MP 1 Unipolar Pulse Power Supply
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1 MP 1 Unipolar Pulse Power Supply Highest flexibility. Supreme performance for Single Magnetron sputtering processes, Plasma Nitriting Processes and Bias application. The MAGPULS Unipolar Pulse Power supplies series MP 1 are designed for operating with single magnetrons for sputtering on substrates as for metal and semi conductive materials. The enhanced ARC-management allows the unipolar pulse power supplies operation in high quality processes. Typical applications are production of hard coatings and plasma nitriding. The MAGPULS Unipolar Pulse Power Supply series MP 1 are constructed in two separate units. One unit is the DC power supply which provides the DC power into the big capacitor bank of the pulse unit and the pulse unit with the integrated sophisticated ARC management. The series MP 1 is available with output power range from 5kW up to 90kW and pulse current from 35A up to 400A peak current. The duty cycle can adjusted within the range from 0.002% up to %. The new MAGPULS enhanced ARC management provides best coating results without process interruptions. Optional the MP 1 series provide an external optical Input interface for external controlling of the pulse times as well as an optical output interface for triggering or synchronization of other unipolar or bipolar pulse power supplies of series MP 1 or MP 2. Features Up to 2 different operating modes from DC up to unipolar pulsing Adjustable pulse parameters and frequency Enhanced ARC management Benefits Universal application range with one power supply Optimal adjustment of the process and process stability Best Arc suppression and lowest Arcenergy for best sputter performance and nitriding coatings Page 1
2 Technical Data Output Voltage V Current 0 10 A DC 0 35 A Puls 0 20 A DC 0 60 A Puls 0 40 A DC A Puls 0 80 A DC A Puls A DC 0 400A Puls Power 0 6kW DC 0 10 kw DC 0 20 kw DC 0 40 KW DC O 75kW DC Pulse frequency DC / 0.05Hz 100kHz DC / 0.05Hz 100kHz DC / 0.05Hz 100kHz DC / 0.05Hz 100kHz DC / 0.05Hz 75kHz Max. frequency with Max. pulse current A A A 40 60A A A A A A Pulse time settings T on T on 2.0 µs up to 100 sec 2.0 µs up to 100 sec Pulse wave form DC / Unipolar pulsed Input Max. Voltage V Max. Current 0 10 A DC 0 20 A DC 0 40 A DC 0 80 A DC A DC Max. Power 0 6kW DC 0 10 kw DC 0 20 kw DC 0 40 KW DC O 75kW DC Mains supply 1AC 230V, 50/60Hz or 1AC 115V, 50/60Hz Page 2
3 Arc Management I max - Detection 0 A up to 35 A peak 0 A up to 60 A peak 0 A up to 100 A peak 0 A up to 200A peak 0 A up to 400 A peak ARC Detection time > 200ns OFF time after ARC detection 30 µs up to 1000 ms di/dt dynamic change Var. di/dt threshold: 0A/µs up to 2000A/µs Voltage drop U Var. U threshold: 0% up to 100% U DC (Option) U x I cross Detection Var. U threshold 0V up to 1000V Var. I threshold: 0.1 x max. Ipeak up to 1 x max. Ipeak (Option) ARC Detection time > 100ns Analog Digital RS 232 RS 485 Ethernet Profibus Interface 1 up to 3 x 15 pin-sub-d for controlling the external DC power supplies 15 pin Sub-D user Interface with floating potential contactors 9 pin Sub_D 9 pin Sub-D RJ 45 (Option) 9 pin Sub-D (Option) Cooling Cooling system Air cooling Water cooling Cooling temperature Max. 35 C 20 C 30 C Cooling medium Air Water pressure max. 6 bar Page 3
4 Ambient temperature Max. humidity Max. operating altitude Environmental Condition +5 C up to +35 C 80% non condensing 1500 m above sea level Mechanical data of the pulse unit construction 19 rack 5 HU 19 -rack 10 HU Dimension H x W x D x 483 x 650 mm x 483 x 650 mm Weight 23 kg 27 kg 30 kg 32 kg 60 kg Page 4
5 Display LED display Operating Display and Operating Graphic color Display Power, OK, Start/Stop Graphic menu via function keys and Arrow keys with knob Page 5
6 2 adjustable pulse wave forms V DC+ V UP+ t t Rear side with connecting cables and water connection Page 6
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