Low Force Interface. For Multi-DUT Memory and Logic. Gerald Back, Staff Engineer, SV Probe Habib Kilicaslan, RF Engineer, SV Probe June, 2006

Transcription

1 Low Force Interface For Multi-DUT Memory and Logic Gerald Back, Staff Engineer, SV Probe Habib Kilicaslan, RF Engineer, SV Probe June, 2006 SWTW

2 Agenda Why Low Force? impact of parallelism What is it? Low Force Interface RF Analysis Test Plan Electrical Testing and Results Mechanical Design Life Test Performance Summary Conclusions SWTW

3 Lower Cost of Test Lower Test Cost Greater Parallelism High Pin Count High Force Examples of Typical DUTs Pins tested / DUT Flash DRAM Parallelism X144 x256 x256 x512 Total contacts Force [Kg] Spring probes LFI SWTW

4 SV Probe LFI What is it? A new high performance/ low force interface technology targeting high I/O count memory and SOC tester applications What is different? Uses Planar Interconnect (PI) contact set to create a high performance interface Contact force is 1/5 of spring probes without drop off in contact reliability SWTW

5 LFI Module Interface to backplane connector or directly to ATE pin electronics card Coax Cables provide high speed/low noise signal path Shroud supports strain relief and base ring Mechanical coarse compliance (gimble) mechanism Interface to the probe card / DUT board thru Planar Interconnect (PI) SWTW

6 Planar Interconnect LGA type contact set Force <10 g/contact CRes <30 mω No connectors on probe card / DUT board SWTW

7 Flexible Cable Assembly 112 Signal / Gnd (Pairs) - or Power/Gnd/Utility (Single Contacts) - or - Signal/Gnd/Power/Utility (Mix) SWTW

8 Cable Definition Flexibility Contact Definition Signals Grounds Power Utilities Total Example Configurations SWTW

9 Size & Count Probe Card Diameter Cable Assy/ MDL, MDL s Useable Area Total Signals (S+G) Total Utilities Total Powers Total Grounds Total Contacts Total No Conn's Total Force Example Configurations ,12 3,18 4, kg 121 kg 215 kg SWTW

10 RF Analysis 3D Electromagnetic Simulation for Mini-PCB to coax connection optimization SWTW

11 RF Analysis Results S-Parameters: Signal to Crosstalk & Return Loss Insertion loss: S2,1 S4,3 Return loss: S1,1 S2,2 S3,3 Crosstalk - Near side: S1,3 S3,1 S4,2 Crosstalk - Far side: S2,3 S3,2 S4,1 SWTW

12 Test Outline Electrical RF test Transmission (S21) Reflection (S11) Crosstalk (S13) DC Test Leakage Max current Mechanical Loading force Planar interconnect force Life Test Path resistance SWTW

13 Test RF HP Vector Network Analyzer GigaTest Probe Station LFI Module BW: Return loss: 1.5 Crosstalk: < 10GHz SWTW

14 Test Hi-Pot Leakage Advantest Ultra High Resistance Meter LFI Module Leakage: < 200V SWTW

15 Test Max Current HP Programmable Power Supply 3 minutes LFI Module Current Carrying Capability: 2A for 3 min SWTW

16 Compliance Mechanism Functions: Coarse compliance in Z direction Provides fine alignment in XY directions without adding parts to probe card or DUT board Limits maximum force Independent suspension allows interface assembly to be modular SWTW

17 Test Planar Interconnect Instron force / deflection tester Planar interconnect contact set 70 PI - Force Deflection Compliance 10.3 mils Force 16 lb (8.1 g/contact) F o r c e - l b f D e f l e c t i o n - i n c h e s SWTW

18 Test Mechanical Compliance Instron force / deflection tester LFI compliant module Module Force Deflection 70 Compliance 89 mils Force 29 lb Maximum F o r c e - l b f D e f l e c t i o n - i n c h e s SWTW

19 Life Test BOSS tester Evertech Handler LFI Module SWTW

20 Typical Path Resistance Data Path Resistance Initial MIN AVG MAX STDEV RANGE Path Resistance 3,000 Cycles MIN AVG MAX STDEV RANGE a01-13-b7 a26-10-a7 a51-20-b5 b12-12-c5 b37-22-d3 b62-19-c3 c23-11-f1 c48-21-e1 d09-12-k7 d34-22-h7 d59-19-k5 e20-11-l5 e45-21-m3 f06-13-n3 f31-10-p1 f56-20-n1 g17-14-e7 g42-23-h7 h03-05-a3 h28-05-n3 h53-32-j7 j14-02-p5 j39-28-n7 j64-31-p7 k25-04-l1 k50-30-m1 l11-02-j1 l36-28-k3 l61-31-j7 m22-03-g7 m47-29-e7 n08-01-d7 n33-28-c1 n58-31-d1 p19-03-a3 p44-29-b3 R e s i s t a n c e a01-13-b7 a26-10-a7 a51-20-b5 b12-12-c5 b37-22-d3 b62-19-c3 c23-11-f1 c48-21-e1 d09-12-k7 d34-22-h7 d59-19-k5 e20-11-l5 e45-21-m3 f06-13-n3 f31-10-p1 f56-20-n1 g17-14-e7 g42-23-h7 h03-05-a3 h28-05-n3 h53-32-j7 j14-02-p5 j39-28-n7 j64-31-p7 k25-04-l1 k50-30-m1 l11-02-j1 l36-28-k3 l61-31-j7 m22-03-g7 m47-29-e7 n08-01-d7 n33-28-c1 n58-31-d1 p19-03-a3 p44-29-b3 R e s i s t a n c e T e s t e r C h a n n e l T e s t e r C h a n n e l Path Resistance 20,000 Cycles MIN AVG MAX STDEV RANGE a01-13-b7 a26-10-a7 a51-20-b5 b12-12-c5 b37-22-d3 b62-19-c3 c23-11-f1 c48-21-e1 d09-12-k7 d34-22-h7 d59-19-k5 e20-11-l5 e45-21-m3 f06-13-n3 f31-10-p1 f56-20-n1 g17-14-e7 g42-23-h7 h03-05-a3 h28-05-n3 h53-32-j7 j14-02-p5 j39-28-n7 j64-31-p7 k25-04-l1 k50-30-m1 l11-02-j1 l36-28-k3 l61-31-j7 m22-03-g7 m47-29-e7 n08-01-d7 n33-28-c1 n58-31-d1 p19-03-a3 p44-29-b3 R e s i s t a n c e T e s t e r C h a n n e l SWTW

21 Path Resistance Data Map Initial 2,000 Cycles Path resistance stabilizes after 3,000 cycles 20,000 Cycles SWTW

22 Life Test Data Average Path Resistance O h m s ,000 10,000 15,000 20,000 C y c l e s Average path resistance remains stable over life SWTW

23 Performance Summary Parameter Impedance Insertion Loss (S21) Return Loss (S11) Cross Talk (S13) Leakage Current Capability Ave Path Resistance Resistance Std Deviation Compression Force Compliance Life Cycles Measured 50 Ω +/- 5% >8 6 cable cable 10GHz < 3 200V 2 A continuous < 100 mω 6 mω < 10 g/contact > 80 mils 20,000 Passed SWTW

24 Conclusions Module testing demonstrates: Low Force Interconnect Mechanically robust and stable Electrically high performance LFI is a viable low force interface for high parallelism applications SWTW

25 QUESTIONS? SWTW