HZDR Innovation GmbH - Enhanced industrial access to large R&D- infrastructures
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1 HZDR Innovation GmbH - Enhanced industrial access to large R&D- infrastructures ERF-Workshop "Technology Transfer and Industrial Relations in Research Infrastructures 7 th June 2013, Triest Dr. Björn Wolf, head of technology transfer and legal affairs
2 Member of the Helmholtz Association Dr. Björn Wolf Technology I technology transfer & and legal legal affairs affairs Dr. I Björn Wolf I The Helmholtz-Zentrum Dresden-Rossendorf Member of Helmholtz Association of German Research Centers (since 01/2011) Employees 1,000 from 45 nations, 300 scientists Budget Research with ~ 100 Mio. Euro (20% third party funding) at eight institutes, in three research fields, and five large-scale facilities Health Matter Energy Research Sites Dresden, Freiberg, Leipzig, Grenoble
3 Research Questions and Large-Scale Facilities Health How can malignant tumors be more precisely visualized, characterized, and more effectively treated? Matter How do matter and materials behave under the influence of strong fields and in small dimensions? Energy How can energy and resources be utilized in an efficient, safe, and environmentally-sound way? PET Center ELBE Center for High-Power Radiation Sources Dresden High Magnetic Field Laboratory (HLD) Ion Beam Center (IBC) TOPFLOW Facility blue: LK II facility page 3
4 Ion Beam Center Dresden-Rossendorf Ion Beam Analysis and Surface Modification European Research Infrastructure (AIM, SPIRIT) National (Application Centre) Competence and User Facility ( ) Ion Energies: 5 ev MeV Double-Beam Stations / Highly-Charged Ions Real-time / In-situ Ion Beam Analysis page 4
5 Ions Universal Tool for Surface Modification Mechanics ( Corrosion Resistance Virgin untreated of TiAl- alloys) F-doped (PIII) Optics ( Si- based Optoelectronics) SiO2: Eu SiO2: Tm Turbo-charger rotors Oxidation: Air, 1050 C, 1200h Microelectronics ( NC-Memory) Tb Gd Magnetics ( Magnetic Anisotropy) nm Source Nanocrystals (Si, Ge: ~ 3 nm) Gate e SiO 2 Charge Transfer Drain C GC, C Dot ~ 1-10 af via (direct, TA)- tunelling Non-Volatile Memory: >10 10 r/w cycles) page 5
6 Plasma immersion ion implantation - Tools and Applications at the HZDR Doping of Semiconductors Super Hard Coatings Cubic Boron Nitride Titanium Nitride P Doping of Si PV Wafers B Doping of Si PV Wafers Tool PBII-3 PBII-5 PBII-6 PBII-7 PBII-8 PBII-9 Bio Materials Nanoporous Metal Surfaces Tribological Protecting Coatings Antibacterial & biocompatible Surfaces Application Implantation Implantation and deposition Deposition of cbn Implantation of F Implantation and deposition Doping of semiconductors High Temperature Oxydation Protection of TiAl -Alloys Turbine blades Automotive valves Drug eluting stents & nanoporous membrane page 6
7 High-Energy Ion Implantation for Power Electronics Power Devices: Power Diodes, MOSFET s, IGBT s ect. Voltage: ~ kv, Current: A ka Wind Generators Benefits, e.g. Switching speed increase Power-loss reduction ICE Applications: Power Converter AC/DC Drives Traction Control Units Generator Electronics Trans- Former Station page 7
8 State of the art - High-Energy Ion Implantation at HZDR Two modern MeV accelerators Internal 2 nd source High expertise in ion implantation, semiconductor research Long-term experiences of scientists and technicians Big pool of radiation protection licenses on the campus Developable plot on the HZDR campus first clients at HZDR No up to date HE ion beam services worldwide logistic advantage of combined Ion / electron irradiation Further growing market of HE ion implantation Worldwide climate protection, need of decreasing CO2 emission & more electromobility result in necessity of decreasing power loss in electronics requires low power loss devices page 8
9 Our motivation to found the HZDR Innovation GmbH 1. Extension of industrial request for ion implantation production service Problems: conflicts with main task, non profit status, liability & professional management of industrial orders 2. Intention to strengthen the technology transfer How to finance the valley of death (prototypes, demonstrators)? How to incubate and develop new businesses? How to manage shares of our spin offs? Problems: organisational and financial restrictions alternatives: A. leave it alone (reject orders; no incubation) B. create a new suitable structure = found a commercial arm and outsoursing of production Seite 9
10 Goals with the HZDR Innovation GmbH HZDR e. V. concentrates on main task excellent research At the same time: take the market chance and strengten the technology transfer Legal certainty (non profit, liability) and transparency Professional management of industrial orders (TQM, payment termes, insurance, duty.) Personal and financial flexibility Accumulation of profits for later investments at HZDR Job perspectives for employees of HZDR Motivation for top performers Funds for validation, incubation, shares Independant active sales group Seite 10
11 Legal and organisational aspects Corporation with limited liability (GmbH) HZDR holds 24,9 % of shares, partner GWT-TUD GmbH zu 75,1 % (reason: ministerial guideline for equity management of PROs) But: rights of vote 50 % : 50 %; profit distribution 75 % : 25 % Transparent contractual regulations for (1) Licencing of know how, (2) usage of infrastructure, (3) common use of employees Shareholder CEO: Scientific / Technical Prof. Andreas Kolitsch CEO: Administration Ms. Beate Ermisch Seite 11
12 Start of planing anc coordination with Co-Investor HZDR board decission Decission of supervisory boards Coordination with employees of HZDR Finalised Businessplan & Contracts Formal foundation of HZDR Innovation GmbH start of operation Time plan of the foundation process businessplan, contracts Januar März Mai Juli Oktober November 2011 Seite 12
13 HZDR Innovation: latest news Sucessful first year: turnover 2012: 715 k ; 25 employees profit 2012: 53 k Compensation of dramatic decrease of turnover with main client via aquisition of more than 60 new clients (esp. Ion implantation service) Plan 2013: turnover: >1,0 Mio., profit: >120 T Qualification for of new second source contracts with global players Installation of new ion implantation equipment (efficiency, capacity) Establishment of new business fields (apart from ion implantation) Start of equity management activities Seite 13
14 HZDR Innovation: Business Fields in 2013 Ion implantation service (50 %) Wafer processing (20 %) Products / incubation projects (30 %) Equity management First & second source contracts Large contracts (esp. High energy ion implantation) Small contracts (esp. PIII) Irradiation detectors & sensors Multi phase flow sensors Ultra short pulse lasers In preparation: -magnetic coils -neutron target equipment -S-layer proteins HZDR spinn offs: 1. I3membrane GmbH In preparation: -BIOBASE -Flowsens page 14
15 Filling the HZDRI-pipeline: InnoManager-Model Dorit Teichmann Innomanager Life Science Uwe Pöpping Innomanager Fluid Dynamics Dr. Andreas Klossek Innomanager Ressource Technology Dr. Stefanie Hartmann (IFW) Innomanager Microelectronics Industrial expertise On site, close relationship to TTO of HZDR and HZDR Innovation Significant success im terms of third party funding & royalties Seite 15
16 Thanks for your questions! Seite 16
17 Implantation Facilities: Accelerators Ion Sources U Ex IS-2: HVEE 358 Duoplasmatron (H, He) Charge Exchange Channel (Li, Rb) He + He - Electrostatic Scan Unit IS-1: HVEE 860C U T (5-20 kv, Cs Sputter Cource n: charge state ~ 1 khz) Neutral Trap E = e(u Ex + [n+1] U T ) U for atomic ions DC (5-20 kv) U T He -,B -, P -, B 2 - He 2+, B n+, P Accelerator Beamline / End Station n+.. Endstation / Waferhandler Analyzing Magnet (Gas) Stripper ELECTROSTATIC ACCELERATOR BL 2 BL 1 Switching Magnet Double Disc at NV-10 page 17
18 Administrative Support Infrastructure Know how First clients Marketing & sales Production page 18
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