InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC

Transcription

1 InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC Circuit Analysis of Analog Blocks Chapter Excerpt - Voltage Reference Generator 1891 Robertson Road, Suite 500, Ottawa, ON K2H 5B7 Canada Tel: Fax:

2 InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC Overview Introduction Brief Design Overview Component Descriptions Device Summary References Figures To view, please click on the appropriate bookmark in the panel on the left Package Markings Package X-Ray Pin Configuration Die Markings Die Photograph Annotated Die Photograph Die Architecture Block Diagram Single-Axis Gyroscope Signal Path Schematics Top Level Diagram I/O Interface Enabled Schmitt Trigger A Interface Buffer Enable Generator Self-Test Accelerometer and Second Order Sigma-Delta ADC Latch Bit DAC B Bit DAC Amplifier Amplifier Amplifier Variable Capacitor Feedback Variable Capacitor Feedback Controller

3 InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC Reference Generator Data Path Selector 5x Data Path Selector Clock Nonoverlapping Clock Generator Counter Clock Selector Latch Level Shifter Integrator Amplifier Buffer Bias Reference Variable Capacitor Feedback Controller Variable Capacitor Feedback Switch Capacitor Control Data Path Selector 3x SCL Interface I/O Interface Self-Test Accelerometer and Second Order Sigma-Delta ADC Clock Nonoverlapping Clock Generator Integrator Variable Capacitor Feedback Controller Variable Capacitor Feedback Data Path Selector 3x Clock Data Interface Single-Axis Gyroscope Signal Path Second Order Sigma-Delta ADC Bit DAC Bit DAC Latch Latch Comparator Amplifier

4 InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC Reference Generator Amplifier Amplifier ADC Clock Integrator Switch Clock VIN Switch Clock Voltage Reference Generator Clock Anti-Aliasing Filter AAF Bias Generator Switch Control Switch Control Decoder (3-to-8 Bit) Feedback Amplifier AAF Integrator Amplifier AAF Integrator Amplifier Feedback Amplifier AAF Integrator Amplifier Type Feedback Amplifier Type Demodulator Switch Switch Control Decoder (3-to-8 Bit) Buffer Bias Generator Buffer Coriolis Sense Amplifier Variable Feedback Capacitor Switch Switch Control Decoder (3-to-8 Bit) Integrator Amplifier Variable Compensation Capacitor Variable Compensation Capacitor Feedback Amplifier Integrator 1 Bias Subthreshold MOSFET Bias Capacitor Switch Control Voltage Reference Generator Amplifier Sense Amplifier Switch

5 InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC Switch Switch Switch Control Decoder (3-to-8 Bit) Switch Variable Feedback Capacitor Subthreshold MOSFET Bias Integrator 2 Bias Feedback Amplifier Sense Amplifier Variable Compensation Capacitor Variable Compensation Capacitor Capacitor Switch Control Voltage Reference Generator Amplifier Feedthrough Cancellation Amplitude Control Buffer Buffer Data Switch Switch Counter Amplifier Amplifier Amplifier Amplifier Comparator Variable RC Feedback Amplitude Switch Control Shutdown Interface Clock Divider Drive Loop Data Interface Bias Generator Bias Generator Shutdown Control Interface Level Shifter Quadrature Sine Wave Oscillator Bit Decoder Resistor Ladder (32 Bit) Amplifier

6 InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC Amplifier Bias Generator Switch Amplifier Variable Feedback Capacitor Variable Capacitor Feedback Controller Amplifier Self-Test Accelerometer and Second Order Sigma-Delta ADC Integrator Variable Capacitor Feedback Data Path Selector 5x Data Path Selector 3x Data Path selector Bit DAC VLOGIC Interface and E Reference Generator and Temperature Sensor Resistor Ladder (16 Bit) Bit Decoder Bias Generator Level Shifter Buffer Buffer Buffer Buffer Bias Generator Bias Generator Control Interface Amplifier Amplifier Voltage Reference Generator Amplifier Regulator Level Shifter Level Shifter Amplifier Amplifier Bias Generator

7 InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC Variable Bias Generator Variable Bias Generator Voltage Reference Generator Amplifier Charge Pump with Clock Input Control Bias Generator Buffer Charge Pump Clock Data Interface Internal Bypass Capacitor Selector Amplifier Clocked Comparator Nonoverlapping Clock Generator Clock Divider Counter Local Oscillator SAR ADC (12 Bit) Buffer Comparator with Sample-and-Hold Comparator Amplifier Counter S/R Latch SAR Control Successive Approximation Register DAC (12 Bit) Resistor Ladder Resistor Ladder 1a Resistor Ladder 1b Resistor Ladder 1c Resistor Ladder 1d Resistor Ladder 1e Resistor Ladder 1f Resistor Ladder 1g Resistor Ladder 1h

8 InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC I/O Interface Charge Pump Supply Enable E Protection Bandgap Voltage and Current Reference Voltage Reference Generator Bandgap Reference Generator Voltage Reference Generator Amplifier Bias Generator Amplifier Bias Generator Amplifier Charge Pump Clock Divider Buffer Switch Amplifier Bias Generator Switch Output Interface Enabled Schmitt Trigger I/O Interface Schmitt Trigger Tri-State Buffer with Level Shifter Clock Generator Subset Nonoverlapping Clock Generator Interface Core Logic Clock Interface Core Clock Frequency Divider Core Clock Frequency Divider Nonoverlapping Clock Generator Level Shifter

9 InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC Temperature Sensor with Hysteresis Feedback Amplifier Bias Generator Clock Circuitry Control Logic S/R Generator Counter Digital Logic Digital Logic S/R Clock Divider Level Shifter Clock Divider Combinational Logic Combinational Logic Combinational Logic Combinational Logic Combinational Logic Clock Divider Combinational Logic Output Routing Stage Unused Transistors Clock Source Selector PDF Clock Selector Control Logic Decoder Combinational Logic Digital Logic Control Logic Clock Switch Clock Switching Interrupt Generator Combinational Logic Combinational Logic Combinational Logic Combinational Logic Combinational Logic Combinational Logic Combinational Logic Clock Generator Clock Divider Variable Bias Current Generator with Controller

10 InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC Relaxation Oscillator Double-Ended Differential Amplifier Double-Ended Differential Amplifier Single-Ended Differential Amplifier Single-Ended Differential Amplifier Phase-Locked Loop Bias Generator Charge Pump Loop Filter Phase Frequency Detector Voltage Controlled Oscillator Variable Bias Generator Level Shifter S/R Generator Counter CLKIN Interface Control Logic Clock Divider I/O Interface Clock Divider AN_HJ_OSC_ OTP Memory Block OTP Memory Dummy Cell Dummy Cell Memory Select Switch OTP Memory Memory Select Switch OTP Memory OTP Memory Memory Select Switch OTP Memory OTP Memory OTP Memory OTP Memory OTP Memory OTP Memory OTP Memory Memory Select Switch OTP Memory

11 InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC OTP Memory OTP Memory OTP Memory OTP Memory Memory Select Switch Memory Select Switch OTP Memory OTP Memory Controller Level Shifter Decoder Level Shifter Decoder Decoder Combinational Logic Combinational Logic Single-Axis Gyroscope Signal Path Second Order Sigma-Delta ADC Bit DAC ADC Clock VIN Switch Clock Integrator Switch Clock Quadrature Sine Wave Oscillator Amplifier Resistor Ladder (32 Bit) Sense Amplifier Variable Feedback Capacitor Sense Amplifier Variable Compensation Capacitor Variable Compensation Capacitor Anti-Aliasing Filter Demodulator Coriolis Sense Amplifier Integrator Amplifier Capacitor Switch Control Amplitude Control Amplifier Amplifier Variable RC Feedback Buffer

12 InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC Buffer Bias Generator Bias Generator Shutdown Control Interface Level Shifter Drive Loop Data Interface Single-Axis Gyroscope Signal Path Second Order Sigma-Delta ADC Bit DAC Amplifier Quadrature Sine Wave Oscillator Amplifier Resistor Ladder (32 Bit) Sense Amplifier Anti-Aliasing Filter Demodulator Coriolis Sense Amplifier Amplitude Control Variable RC Feedback Amplitude Switch Control Bias Generator Bias Generator Shutdown Control Interface Drive Loop Data Interface Cell Library About Chipworks

13 VBG1N1 4 IREF MI344 BREF1 BREF2 BREF3 BREF4 BP1 BP2 BREF21 BREF22 BREF23 BREF Bias generator NINV BP2 BP1 OUT MI343 LGCSUP2 INV Amplifier R1345 sq=0.745k sq=957.0 R1339 VBG1N2 3 MI346 IREF BREF1 BREF2 BREF3 BREF4 BP1 BP Bias generator BREF11 BREF12 BREF13 BREF14 NINV BP2 BP1 OUT MI345 LGCSUP INV Amplifier R1335 sq=0.745k sq=957.0 R1333 CK CK CDN MI352 N CDNCTL1 CDNCTL2 CDNCTL3 X2840 V1G_OR3_14_7 V1G_AND22_14_9 X Clock divider MI350 CK VPP2 CDN Charge pump BUFVREF24 C1322 NMOSCAP area=0.297n C1321 NMOSCAP area=0.394n C1320 NMOSCAP area=1.148n C1346 NMOSCAP area=0.21n VPP2 NINV INV BIAS N MI347 OUT LSUPP Amplifier sq=0.627k R1517 R1516 sq=2.509k 2 NINV INV BIAS BP2 BP1 MI355 OUT Amplifier LSUPP2 CTL<4> X3188 X3359 R1323 sq=0.745k sq=957.0 R1324 V1G_INV_14_7 V1G_INV_14_7 LSUPPBUFENA INV NINV BIAS1 BIAS2 MI354 ENP MI353 OUT Z1 Z Switch Buffer LSUPPBUF MI357 2 VBG1N3 2 IREF BAMP1 BAMP2 BP2 BP1 BAMP3 BAMP4 BREF1 BREF2 BREF3 BREF4 BREF31 BREF32 BREF33 BREF Bias generator Voltage Reference Generator Note: Device sizes in microns (as measured from images) Template: dsheetp Copyright (C) 2012 Chipworks Incorporated InvenSense MPU-6050ES Device Type: 3-Axis Gyro/Accelerometer ASIC Die Markings: MANTIS-B3 <InvenSense logo> REV.B CC Date Code: 1129

14 X5600 P u/0.18u BP1 P1672 P1622 P1621 P1627 P1626 V1G_INV_14_7 4.00u/8.00u 4.00u/8.00u BP2 P1658 P1637 P1634 P1635 P1636 P u/1.00u P1655 N1654A P1624 N1653 P1629 sq=0.525k P1628 R1338 R1341 sq=46.4 N1652 N u/8.00u m=6 N1664 N1651 P u/2.00u P u/2.00u N1649 N1650 N u/2.00u m=3 N u/8.00u C1681 METALCAP area=0.994n NINV INV N1663 N1647 N1638 N u/8.00u 2.00u/8.00u 1.00u/8.00u 1.00u/8.00u Amplifier Note: Device sizes in microns (as measured from images) Device Type: Die Markings: Template: csheet Copyright (C) 2012 Chipworks Incorporated InvenSense MPU-6050ES Date Code: 3-Axis Gyro/Accelerometer ASIC MANTIS-B3 <InvenSense logo> REV.B CC 1129 OUT

15 P u/0.60u P1668 P1669 P1671 P1667 P1670 P1673 P1677 P1678 P1657 P1656 P1659 P1661 P1660 P1674 P1676 P1675 R1342 sq=0.262k BREF1 BREF2 BREF3 BREF4 V1G_BUF2_15_7 X7211 X6527 P1679 R1344 sq=32.8 R1343 sq=32.8 VSG_TRIGATE_40L6X3_40L6 IREF Unused Bias Generator Note: Device sizes in microns (as measured from images) Device Type: Die Markings: Template:bsheet Copyright (C) 2012 Chipworks Incorporated InvenSense MPU-6050ES Date Code: 3-Axis Gyro/Accelerometer ASIC MANTIS-B3 <InvenSense logo> REV.B CC 1129 BP1 BP2

16 X5611 P u/0.18u V1G_INV_14_7 BP1 P1615 P1576 P1575 P1581 P u/8.00u 4.00u/8.00u BP2 P1562 P1591 P1588 P1589 P1590 P u/1.00u P1609 N1608A P1578 N1607 P1583 sq=0.525k P1582 R1337 R1330 sq=46.4 N1606 m=3 N1571 N1605 N1603 N1604 N u/8.00u P u/2.00u P u/2.00u N u/8.00u m=6 C1680 METALCAP area=0.994n NINV INV N1570 N1601 N1592 N1593 N u/8.00u 2.00u/8.00u 1.00u/8.00u 1.00u/8.00u 1.50u/2.00u Amplifier Note: Device sizes in microns (as measured from images) Device Type: Die Markings: Template: csheet Copyright (C) 2012 Chipworks Incorporated InvenSense MPU-6050ES Date Code: 3-Axis Gyro/Accelerometer ASIC MANTIS-B3 <InvenSense logo> REV.B CC 1129 OUT

17 P u/0.60u P1611 P1610 P1614 P1612 P1613 P1616 P1618 P1617 P1561 P1567 P1563 P1560 P1564 P1565 P1566 P1568 R1331 sq=0.262k BREF1 BREF2 BREF3 BREF4 V1G_BUF2_15_7 X6526 P1619 R1336 sq=32.8 R1332 X7210 sq=32.8 Unused BP1 BP2 VSG_TRIGATE_40L6X3_40L6 IREF Bias Generator Note: Device sizes in microns (as measured from images) Device Type: Die Markings: Template:bsheet Copyright (C) 2012 Chipworks Incorporated InvenSense MPU-6050ES Date Code: 3-Axis Gyro/Accelerometer ASIC MANTIS-B3 <InvenSense logo> REV.B CC 1129

18 VPP2 X7277 P u/0.60u LS N V1VSG_INVDIF_20L5_60L6 VPP2 VPP2 VPP2 P u/8.00u m=36 P u/8.00u 4 OUT VPP2 P u/8.00u m=6 BIAS N u/0.60u P u/0.60u m=3 METALCAP area=1.26n C1557 NINV P u/4.00u m=6 P u/4.00u m=6 INV METALCAP area=1.468n C1547 sq=67.2 N u/4.00u N u/4.00u R1518 N u/4.00u N u/4.00u N u/4.00u N u/0.60u N u/0.60u N u/0.60u InvenSense MPU-6050ES Amplifier 3-Axis Gyro/Accelerometer ASIC MANTIS-B3 <InvenSense logo> REV.B CC 1129 Note: Device sizes in microns (as measured from images) Device Type: Die Markings: Date Code: Template:bsheet Copyright (C) 2012 Chipworks Incorporated

19 VDD N15693A N15695A 1.40u/0.60u 1.40u/0.60u CDN CK X1556 V1G_AND22_14_9 X of 4... V1G_BUFSER_14_9D16 VDD area=3.809n METALCAP C1544 P u/0.50u P u/0.50u R1515 sq=22.4 R1519 sq=22.4 Unused N15697A 1.40u/0.60u 1.40u/0.60u N15696A 6.00u/0.50u P15698 C1319 C1543 C1542 C1520 C3070 C1318 C1541 C1559 C1317 C1552 NMOSCAP METALCAP METALCAP NMOSCAP NMOSCAP NMOSCAP METALCAP METALCAP NMOSCAP NMOSCAP area=0.162n area=0.192n area=2.555n area=2.0n area=0.16n area=0.202n area=4.56n area=7.2n area=6.06n area=0.8n 6.00u/0.50u P15699 X1557 X of 4... C1558 METALCAP area=3.864n V1G_NAND2_14_9 V1G_BUFSER_14_9D Charge Pump Note: Device sizes in microns (as measured from images) Device Type: Die Markings: Template: csheet Copyright (C) 2012 Chipworks Incorporated InvenSense MPU-6050ES Date Code: 3-Axis Gyro/Accelerometer ASIC MANTIS-B3 <InvenSense logo> REV.B CC 1129 VPP2

20 X2444 ZN SEGCORE01S3 X636 X665 X672 X663 X668 X664 X638 D Q D X2984 DFF DFF QN V1G_AND22_14_9 CK CP CP Q D DFF QN CP Q QN D Q D DFF DFF QN CP CP Q QN D Q DFF QN CP D Q X3416 X3226 DFF QN CP V1G_INV_14_7 V1G_INV_14_7 CDN V1G_OR2_14_7 CDN CDN CDN CDN CDN CDN CDN X2602 V1G_DFC_14_9 V1G_DFC_14_9 V1G_DFC_14_9 V1G_DFC_14_9 V1G_DFC_14_9 V1G_DFC_14_9 V1G_DFC_14_ Clock Divider Note: Device sizes in microns (as measured from images) Device Type: Die Markings: Template: csheet Copyright (C) 2012 Chipworks Incorporated InvenSense MPU-6050ES Date Code: 3-Axis Gyro/Accelerometer ASIC MANTIS-B3 <InvenSense logo> REV.B CC 1129 X23537 V1G_BUF2_14_9 N

21 X6742 P u/0.18u V1G_INV_9_6 P1417 P1414 P1430 P1439 P1456 P1429 P u/4.00u 2.00u/4.00u 4.00u/1.00u 4.00u/1.00u 1.80u/1.00u 4.00u/1.00u 4.00u/0.18u 8 P1440 P1441 NINV 4.00u/0.50u 4.00u/0.50u P1457 P1421 P u/1.00u 4.00u/0.50u 4.00u/0.50u BIAS1 BIAS2 OUT N1489 N1491 N u/8.00u 4.00u/8.00u 4.00u/8.00u!!! P1413! P u/4.00u P1419 P1416! 2.00u/0.18u! 2.00u/0.18u! 2.00u/4.00u m=3! N u/0.50u N u/0.50u N u/8.00u!!!! N u/8.00u N u/8.00u N u/0.18u! N1495! N1470! N1487! N u/0.18u! 4.00u/0.30u! 4.00u/0.30u! 4.00u/0.30u m=6!!!!!! N1492!! Unused N u/1.00u N1497 Unused X825! 1.00u/0.18u! 0.50u/1.00u! Z D OE!!! V1G_DATAOUT_14_7D2 InvenSense MPU-6050ES Buffer 3-Axis Gyro/Accelerometer ASIC MANTIS-B3 <InvenSense logo> REV.B CC 1129 Note: Device sizes in microns (as measured from images) Device Type: Die Markings: Date Code: Template: csheet Copyright (C) 2012 Chipworks Incorporated

22 1.50u/0.18u 2 N1467A u/0.18u P1461 N1466A 1.50u/0.18u u/0.18u P1463 Z1 ENP Switch Note: Device sizes in microns (as measured from photographs) Template: asheet Copyright (C) 2008 Chipworks Incorporated V1G_BUFF_20_10 X6459 Z2 InvenSense MPU-6050ES Device Type: Die Markings: Date Code: 3-Axis Gyro/Accelerometer ASIC MANTIS-B3 <InvenSense logo> REV.B CC 1129

23 BP1 P1359 P1358 P1361 P u/8.00u 4.00u/8.00u 2 X5609 P u/0.18u BP2 V1G_INV_14_7 P1357 P1354 P1355 P1356 P u/1.00u N1349A N1391 P1364 P1366 P1348 P u/2.00u P u/2.00u N u/8.00u C1393 METALCAP area=0.994n BIAS OUT P1365 R1347 sq=0.525k sq=46.4 N1392 R1328 m=3 N1398 N1388 N1390 N1389 N u/2.00u N u/8.00u m=6 NINV INV P1412 N1401 N1377 N1368 N u/8.00u 2.00u/8.00u 1.00u/8.00u 1.00u/8.00u R1326 R1329 sq=32.8 sq=32.8 Unused Amplifier Note: Device sizes in microns (as measured from images) Device Type: Die Markings: Template: csheet Copyright (C) 2012 Chipworks Incorporated InvenSense MPU-6050ES Date Code: 3-Axis Gyro/Accelerometer ASIC MANTIS-B3 <InvenSense logo> REV.B CC 1129

24 P u/0.60u P1403 P1408 P1411 P1410 BP1 P1381 P1387 P1386 P1385 BP2 R1327 sq=0.262k 2 V1G_BUF2_15_7 P u/0.60u P u/0.60u BAMP1 BAMP3 BAMP4 X4874 X5608 P1405 P1379 P1404 P1380 P1406 P1384 P1407 P1383 VSG_TRIGATE_40L6X3_40L6 P u/0.60u X7209 P u/0.60u V1G_BUF2_15_7 BREF1 BREF2 BREF3 BREF4 IREF Bias Generator Note: Device sizes in microns (as measured from images) Device Type: Die Markings: Template:bsheet Copyright (C) 2012 Chipworks Incorporated InvenSense MPU-6050ES Date Code: 3-Axis Gyro/Accelerometer ASIC MANTIS-B3 <InvenSense logo> REV.B CC 1129 P1409 P1382 BAMP2

25 InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC About Chipworks Chipworks is the recognized leader in reverse engineering and patent infringement analysis of semiconductors and electronic systems. The company s ability to analyze the circuitry and physical composition of these systems makes them a key partner in the success of the world s largest semiconductor and microelectronics companies. Intellectual property groups and their legal counsel trust Chipworks for success in patent licensing and litigation earning hundreds of millions of dollars in patent licenses, and saving as much in royalty payments. Research & Development and Product Management rely on Chipworks for success in new product design and launch, saving hundreds of millions of dollars in design, and earning even more through superior product design and faster launches. Chipworks Inc all rights reserved. Chipworks and the Chipworks logo are registered trademarks of Chipworks Inc. Contact Chipworks To find out more information on this report, or any other reports in our library, please contact Chipworks at Chipworks 1891 Robertson Road, Suite 500 Ottawa, Ontario K2H 5B7 Canada T F Web site: info@chipworks.com Please send any feedback to feedback@chipworks.com