Piezoceramic Sensors

Transcription

1 Microtechnology and MEMS Piezoceramic Sensors Bearbeitet von Valeriy Sharapov 1. Auflage Buch. xii, 500 S. Hardcover ISBN Format (B x L): 15,5 x 23,5 cm Gewicht: 925 g Weitere Fachgebiete > Technik > Elektronik > Sensorik Zu Leseprobe schnell und portofrei erhältlich bei Die Online-Fachbuchhandlung beck-shop.de ist spezialisiert auf Fachbücher, insbesondere Recht, Steuern und Wirtschaft. Im Sortiment finden Sie alle Medien (Bücher, Zeitschriften, CDs, ebooks, etc.) aller Verlage. Ergänzt wird das Programm durch Services wie Neuerscheinungsdienst oder Zusammenstellungen von Büchern zu Sonderpreisen. Der Shop führt mehr als 8 Millionen Produkte.

2 Contents 1 General Information About Piezoelectric Sensors Short Historical Essay Determination and Classification of Piezoelectric Sensors Properties and Descriptions of Piezomaterials Transducer Research Methods Piezoceramic Material and Element Parameters Determining Piezoceramic Element Parameters Defining the Electromechanical Communication Coefficient Phase Measurement of Resonant f r and Antiresonant f a Frequencies of Radial and Longitudinal Fluctuations Measurement of Resonant Frequency f r Measurement of Antiresonant Frequency f r Best (Amplitude?) Method of Measuring Resonant f r and Antiresonant f a Frequencies Measurement of Frequency in the First Overtone f Definition of Poisson s Coefficient Definition of the Least Positive Root of the Frequency Equation Relative Dielectric Permeability (Constant, Permittivity?) " T 33 =" Specific Volume Electric Resistance v Defining Piezo-modules d 31 and d 33 in a Dynamic Mode Piezo-module d 33 in a Static Mode Young s Modulus Y31 Y Speed of Sound 3 D vii

3 viii Contents Good Mechanical Quality Q m Definition of Curie Point Temperature T C Piezoceramic Materials Formulas for the Calculation of Piezoceramic Material Descriptions Piezoceramic Disk (Fig. 1.5) Piezoceramic Bar (Fig. 1.6) Piezoceramic Rectangular Plate (Fig. 1.7) Sensor [Physical Size] Descriptions References Monomorph Piezoceramic Elements Calculating Electric Piezoceramic Resonator Parameters Equivalent Schemes for Piezoresonators Calculate Piezoresonator Electric Parameters Fluctuations of Piezoceramic Rods Longitudinal Fluctuations of a Rod in a Transverse Field Longitudinal Fluctuations of a Rod in a Longitudinal Field Fluctuations of a Piezoceramic Disk Piezoceramic Transformers Piezoelectric Transformer in the Form of Thin Disks and Rings References Spatial Energy Force Structure of Piezoceramic Transducers Synthesis of Piezoelement Spatial Energy Force Structure Anisotropy of Piezoceramic Materials Characteristics Transverse Piezoelectric Transducers Piezotransformers Disk Piezotransformers References Measuring Circuits of Piezoelectric Sensors Charge Amplifiers Voltage Amplifiers References Feedback in Piezoceramic Sensors Feedback Effect on Sensor Characteristics Influence of Frequency-Dependent Feedback Influence of Frequency-Independent FB Feedback Influence on Nonlinear and Frequency Distortions Feedback Influence on Time Constant of Sensors

4 Contents ix Feedback Influence on Input and Output Resistances Feedback Influence on Static Systems Errors Piezoceramic Sensors with Spatial Electromechanical NFB Domain-Dissipative Piezoceramic Sensors with Spatial Electromechanical NFB Piezoceramic Sensors with Piezoelement in FB Circuit of Charge Amplifier Electric Feedback in Piezoceramic Sensors Sensors with Combined Feedback Electric Damping of Piezoceramic Sensors with Feedback Sensors with Two Feedback Channels Sensors with Output Charge Amplifier and Voltage Amplifier in Additional Feedback Channel Sensors with Output Voltage Amplifier and Charge Amplifier in Additional FB Channel Piezosensors with Two Charge Amplifiers with Piezoelements in FB Circuits of Amplifiers Piezosensor with Charge Amplifier and FB Channel on Voltage Amplifier References Bimorph and Trimorph Piezoelements Symmetric Bimorph Piezoelements Asymmetric Bimorph Piezoelements Trimorph Piezoelements Asymmetric Planar Trimorph Piezoelements Asymmetric Coplanar Trimorph Piezotransducers Symmetric Coplanar Trimorph Transducer Vibrations of Asymmetric Coplanar Trimorph Piezotransducer with FB Technology of Bimorph Piezoelement Production References Devices to Control and Diagnose Bimorph Piezoelements Defects of Bimorph Piezoelements Defect Diagnostics by AFC Diagnostics of Defects by Pulse Characteristic Diagnostics of Defects by Transitive Characteristic Device Based on Aperiodic Networks Devices Based on Active Oscillator Circuit References

5 x Contents 8 Piezomagnetic Sensors Influence of Magnet Design Factors on Sensor Characteristics Cylindrical Magnets Rectangular Magnets Piezomagnetic Sensors of Tachometers Piezomagnetic Sensor Models Improvement of Piezomagnetic Sensor Characteristics Output Signal Enhancement Accuracy Improvement Methods Sensor Design Simplification Suppression of Vibration Hindrances Piezomagnetic Electro-acoustic Transducers References Hydroacoustic Transducers Classification and Characteristics Ratios of Electromechanical Transformations Cylindrical Piezoceramic Transducers Lamellar and Spherical Piezoceramic Transducers Basic Requirements for Projected Transducers Selection of Energy Transformation Method and Mode Shape Certain Transducer Designs On One Method of Low-Frequency Acoustic Vibration Creation References Transducers with Non-destructive Control Designs and Specifications of Ultrasonic Monitor Piezotransducers Coefficient of Electromechanical Transformation Piezotransducer Amplitude Frequency Response (AFR) Form of Acoustic Field Created Resonant Volume Piezotransducers Non-resonant Excitation of Piezoelements References Sensors of Korotkoff Sounds General Information Enhancement of KSS Sensitivity On Optimum Load Resistance of KSS Piezoelements Feedback in Korotkoff Sound Sensors Hindrances at Arterial Pressure Measurement Sensors of Pulse Waves References

6 Contents xi 12 Electro-acoustic Transducers General Information Transfer Function Calculation of Electro-acoustic Transducers Chladni Figures and Transducer Directional Diagrams Methods of Electro-acoustic Transducer Uprating Electro-acoustic Transducers in Active Oscillator Schemes References Piezoceramic Accelerometers Monolithic Accelerometers Multi-element Accelerometers Accelerometer Designs Three-Dimensional Accelerometers Accelerometers Based on Bimorph and Piezoelectric Elements Domain-Dissipative Accelerometer and Accelerometers with Feedback References Resonant Piezoceramic Sensors Resonant Contact Sensors Measurement of Contact Rigidity and Real Contact Area Frequency-Modulated Oscillation Use for Resonant Piezosensor Excitation Negative Feedback in Resonant Piezosensors Piezosensors with Ultrasonic Concentrators Constructive Control Methods of Force and Pressure Piezosensor Characteristics Piezorezonant Accelerometer Sensor on Acoustically Connected Resonators For Gases References Sensors with Piezoelements in Scheme Electric Filters Schemes of Electric Filters Low-Pass Filters High-Pass Filters Sensors with Piezoelements in Low-Pass Filter Schemes Sensors with Piezoelements in High-Pass Filter Schemes Sensors with Piezotransformers in Electric Filter Schemes References Piezoceramic Scanners for Probe Nanomicroscopes Nanotechnologies and Nanomicroscopes Functional Mechanical Nodes Methods of Scanning Probe Microscopy Scanning Tunneling Microscopy Atomic-Force Microscopy

7 xii Contents Electric Force Microscopy Magnetic Force Microscopy Scanners on Hollow Piezoceramic Cylinders Scanners Based on Flat Bimorph Piezoelements References Index

8