- Optics Design - Lens - Mirror - Window - Filter - Prism

Transcription

1 - Optics Design - Lens - Mirror - Window - Filter - Prism

2 Optics Design Camera lens Design Laser Line Beam Design Lithography lens Design F-theta lens Design Beam Expender Design Zoom Lens Design, etc.

3 Lens Features Material: Fused Silica, Optics material, ZnS, ZnSe, Ge, Si, CaF2, MgF2, etc. precision processing : shape error 1 μm / P-V< 1/10λ@632.8nm RMS<1/60λ, Ra<3Ω Processing Sectors

4 Lens -Spherical lens~1500mmφ -Aspherical lens~1500mmφ -Cylindrical lens~2000mm -Array lens -Doublet lens -Grating lens -Deep UV 193nm ArF,248nm KrF lens -UV laser Cylindrical lens -OLED/LCD Lithography lens -Semiconductor Lithography lens -FLIR Camera lens

5 Mirror Laser Mirror: Laser mirror is characterized by a dielectric coating optimized to have a high reflectance at a specific laser wavelength. These mirrors typically receive a damage threshold test and are used in the most popular laser wavelength. *Excimer Laser Mirror *ND;YAG Laser Mirror *CO2 Laser Mirror Metal Mirror: As a metal coating mirror including Al, Au, Ag, Cu, Cr, etc., reflectivity and uniformity of the broad wavelength are excellent.

6 Mirror Dielectric mirror : Dielectric Mirror is suitable for laser or highly reflective applications. These mirrors are designed to have a maximum reflection at the measurement wavelength or the band. Large Size Mirror We guarantee of the highest quality. % R> 99.5% of High Power Excimer & Yag Laser Mirror -Max size 2000mmx1500mm Astronomical telescope Aspherical Mirror We guarantee the best quality in core aspherical mirror, process of lens, aspherical, coating, measurement for astronomical, satellite use. -Max size φ1500mm -Material Zerodur, Ceramic, Fused Silica

7 Window Features Laser line Beam windows are precisely manufactured based on the know-how and assessment accumulated for uniformity. We ensure high optical performance in a short time through the MRF Final Polishing in the existing polishing methods. We ensure reliability and durability of Au-processed products on the ceramic substrate when the metal is closed. High performance windows [φ10mm~200mm size] -Surface p-v:1/20λ@632nm -Parallelism <1arc sec -S/D <0.001mm -Sapphire, Fused Silica, Zerodur, Optics materials Large Size Windows -Max 2000mm x1800mm -Surface Flatness<20 μm

8 Product Sectors Product images

9 Filter Scope of products Band Pass Filter : Only selected wavelengths are transmitted and the rest is blocked. Shot/Long Pass Filter : manufactured to have a very sharp conversion from reflection to transmission, so it is useful in many applications. ND Filter :mainly used to typically reduce the light of the broad wavelength.

10 Prism Features 0.5 arc sec resolution measurements can assure the angle. Optical Bonding to withstand the High Power enables to manufacture the Cube. Optical Bonding is possible without absorbing to the UV Range. The confidence in measuring squareness and parallelism is assured by the latest measurement equipment. Various types of prisms and long size of precision prism are produced. The edge can be processed without chamfer. High performance prism [10mm~200mm Size ] -Surface p-v :1/20 λ at 632nm -Parallelism<1arc sec -Scratch & Dig<0.001mm -Sapphire, Fused Silica, Zerodur, Optics Material Large Size Windows -Max 2000mm x1800mm -Surface Flatness<20 μm

11 Types Dove Prism: suitable for 180 image rotating and using retroreflective replacements Right angle Prism : is used to change the optical path to 90 degrees and angle tolerances can be produced in seconds PBS Prism : guarantees the best data with PBS coating to fit customer s needs Optical Contacted Prism: guarantees high quality in cube type with no loss of energy through the pure glass bonding without using adhesive. NPBS Prism : guarantees the best data with NPBS coating to fit customer s needs. X-Cube Prism: bonds 2 Right Angle Prisms, so it is suitable for separating the polarization and the intensity of radiation

12 Coating Features We provide customized design available to fit coating film durability and a variety of environmental conditions, and process reliability tests of the coating film. We have a coating and measurement technology ranging from Deep UV to FLIR. We have a chamber of up to Ø 3200 and a variety of 2M-grade coating is possible. We can precisely measure up to 193nm ~ 14um. We have facilities capable of handling up to mass production from a small sample.

13 Coating Sectors <Deep UV(193nm AR)> <Deep UV(193nm HR)> Penetration rate : T 99.5%@193nm Surface reflection rate : R 0.25% at 193nm <UV(308nm AR)> Penetration rate : T 99%@193nm Surface reflection rate : 0~45deg <UV(308nm HR)> Penetration rate : T 99.5%@308nm Substrate : F/S, Sapphire, CaF2 Penetration rate : T 99.5%@308nm Incidence angle: 0~45deg

14 <UV AR(G H I Line)> <UV Cold Mirror(G H I Line)> Penetration rate : T 99.5% at g h i Incidence angle : 0~45deg <Filter> Reflection rate : Tavg 99% at g h i Incidence angle : 0~45deg <Band Pass Filter> Cutoff filter, LWPF, SWPF Incidence angle : 0~45deg Half-width : 7nm~ Incidence angle : 0~45deg

15 <Beam Splitter> <M-IR AR(Ge, Si, ZnS, ZnSe)> T:R = 5:5, 7:3, 6:4 Incidence angle : 0~45deg <M-IR Filter> 3.5~5 μm over 99% of Average Penetration rate size : ~dia300mm <F-IR AR (Ge, ZnS, ZnSe)> LWPF, SWPF, BPF size : ~dia300mm 8~12 μm 95% of Average Penetration rate Improving up to 98% of Average Penetration rate size : ~dia300mm

16