Fiber Optic Cables for the TopSens Series
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1 Fiber Optic Cables for the TopSens Series E2000 Push-Pull Connector Polytec GmbH (Germany) Polytec-Platz Waldbronn Tel Fax info@polytec.de Standard E2000 connector optical fiber Metallic armored E2000 connector optical fiber Model Length Core Ø Max Ø Sheath Connector type E m 50/125 μm 2.8 mm Standard E2000 E m 50/125 μm 2.8 mm Standard E2000 E m 50/125 μm 2.8 mm Standard E2000 E m 10/20 μm 1.9 mm Standard E2000 E50-2-M 2 m 50/125 μm 5 mm Armored E2000 E50-4-M 4 m 50/125 μm 5 mm Armored E2000 E50-10-M 10 m 50/125 μm 5 mm Armored E2000 FC/APC Connector Polytec France S.A.S. Bâtiment Orion 1 er étage 39, rue Louveau Châtillon Tel Fax info@polytec.fr Polytec Ltd. (Great Britain) Lambda House, Batford Mill Harpenden, Herts A L5 5BZ Tel Fax info@polytec-ltd.co.uk Technical specifications are subject to change without notice. OM_BR_TMS-TopSens_2011_08_E Standard FC/ACP connector optical fiber Metallic armored FC/APC connector optical fiber Model Length Core Ø Max Ø Sheath Connector type F m 50/125 μm 2.8 mm Standard FC/APC F m 50/125 μm 2.8 mm Standard FC/APC F m 50/125 μm 2.8 mm Standard FC/APC F m 10/20 μm 1.9 mm Standard FC/APC F50-3-M 3 m 50/125 μm 5 mm Armored FC/APC F50-4-M 4 m 50/125 μm 5 mm Armored FC/APC F50-10-M 10 m 50/125 μm 5 mm Armored FC/APC F20-4-M 4 m 10/20 μm 5 mm Armored FC/APC F20-10-M 10 m 10/20 μm 5 mm Armored FC/APC F50-5-M 5 m 10/20 μm 5 mm Armored FC/APC F50-10-M 10 m 10/20 μm 5 mm Armored FC/APC You can find more information and the dimensions at or communicate directly with one of our product specialists at oms@polytec.de Polytec Japan Arena Tower, 13 th floor 3-1-9, Shinyokohama, Kohoku-ku, Yokohama-shi, Kanagawa, Tel Fax info@polytec.co.jp Polytec, Inc. (USA) rth American Headquarters Bake Parkway Suites 150 & 200 Irvine, CA Tel Fax info@polytec.com Central Office 1046 Baker Road Dexter, MI Tel Fax East Coast Office 25 South Street, Suite A Hopkinton, MA Tel Fax Advancing Measurements by Light
2 TopSens Configurable Chromatic Confocal Point Sensors
3 Configurable Chromatic Confocal Point Sensors Chromatic confocal technology for optical measurement of distance and thickness has been used in industry and research for a long time and is now a mature technology. In cooperation with STIL S.A., inventor of this technology, Polytec offers a huge variety of sensors for the measurement of any kind of material with exceptional accuracy. These sensors have applications in practically all sectors of industry, whether as high-precision instruments in metrology or research labs, or for quality control on production lines. Designed for use in industrial environments, the TopSens sensors interface quickly and easily with your other equipment. Applications The TopSens sensors can be configured for a wide range of applications and can easily be integrated into manufacturing lines for measuring depths of drilling or heights of welding seams, electrical contacts or solder bumps, e.g. Height Measurements Height measurement has been the initial application for the TopSens distance sensors. A choice of sensor heads allow to find an optimal solution in terms of measurement range, accuracy and lateral resolution. The controller is designed for easy integration into the manufacturing system. Autofocus With their extended measurement range, these sensors are the perfect solution for accurate autofocus in vision systems. Online Inspection The high measurement rates and advanced interfacing capabilities of these sensors allow them to provide systematic control of production lines. Level Control Thanks to the non-contact technology, these sensors allow for the detection and measurement of fluid levels. Measurement Chromatic Confocal Imaging allows for the measurement of the thickness of transparent materials as glass or transparent films with extremely high accuracy. Profilometry and Microtopography Interfaced with 3-D scanning devices, these sensors allow for full 2-D and 3-D measurement of complex objects or assemblies, with sub-micron accuracy. Roughness Measurement The sensors are fully compliant with the new ISO standard and can measure roughness down to a few nanometers. The acquisition of roughness profiles is much faster than a tactile probe, and there is no risk of marking the surface. Typically this is done in combination with a translation stage. 2
4 System and Components Polytec s TopSens line is available in a variety of combinations and includes everything required to start measuring immediately: a controller, an optical pen, a fiber optic cable, electrical cables and software. These components can be selected according to the required measurement tasks. Optical Pens Different optical pens determine the measurement range and the maximal object slope whereas the magnifier mainly determines lateral resolution. The pens of the CG- line offer a choice of magnifiers for the specified range. The series offers versions with 90 beam deflection. In addition, the ENDO line of chromatic confocal pens provides a tiny size, allowing for non-contact measurement applications in tight spaces. Thanks to their size, integration in inspection machines on the production line is made easier. These miniature pens are also useful for the measurement of holes or cavities of small diameter. Controllers The electrical controllers, including the white light source, are available with different measurement rates, with or without front panels, with up to four multiplexed channels or simultaneous multiple channels, each for a separate optical pen. Advantages Measurement on any type of material (metal, glass, ceramic, semiconductors, paper) Measurement of polished surfaces (mirrors, wafers) and rough ones Instant measurement with no moving parts in the sensor Resistant to harsh environments (temperature, pressure, radiation) Insensitive to ambient lighting ISO compliant Easy to integrate into production lines An Innovative Optical Principle TopSens optical sensors are based on the innovative Chromatic Confocal Imaging principle. Incident white light is imaged through a chromatic objective to yield a continuum of monochromatic images along the Z-Axis, thus color coding the optical axis. When an object is present in this field, an unique wavelength is perfectly focused at its surface and is reflected back into the optical system. The backscattered beam passes through a filtering pinhole into a spectrograph. The specific wavelength of the beam is calculated, to precisely determine the object s position in the measurement field. Chromatic Confocal Imaging allows for reliable, accurate and reproducible dimensional measurements with high resolution. Spectrometer M Diplay & Signal Processing Filtering Pinhole M Point Objekt Surface S: White Light Source Beam Splitter 1 M n Lens Monochromatic Images of the S Point Source 3
5 Controllers for the TopSens Series Polytec offers two controller series: The TopCCS Series and the TopCHR Series with integrated control panel. TopCCS Line The TopCCS line offers lightweight, compact and high performance controllers with advanced functionalities for OEM integration. Several models are available with maximum measurement frequencies from 2,000 to 30,000. Multiplexed channel models are available for up to four optical pens. Three controllers for configurable chromatic confocal sensors are available featuring different measurement rates: CCS PRIMA (2 khz) CCS TIMA (5 khz) CCS ULTIMA (30 khz) TopCCS TIMA and Top CSS ULTIMA Series The TopCCS TIMA and TopCCS ULTI- MA controllers offer the same features as the PRIMA controller, however the measurement rate is increased to 5 khz (TI- MA) and 30 khz (ULTIMA). The TopCCS ULTIMA, with the highest repetition rate on the market, has an external xenon lamp for the light source. Please note that a laptop or PC is required to run the CSS controllers. TopCCS PRIMA Series The TopCCS PRIMA controller with integrated LED light source is highly sophisticated and offers extensive synchronization options and advanced measurement modes. It is recommended for OEM users and industrial applications. Synchronization software is provided for the dialog with the automated inspection process control. An external PC or laptop is required. The TopCCS PRIMA controller provides Two measurement modes: distance and thickness RS-232/RS-432 and USB 2.0 Synchronized reading of digital encoders and measured data Auto-adaptive operation modes Compatibility with all chromatic optical pens (CL and series) Advantages High precision, high resolution Compatible with all chromatic confocal optical pens Up to 20 different optical pens interchangeable on the same controller Digital and analog outputs Synchronized reading of external digital encoders Improved performance in thickness mode thanks to a specific thickness calibration Long-lifetime light source 100 Hz to 2,000 Hz measurement rates In addition: TopCCS PRIMA 2 and 4 Multiplexed Channel Models Up to four optical pens connected to a single controller Multiplexed channels, commutation time <400 ms The TopCHR Line The TopCHR line offers a tabletop controller, featuring a Local User Interface (display and keypad). The controller uses a tungsten halogen lamp or a LED for the light source. Maximum measurement frequency is 1,000. One channel models and multichannel models are available for up to four optical pens. The controllers are compatible with all chromatic optical pens and provide: Two measurement modes: distance and thickness A LCD screen and keypad on the front panel for easy configuration and alignment Advantages High precision, high resolution Measurement rate up to 1 khz Compatibility with all optical pens Long-lifetime light source Integrated control panel In addition: 2 Channel CHR150 and 4 Channel CHR150-L Up to four optical pens connected to a single CHR150-L controller All channels measure simultaneously Each channel configurable independently 4
6 TopCSS Functions Auto-LED: LED brightness adapts itself automatically First Peak: the sensor locks on the first surface Double Frequency: the sensor selects the optimal measurement rate automatically Hold Last Value: output data smoothing Application Samples with variable slope, e.g. lenseses Topography on transparent objects or coated samples Samples with high, sharp reflectivity variations, e.g. masks for microelectronicsonics Difficult samples with many non-measurable points Technical Specifications TopCHR Series TopCCS Series Model TopCHR150 TopCHR150-L TopCCS PRIMA TopCCS TIMA TopCCS ULTIMA Measurement frequency From 30 to 1,000 Multichannel version 1) Available (2 & 4 channels) From 30 to 1,000 Available (2 & 4 channels) From 100 to 2,000 Available (2 & 4 channels) From 100 to 5,000 n.a. From 500 to 30,000 Light source Halogen White LED White LED White LED Xenon arc (external) Light source brightness setting Advanced Features: First Peak Hold Last Value Calibration Auto-LED 2) Autodark 3) Double Frequency Measurement modes ne Manual Programmable Programmable Manual (on external source) Up to 489 Hz Up to 489 Hz Up to 1,850 Hz n.a. Calibration tables (max) 6 20 Encoder input 4) (up to 3 axes) - TTL signal input - 30 bit counters (> 1 billion step count) Digital output 15 bit resolution 30 bit resolution 15 bit resolution Analog output 2 configurable outputs [ V] - 12 bit 2 configurable outputs [ V] - 16 bit resolution resolution Digital I/O RS-232 (up to 115,200 baud) serial link USB 2.0 and RS-232/RS-422 (up to 46,800 baud) Synchronization I/O 1 Synchro input (TTL) / 1 Synchro output (TTL) 1 Synchro input (TTL) / 1 Synchro output (TTL) Fiber optic connector E2000 type (push-pull) with Autoprotect system Compatible optical pens All chromatic confocal pen types Power supply / consumption V AC/100 W V AC/25 W 24 V DC/20 W Temperature in use 5 C C Storage temperature -30 C C Relative humidity in use 5%... 80% HR without condensation Protection type IP 40 EMC EN and EN compliant Weight 5) 3.4 kg 1.4 kg Dimensions (w x h x d) 316 mm x 96 mm x 235 mm 168 mm x 138 mm x 120 mm Mechanical interface Tabletop controller Integrated DIN rail-mount interface 1) Multiplexed channels (TopCCS) vs. simultaneous multiple channels (TopCHR): - TopCCS PRIMA 4 multiplexed channels: 1 (out of 4) optical pen can measure at a time; the sensor can switch to another optical pen in about 400 ms. - TopCHR150-2 and TopCHR150-4 multiple channels: all the optical pens (2 or 4) can measure simultaneously. 2) The Auto-LED function allows the TopCCS PRIMA to dynamically adjust the LED power in order to adapt it to the reflectivity of the measured object. 3) The Autodark function allows a constant and automatic regulation of the dark signal level of the TopCCS controller. 4) The incremental encoder input port allows the acquisition of the instant position of the measuring system motion axes (3 axes maximum). These measurements are synchronized with the measurement frequency of the sensor. 5) The specified weight does not include the external light source for the TopCCS ULTIMA model. 5
7 Optical Pens for the TopSens Series A measurement system of the TopSens series needs a controller (TopCCS or TopCHR series), an optical fiber and an optical pen. Three different series of pens are available: The CL- series providing maximum flexibility by combining a chromatic lens (CL), which defines the measurement range and working distance, and a magnifier, which defines the spot size diameter and therefore the lateral resolution. The series with integrated chromatic lens and fixed magnifier. 90 beam deflectors are available. The ENDO line of miniature optical pens for noncontact measurement in tight spaces. CL- Series Model CL1 CL2 CL3 CL4 CL5 CL6 minal measurement [μm] ,100 3,000 10,000 20,000 range 1) Working distance 1) [mm] Axial resolution 1) 2) [μm] Axial accuracy 2) [μm] Max. object slope 3) [deg] ± 43 ± 28 ± 27 ± 22 ± 14 ± 8.6 Reference plate 4) - 90 pen - Magnifier Model Spot size diameter [μm] Lateral resolution [μm] Min. measurable thickness 5) [μm] Length 6) [mm] Weight [g] Diameter [mm] ) The precise values of the measurement range, the resolution and the working distance depend on the controller. The values in these tables are for the TopCCS PRIMA. 2) The resolution and the accuracy depend on the measurement range (distance / thickness). The values in these tables are for mode. 3) The maximum slope angle depends on the sample type (diffuse / specular). For diffusive objects the maximal object slope can reach 87 ; for a specular sample it is limited. The values in these tables are for specular samples. 4) The reference plate acts as an absolute reference in the measurement field. It compensates for the mechanical imperfections of the scanning system. 5) The values are given for transparent samples with a refractive index value of ) The length and weight do not include the optical fiber. Max. object slope Diameter Length Measurement spot size Working distances Measuring range 6
8 Series Model VM minal measurement range 1) [μm] ,000 8,000 10,000 20,000 24,000 Working distance [mm] Axial resolution 2) [μm] Axial accuracy 2) [μm] Max. object slope 3) [deg] ± 48 ± 25 ± 22 ± 16 ± 12 ± 20 ± 5 Reference plate 4) - Reference number 90 pen - n.a. 300/90 n.a. n.a. 1000/90 available 24000/ 90 Magnifier Model Spot size diameter [μm] Lateral resolution [μm] Min. measurable thickness 5) [μm] Length 6) [mm] Weight 6) [g] Diameter [mm] ) The precise values of the measurement range, the resolution and the working distance depend on the controller. The values in these tables are for the TopCCS PRIMA. 2) The resolution and the accuracy depend on the measurement range (distance / thickness). The values in these tables are for mode. 3) The maximum slope angle depends on the sample type (diffuse / specular). For diffusive objects the maximal object slope can reach 87 ; for a specular sample it is limited. The values in these tables are for specular samples. 4) The reference plate acts as an absolute reference in the measurement field. It compensates for the mechanical imperfections of the scanning system. 5) The values are given for transparent samples with a refractive index value of ) The length and weight do not include the optical fiber. ENDO Series The ENDO Series is a new line of chromatic confocal pens of amazingly small size. The ENDO 0.1, ENDO 1.2 and ENDO 1.5 units are ideal for non-contact measurement applications in tight spaces. Thanks to their small size (6 mm diameter, 56 mm, 76 mm and 101 mm length, respectively), integration in inspection machines on the production line is easy. These miniature pens are also useful for the measurement of holes or cavities of small diameter. Working with any controller, the ENDO series give precise measurement with sub-micron resolution. Model ENDO 0.1 ENDO 1.2 ENDO 1.5 minal measurement range 1) [μm] Working distance [mm] Axial resolution 2) [μm] Axial accuracy 2) [μm] Max. object slope 3) [deg] ± 24 ± 14 ± 13 Spot size diameter [μm] Lateral resolution [μm] Length 4) [mm] Weight 4) [g] Diameter [mm] ) The precise values of the measurement range, the resolution and the working distance depend on the controller. The values in these tables are for the TopCCS PRIMA. 2) The resolution and the accuracy depend on the measurement mode (distance/ thickness). The values in these tables are for mode. 3) The values in these tables are for specular samples; for diffusive samples, the maximum slope can be much higher. 4) The length and weight do not include the optical fiber. 7
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