Laser Material Processing

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1 Laser Material Processing Standard lenses Custom developments Technical support services

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3 Products for Laser Material Processing LINOS History 4 The Team 5 F-Theta-Ronar Lenses Basics 6 F-Theta-Ronar lenses for 355nm 9 F-Theta-Ronar lenses for 532nm 9 F-Theta-Ronar lenses for 830nm 10 F-Theta-Ronar lenses for 1030nm/1064nm 10 F-Theta-Ronar protective glasses 11 Beam Expanders Basics 12 Beam Expanders fixed magnification 15 Beam Expanders variable magnification, manual 16 Beam Expanders variable magnification, motorized 17 More Optical Systems 18 Fax Form 19 LINOS Photonics GmbH & Co. KG Business Unit Laser Technology Isartalstraße 43 D Munich, Germany 3 Phone +49 (0) Fax +49 (0) lmp@linos.de Internet

4 LINOS History A company with a comprehensive past and a promising future With over 800 employees (more than 130 of which are physicists and engineers) working at three German sites and many subsidiaries all over the world, we are able to meet all of our customers requirements in the optical industry. Our aim is to provide extensive service and customer support from the very first customer contact. With many years of experience and a huge range of projects carried out in numerous applications we can offer a solution for almost any problem. In addition there are our specialist teams who provide services to customers in the fields of optical design, system engineering, quality assurance and system manufacturing. And, last but not least, as the basis of a good supplier relationship we strive to be a reliable, competent and longstanding partner to our customers. Our product range and services run from individual standard components to the installation of highly complex optical systems. LINOS facility, Regen, Germany 1877 Founding of Rodenstock in Würzburg 1883 Relocation to Munich 1898 Opening of the Regen facility 1898 Founding of Spindler & Hoyer 1996 LINOS is founded Further acquisitions: Steeg & Reuter Präzisionsoptik, Franke Optik Vertriebsgesellschaft, Gsänger Optoelektronik GmbH 2000 Acquisition of Rodenstock Präzisionsoptik 2001 LINOS takes over all products of Lees Optical Instruments Co. Inc Opening of the new LINOS facility in Regen 2006 LINOS is acquired by Qioptiq A brief overview of LINOS history 4 LINOS Photonics GmbH & Co. KG Business Unit Laser Technology Isartalstraße 43 D Munich, Germany Phone +49 (0) Fax +49 (0) lmp@linos.de Internet

5 The Team Our objective is to provide maximum customer service Your satisfaction is our primary goal. LINOS products are known worldwide for their high quality and exceptional performance. It is against this demanding standard that we measure our efforts. Our team combines experience, knowhow and ingenuity with over one hundred years of company tradition in the development and production of sophisticated opto-mechanical systems. Our mission is to be an innovation leader within the highly specialized photonics market. With that in mind, LINOS endlessly pursues perfection in the tradition of our RODENSTOCK heritage; especially in these times of changes and challenges. Based on this corporate culture we can mark the beginning of an exciting future, giving new opportunities a chance. Capitalizing on our strength of innovation through the deployment of our core competencies in optics and mechanics design, we strive to satisfy all of our customers demands. This mutual success is made possible by teamwork, cooperation, openness, and optical experience. Our newly expanded team extends a warm welcome to you for a start into this exciting future. We request that you consider us to be your dedicated and reliable partner for providing practical solutions, creating innovative products and creating the future. Isabel von Diemar Business Unit Manager Laser Technology Phone +49 (0) isabel.diemar@linos.de LINOS Photonics GmbH & Co. KG Business Unit Laser Technology Isartalstraße 43 D Munich, Germany Phone +49 (0) Fax +49 (0) lmp@linos.de Internet 5

6 F-Theta-Ronar Lenses Application Only by providing focussing systems which meet production processing demands, the extremely versatile possibilities of the laser as a tool can be fully utilized. The LINOS F-Theta-Ronar lenses for laser material processing guarantee the best processing results over the entire working field. These lenses can contribute to providing your requirements in production, especially for sophisticated applications. The wide range of applications include: Drilling and fine cutting of metals and ceramics (e.g. micro drilling in PCBs) Plastic welding (e.g. fusion of plastic materials without additional materials) Structuring or perforating of metallic and non metallic materials (e.g. openings/ ventilation) Marking (e.g. of smart cards, ICs, printing plates, keyboards, dashboard designs in the automotive industry) Cleaning with laser pulses for careful treatment of industrial products (e.g. wafers) as well as restoration projects (e.g. monuments). Translating identical scan angles into identical scan paths An F-Theta-Ronar lens provides an image in accordance with the so-called F-Theta condition y = f x Ð For instance, a laser beam bundle is directed by means of movable mirrors and focused by an F-Theta-Ronar lens. The material surface to be processed, the object to be read or the film to be written is scanned in accordance with the scanning angle Theta resulting from the deflection (by line or area). To avoid the curvature of field which normally occurs, the deflecting unit is positioned in front of the lens in the beam path. This results in a straight scanning line in a plane (image plane) perpendicular to the optical axis. An F-Theta-Ronar lens is therefore plane field lens as well. Proportionality between the scan angle Theta and the image height y ensures proportionality between the angular velocity of the deflecting system (e.g. of the mirror or polygon wheel) and the scanning speed in the image plane. This property is of special importance in those cases where the duration of exposure of the material surface is a factor. Utilization of a maximum allowable entrance beam diameter Because of the optically advantageous properties of lasers (monochromaticity and coherence), it is possible to obtain a diffraction-limited quality of the image point when using high-grade F-Theta- Ronar lenses. To utilize this property in practice, the entrance pupil must be filled out as much as possible by the entrance beam bundle. Depending on the application, homogeneous or Gaussian shaped illumination profiles can be used. To satisfy this condition, the deflecting elements must be of sufficient size. In case the beam diameter is not sufficient, a beam expander must be used to expand the laser beam bundle (see section beam expanders, page 12). The primary technical data of the standard LINOS F-Theta-Ronar lenses is listed in the tables on pages 9 and 10. It also gives details of the relevant diameters of the entrance beam bundles and the position of the deflecting elements. 6

7 F-Theta-Ronar Lenses Application Data M1 A FFL flange focal length øspot image plane y m1 øbeam M2 m2 last surface (lens element or protective glass) BFL back focal length first surface Telecentric F-Theta-Ronar lenses If a non-flat surface is scanned, and the beam is incident at an angle, there will be a positional deviation over the projection of the corresponding point in the scan plane and so a deviation in scale in dependence on the distance from the ideal scan plane. This error can be avoided by using a telecentric F-Theta-Ronar lens. Such a lens differs from standard F-Theta-Ronar lenses in that the axis of the focused beam bundle is perpendicular to the scan plane (see picture above). Telecentric F-Theta-Ronar lenses require large lens diameters for large scan paths (lens diameter 2y + entrance beam bundle diameter). F-Theta-Rapid-Ronar lenses The F-Theta-Rapid-Ronar lenses are small, cost effective scan lenses for high speed galvo systems, complementing the existing well known LINOS F-Theta- Ronar lens series. With a weight of only 90 grams and a miniature design of only 47 mm in diameter, the F-Theta-Rapid-Ronar lenses are ideal for small, compact systems. All F-Theta-Rapid-Ronar lenses for 532 nm, 830 nm and 1064 nm have the same screw thread of M39x1. The focal lengths 63 mm, 100 mm, 160 mm and 254 mm allow diagonal scan lengths of 41 mm, 62 mm, 100 mm and 157 mm respectively. Customized solutions allow optimization LINOS is the laser industry s first contact to talk about exciting projects such as: lenses for ultraviolet radiation, high power versions, lenses for USP lasers and special applications like micro machining. As a matter of course LINOS answers all technical questions with the help the world leading optical designers. LINOS has developed and produced a number of customized F-Theta-Ronar lenses for the most varied application areas. Based on this know-how a wide range of different needs can be solved, like achromatic F-Theta-Ronar lenses, extremely large scan angles, modification of the standard antireflection coating or rectlilinear F-Theta-Ronar lenses for line scanning. Standard version F-Theta-Ronar and Rapid-Ronar-lenses The following pages provide the most important data for the standard F-Theta- Ronar and Rapid-Ronar lenses. They are suitable for scanning by line with one deflecting unit (where a diameter of the entrance beam bundle larger by a factor of 1.4 to 1.8 is possible and where the point image diameter is correspondingly smaller due to lower diffraction) and for area scanning with two deflecting units (where the diagonal determines the maximum scan length). 7

8 Product Tables Nomenclature for F-Theta-Ronar lenses Application Data m1 M2 M1 Θ A FFL flange focal length last surface (lens element or protective glass) image plane øspot Y PG means including a protective glass with antireflective coating for the given wavelengths. The mirror distances m1 and m2 are recommended values The overall scan angle Ñ. refers to the maximum diagonal scan angle The scan length can be calculated with the formula: 2y = EFL x 2 x π/180 øbeam m2 first surface BFL back focal length 2y : scan length or diagonal [mm] EFL: effective focal length [mm] 2 : overall scan angle [ ] π/180: conversion factor into radians The entrance beam diameter (øbeam) refers to the intensity 1/e² under Gaussian illumination. The image spot diameter (øspot) refers to the intensity 1/e² under Gaussian illumination. It can be calculated with the formula: øspot = 1.83 x λ x EFL / øbeam øspot: image spot diameter [µm] 1.83: factor of apodisation λ: wavelength [µm] EFL: effective focal length [mm] øbeam: entrance beam diameter [mm] The listed F-Theta-Ronar lenses fulfill the F-Theta-condition of better than 0.1% except for a few versions. Those lenses that feature a larger deviation in distortion are indi cated accordingly. The effective focal length (EFL), flange focal length (FFL) and back focal length (BFL) have been calculated by means of paraxial relations (for rays close to the optical axis). In reality, they can slightly deviate from the data shown in the following tables based on the actually used entrance beam diameters and mirror positions. The data for the entrance beam diameter and the mirror positions are recommended values. Changing their values will affect both the image spot diameter and the maximum possible scan angle/diagonal. 8

9 EFL BFL FFL 2y ±Θ max. Øbeam Øspot m1/m2 Order number Nominal focal length [mm] Effective focal length [mm] Back focal length (from vertex of last element or from protective glass surface) [mm] Flange focal length (distance from mechanical flange to focus plane) [mm] Scan length or diagonal for area scans [mm] Maximum scan field [mm 2 ] Overall scan angle [ ] Entrance beam bundle diameter [mm] Image point diameter (1/e 2 ) for Gaussian illumination [μm] Mirror distances [mm] Screw thread or lens diameter PG = including protective glass F-Theta-Ronar lenses for 355 nm x 98.8 ± / PG x 99.3 ± / PG4 *** F-Theta-Ronar lenses for 532 nm x 28.5 ± /15 M39x PG x 43.5 ± /13.5 M39x PG x x 58 ±25.0 ± /12 16/ PG x 54.4 ± / PG7 * x x 98.4 ±25.0 ± /12 16/ PG x 70.1 ± /13.5 M39x PG1 ** X ± / PG x 111 ± /19.2 M39x PG x x ±25.0 ± /24 18/ PG x x ±28.0 ± /16 30/ PG x ± /20 D * Telecentric F-Theta-Ronar lens meets F-Theta condition better than 3.4% ** Meets F-Theta condition better than 1% *** With quartz lenses 9

10 EFL BFL FFL 2y ±Θ max. Øbeam Øspot m1/m2 Order number Nominal focal length [mm] Effective focal length [mm] Back focal length (from vertex of last element or from protective glass surface) [mm] Flange focal length (distance from mechanical flange to focus plane) [mm] Scan length or diagonal for area scans [mm] Maximum scan field [mm 2 ] Overall scan angle [ ] Entrance beam bundle diameter [mm] Image point diameter (1/e 2 ) for Gaussian illumination [μm] Mirror distances [mm] Screw thread or lens diameter PG = including protective glass F-Theta-Ronar lenses for 830 nm x 28.9 ± /15 M39x x ± / x ± / F-Theta-Ronar lenses for 1030 nm/1064 nm x 29.1 ± /15 M39x PG x 43.6 ± /13.5 M39x PG x x 61.5 ±25.0 ± /12 16/ PG x 54.4 ± / PG9 * x x 98.9 ±25.0 ± /12 16/ PG x 69.9 ± /13.5 M39x PG1 ** x x ±28.5 ± /24 13/24 M76x1 M76x PG x ± / PG x ± / PG10 *** x ± /19.2 M39x PG x x ±26.5 ± /24 18/ PG x x ±28.0 ± /16 30/ PG * Telecentric F-Theta-Ronar lens meets F-Theta condition better than 3.4% ** Meets F-Theta condition better than 1% *** F-Theta-Ronar lens for λ = 1030 nm

11 F-Theta-Ronar protective glasses Protective glass Protective glass diameter [mm] Protective glass thickness [mm] AR coated for λ [nm] Order number PG / PG VIS PG PG Quartz PG VIS PG VIS PG PG PG / PG

12 Beam Expanders Application The option of well directed beam expansion by the LINOS beam expander extends the spectrum of sophisticated laser material processing. It can vary the diameter of the laser beam, thus adapting the focus spot to the demands of the overall system. At the same time, it is possible to minimize undesirable effects by other optical components. The beam expander allows for fine focussing, a reduction in beam divergence and a minimization of diffraction. The LINOS beam expander can be used for sophisticated processing tasks ideally in combination with the LINOS F-Theta-Ronar lenses: Beam expanders with fixed magnification As with all LINOS products, the beam expanders are designed with exceptional imaging quality. The lens geometry has been optimized to eliminate disturbing back reflections that may impact laser stability and system performance. These beam expanders have been designed with a minimum number of lens elements to avoid the high energy density beam waists lying close to any lens surface, thus minimizing the potential for damage. In addition, a specially developed coating, coupled with a more durable fused silica entrance lens enhances the lifetime of these beam expanders. A linear guide is included in the design that guarantees high pointing accuracy during alignment. An engraved scale with a vernier simplifies the compensation for focal length variations introduced by additional optical components, making it easier to maintain ideal focus. Laser structuring of foils Laser scribing of ceramic substrates Cutting of solar cells Micro drilling of sheet metal Marking of diverse materials with encodings LINOS offers standard versions of fixed, variable and motorized beam expanders. Galvo mirror F-Theta-Ronar lens Motorized beam expander The illustrated beam path shows a typical scan head application for material processing using a beam expander. 12

13 A Beam Expanders Exit Group Focusing ring (Scale A) Zoom ring (Scale B) Entrance group Ø 42.0 Groove Ø Ø 36.0 E Position for Γ = 2x Focusing and zoom rings in position for Γ = 8x Position for Γ = 2x Fig. 1 Beam expander with a variable expansion factor 2x to 8x for 1064 nm. Beam expanders with variable magnification Manual Version Expansion factor The variable beam expander enlarges the diameter of a parallel beam bundle by a certain expansion factor which can be set anywhere in the range from 2 to 8 times. The correct selection of this factor allows for an ideal adaptation of the beam diameter to the entrance pupil of a following optical system, for example an F-Theta-Ronar lens. The variable expansion factor allows an exact adaptation to changing application conditions which results in lower diffraction and divergence, therefore in higher imaging quality. Focusing The back focal length of the overall optical system can be modified by focusing the beam expansion. There to the distance between the entrance lens element group and the exit lens element group has to be modified. The derived variable afocus also allows for a fine focusing for the compensation of focal length tolerances of other optical components. In addition, an adjustable working distance between the lens and the workpiece can be achieved. Handling The expansion factor is adjusted by turning the focusing ring (scale A in Fig. 1) and zoom ring (scale B) to the according value of the scale (see Fig. 2). To focus the beam expansion, the focusing ring (Scale A in Fig. 1) should be turned. The beam expander should be mounted at surface [A] to ensure that the function of the lens elements or setting threads are not impaired. During installation, it is also important to maintain free access to the setting scales and the maximum positions of the moving lens groups in the direction of the optical axis. The standard LINOS beam expander can be operated with an image angle of 0.2 without any image loss. This means that the incident beam can be tilted by up to 0.2 with respect to the beam expander axis. As a rule, this allows sufficient space for installation despite the mechanical tolerances of the overall system. First turn (groove visible) The precise adjustment of the beam expander in the customer s unit is also important for the following reasons: If the laser beam is incident to the beam expander with a lateral offset of Δx E, the lateral offset at the exit is increased to Δx A = Δx E x Expansion factor. This is particularly noticeable with large expansion factors. In practice, the following deflection mirrors are then not met at the center. If beam expander is tilted with respect to the laser beam, it is primarily noticeable at small expansion factors since the image angle is inversely proportional. These results can be seen after the focusing lens as a positional change in the image plane. The threads for the focus and expansion setting on the variable beam expander are designed as 6-start worm trapezoidal threads in order to minimize tilting due to the setting movement. Second turn (groove is covered) Focusing ring (Scale A) 8x 7x 6x 5x 4x 3x 2x Expansion factor Γ Zoom ring (Scale B) Fig. 2 Setting values for the focusing ring (A) and the zoom ring (B) of the beam expander for the expansion factors 2x to 8x. When the second turn of the focusing ring is made (the scale goes back to the start again after 20), the groove is covered. 13

14 Beam Expanders 25 pin D-sub plug (female) 4-40 UNC (2x) A 7.0 Ø 56.5 Ø 39 h Beam expanders with variable magnification Motorized Version The motorized beam expander contributes to considerably reduced set-up times and allows for an universal and flexible use of the machine in on-going production. It is no longer necessary to have the laser system set up by experts between the different production processes. And as there is no need to open the unit, the laser protection class of the equipment is maintained during re-adjustment. The user-friendly software allows for an easy setting of the expansion factor and the focusing position using a computer. Two motors control the lens movements. Positional sensors report the exact position of the lens elements at all times. The positioning accuracy of better than 50µm makes it possible to set up an application once and to store the settings of the beam expander for successive jobs. This precision also allows a deliberate defocusing of the laser beam. With a constant expansion factor, a change in the back focal length can replace a z-axis or a vertical axis stage in certain applications. The maximum change in the working distance depends on the selected expansion factor and the focal length of the following lens. The focus shift for an afocal laser beam can be approximately calculated as follows: Δ s = -f ² x RBFL where f : focal length of lens RBFL: reciprocal back focal length of beam expander Drive system The drive system of the motorized beam expander consists of two independent DC motors. The position of the two entrance lens elements is detected by two conductive plastic resistors. The computerized control concept is based on the controller and the corresponding software. The controller connects the RS232C serial input of the PC via a 9-pole sub-d plug with the motorized beam expander via a 25-pole sub-d plug. The beam expander can also be directly controlled under other operating systems (e.g.dos, UNIX, etc.) via the serial input of the controller. The software (see Fig. 3) allows for the input of any desired enlargement between 2x and 8x. The exact position of the moving lens groups is calculated by the software and set while taking the factory determined offset factor into account. All major data, including the offset value, are stored in a permanent memory of the beam expander. To compensate deviations of other optical components (e.g. mirrors) in the system, the lens elements can also be controlled independently of one another by the software. The motorized beam expander and the controller (incl. software and power supply) must each be ordered separately. A detailed manuel and a CD-ROM are available for demonstration purposes. Fig. 3 Windows TM software mask for easy control of motorized beam expansion. 14

15 Beam Expanders Fixed magnification M 25.4 x E 1-32UN-2B C-Mount Ø 22.0 Ø 27h7 A Ø 36.0 Expansion 2x, 5x or 10x Wavelength 532 nm or 1064 nm Entrance lens made of quartz Ø E High imaging quality Mounting in customer machine at Ø 27h7 or C-Mount ±7.5 overall length Pointing stability during adjustment of divergence Easy fine focusing using an engraved scale with a vernier convergence correction Consideration of convergence correction when using maximum focusing span Wavelength [nm] Magnification factor Maximum entrance beamø at 1 /e 2 Gaussian beam [mm] Maximum exit beamø in [mm] Lens elements Entrance lens made of quartz Mounting diameter or thread [mm] Order number 532 2x fixed x 27.0 h7 1-32UN-2B C-Mount x fixed x 27.0 h7 1-32UN-2B C-Mount x fixed x 27.0 h7 1-32UN-2B C-Mount x fixed x 27.0 h7 1-32UN-2B C-Mount x fixed x 27.0 h7 1-32UN-2B C-Mount x fixed x 27.0 h7 1-32UN-2B C-Mount

16 Beam Expanders Variable magnification, manual Exit Group Ø 42.0 Focusing ring (Scale A) Zoom ring (Scale B) Entrance group Groove A Ø Ø 36.0 E Position for Γ = 2x Focusing and zoom rings in position for Γ = 8x Position for Γ = 2x Continuous variation of magnification 2x... 8x Wavelengths 355 nm, 405 nm, 532 nm, 633/780/830 nm or 1064 nm Settings of zoom and focussing scales according to product specific graph Mounting in customer machine at surface [A] Consideration of convergence correction at maximum setting of movable lens elements Wavelength [nm] Magnification factor Maximum entrance beamø at 1 /e 2 Gaussian beam [mm] Maximum exit beamø in [mm] Lens elements Entrance lens made of quartz Mounting diameter or thread [mm] Order number 355 2x... 8x variable 3.4* 31 4 x ** 405 2x... 8x variable 6.0* x... 8x variable 4.0* 31 4 x x... 8x variable 8.0* /780/830 2x... 8x variable 8.0* x... 8x variable 4.0* x... 8x variable 4.0* 31 4 x x... 8x variable 8.0* * Entrance beam Ø only valid for certain magnification factors Otherwise max. entrance beam Ø = 31mm / magnification factor Details can be found in the respective data sheet ** All lenses made of quartz

17 Beam Expanders Variable magnification, motorized Continuous variable magnification 2x...8x Wavelength 1064 nm or 532 nm (on request) User friendly WindowsTM based software with 8 position pre-sets and detailed manual Reduced machine setup times through automatic change of magnification Laser protection class is maintained, as opening of the machine for re-adjustment is not necessery Motorized beam expander with controller Wavelength [nm] Magnification factor Maximum entrance beamø at 1 /e 2 Gaussian beam [mm] Maximum exit beamø in [mm] Lens elements Entrance lens made of quartz Mounting diameter or thread [mm] Order number 532 2x... 8x variable motorized 8.0* h x... 8x variable motorized 8.0* h Controller AC Supply Voltage [V] AC Supply Frequency [Hz] AC Power Supply [A] Outer dimensions [mm 3 ] Software Platform PC Interface Sub-D Cabel (9 Pins,1:1) [mm] / Supply line [mm] Order number (±10%) max ca. 110 x 61 x 35 Windows 95/98/ NT 4.0/2000/XP RS232C ca. 2000/ * Entrance beam Ø only valid for certain magnification factors Otherwise max. entrance beam Ø = 31mm / magnification factor Details can be found in the respective data sheet 17

18 More Optical Systems for Laser Material Processing Laser Beam Expanders UV Laser Beam Expander Systems bm.x VIS-YAG Laser Beam Expander Systems bm.x NIR Laser Beam Expander Systems bm.x Laser Beam Expander Systems 4x and 7x Laser Beam Expander Systems 16x/25x, without spatial filter Laser Beam Expander Systems 50x and 75x with spatial filter Optical Systems Beam Homogenizer Laser Beam Homogenizer for Microbench Laser Beam Homogenizer, System 40/65 mm F-Theta Lenses from Qioptiq Cost effective `LASONAR Series of F-Theta scanning lenses 18 For detailed technical information visit:

19 Fax form LINOS Photonics GmbH & Co. KG Fax +49(0) Laser Material Processing Isartalstraße 43 D Munich Germany Phone +49(0) Internet Last name First name Company Phone Fax Department Address Zip code City Country Dear Customer, Thank you very much for your interest in our high-quality optical systems for laser applications. Please take a moment and describe your requirements as accurately as possible. You will receive a competent reply from LINOS within 3 days. Thank you and best regards, Your LINOS LMP team I ask for a quotation I need further information I prefer a LINOS response by F-Theta-Ronar Beam Expander Laser source ( type, wavelength(λ), beam diameter, power,...) Performance requirements (effective focal length, scan field, scan angle, entrance beam diameter, spot size, magnification factor,...) General information (application, drawing, type of deflecting unit, quantity required,...)

20 LINOS Photonics GmbH & Co. KG Isartalstraße 43 D Munich Germany Phone +49 (0) Fax +49 (0) Internet LINOS Photonics Inc. 459 Fortune Boulevard Milford, MA USA Phone +1 (508) Fax +1 (508) Internet LINOS Photonics Ltd. 2 Drakes Mews, Crownhill Milton Keynes, Bucks MK8 OER UK Phone +44 (0) Fax +44 (0) sales@linos.co.uk Internet LINOS Photonics SARL 90, Avenue de Lanessan Champagne au Mont d'or France Phone +33 (0) Fax +33 (0) info-fr@linos.com Internet LINOS GmbH & Co. KG, Technical specifications are subject to change without notice.