9 rue Alfred Kastler - BP Nantes Cedex 3 - France Phone : +33 (0) website :

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1 9 rue Alfred Kastler - BP Nantes Cedex 3 - France Phone : +33 (0) info@systemplus.fr - website : May Version 1 Written by: Sylvain HALLEREAU DISCLAIMER : System Plus Consulting provides cost studies based on its knowledge of the manufacturing and selling prices of electronic components and systems. The given values are realistic estimates which do not bind System Plus Consulting nor the manufacturers quoted in the report. System Plus Consulting is in no case responsible for the consequences related to the use which is made of the contents of this report. The quoted trademarks are property of their owners by SYSTEM PLUS CONSULTING, all rights reserved. Flir ISC0601B micro-bolometer 1

2 Table of Contents Glossary 1. Overview / Introduction Glossary Executive Summary Reverse Costing Methodology 2. Company Profile ULIS Profile On Semiconductor 3. Physical Analysis Synthesis of the Physical Analysis IR Camera I7 Package 14 Package X-ray Package front side Package rear side Read Out IC 27 ROIC Functions ROIC technology Micro-Bolometer 31 Reflector Structure of Pixel Microbridge Contact structure Compensation Pixels Principle Operation Physical data summary 4. Manufacturing Process Flow...58 Global Overview ROIC Process Flow Description of the ROIC Wafer Fabrication Unit Micro-bolometer Process Flow 62 Description of the Micro-Bolometer Wafer Fabrication Unit Packaging Cost Analysis Main Steps of Economic Analysis Yields Explanation Die per wafer & Probe Test ROIC Wafer Front-End Cost mm Micro-Bolometer Cost Analysis Micro-Bolometer Wafer Cost Micro-Bolometer Step Cost Micro-Bolometer Equipment Cost Micro-Bolometer Consumable Cost Back-End 1 : Packaging, Final test 86 Component Cost (FE + BE 0 + BE 1) 93 Yields Synthesis 7. Micro-Bolometer Price Estimation Manufacturer Financial Ratios Estimated Manufacturer Price Synthesis of the cost analysis Conclusion by SYSTEM PLUS CONSULTING, all rights reserved. Flir ISC0601B micro-bolometer 2

3 Executive Summary This full reverse costing study has been conducted to provide insight on technology data, manufacturing cost and selling price of the Flir ISC0601B, the micro-bolometer used in the I7 infra-red camera from Flir. The Flir ISC0601B is a micro-bolometer 325 x 256 pixels using surface micromachining process. The Flir I7 IR camera has a 140x140 pixel resolution. It offers a 3-D integration of a microbolometer and a control ASIC in one Circuit. The component is provided in a custom package, compatible with through hole process by SYSTEM PLUS CONSULTING, all rights reserved. Flir ISC0601B micro-bolometer 3

4 Reverse Costing Methodology The reverse costing analysis is conducted in 3 phases: The device is extracted in order to get overall device data : dimensions, main characteristics, marking. A cross section is realized in order to get the layers thicknesses. Set up of the manufacturing process Teardown analysis Setup of the manufacturing environment Cost simulation of the process steps with different year scenarios Costing analysis Supply Chain Analysis Analysis of the selling price Selling price analysis 2012 by SYSTEM PLUS CONSULTING, all rights reserved. Flir ISC0601B micro-bolometer 4

5 I7 IR Camera Teardown Pin female connector on the electronic board ISC0601B IR micro-bolometer Back side of the ceramic package with the pins 2012 by SYSTEM PLUS CONSULTING, all rights reserved. Flir ISC0601B micro-bolometer 5

6 2012 by SYSTEM PLUS CONSULTING, all rights reserved. Flir ISC0601B micro-bolometer 6

7 Micro-bolometer Micro bolometer Optical view, focus on the membrane Micro bolometer Optical view, focus on the Die 2012 by SYSTEM PLUS CONSULTING, all rights reserved. Flir ISC0601B micro-bolometer 7

8 Micro-bolometer Arm of Microbridge Pixel SEM tilted view 2012 by SYSTEM PLUS CONSULTING, all rights reserved. Flir ISC0601B micro-bolometer 8

9 Reflector Without the membrane SEM view SEM view : reflector cross section 2012 by SYSTEM PLUS CONSULTING, all rights reserved. Flir ISC0601B micro-bolometer 9

10 2012 by SYSTEM PLUS CONSULTING, all rights reserved. Flir ISC0601B micro-bolometer 10

11 200mm - ISC0601B Component Cost (FE + BE 0 + BE 1) 2012 by SYSTEM PLUS CONSULTING, all rights reserved. Flir ISC0601B micro-bolometer 11

12 Estimated Manufacturer Price 2012 by SYSTEM PLUS CONSULTING, all rights reserved. Flir ISC0601B micro-bolometer 12