(EN) I MACHINES AND COMPONENTS FOR MICROMACHINING I PRECISION IN A NEW DIMENSION I KUGLER I MACHINES AND COMPONENTS FOR MICROMACHINING

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1 (EN) I MACHINES AND COMPONENTS FOR MICROMACHINING I PRECISION IN A NEW DIMENSION I KUGLER I MACHINES AND COMPONENTS FOR MICROMACHINING PRECISION IN A NEW DIMENSION

2 FUTURE-PROOF TECHNOLOGY AND GLOBAL PRESENCE VISION STRATEGY MISSION The managing directors: Lothar Kugler with his sons Joerg and Till Kugler KUGLER already meets the requirements of ultra-precision machining for tomorrow Since the founding of the company in 1983, KUGLER has been developing and manufacturing precision equipment for the optics industry as well as for other sectors where the machining of metal and other materials in the sub-micrometer range is required. Continuous advanced development of machine technology enabled KUGLER to present the world s first ultra-precision lathe with linear actuator already in 1991 technology that is currently still applied! With over 25 years experience, KUGLER today manufactures micromachining equipment that count among the best in the world. As a company asserting its leading position in the industry, KUGLER feels it has an obligation to maintain the highest quality demands: For us this philosophy does not end with the sale of a machine, but it continues to apply in the support of and advice on all technical aspects of its applications and naturally also with regard to training and customer service. KUGLER has been certified according to DIN EN ISO 9001: 2000 Certificate Register Number: TMS KUGLER works in conformity with RoHS (Restriction of Hazardous Substances) Our clients can call on our subsidiaries worldwide KUGLER has been meeting challenges, which would mean a quantum leap for other manufacturers, head on for a long time: We belong to the few developers and manufacturers of machine tools that consistently rely on aero-/hydrostatic guidances with linear motors. The extreme dynamics, the fast feedrate, the captivating contouring accuracy, and a surface finish of up to a few nanometers are the main advantages of the advanced KUGLER actuator technology, which moreover is non-wearing and consequently offers a high degree of precision and longevity and that in worldwide use. PRECISION IN A NEW DIMENSION KUGLER Your preferred partner for ultra-precision technology, micromachining, and for the manufacturing of high-quality precision parts The key to our success is the success of our customers. As a KUGLER customer you can apply your investments in precision-engineering technologies more successfully than others: Our superior range of ultra-precision machines and components, machining solutions, and services guarantee a measurable competitive advantage! Our customers include small and medium-sized toolmakers and manufacturers of precision parts as well as large global corporations and renowned research and development facilities. Time and cost pressures, the demand for more complex shapes, shorter product cycles, and new materials place ever-increasing strain on the capacities of our clients. The limits of the achievable are thus increasingly exceeded when it comes to conventional methods in the production of parts. Here we deliver new, even client-specific, solutions that will elevate your precision to the next level. The success of our clients is the success of our products it enables us to grow stronger in all the regions of the world, even against the current trend! Our strategy We boost sustainable profitability through profitable, internal growth and continuous improvement of efficiency. We are fast expanding our position in the remaining growth markets, while at the same time consolidating our strong position in our traditional markets. Compared with our competitors we are gaining an advantage through innovation and market-leading technologies in the fields of flycutter machines, micromachining centers, drum lathes, specialized equipment, and components. Content overview Our core competencies p. 4 Design, development, production p. 5 Manufacturing, in-house production p. 6 Quality assurance p. 8 Micromachining centers p. 10 Flycutting milling centers p. 15 Drum lathes p. 19 Air-bearing machine components p. 20 Special equipment solutions for production, measuring technology, R&D p. 21 Global service p

3 OUR CORE COMPETENCIES DESIGN DEVELOPMENT PRODUCTION How is a new machine developed at KUGLER? Why are we so successful? At the beginning there is the idea: Our customers' idea of what should be produced. Our idea how the solution to the manufacturing assignment will look. And then experience is added: The experience of our customers with the demands to the new product and the new step in the process. Our experience in solving multifaceted challenges in the field of ultra-precision manufacturing and micromachining with machine tools featuring aero- and hydrostatic bearings. This leads to machine tool specifications: Based on ideas and experience, machine tool specifications are defined, covering both machine hardware and process requirements. We establish a reliable partnership with our customers Wherever our customers operate globally, they benefit from the presence of highly skilled employees, from trustworthy personal relations, and from our reliability. We support our customers through our consistent solutions-driven approach With extensive application know-how and our wide range of technology-leading machine tools, efficient concepts, and comprehensive service support, we provide our customers with solutions to commercially attractive applications, superior to that of their competitors. We provide our customers with more productive machine tools The excellent precision, speed, and reliability of our machine tools lead to superior productivity at lower operating costs over the full service life, and subsequently to a higher added value for the customer. We achieve our results through machines that are based on market requirements Our creative employees do pioneering work in the development of new application solutions, technologies, products, and services for the use of the customers with their extensive technological know-how and profound knowledge of future market needs. We keep our word We have honored our vision, if our customers regularly report during surveys that they are more successful than their competitors due to our products. Development and design: The machine tool suitable for solving the new machining tasks will be configured, using well-proven concepts and components, if applicable. Unsolved problems that are beyond current manufacturing technology are identified, solutions are found by suitable research work and experiments. The new tool is designed, and the control system and associated software packages are selected. Prototype construction: Already during assembly and construction, the prototype machine tool is optimized in close cooperation with our developers, the assembly staff, and the customer. Precision metrology instruments (classical-optical as well as computer-aided) allow for this early improvement. An in-house test production with the new prototype machine finalizes this development phase. Standard production machine: A machine tool which proofs to be reliable and successful will be offered as a KUGLER standard machine tool, and is built as a small series. This substantially reduces production costs in comparison to the prototype or the construction of a single unit due to lower purchasing costs, standardized assembly processes, and due to drastically reduced software development. But even then, KUGLER always accounts for client-specific features and special options of the machine. 4 5

4 MANUFACTURING IN-HOUSE PRODUCTION MANUFACTURING IN-HOUSE PRODUCTION Machine base from granite Resistant against aging Corrosion-free Excellent damping characteristics Optimal characteristics for aerostatic/hydrostatic bearings Low thermal expansion The machine base ensures that the tool bit clamped to the motor spindle is always kept in position with respect to the workpiece with a sub-micrometer accuracy! We use granite for the machine base and, in combination with water-cooled actuators, attain a high level of thermal stability. Besides a very low thermal expansion coefficient of 6.5 µm/k, granite features extremely good damping characteristics an inevitable requirement when machining metal surfaces to mirror quality! Development methodology and quality management We combine both very efficiently A long-year experience is needed for the reliable design and building of sophisticated machine tools at the limit of what is technically possible. KUGLER has been producing micro and nano technology for more than 25 years, manufacturing the basic components in house. Only the use of these original KUGLER components guarantees the high quality and subsequent long service life of our machine tools, and that provides you with a competitive advantage: You know that your machine always works with the highest accuracy and at full capacity! Original KUGLER components are the result of extensive research-based development and quality assured assembly: Strict, traceable testing procedures measure the performance in order to comply with the extremely demanding product specifications! KUGLER places great value on the in-house manufacturing of key components in order to ensure quality and delivery times. Even for machines that are more than 15 years old, we guarantee availability of more than ninety percent of the complete range of parts, because one of our most important goals is to ensure lowest down times of our tools to support the competitiveness of our customers worldwide. Ultra-precision motor spindles A KUGLER precision machine tool firstly needs a spindle, mostly for workpiece movement: Whether mold making, production, or aerospace, thanks to the close cooperation with universities, research institutes, and customers, and due to our broad knowledge of motor spindles and the optimal exploitation of our innovation potential, KUGLER is able to take care of special requirements with regard to high torque or compact systems. Main spindle drives and rotational stages that comply with the required process accuracy and reliability can be provided. The high level of diversification and the need for always shorter delivery times require defined development standards as well as reliable calculation and simulation methods for the static and dynamic behavior of the spindles to be used. Using latest production methods and tools we implement our ideas and turn the digital product of our development into reality: Calculations and simulations are done on the same CAD model, which later also is used for manufacturing, utilizing CAM programming of the machine tools. Only with this integrated process it can be ensured that the highest quality standards can be met. High-speed actuators Maintenance-free High speed and acceleration Non-wearing Backlash-free Vibration-free Consistent precision The direct linear motors optimized for the KUGLER machine tools offer the advantage of higher speed and acceleration as well as shorter reaction times without indications of wear. The particularly large non-ferrous motor coil prevents variances in the cogging force and allows for an exceedingly stable speed control with higher efficiency as compared to other direct actuators. Assembly in climate-controlled rooms Assembly of precision components in clean rooms Assembly of machines in climate controlled environment We can call on our in-house mechanics and our extensive knowhow in assembly and measuring technologies for the manufacturing of machine tools and components. We guarantee highest quality, a faultless price-performance ratio, and on-time delivery. Our production and assembly procedures are flexible, always meeting the requirements of the actual task. 6 7

5 QUALITY ASSURANCE QUALITY ASSURANCE Running test Initial operation For the acceptance process of a KUGLER machine tool, but also for monitoring the assembly procedure, we perform various non-contact optical and tactile (touching with calipers) tests with calibrated probes, some of which we will present on this page: Measuring the axis performance in the X-Y plane of a machine tool. At this point it is especially the perpendicularity of the axes that is to be measured. An extension of this test presents a circular path test, which verifies the near-zero backlash of a KUGLER precision linear axis. Classic measurement of the flatness of the machine tool s XY plane using an optical flat with a surface figure in the 100 nanometer range. A coaxial non-contact optical height sensor (based on the principle of chromatic aberration) is used as probe. Quality assurance using state-of-the-art measuring technology Surface and distance measurements with laser interferometers Roundness measurement instruments Inspection cameras with digital image processing Measuring microscopes, also for surface roughness measurements in the nanometer range Geometry measuring instruments Autocollimation systems for the measurement of angles Coordinate measuring machines Calibrated measurement standards for flatness, angles, and sphericity All precision components and machine tools, which we manufacture for our customers, comply with the highest demands for accuracy and quality. SPECIFICATION SHEET DOCUMENTATION PROCESS COMPONENTS MACHINE TOOLS QUALITY DOCUMENTATION Measuring the exact positioning of a linear axis by means of a laser autocollimator. The data collected is used to program the motion controller to compensate for residual sub-micrometer deviations. Straightness measurement of a linear axis with a laser interferometer. Here, too, residual deviations in sub-micrometer range are recorded in order to then reduce them further by programming the motion controller. You can be assured that our products are systematically subjected to quality inspections using highest resolution calibrated measuring instruments. This we guarantee. KUGLER has been certified according to DIN EN ISO 9001:2000 Documentation on the complete process sequence We record every step, from the first sample test report through to the statistical process control in series production. KUGLER works in conformity with RoHS (Restriction of Hazardous Substances) KUGLER standard of quality KUGLER precision machine tools - a constant quality level from the initial specification sheet to the final acceptance process! VDI Standard for Positional Accuracy of Machine Tools VDI/DGQ 3441 RT400 rotary table measuring the exact angle positioning with an autocollimator and a calibrated reference polygon. RT400 rotary table measuring the radial and axial runout against a reference ball with a precision of better than 50 nanometers. 8 9

6 MICROMACHINING CENTERS MICROMACHINING CENTERS Micromachining for SMEs With KUGLER machine tools, high-end micromachining technology, which not long ago was the exclusive domain of research institutes and large corporations, has been made accessible to small and medium-sized enterprises. Sophisticated and demanding precision machining now is affordable, as the investment in it remains reasonable. The modular design of micromachining centers also provides for upgrading at a later stage: Depending on requirements, a standard model can be upgraded to a highest precision model. Optional axes and accessories make the machine tools highly flexible. The micromachining centers only require moderate space conditions. Thanks to the compact design, the smaller size makes it possible to set up the machine tool even in limited spaces. The functional protective housing provides for excellent shielding against interfering environmental influences. Why KUGLER micromachining centers? KUGLER micromachining centers increase your profit margins and improve your competitiveness, because: they reduce hourly rates through automation or at least partial Modular design multi-axis machining center for variable machining requirements and variable budgets The precision sets the price MICROGANTRY this is the original name of what today is a broad range of modularly designed micromachining tools, which are assembled on the same size granite base and feature a compatible motion controller and software architecture. The MICROGANTRY represents the latest state-of-the-art technology in KUGLER precision machine tools. With the development of the MICROGANTRY micro, MICRO- GANTRY nano, and MICROMASTER models, KUGLER satisfies the demand for flexible micromachining centers suitable for different machining needs and budgets. The MICROGANTRY MICROMASTER models offer the customer the possibility to choose between standard and high-performance machines (HPMs) depending on its intended use and required precision in micromachining and microstructuring. All models feature an excellent price-performance ratio. All machines of the MICROGANTRY line are high-precision CNC controlled 3- to 5-axis machining centers, designed and optimized to meet the requirements of dynamic micromachining with very low roughness, and of microstructuring by means of laser. Depending on the selected machine configuration, the process parameters, and the tooling, a variety of materials can be machined and structured with the highest precision. Hybrid machining on a single machine tool Micromachining by milling or by laser ablation All the MICROGANTRY MICROMASTER models are characterized by the possibility of performing hybrid machining on one machine: The tool can for example be equipped with a high-frequency spindle and a laser, enabling a combination of machining the work pieces by milling and by laser radiation. Always possible is the integration of a tactile probe for measuring the work pieces position or even for capturing the work piece surface geometry. Many of our customers appreciate the benefits of several machining types on one tool, which eliminates time-consuming and accuracy degrading rechucking of the workpiece. Nano Pico Femto The choice of laser is yours! At the integration of a laser system there is a choice between Nano, Pico or Femtosecond laser sources. It is even possible to integrate two or three different lasers into one machine tool; the laser radiation is brought to the workpiece either via fiber optics or via a free beam guiding system. Long-term thermal and mechanical stability The base of our micromachining centers is from fine-grained granite that guarantees the best long-term thermal and mechanical stability. Furthermore, the granite, in combination with passive or active air-damping elements, eliminates external vibrations very effectively. automation, they reduce auxiliary process time and as such increase productivity, they reduce lead time due to optimized dynamics and intelligent operator assistance such as the set-up assistant, they reduce error potential during machine operation through tailored measuring routines. KUGLER micromachining tools reduce your dependencies! No highly specialized operating personnel needed: Machines can be operated by trained employees. Less or no shift work: Flexible automation. More flexibility at fluctuating capacity utilization: Simple product and process changeovers through operator-friendly control system software. More transparency: Logging of work progress and operating data of the machine. Less service: The remote maintenance by KUGLER helps to avoid unscheduled on-site service deployment. Typical applications Laser micromachining of 2.5D and 3D structures Drilling and fine-cutting Structuring through laser ablation 3(5)-axis micromachining Milling Drilling Grinding with diamond grinding bits Applications Micro mechanics Texturing for tribology Micro electronics and printing technology Micro optics Microfluidic components Micro molds for injection molding Nozzle drilling Production of prototype parts, small and medium size batches

7 MICROMACHINING CENTERS COMMON SPECIFICATIONS MICROGANTRY MICROMACHINING CENTER Precision mechanical bearing concept for flexible use in a mechanical workshop Aerostatic bearing concepts Outstanding cost-effectiveness and nano precision Whether utilizing mechanical bearings like the MICROGANTRY micro, or air bearings like the MICROGANTRY nano, or even hydrostatic bearings like the MICROMASTER, all these precision multi axis machine tools feature the same machine platform, and many components are interchangeable. All models can be chosen to be equipped with high-frequency spindles e.g. for micro structuring, or with machining lasers, or even with fly-cutter spindles for the generation of mirror surfaces. On the following pages you will find more information about the main focus and the typical application field for each of the MICROGANTRY MICROMASTER models! Common features MICROGANTRY MICROMASTER Axis stroke X/Y/Z = 300 x 300 x 200 mm Massive granite machine base Rigid portal frame for X and Z axes Precision linear stages X (portal axis) / Y (in granite base) / Z (vertical axis) Very high dynamics and high velocity of linear axes Highest stiffness of axes High overall accuracy Digital servo controllers for all axes, optical data bus Space provided on machine base for micromachining lasers Reflective beam guidance for the smallest focus diameters (partly optional) Prepared for parallel configuration of laser, measuring, and milling spindles on the Z axis linear stage Vibration isolation through passive air dampers (partly with automatic leveling) Future exchange of linear stages possible (mechanical, aerostatic and hydrostatic bearings) High-frequency spindles up to 200,000 rpm for tools from Ø 30 micrometer! Flycutter spindles up to Ø 100 millimeter In combination with the optional tilt-swivel-unit, a 3-axis 3X machining center is turned into a fully simultaneous 5X 5-axis system. The powerful motion controller enables the precise and, depending on the bearing concept, even ultra-precision or highly dynamic machining of 2.5D and 3D structures with all 5 moving axes interpolated simultaneously. MICROGANTRY micro Bearings precision mechanical bearings All-over accuracy ± 2 µm Positioning error ± 1.5 µm Axis run-out ± 1.5 µm Acceleration 15 m/s 2 Linear axis speed 0 20,000 mm/min Outstanding suitability for rapid and efficient manufacturing of microstructures Standard micro machining tool center MICROGANTRY micro3/5x The new KUGLER MICROGANTRY micro3/5x is the right machining center for a large part of mechanical and laser micromachining tasks. Whether for 2.5D or 3D applications: the machine lives up to its promise. The MICROGANTRY micro3/5x with its specially designed precision mechanical bearings features a noticeably improved repeatability and positioning accuracy as compared with conventional precision bearing machine tools. The MICROGANTRY micro3/5x is designed for milling and laser machining with high dynamics. Depending on the tooling (milling spindle or laser), microstructures can be manufactured from various materials. Through the application of mechanical precision bearings, the MICROGANTRY micro3/5x sets few demands on the installation site. Within the KUGLER line of micromachining tools, a unique feature of the MICROGANTRY micro are the high dynamics linear axes, showing the largest acceleration values of all of the KUGLER machine tools. Only due to the outstanding dynamics, precise laser machining operations can be performed within an acceptable time frame, as galvo laser scanners cannot be used here for accuracy reasons. MICROGANTRY nano Bearings aerostatic for X/Y axes All-over accuracy ± 1 µm Positioning error ± 0.5 µm Axis run-out ± 0.15 µm Acceleration 10 m/s 2 Travel speed 0 12,000 mm/min Outstanding suitability for laterally extended micro structuring with highest precision MICROGANTRY nano3/5x The KUGLER MICROGANTRY nano3/5x is a high-precision multiaxis micromachining center that can perform milling/cutting and structuring with nanometer precision due to its air bearing concept. The aerostatic bearing design of the X and Y stages allows for the manufacturing especially of laterally extended structures with the highest precision and minimal roughness. The MICROGANTRY nano3/5x is well-suited for commercial manufacturing of embossing masters with finest structures at tight tolerances. The frictionless bearings guarantee a superior long-term accuracy of the machine tool. In addition to high-precision milling, the MICROGANTRY nano3/5x is, as the micro3/5x, also suitable for laser machining. Nanoprecision through aerostatic bearings Minimal residual friction of air bearing stages Sub-micrometer repeatability High-resolution measuring system Suitable for positioning at smallest increments Minimal run-out errors for X/Y axes High dynamics and machining speed Insulation and temperature control of the machining space Integrated compressed air filters and dryer Standard air damping mounts with automatic leveling Manufacturing of basic metal optical components with optional flycutter spindle 12 13

8 MICROMASTER MICROMACHINING CENTER FLYCUTTING MILLING CENTERS Hydrostatic bearings for ultra-precision and best surface finish Superior machining of 3D-surfaces in optical quality MICROMASTER 3/5X The MICROMASTER 3/5X is optimized for machining in ultraprecision quality. The ultra-smooth movement of the linear axes at an excellent positioning accuracy, in combination with aerostatic spindles, allows for the machining of optical quality surfaces of metal and polymer blanks, e.g. for mirrors, embossing masters for F-theta lenses, or optical freeform surfaces. The outstanding stiffness of the hydrostatic bearings improves the machining of very hard materials and allows for higher feed rates. Long-term accuracy of the machine axes is sustained at all operation conditions, which is an essential feature when machining optical gratings. The hydrostatic bearings of all axes enable 3D machining with smallest manufacturing tolerances. Therefore the MICROMASTER also is especially suited for any machining task requiring smallest incremental feed motion. The powerful motion controller and the use of the optional tilt swivel unit expanding the machine to a fully simultaneous five axis tool offer the best qualification for the machining of 2.5D and 3D freeform surfaces at highest quality. For the manufacturing of metal optical components, e. g. for high reflectivity cross gratings, the tilt swivel unit can be interchanged with an optional ultra-precision KUGLER RT rotary stage. MICROMASTER Bearings hydrostatic, X/Y/Z axes All-over accuracy ± 0.5 µm Positioning error ± 0.3 µm Axis run-out ± 0.15 µm Acceleration 10 m/s 2 Linear axis speed mm/min Outstanding suitability for optical quality surfaces in non-ferrous metals and polymers; hard metal machining Nanoprecision through hydrostatic bearings Hydrostatic linear stages X (portal axis) / Y (in granite base) / Z (vertical axis) Highest stiffness of motion axes Lowest residual friction for all axes Optimized vibration damping in oil bearings Minimal positioning jitter; ultra-smooth axis motion Sub-micrometer repeatability Measuring system with highest resolution Suitable for positioning in small increments Minimal axis run-out for X/Y/Z Best control performance with dedicated motion controller Extensive insulation and temperature control for the machine tool Compact hydrostatic unit, controlled oil temperature Vibration isolation of machine tool with passive metal damping mounts, automatic leveling Precision quick-change system for flycutter spindles, high frequency (HF) spindles, and measuring probes; with three docking stations Ultra-precision machining in the flycutting process FLYCUTTING MILLING CENTERS KUGLER flycutting milling centers are high-precision, CNC controlled 2- to 4-axis milling machines, specially designed and optimized for the requirements of ultra-precision machining using air bearing spindles with flycutting disks. The flycutting milling process is technically similar to grinding with cup wheels, whereby, instead of the bonded diamond grain, a single-point diamond tool with geometric-specific cutting edge is used. Machine-cutting processes that use ultra-precision air-bearing technology for the machining spindle and the workpiece stage produce mirror surfaces in excellent optical quality on suitable materials. The more than 25 years experience in the design and construction of this type of machine tools with aerostatic bearings forms the foundation for the exceptionally high reputation of KUGLER precision machine-building. The surface finish that can be achieved is in the range of a few nanometers, or even lower than one nanometer (Ra value) for suitable materials such as oxygen-free copper. Geometry accuracy is in the sub-micrometer range, often even about 50 nanometers (peak-to-valley values). FLYCUTTER F1000-2X Bearings X axis (workpiece axis) aerostatic X-axis feed drive non-ferrous linear motor Positioning accuracy X-axis ± 0.5 µm Z axis precision needle roller bearing Z-axis drive unit DC servo motor Thermally stable natural granite components for machine base, vertical column (Z column), and X stage Air-damping machine mounts for vibration isolation and damping Workpiece (X-) stage with vacuum pre-loaded aerostatic bearing Highest precision of the workpiece stage with best straightness, lowest pitch, roll, yaw, and ultra-smooth motion Z axis positioning with high-precision needle roller stage with high-resolution linear incremental encoder Axis stroke X/Z: 1000 x 250 mm High load capacity of workpiece stage Manually operated rotary B axis mounted on Z stage for micrometer-precision alignment of flycutter spindles for machining of flat and cylindrical workpiece geometries Flycutter spindles with aerostatic bearings, flycutter disk diameters up to 600 mm Integrated measuring tools for in-process workpiece measurement on the machine tool 14 15

9 FLYCUTTING MILLING CENTERS FLYCUTTING MILLING CENTERS Typical applications 2D ultra-precision machining of flat geometries with monocrystalline diamond tool bits on non-ferrous metals in optical quality; surface figure < 0.3 µm / Ø 150 mm, surface finish Ra < 3 nm (depending on workpiece material). Interpolating motion controller with easy-to-use operator s interface, e.g. programming with M and G codes. Materials and components Non-ferrous metals as Cu, Al, Al and Cu alloys, chem. Ni, nickel, silver, gold, gold platinum alloys, brass Semiconductor materials, e.g. Si, Ge Polymers, plastics, e.g. PMMA, polycarbonate (with restrictions) Optical crystals, e.g. CaF 2, NaCl, KDP Special materials, e.g. Be and ZnSe Mirror surfaces on Cu and Al substrates (metal optics) Scanner polygons Reflectors, lighting units Electric contact surfaces Some process steps in wafer machining Mechanical sealing surfaces Elements for heat dissipation, cooling elements Precision mechanical components Acrylic glass windows Transparent polymer components for interior design Optimization for a wide range of machining tasks KUGLER offers customer-specific flycutting milling centers, e.g. with enlarged X-axis stroke, and additional options. Optimization for the most diverse tasks, such as the reworking of aircraft windows, or the machining of long aluminum beams for high-precision coordinate measuring machines, is realized at customers request at affordable costs. Optional upgrades for FLYCUTTING MILLING CENTERS Robust sheet metal covering with special damping coating Aerostatic bearing machining spindles in different sizes and with different speed ranges Flycutting milling wheels for specific diameters or for specific orientations of the diamond tool bits High-precision indexing rotary stage for polygon manufacturing All-purpose or workpiece-specific vacuum chucks for workpiece clamping High-precision Y axis linear stage, e.g. for the manufacturing of reflection gratings or IR diffraction gratings C-axis rotary stage with aerostatic bearings, with drive unit and high-resolution angular encoder, e.g. for the manufacturing of spherical and toroidal metal optics components Minimal quantity lubrication system Efficient chip extraction system Increased stroke for x-axis: 2 m (larger stroke on request) 16 17

10 FLYCUTTING MILLING CENTERS DRUM LATHES Intuitive operation, programming assistant and remote access The modern motion control system of KUGLER Flycutting milling centers uses similar software and hardware as the MICROGANTRY MICROMASTER micromachining centers. This allows for a simple and cost-effective adaption of the flycutting tool s user interface to any specific flycutting application. Client- and application-specific user interface of the machine controller Integrated assistant for easy setup of measuring routines and programmable functions The machine controller can handle up to 32 axes for the integration of additional units, such as probes for measuring surface finish and flatness Large, easy-to-use color touch-screen display Remote diagnostics via internet: KUGLER is ready for 24/7 assistance in case of difficulties or for programming support. Intelligent measuring technology Automatic measurement of the diamond tool position by means of a high-precision laser gauge Automatic measurement of the workpiece by means of an optical confocal sensor or by a high-resolution tactile probe Automatic compensation of the axis position using data from tool and workpiece measurement Integrated humidity and temperature sensors, suitable for the permanent documentation of environmental conditions, e.g. in long-term manufacturing processes Optional: Fizeau interferometer, also with computer-aided interferogram evaluation for sub-micrometer flatness inspection Optimal protection for man and machine Extremely low floor space requirement through full integration of control system and power supply into one single cabinet Personal protection housing separately mounted, without connection to the machine base reduced susceptibility to lowfrequency vibrations Accessibility to the machining space via a large, automatically activated panorama window Optimal accessibility to the machine for cleaning, maintenance and service through large, comfortably to open doors Special lathes for diamond machining of long rollers from nonferrous metals or with non-ferrous metal coating. Optical quality surfaces, annular and helical groove structures We create high gloss cylindrical surfaces at perfect shape MICROTURN TDM-1200 The KUGLER TDM-1200 drum lathe is a precision lathe with aerostatic bearings for high-precision machining of rotation-symmetrical workpieces such as drums and rollers, mounted in a horizontal position between two bearings. Monocrystalline diamond tools with a defined cutting geometry are used on workpieces from non-ferrous metals or on workpieces with chemical nickel or E-copper plating. It generates optical glossy surfaces as well as ring-like and helical groove structures with the highest demands on surface finish and contouring accuracy (run-out, diameter variation, cylindrical form). Rollers and cylinders prepared in this way are mainly applied for the embossing of polymer films and plates or as master for the manufacturing of nickel shims. Typical applications V groove grating for lighting foils in architecture, solar energy technology or for TFT monitors Mold master for cylindrical lens arrays General precision rollers Machine base and workpiece stage from fine-grained granite Passive air-damping mounts between granite base and machine frame for optimal vibration insulation of the machine Workpiece stage with the latest actuator technology with non-ferrous linear motor and digital servo amplifier to eliminate backlash Spindle and tailstock with aerostatic bearings in the latest KUGLER double-calotte bearing technology with integrated balance sensors for ultimate safety Integrated direct drive (torque motor) for the head stock with incremental angular encoder, suitable for exact angle positioning of the workpiece (drum indexing) Separate linear stage for cable chain for vibration reduction Accessories Extraction system for chips and cooling lubricant spray mist Separate linear stage for carrying chip extraction system Cooling/lubrication spray mist system, quick exchange tool holder Tool alignment microscope Laser system for measuring roller diameter and for alignment of the tailstock MICROTURN TDM-1200 Bearings Z axis, spindle and tailstock A axis (tool axis, optional) Fast tool servo (optional) Cutting diameter Outstanding suitability for aerostatic hydrostatic piezo mm, larger models on request for optical quality surfaces, annular and helical groove structures Optional features Fast tool servo, piezo-actuated, for non-rotationally symmetric structuring of the roller surface; integrated in the motion control system of the machine tool Hydrostatic bearing rotary stage for the positioning of tools and instruments, e.g. for the adjustment of the V-groove angle of optical gratings Video microscopes for tool alignment and quality assurance Non-contact optical probe for qualification and alignment of rollers before machining 18 19

11 MACHINE COMPONENTS WITH AEROSTATIC BEARINGS SPECIAL EQUIPMENT SOLUTIONS FOR PRODUCTION, MEASURING TECHNOLOGY, RESEARCH Power and accuracy We do high-precision positioning on air AIR BEARING ROTARY STAGES KUGLER RT rotary stages feature single-calotte aerostatic bearings: The hemispherical calotte with an accuracy in the 50 nanometer range guarantees lowest possible run-out. A large precision flat disk bearing guarantees the extraordinary high load capacities of e.g. 12 tons as for the RT Adjustable vacuum pre-loading enables adapting to variable loads (type RTV rotary tables). The rotary stages are available with vibration-free run-out belt drives for nanometer smooth motion (e.g. for the manufacturing of optics), and with highly dynamic direct drives (e.g. for precision machining and metrology). A high-resolution angular encoder provides for accuracies into the sub-arc seconds range. High load capacity and repeatability Long service life, service-friendly No stick-slip effect Suitable for clean room operation (optional) Typical applications Measuring of inner and outer diameters Rotary stage for roundness/cylindricity measurement instruments and for coordinates measuring machines Precision machining, optics manufacturing Short and long distances Perfect straightness even at the highest speeds AIR BEARING LINEAR STAGES KUGLER ALU-LINE and GRANU-LINE type linear stages. Incredibly easy principle: one guidance bar, one cage. Incredibly accurate: run-out only in the sub-micrometer range. Incredibly compact: integrated actuator and linear encoder. Incredibly flexible: vibration-free and highly dynamic actuators, high-resolution models, aluminum or granite base. Thanks to proven and tested technologies KUGLER linear stages are highly vibration-proof. Because there is no mechanical contact between guidance bar and moving cage, service life of the Alu-Line and Granu-Line stages is practically unlimited. Best straightness, best positioning capability High load capacity, excellent stiffness Vibration-free motion, no stick-slip effect Maintenance-free, unlimited service life Versatile due to modular design Typical applications Machine axes for precision machine tools Main axes and auxiliary axes for measuring devices Ultra-precision positioning systems Clean room applications (optional) Knowledge and experience for the development of machining tools and for process improvement 25 years of KUGLER ultra-precision machining, 25 years of KUGLER precision machine-building. Benefit from our longterm experience in the design and construction of precision machine tools and precision machine components. Benefit furthermore from our experience in the application of our machine tools! It is only the comprehensive combination of machine-building, market-driven manufacturing of precision components and optics, as well as high-precision measuring technology that lead to the excellent products that KUGLER can offer today. It is not only the standard machines presented in this catalog here, but also the new developments perfectly matching your specific needs and requirements special solutions produced for our customers. We would like to present some of them on this and the following pages: MACHINE TOOLS LARGE, PRECISE, AND VERY SPECIAL Photo top left: The old MICROMASTER, a true five-axis machining center with hydrostatic linear axes. The precursor of today s compact, modular, new MICROMASTER. The tool has already been equipped with workpiece measuring technology, a sophisticated CNC control system with extensive positioning correction, and a dedicated interface to a CAM system. The axis motion is that smooth and precise, that the manufacturing of metal optics is possible. And the axes are that stiff, that the milling of hard materials such as molybdenum and iridium is also successful! Small photo top right: Microbase, the large tool for femtosecond laser machining. When a short-pulse laser still had the size of a canapé, this all aerostatic bearings machine not only housed up to two of these large beam sources, but also carried newly developed, heavy trepanning optics and provided support for a scanner head. Today a powerful micromachining laser fits on the rear side of the base granite of a compact MICROGANTRY machining center! Photo top right: KUGLER has already designed the first hydrostatic bearing-mounted ultra-precision lathe with linear direct drives in 1990: The KUGLER HP100. Today only special equipment is fitted with the original axis arrangement of this legendary lathe. Shown here is an experimental air bearing system for the testing of self-balancing precision spindles, a project for a research institute, whose ideas and requirements could be realized quickly and cost-effectively with KUGLER components! MICROGANTRY The compact multi-axis positioning systems of the MICROGANTRY line are not only used for precision milling centers or laser machining equipment, but have also been customized for micro ECM systems or even for micro-gluing applications! 20 21

12 SPECIAL EQUIPMENT SOLUTIONS FOR PRODUCTION, MEASURING TECHNOLOGY, RESEARCH GLOBAL SERVICE Measuring devices with a linear stroke of more than 10 meters and a resolution of only a few nanometers! KUGLER has manufactured stand-alone measuring instruments specifically for the optics industry up to the year Interferometers and measuring microscopes are applied on work floor and in development laboratories of the optics and semiconductor industries. What has remained until today is the development, construction, and delivery of robust ultra-precision positioning systems based on aerostatic bearings. Our customers use them for their own measurement tools and instruments. with an accuracy clearly in the sub-micrometer range they are ideally suited for non-contact probes and measuring heads! Global Service, World Standard, and Quality KUGLER is an internationally renowned leading company for ultra-precision machine tools and equipment. Our excellently trained employees are the base for this success. And for your success: We are available to assist you with all needs about our products seven days a week. Regular software updates and information on new add-ons and upgrades for your KUGLER machining equipment and precision components complete our comprehensive service portfolio. SERVICE@KUGLER-PRECISION.COM The longest KUGLER measuring benches are used in all the famous important accelerator centers of the world: To measure magnetic fields, our customers mount their probes on the granite stage. On frictionless air bearings the stages slide along the long precision base granite, driven by magnetically shielded linear motors. Photo top: Positioning system for a magnetic field measuring probe, mounted on a granite bench made from special stone selected for low magnetic susceptibility. Photo right: Measuring devices for the measuring of a gear wheel tooth profile. From big to small : With integrated RT-2000 rotary table (with aerostatic bearings), or with the compact ALU- LINE 80 linear stages. Always with belt drive for the smallest runout and an especially ripple and vibration-free movement. Of course, the compact 3-axis gantry systems can also be used for the construction of desktop coordinates measuring machines 22 23

13 PRECISION IN A NEW DIMENSION KUGLER GMBH Heiligenberger Str Salem GERMANY Fon: Fax: info@kugler-precision.com KUGLER GMBH accepts no liability for the contents of the catalogue. Technical changes without notice. KUGLER