Since 1972 Powering the Future
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1 Since 1972 Powering the Future Semi Networking Day Milano 20 Settembre 2012 Semi Networking Day Milano 20 Settembre C o r p o r a t e P r o f i l e
2 Vision & Mission C o r p o r a t e P r o f i l e LPE Vision : to help develop Energy Efficient Solutions Mission : To be the market & technology leader in epitaxial technologies for Smart Power Management and Sensor Solutions Semi Networking Day Milano 20 Settembre
3 Our strengths LPE is a worldwide specialist in epitaxial technologies for Power Management, Power Saving and Sensor applications C o r p o r a t e P r o f i l e Our clear mission is to provide our Customers with leading edge equipment and process solutions for advanced and traditional discrete devices, new generation sensors, improving Customers' process performance, lowering environmental impact and lowering manufacturing costs Semi Networking Day Milano 20 Settembre
4 Our strengths We provide epitaxy reactors for silicon and silicon carbide built around LPE proprietary reaction chambers and core technology IP C o r p o r a t e P r o f i l e Our reactors are particularly suited for thick and very thick epi layers on substrates and patterned wafers, maintaining quality standards typical of thin epi layers Our Customers are both devices makers and epi houses, operating worldwide Semi Networking Day Milano 20 Settembre
5 Historical facts C o r p o r a t e P r o f i l e Preti Engineering ( now LPE ) designs and manufactures the first silicon Epitaxial Reactor in Europe. Almost 40 years later LPE reactors are still the preferred tools s to grow EPI layers for discrete and power applications. Over 400 reaction chambers are in operation in more than 30 leading semiconductor companies. LPE has become a global leader by offering the most advanced equipment for Epitaxial Deposition. Semi Networking Day Milano 20 Settembre
6 Worldwide organization Headquarters Headquarters Milan, Milan, Italy Italy C o r p o r a t e P r o f i l e SUBSIDIARIES ETC Italy LPE Shanghai AGENTS Japan USA Taiwan South Korea Czech Republic Semi Networking Day Milano 20 Settembre
7 Revenue Euro USD avg ME 13.8 M$ C o r p o r a t e P r o f i l e ME 22.2 M$ ME 24.8 M$ ME 22.7 M$ ME 19.2 M$ ME 7.6 M$ ME 27.0 M$ ME 60.0 M$ ME budget Semi Networking Day Milano 20 Settembre
8 Silicon Equipment Product Line Silicon Epitaxy PE2061 S O u r P r o d u c t s PE 3061 D Installed Base: >140 Located in all world regions since 1992 Installed Base: > 130 Located in all world regions since 2000 Semi Networking Day Milano 20 Settembre
9 SiC Equipment Product Line (since 2008) SiC Epitaxy ACiS SiC Bulk (R&D) Subli100 (PVT) O u r P r o d u c t s Installed Base: 3 in Japan 3 in Europe InventaPro (CVD) Semi Networking Day Milano 20 Settembre
10 C u s t o m e r s Silicon and Silicon Carbide Customers Semi Networking Day Milano 20 Settembre
11 Europe Semi Networking Day Milano 20 Settembre
12 North America Undisclosed Customer Semi Networking Day Milano 20 Settembre
13 Korea & Japan Undisclosed Customer Semi Networking Day Milano 20 Settembre
14 China & Taiwan Yanhe Factory Fushun Semi Networking Day Milano 20 Settembre
15 .and Singapore Semi Networking Day Milano 20 Settembre
16 LPE Group innovation Semi Networking Day Milano 20 Settembre L P E G r o u p I n n o v a t i o n
17 LPE Group strategy L P E G r o u p I n n o v a t i o n Extend the application of LPE know-how to the following domains : Power Management / Power Saving - Silicon epitaxy - SiC homo & hetero epitaxy - Other WBG materials Semi Networking Day Milano 20 Settembre
18 LPE Group strategy LPE Mission : Equipment for epitaxy (Si and SiC) Design Manufacturing Sales ETC Mission : Epitaxial growth processes Epitaxial wafers supply Semi Networking Day Milano 20 Settembre L P E G r o u p I n n o v a t i o n
19 Since 1972 Powering the Future ETC Epitaxial Technology Center Semi Networking Day Milano 20 Settembre C o r p o r a t e P r o f i l e
20 ETC Key Facts Epitaxy experts SILICON and SiC Significant effort and investment made to develop SiC epi and know-how on substrate growth technology ETC SiCiLab R&D lab with CNRsupport & staff inside ETC ENIAC European projects: 150 mm SiC epi 300mm Silicon Semi Networking Day Milano 20 Settembre
21 ETC Epitaxy Service ETC ETC offers a complete range of SiC Epitaxy specifications on wafers from 2 to 200mm diameter 4H SiC blanket homoepitaxial layer, with a wide range of thicknesses and doping concentrations for both n and p-type doping A unique multistep high-growth-rate (HGR) epitaxial process for complex p-n junctions structures A patented Virtual Substrate process for high thickness (>100µm) and low doping (<5x10 13 at/cm 3 ) for sensors applications 3C SiC heteroepitaxy on silicon on any diameter up to 200mm and most silicon orientations for MEMS application Semi Networking Day Milano 20 Settembre
22 ETC Epitaxy Service ETC offers silicon epitaxial process development IGBT multiple structures Custom processes Very high thickness >150 µm ETC Very high resistivity >1000 Ωcm High doping substrates: Red phosphorus, Arsenic Silane + TCS processes High temperature processes >1200 C Semi Networking Day Milano 20 Settembre
23 ETC Epitaxy Service Internal characterization capability Layer thickness mapping: FTIR QS2200 Carrier concentration mapping and in-depth profiling: ETC CV Mercury probe SSM 495 Nikon automatic inspection for defects mapping (bright field, dark field, DIC, confocal) Semi Networking Day Milano 20 Settembre
24 ETC Epitaxy Service ETC In the SiCilab ( X-Ray diffraction Polar figures Rocking curve maps Stress measurements Optical characterization µ-raman map µ-photoluminescence map time-resolved photoluminescence Electrical characterization I-V and C-V by device test patterns DLTS Stress characterization by test structures (3C-SiC) Semi Networking Day Milano 20 Settembre
25 ETC Epitaxy Service SiC MEMS test structures V1 V2 ETC microstructures: Spirals Planar rotating sensors compressiv e Stress Tensile Stress Beams (Cantilevers) Bicycle Wheels Semi Networking Day Milano 20 Settembre
26 ETC SiC ETC Semi Networking Day Milano 20 Settembre
27 ETC Silicon ETC Semi Networking Day Milano 20 Settembre
28 Grazie bedankt tak raibh maith agat tänan kiitos спасибо tack thank you danke gracias 有難うございました terima kasih díky teşekkürler mulţumiri grazas 谢谢감사 köszönöm ευχαριστίες gràcies faleminderit спасибі nhờ хвала תודה obrigado merci salamat благодаря მადლობა shukrani hvala благодарам dzięki paldies ačiū ขอบค ณ را धयव द дзякуй takk ر grazzi vďaka dankie hvala Semi Networking Day Milano 20 Settembre
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