensor Controllers WARNING Never look directly into the laser beam. Doing so will result in eyesight damage. Do not disassemble the. Doing so will cause laser beam to escape, resulting in eyesight damage. (Unit: mm) Heat-resistive vinyl chloride, 5.2 mm dia. Standard length 2 m dia. Sensor Heads D50/LD50S/LD80/LD130/LD200/LD350S Measuring center Emitter Emission axis Reception axis L (See note.) Reference surface 65 8 Two, 4.5 mm dia. mounting holes Range indicator 56± Two, M4 56± Receiver A (See note.) Mounting hole dimensions Connector Note: L = 50 and A = 30 for the D50/50S. L = 80 and A = 15 for the D80. L = 130 and A = 12 for the D130. L = 200 and A = 8 for the D200. L = 350 and A = 5 for the D350S. Vinyl insulated round cable, 6.2 mm dia. Standard length: 0.5 m and 2 m 424

14 / Length D20T/LD20ST/LD40T Measuring center L (See note.) Reference surface 65 8 Two, 4.5 mm dia. mounting holes ± Emitter Emission axis Reception axis Receiver Range indicator 56± Two, M4 Mounting hole dimensions 3 A (See note.) Connector Note: L = 20 and A = 45 for the D20/20S. L = 40 and A = 32 for the D40. Vinyl insulated round cable, 6.2 mm dia. Standard length: 0.5 m and 2 m Multi Controllers Refer to page 409 for details. Data Storage Units Refer to page 409 for details. Accessories (Sold separately) Refer to page 411 for details. Cat. No. E827-E1-02 In the interest of product improvement, specifications are subject to change without notice. 425