Illustrated Part Guide for Varian 350D
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1 Illustrated Part Guide for Varian 0D Ion Source for 0D Implanter P/N 0 Pg. - Bernas Source for 0D Implanters P/N Pg. - Electrostatic Quadrapole Assembly for 0D Implanters P/N 0 Pg. 0- Extraction Electrode for Varian 0D Ion Implanter P/N 0 /0B Pg sales@glemco.com
2 Ion Source for 0D Implanter P/N Insulator Insert A 00 0 Filament Connector F00 0 Arc Chamber Support Plate A Filament Insulator, Alumina A 00 0 Filament C 00 0 Arc Chamber C 00 0 Arc Chamber Endcap C 00 0 Tantalum Hairpin Clip C 00 Nut, - Hex, - SST SHCS -0 X / SST X /, SHCS, SST - 00 BHSS 0- X / SST E sales@glemco.com
3 0 00 Clamp A 00 0 Heat Shield B 00 0 Gas Feed Tube B 00 0 Seal Bearing B 00 0 / ID Collar 0 0 / ID Collar 0 0 / ID Shaft Spacer 0 00 Silver Connector Strap, Set E000 0 Graphite Heat Shield *One Piece* No Reference 0 SHCS -0 X / SST sales@glemco.com
4 0 0 Back Plate Insert B Filament Feed Rod B 00 0 Source Handle B Compression Collar A 00 0 / Fitting SST No Reference 0 No. Washer (Modified) SST No Reference O-Ring, - Buna N No Reference O-Ring, -0 Buna N 0 SHCS - X / SST E SHCS - X / SST - E0000 BHSS 0- X / SST E sales@glemco.com
5 0 Back Plate D00 A 0 Support Plate C 00 S 0 Support Tube C x / FHSS - SST E0000 BHSS - X.0 LONG - SST sales@glemco.com
6 00 Pc. Varian Arc Chamber, Assembly No Reference 00 Pc. Arc Chamber, Top Plate No Reference 0 Pc. Stud No Reference 0 Pc. Arc Chamber Alignment Pin No Reference 0 Pc. Arc Chamber Aperture No Reference 00 Pc. Arc Chamber, Complete No Reference 0 Graphite Nut No Reference 00-- sales@glemco.com
7 Bernas Source for 0D Implanters Filament Insulator, Alumina A 00 0 Tantalum Hairpin Clip A 00 0 Clamping Pin E00 0 Arc Chamber Base 00XP Bernas, Molybdenum E00 0 Arc Chamber Cover 00XP Bernas, Molybdenum E00 0 Filament Insulator, Alumina E000 0 Pigtail Filament E00 0 Filament Connector Rod, Short E000 Filament Connector Rod, Long E00 0 Repeller Rod Connector E000 Repeller E000 Arc Chamber Mounting Stage E00 Connector Rod Screw No Reference 0 Gas Feed Retainer E000 Arc Chamber Nut E000 Clamp E00 00 Arc Chamber Top Plate Retaining Stud EGHVIT Nut, - Hex, - SST 000 SHCS -0 X / SST X /, SHCS -, SST 00 - X / SHCS, SST E0000 M Insulator Insert, Molybdenum E sales@glemco.com
8 0 0 / ID Collar 0 0 / ID Shaft Spacer 0 00 Silver Connector Strap Set 00 Filament Connector Buss E000 Connector Alignment Block E00 Silver Connector Strap E00 Heat Shield E000 0 Clamp E000 Gas Feed Tube E000 0 SHCS -0 X / SST SHCS -0 X / - SST 00 A One Piece Heat Shield, Graphite No Reference 00-- sales@glemco.com
9 0 0 Back Plate Insert B No. Washer SST (Modified) No Reference Ultra Torr Male Connector Fit, /, No Reference Source Handle 000 Compression Collar No Reference Filament Feed Rod, Negative No Reference Positive Filament Feed Rod No Reference O-Ring - Buna-N No Reference O-Ring -0 Nitrile X /, SHCS, SST / 0 / X / SHCS, SST 000 / 0000 / X / Button Head Socket Screw, SST 000 / 00 BHSS - X.0 Long - SST sales@glemco.com
10 0 Support Tube C 00 0 Seal Bearing, Teflon B 00 Support Plate, Aluminum No Reference Back Plate, Aluminum No Reference 0- x / FHSS - SST E0000 SHCS - x / Vented -SST E sales@glemco.com
11 Electrostatic Quadrapole Assembly for 0D Implanters 0 Top Quadrapole Ring C000 0 Magnet Housing C000 0 Top Magnet Retainer A000 0 Bottom Magnet Retainer A000 BHSS -0 X /, SST 000 BHSS - X /, SST 00 BHSS - X / / SST Magnet, North Pole B Magnet, South Pole B sales@glemco.com 0
12 0 0 Quadrapole, Bottom Ring No Reference SHCS -0 X / SST SHCS -0 X / - SST 00 SHCS - X / SST 000 No. Flat Washer,.0 Thick, SST X / Button Head Socket Screw, SST Connector Base No Reference 0-A0 Terminal Plate A000 0-A Terminal Plate A B0 Terminal Plate A000 0-B Terminal Plate A sales@glemco.com
13 0 0 Ceramic Standoff / X /L 00 0 Support Bar No Reference 0 Long Pole Level No Reference 0 Long Pole Piece B000 0 Short Pole Level No Reference 0 Short Pole Piece B000 Set Screw - X / X /, Set Screw, - SST SHCS -0 X / SST No. Flat Washer,.0 Thick, SST X / Button Head Socket Screw, SST 00 BHSS - x / sales@glemco.com
14 Top B C D E D E C B Bottom A B+ B- A+ A- Wiring Key Long Pole Pieces Short Pole Pieces B+ Circuit B- Circuit A+ Circuit A- Circuit A - E A - B A - B A - C E - C B0 - D B - D C - E B - B0 E0 - E D - D C - C P/N No. 0 AWG Solid Tinned Copper Wire. This can be purchased by the foot, but is included with quadrapole cleaning and refurbishment sales@glemco.com
15 Extraction Electrode for Varian 0D Ion Implanter P/N High Voltage Electrode F00 0 Snout, Ground Electrode F00 0 Aperture Insert, Extraction Electrode, Graphite F00 0 Insulator Shield, SST E000 Rev. 0 Pivot Pin A000 0 Insulator Standoff, Ceramic 0 00 Spring Pin, Slotted /D X / 0 SST No Reference - X / SHCS, SST No. Regular Spring Washer, - SST BHSS -0 X /, SST E A Ground Electrode, Aluminum (Modified) F00 A - X / BHSS, Vented, SST No Reference A - X / FHPS, SST sales@glemco.com
16 Extraction Electrode for Varian 0D Ion Implanter P/N 0B 0 0 Ground Electrode, Aluminum F00 0 High Voltage Electrode F00 0 Electrode Support Assembly, SST F00 0 Snout, Ground Electrode F00 0 Insulator Shield, SST E000 REV 0 Pivot Pin A000 0 Insulator Standoff, Ceramic 0 00 Spring Pin, Slotted /D X / 0 SST No Reference - X / SHCS, SST E No. Regular Spring Washer, - SST E00000 BHSS -0 X /, SST No Reference A BHSS - X /, Vented, SST No Reference A FHP - X /, SST sales@glemco.com
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14 13 15 16 18 17 55 10 12 11 19 54 9 20 53 7 5 4 60 7 3 1 28 6 2 61 23 27 26 29 21 24 25 22 32 32 33 35 36 37 38 49 48 47 40 39 34 30 59 51 52 46 45 44 43 42 42 41 50 56 57 58-38- Parts List 1 XM1014001
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