InvenSense. MPU Axis Accelerometer Gyroscope MEMS Motion Sensor. Circuit Analysis
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1 InvenSense MPU Axis Accelerometer Gyroscope MEMS Motion Sensor Circuit Analysis 3685 Richmond Road, Suite 500, Ottawa, ON K2H 5B7 Canada Tel: Fax:
2 Some of the information in this report may be covered by patents, mask and/or copyright protection. This report should not be taken as an inducement to infringe on these rights. Chipworks Inc all rights reserved. Chipworks and the Chipworks logo are registered trademarks of Chipworks Inc. This report is provided exclusively for the use of the purchasing organization. It can be freely copied and distributed within the purchasing organization, conditional upon the accompanying Chipworks accreditation remaining attached. Distribution of the entire report outside of the purchasing organization is strictly forbidden. The use of portions of the document for the support of the purchasing organization's corporate interest (e.g., licensing or marketing activities) is permitted, as defined by the fair use provisions of the copyright act. Accreditation to Chipworks must be attached to any portion of the reproduced information. CAR CYJC Revision 1.0 Published: May 14, 2014
3 Overview Introduction Brief Design Overview Component Descriptions Device Summary Figures To view, please click on the appropriate bookmark in the panel on the left Package Markings Package X-Ray Die Markings Die Photograph Top Metal Layer Annotated Die Photograph Top Metal Layer Die Photograph Polysilicon Layer Die Architecture Schematics Top Level Diagram Accelerometer Data Path Self-Test Logic Self-Test Logic Self-Test Logic Control Logic Clock Divider Control Logic Accelerometer Amplifier Buffer Buffer Programmable Capacitance Decoder Current Bias Programmable Capacitance Current Source Current Bias Current Source Amplifier
4 Programmable Capacitance Amplifier TRIGATE_4_4D2S TRIGATE_4_4D Switches Switch S_DIFINV_4L2P5_20L Control Logic Accelerometer Amplifier SWITCH_ Switch Programmable Capacitance Sigma Delta ADC ADC Switches ADC Switches ADC Amplifier ADC Amplifier ADC Amplifiers Gyroscope Data Path Self-Test Logic Self-Test Logic Self-Test Logic Gyroscope Decoder Bias Reference Amplifier Programmable Capacitance Programmable Capacitance Current Source Programmable Capacitance S_TRIGATEF_10_10D Switch Programmable Capacitance Logic Controller B Self-Test Logic Self-Test Logic Self-Test Logic Logic Controller A
5 3.9.1 Counter Counter Counter Counter Counter Counter Logic Controller Logic Controller Logic Controller Buffers Clock Circuit Logic Controller Logic Controller IDECOMP_9B Logic Controller Logic Controller Gyroscope Sigma Delta ADC ADC Amplifier ADC Amplifier Resistor Network ADC Buffer Voltage Reference ADC Amplifiers Frequency Divider ADC Amplifier ADC Switches ADC Switches DEC_4BS ADC Switches ADC Buffer ADC Switches Delay S_LANF_E30L5_E10L Sigma Delta ADC ADC Amplifier 1
6 4.0.0 Charge Pump Amplifier Pulse Generator Counter Buffer Clock Divider Charge Pump Clock Driver S_INV_10L3_4L3P Amplifier Current Bias Amplifier Current Bias S_TRIGATEF_10_10S S_TRIGATEF_4L4_4L3P S_TRIGATEF_4L3P5_4L3P S_INV_16_ Self-Test Logic Charge Pump BIAS_ ADJ_CAP Amplifier AMP_ ADJ_RES Amplifier Temperature Sensing Amplifier Switching Amplifiers Temperature Sensing Programmable Switches NAND Amplifier Voltage Bias Amplifier Self-Test Logic Switch Stage Switch Circuit S_MX21F_10_ Control Logic
7 5.6.1 Clock Divider Pulse Generator Logic Logic Logic Comparator Clock Generators Clock Generator Clock Divider Buffer S_INV_14L3_4L3P5D Clock Drivers Level Shift S_RSF_15L3X2_8L3P Level Shift S_TRIGATE_30L3X2_20L3P5X Detector Circuit AMP_ Unused Logic Clock Divider Programmable Oscillator Programmable Oscillator S_TRIDIFINVF_14_ Clock Divider Level Shifters LDO LDO Regulator S_TRIGATE_74L3P5_40L3P S_TRIGATE_74L3P5X6_40L3P5X S_TRIGATE_40L3P5X3_40L3P Voltage Divider Amplifier Amplifier Level Shift with Disable Control Logic Bandgap Resistor Network
8 8.3.2 DEC_4B S_TRIGATE_20L3P5_20L3P5D Level Shift Voltage Generator and Biases Current Source Current Sink Voltage Bias Current Sink Buffer Buffer S_TRIGATEF_10_10D S_TRIGATEF_4L4_4L S_TRIGATEF_10_ S_MX21F_10_10D Self-Test Logic Buffer S_MX21F_4L3P5_4L3P Buffer Bandgap RES_ADJ_ RES_ADJ_ RES_ADJ_ Amplifier Buffer Self-Test Logic S_TRIGATEF_10_10D2S Unused Reference Generator Level Shift Control Circuit Amplifier Level Shift Level Shift Pull-Down S_TRIGATE_8L3P5_18L3P5X Resistor Network S_TRIGATE_40L6X3_40L S_TRIGATE_10L3X3_10L3P5
9 S_TRIGATE_10L3P5_10L3P5D Unused Current Source Analog Data Path and PLL Switch Analog Path Voltage Generator Amplifier Amplifier Amplifier Switch Analog Path Switch Switch Clock Pulse Generator Comparators Comparator Voltage Bias S_SMBUF_15_5D Comparator Amplifier S_TRIGATE_10_10D Unused Amplifier Unused S_TRIGATE_20_ Amplifier Pulse Generator Current Sink S_TRIGATE_20_10X Amplifier Amplifier S_TRIGATE_10_ Clock Generator CLKGEN_ Comparator Voltage Generator Unused
10 Logic Controller PLL and Integrator Integrator Unused S_INV_4_ Voltage Reference Unused Amplifier Self-Test Logic Charge Pump Amplifier Clock Buffer S_TRINOTF_E10_E S_INV_4_4D Buffers PFD Control Drivers S_DIFINVF_E10_ S_TRIGATEF_10_10S VCO Amplifier B Comparator Voltage Divider Decoder Amplifier Vbias Amplifier Amplifier A VCO Comparator Amplifier A Amplifier Vbias AMP_ Amplifier B Clock Generator Tr-State Driver Analog Path Self-Test Logic S_TRIGATEF_10_10S S_TRIGATEF_10L3_10L3D4
11 S_TRIGATEF_4L4_4L4S Decoder Current Source Voltage Reference Programmable Switches Programmable Switch Programmable Switches Programmable Switch Amplifier Switch Select Control Logic Logic Controller EEPROM Column Address Buffer and Row Decoders Buffer Pre-Decoder UNUSED_ Wordline Drivers Level Shift Row Address Driver Buffer Switch MUX Reference Generator F-F Sense Amps Control Circuit Level Shifters S_INV_14_ Level Shifter Control Logic Logic I/O Drivers ESD ESD Output Driver S_NOR2_74X2_50
12 S_NAND2_74X2_ S_NOR2_E70L7_70L S_NOR2_30L7_E300L S_SMBUF_80L7_40L S_SMBUF_74X4_50X Level Shift Level Shift Level Shift S_INV_100L7_50L7X S_NAND2_70L7_70L7X S_TRIGATE_100L7X3_300L7X S_INV_74X2_ S_INV_70L7_70L Output Driver Pull-Down S_SMBUF_40L7_20L7X S_DIFBUF_60L7_50L7X S_NAND2_E120L7_200L S_NOR2_50_ Unused CS S_SMBUF_100X3_ Input Buffer S_SMBUF_40L7_40L Unused CS S_SMBUF_100X3_24X Output Driver S_INV_150_ S_NOR2_E150_E S_NOR3_150_ S_NOR2_200_ S_NAND2_70L7_300L7X S_NOR2_140L7_300L S_SMBUF_80L7_40L7S S_SMBUF_150X2_ Level Shift S_DIFINV_34L7_150L7X Level Shift S_INV_150L3_50L3S ESD Level Detector
13 Pulse Generator S_TRIGATE_40L3_14L3P5D Comparator S_SMINVF_20_ Level Shift Output Driver S_OR2F_34L7_150L7X S_INV_20_ S_TRIGATE_40_16D S_INV_150L3_50L Schmitt Trigger VDDIO_GND_ESD ESD Charge Pump Capacitors Cell Library About Chipworks
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