A unique 3D Silicon Capacitor with outstanding performances in terms of DC leakage and reliability performances. Catherine Bunel R&D Director

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1 A unique 3D Silicon Capacitor with outstanding performances in terms of DC leakage and reliability performances. Catherine Bunel R&D Director

2 Agenda Introduction Ipdia core technology Application overview The IPDIA 3D Silicon capacitor Performances Reliability Conclusion 27/09/2011 2

3 Introduction Miniaturization Performances Cost of solutions Miniaturization is a key growth driver Reliability and performance are key considerations for the Medical Customers Satisfaction Need to provide cost effective products 27/09/2011 3

4 IPDIA Technology Single IPD die A highly efficient way to integrate several passive components such as resistors, capacitors,inductors, ESD diodes in a single die. 27/09/2011 4

5 PICS process Passive Integration Connecting Substrate Silicon Substrate 3D Capacitor 27/09/2011 5

6 Ipdia Core Technology C 0 S e S 27/09/2011 6

7 Ipdia Core Technology This Technology holds the world record in performance with 250nF/mm² in production 27/09/2011 7

8 Billions of Products using IPDIA technology Automotive Smart card Wireless Oil exploration Military avionic e-metering Pacemaker High Brightness LED protection Medical Sensor Brain stimulation Learning pacing 27/09/2011 8

9 PICS Amazing miniaturization 25 mm 7 mm After, 1 component 49mm2, h=0.85mm Before 2 active dies+ 100 components PCB=600mm2, h= 2mm 9

10 PICS Amazing miniaturization 25 mm 7 mm DC feeds Magnification Decoupling, PLL filter PA Tx balun PA matching Transceiver Band Filter Zoom on SIP in HVQFN56 Rx balun 10

11 PICS Amazing miniaturization E-Pill, temperature sensor Sensor TX WLP module including : 3 active dies flipped over an IPD Substrate 96 SMD components are integrated and composed of RF capacitors, decoupling capacitors, resistors, inductors, and PIN diode µctrl 11

12 6.45 mm 8 mm PICS Amazing miniaturization SMD & PCB technology 14 mm Complete RF Module 112 mm² 1.6mm height RF Transceiver XO SAW Filter 400MHz & 2.4GHz Matching network with integrated coils Decoupling capacitances 11.2 mm PICS technology Using PICS technology : 40 % area decrease! 25 % height decrease! 72 mm² 1.2mm height 27/09/

13 SILICON Capacitors as Pin to Pin replacement of Ceramic and Tantalum Capacitors A breakthrough solution for: 1. High reliability Industries such as Medical, Avionics, Defense etc. 2. High Temperature industries such as Oil and Gaz Explorations, Geothermal energy etc. 250 m 480 m{ 230 m Capacitor array Application PCB 27/09/

14 Low Profile Silicon Capacitor (LPSC) Typical 100nF Capacitor Thickness Volume comparison of 1206 Case size capacitors 6 Times smaller More than 2 times smaller 27/09/

15 Oustanding performance for High Temperature applications For X7R nF capacitors the cumulated 200 C is -77% For 3D Silicon capacitor, it is < 2% Extreme stability Exceptional low derating 15

16 IPDIA 3D Silicon Capacitors DC Voltage Stability tt 27/09/

17 IPDIA 3D Silicon Capacitors Temperature stability Cp (nf) 100 nf, Capacitance 3V On wafer 5 areas PCM1 PCM2 PCM3 PCM4 PCM5 ~50 ppm/ C [ C] Temperature ( C) 27/09/

18 DC leakage current 3V) vs Time & Temperature C= 100nF I(120s) < 25 C Ip (A) 5.0E E E E E E E E E E E+00 Ip 85 Ip 200 C Ip 250 C Ip 275 C Ip 300 C Time (s) I(120s) < C 27/09/

19 Leakage Current (A) DC leakage current (A),25 C C= 12µF 10,0E-3 1,0E-3 IL(120s) = 55 na IL(120s) = 4 na IL(5v) IL(3,6v) 100,0E-6 10,0E-6 1,0E-6 Ta capacitors 100,0E-9 10,0E-9 1,0E-9 100,0E Time (s) 27/09/

20 Reliability Failure In Time Predicted MTTF ( yrs) 6,00E ,00E ,00E ,00E ,00E ,00E ,00E+00 X7R Ta PICS 0 X7R Ta PICS Maximum Operating 37 C 50% Operating 85 C 27/09/

21 Failure Rate 'ppm' Reliability Projected Failure Rate in 10 Years 491 The 3D Capacitors have the lowest Failure rate compared to Tantalum & X7R capacitors Only 2 Units failed on a Million after 10 Years operation time D-Si Capacitor X7R Tantalum 27/09/

22 Conclusion Passive integration technologies bring differentiation and miniaturization IPDIA 3D Silicon Capacitor has many advantages over the other types of capacitors : Very high stability. Withstands temperature up to 300 C Extremely low failure rate.no catastrophic failure.no burning test needed. Very Low leakage. By replacing Ta & MLCC capacitors with Silicon Capacitors, Operating Time could be increased by more than 30. It s also a smart way to reduce the application volume and increase the IP protection level. 27/09/

23 We want to continue to make the difference Can t do it alone as an SME IPDiA and its partners launched a 4 year cooperative R&D program

24 Thanks for your attention 27/09/

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