Multi-Element Overview

Transcription

1 Intro Lenses Overview Windows Achromats nm Cemented Doublets nm Fast Achromats /633nm Air-Spaced /532nm Air-Spaced Aplanats Visible Meniscus Lenses High Energy / UV UV Meniscus UV Focusing Lenses Excimer Laser Focusing Lenses UV Objective Lenses F-Theta Lenses Prisms Lenses Mirrors Beamsplitters Waveplates Polarizers Ultrafast Etalons Filters Interferometer Mounts Appendix

2 Mirrors Lenses Prisms Windows Intro Beamsplitters Polarizers Waveplates Filters Etalons Ultrafast Interferometer Appendix Mounts Lenses Technical Notes CVI Lenses A multi-element lens system is required when the aberrations of a singlet lens are too large to satisfy system requirements. CVI offers two and three element lenses for use at focal ratios where singlets fail due to spherical aberration. CVI multielement lenses with diffraction limited f/numbers down to 3.3 are summarized in the table to the right. Nomenclature As with a singlet, the back focal distance BFD is the signed distance (distance noted with negative or positive value depending on whether it is positive or negative focal length) from the rear vertex Figure 1. to the back paraxial focal plane. This is shown in Figure 1 below for a positive triplet. For a negative lens, Figure 2, the BFD is negative and is calculated using the same rule. The BFD is the distance from the back vertex to the (virtual) back paraxial Figure 2. focal plane. We have put absolute value signs around the BFD in Figure 2 to emphasize this. Product No. of Wavelength Code Elements f/# Range The advantage of a consistent formalism is evident in the construction of a Galilean beam expander, Figure 3. Here, both the negative and positive elements will have a common focus as shown. To determine the spacing of the elements, distances Figure 3. strictly referenced to optical surfaces are required. The logical choice is to use the back focal distances: Thus we have Monochromats LAP Laser Aplanat (Positive) nm LAPQ UV Laser Aplanat (Positive) nm LAN Laser Aplanat (Negative) nm LANQ UV Laser Aplanat (Negative) nm LAP + APM Laser Aplanat + Aplanatic Meniscus nm LAPQ + APMQ UV Laser Aplanat + UV Aplanatic Meniscus nm UVAP UV Laser Aplanat nm Achromats d = BFD p + BFD n = BFD p - BFD n The reader may notice that the equation above is actually not consistent with our definitions when the direction of the light rays is considered. Strictly speaking, it is the front focal distance of the positive element that is required in the formula above. However, it is customary to list the back focal distance of a lens as the distance from its last element to the focal plane when the lens is properly oriented for focusing a collimated beam from left to right. So, to design a system using lens tabulated values, keep in mind the orientation conventions used in the descriptions of the individual component lenses. The working distance of elements in housings has been provided in the product tables. The working distance specifies the distance from the focal plane to a mechanical reference surface - here it is the housing edge closest to the focal plane. This is shown schematically in Figure 4 below: Figure nm nm HAP Nd:YAG / HeNe Achromat (Positive) nm HAN Nd:YAG / HeNe Achromat (Negative) nm YAP Nd:YAG / Doubled Nd:YAG Achromat (Positive) nm YAN Nd:YAG / Doubled Nd:YAG Achromat (Negative) nm AAP Aplanatic Achromat (Cemented) nm 128 Americas (505) Europe +44 (0) Asia +82 (0) Order now at

3 Lenses Intro Technical Notes Aplanat or Achromat? An Aplanat lens is designed to be free of two monochromatic (single wavelength) wavefront errors called Spherical Aberration and Coma. Spherical Aberration is axially symmetric and occurs when rays from a point on the axis passing through the outer zones of the lens focus at a different distance from the lens than rays passing through the central zone. Coma is an offaxis non-symmetric wavefront distortion which increases linearly with field angle or distance from the principal axis. In combination, these aberrations distort the transmitted wavefront through the lens and cause the focal spot to become irregularly shaped and/or blurred. On the other hand, Achromatic lenses are corrected for Chromatic Aberration with respect to two wavelengths (normally blue and red). Chromatic aberration is produced by dispersion, or the variation of refractive index with wavelength, and causes different wavelengths to have different focal points. Using separate materials like crown glass and flint glass for the converging and diverging lens elements, the dispersion of each can be compensated for by the other thereby minimizing the total effect. In photography and precision micromachining, it is often crucial that the secondary spectrum or a third wavelength be color-corrected in addition to the blue (F-line) and red (C-line). Neither crown nor flint glasses transmit well below 420nm so other materials are required for applications using broadband or multi-wavelength UV sources. there are few options available to optical designers, due to limitations in UV transmitting materials. Existing designs use fused silica glass for the positive element, and either Aplanat Marking Conventions Positive Systems (Convergent) The arrow marking on the housing always points to the collimated light. UV grade calcium fluoride or lithium fluoride for the negative element. An UV achromat comprised of either of these material combinations can be optimized for a 200nm bandwidth centered around 300nm or 350nm depending on the application requirements. Negative Systems (Divergent) The arrow marking on the housing always points to the collimated light. UV achromats are ideally suited to broadband UV applications including photometric instrumentation and fluorescence analysis. They can also be used as UV focusing lenses in place of aplanat lenses in certain situations. Most commercially available UV aplanats are designed for 248nm. At other wavelengths, such as the laser diodes at 365nm (I line) and 405nm (H line) used in lithography exposure systems, more precise focal lengths may result from using an achromat in place of an aplanat which was designed for a different wavelength. LAP/LAN Series Laser Aplanats The LAP/LAN Series Laser Aplanats are air-spaced doublets designed to produce minimum focal spot size. An aplanat is a lens designed to minimize spherical aberration and coma. The LAP/LAN Series lenses exhibit essentially diffraction limited performance over their full f/5 apertures. Use LAP/LAN doublets when the focal spot of a monochromatic laser must be an absolute minimum. Applications include nonlinear optics experiments, laser beam expanders and collimators, interferometers, beam handling systems, material ablation and cutting systems, power fiber optic interfacing, and other applications where lenses are used to focus collimated beams. Figure 5 shows the construction of the LAP Series positive lenses; identical definitions apply to the LAN Series negative lenses. Both elements are fabricated from SF11 glass and are antireflection coated with hard, damage resistant coatings. Lens design prescriptions are available in many of the commercially available optical design software packages to facilitate computer analysis, such as ZEMAX. Windows Prisms Lenses Mirrors Beamsplitters Waveplates Polarizers Ultrafast Etalons Filters Interferometer Mounts Appendix Americas (505) Europe +44 (0) Asia +82 (0) Order now at 129

4 Mirrors Lenses Prisms Windows Intro Lenses Technical Notes Figure 6. LAP with BFD = 93.20mm and λ = 488nm aplanatic meniscus lens to shorten the focal length by a factor of 0.67 to create a combined system of f/3.3 relative aperture. LAPQ and LANQ are positive and negative diffraction limited aplanats optimized for 248 nm. The Q designates UV grade fused quartz used in place of SF11. APM Series Aplanatic Meniscus Lenses The CVI APM or APMQ Series aplanatic meniscus lenses shorten the focal length Beamsplitters Polarizers Waveplates Figure 5. Laser Aplanat Figures 6 through 8 show the degree of design correction that has been achieved for LAP The peak-to-valley wavefront distortion is shown on the axis at three wavelengths. The X-axes span the ± 10mm clear aperture for rays above and below the optical axis. Note that for each wavelength, the lens has been of the LAP or LAPQ Series positive laser aplanats while maintaining the minimization of the aberrations inherent in the LAP or LAPQ Series lenses. An LAP/APM or LAPQ/APMQ combination is an f/3.3 focal system made up of reasonably priced standard components. The APM lens acts to shorten the combined focal length of the system Filters Etalons Ultrafast Interferometer Appendix Mounts Figure 7. LAP with BFD = 96.53mm and λ = 633nm refocused to find the focal plane where the optical path difference (OPD) spread is a minimum. The BFD of this focal plane is given. The graphs show that the theoretical deviation from a perfect spherical wavefront centered on the point of best focus is negligible. CVI guarantees less than λ/4 peak-to-valley wavefront distortion for all elements of the LAP/LAN Series. This means that the energy falling within a theoretical circle co-incident with the minimum of the first dark ring of the Airy diffraction pattern will contain at least 80% of the energy contained in the corresponding region of an ideal diffraction pattern. The LAP Series positive aplanats have relative apertures of f/5. If you require without introducing additional coma or spherical aberration. The resulting focal length obtained is always: f combination = f initial n where n is the index of refraction of the meniscus element. To introduce no spherical aberration or coma, the APM lens design must be matched to the spherical wavefront generated by the preceding LAP lens. This requirement determines the front and back radii and center thickness of the meniscus lens. Also, the APM lens must be properly spaced from its companion laser aplanat. Therefore, APM and LAP lenses are used in pairs, Figure 9. CVI provides each APM lens pre-mounted in a housing that assures proper spacing and orientation Figure 8. LAP with BFD = 99.71mm and λ = 1064nm a smaller spot size, add an APM Series with its paired LAP lens. APM lenses can 130 Americas (505) Europe +44 (0) Asia +82 (0) Order now at

5 Lenses Intro Technical Notes they are air-spaced, they can be used in high power YAG applications. The coatings Windows be ordered with their companion laser aplanats or separately. This gives you the ability to change the focal length of an existing system at a later time. UVAP UV and Excimer Laser Focusing Lenses CVI designed the UVAP Series to focus large aperture excimer beams and for general purpose ultraviolet focusing applications. The UVAP Series has optimum correction of spherical aberration and coma in a lens transmitting to 200nm. Choose lenses from this series whenever your application requires ultraviolet diffraction limited performance at modest f/numbers. Lenses from the UVAP Series can satisfy many requirements in photoablation, microlithography, and image relay applications without the need for expensive custom designs. YAG/HeNe Achromats Figure 9. The LAP lens is inserted into the housing of the APM companion meniscus lens. These air-spaced triplets have the same focal length at 1064nm and 633nm. They can be used to focus a YAG beam and HeNe beam to align to the same point. They can also be used to form beam expanders that collimate YAG and HeNe beams at the same lens spacing. These lenses are corrected for spherical aberration at 1064nm and 633nm and for coma at 1064nm (see Figure 10). Because are designed to give reflection losses of less than 0.5% per surface at both 1064nm and 633nm. Uncoated reflections can be as much as 4% per surface on BK7 elements and 8% per surface on SF11 elements. To compare the performance of these lenses with that of telescope objectives, one can ray-trace representative telescopes consisting of two CVI cemented aplanats and two high power achromats. The high power achromats offer better wavefront quality and achromatization at two useful laser wavelengths. The inner surfaces are air-spaced and coated with high efficiency anti-reflection coatings and are suitable for high power applications that would cause telescope objectives to fail. YAG/Doubled YAG Achromats These lenses are similar to the HAP/HAN Series except they are achromatized for 1064nm and 532nm. They are air-spaced and all surfaces are coated with double-v AR coatings that have anti-reflection of less than 0.6% per surfaceat both 1064nm and 532nm. These lenses can be used to focus YAG and doubled YAG beams simultaneously or to form a beam expander that is concurrently collimated for YAG and doubled YAG. A cross section of the YAP is shown in Figure 11. Figure 12 shows the OPD fans for this lens at the best common focus. Both wavelengths are theoretically less than λ/20 peak-to-valley transmitted wavefront distortion. These lenses are diffraction limited at 1064nm and 532nm. Figure 10. HAP OPD fan Figure 11. YAP Figure 12. YAP OPD fan Prisms Lenses Mirrors Beamsplitters Waveplates Polarizers Ultrafast Etalons Filters Interferometer Mounts Appendix Americas (505) Europe +44 (0) Asia +82 (0) Order now at 131

6 Mirrors Lenses Prisms Windows Intro nm Cemented Doublet Achromats AAP - Positive Cemented Doublet Achromat AAP, AAN Substrate Material BK7 and SF2, SF6, or SF11 glass Surface Quality per MIL-PRF-13830B Diameter Tolerance ± 0.25mm Clear Aperture Central 85% of diameter Field of view 4 Design Wavelength nm Visible Transmitted Wavefront Distortion λ/2 p-v at 633nm Antireflection Coating R avg 0.5%, nm Damage Threshold 500mJ/cm 2, 20ns, 20Hz; 100W/cm 2, CW at 515nm Beamsplitters Polarizers Waveplates Filters Etalons Ultrafast Interferometer Appendix Mounts AAN - Negative Cemented Doublet Achromat Focal lengths from 25mm to 2000mm CVI low loss nm BBAR coating included l See HAP/HAN or YAP/YAN for 1064nm air-spaced designs l 134 Chromatic focal shift vs. wavelength for AAP doublet achromat nm Cemented Doublet Achromats Focal Diameter Part Number Length D f/d Positive Cemented Doublet Achromats AAP AAP AAP AAP AAP AAP AAP AAP AAP AAP AAP AAP AAP AAP AAP AAP AAP AAP AAP AAP AAP AAP AAP AAP AAP AAP Negative Cemented Doublet Achromats AAN AAN AAN AAN AAP 132 AAN Americas (505) Europe +44 (0) Asia +82 (0) Order now at

7 FAP nm Fast Achromats Intro Chromatic focal shift vs. wavelength for FAP fast achromat. Substrate Material BK7 and SF2 glass Design Wavelengths Visible ( nm) Focal Length Tolerance ± 0.5% Housing Black anodized aluminum barrel Housing Tolerance ± Antireflection Coating R avg 0.5%, nm Transmitted Wavefront Distortion λ/2 p-v at 633nm Damage Threshold 500mJ/cm 2, 20ns, 20Hz; 100W/cm 2, CW at 1064nm Windows Prisms Lenses Application in fiber optic couplings Low f/# aplanatic achromat positive lens system Infinite conjugate design CVI low loss nm BBAR coating included l Two air-spaced doublets make this achromat ideal for fiber optic coupling and similar applications where a very low f/# is required. This fast achromat design also minimizes spherical aberration and coma. Vent holes can be placed in the barrel between the doublets for vacuum applications. Contact CVI for pricing and delivery of custom features. How To Order FAP Mirrors Beamsplitters Waveplates Polarizers Ultrafast Etalons Product Code nm Fast Achromats Focal Length in mm Clear Aperture Diameter in mm Wavelength Range of AR Coating in nm Focal Housing Housing BBAR Part Number Length f/# NA BFL WD Diameter Length Coating (nm) FAP FAP FAP FAP Filters Interferometer Mounts Appendix Americas (505) Europe +44 (0) Asia +82 (0) Order now at FAP 133

8 Mirrors Lenses Prisms Windows Intro Beamsplitters Polarizers Waveplates Filters Etalons Ultrafast Interferometer Appendix Mounts 1064/633nm Air-Spaced Laser Achromats HAP Series Positive Laser Achromats HAN Series Negative Laser Achromats Chromatic focal shift vs. wavelength for HAN /633 achromat. 1064/633nm Air-Spaced Laser Achromats Dual wavelength beamsteering applications Same focal length for 1064nm and 633nm Excellent achromatic performance for Ti:Sapphire at 800nm Air-spaced design for high energy laser applications All surfaces AR coated for both 1064nm and 633nm Substrate Material HAP, HAN BK7 and SF11 glass Surface Quality per MIL-PRF-13830B Housing Tolerance ± These air-spaced triplets have the same focal length at 1064nm and 633nm. They can be used to focus a Nd:YAG beam and HeNe beam to align to the same point. They can also be used to form beam expanders that collimate Nd:YAG and HeNe beams at the same lens spacing. These lenses are corrected for spherical aberration at 1064nm and 633nm and for coma at 1064nm. Because they are air-spaced, they can be used in high power Nd:YAG applications. The coatings are designed to give reflection losses of less than 0.5% per surface at 1064nm and 633nm. To compare the performance of these lenses with that of telescope objectives, one can ray-trace representative telescopes consisting of two CVI cemented aplanats and two high power achromats. The high power achromats offer high wavefront quality and achromatization at two useful laser wavelengths. The inner surfaces are air-spaced and coated with high efficiency anti-reflection coatings and are suitable for high power applications that would cause telescope objectives to fail. Clear Working Back Focal Outside Focal Aperture Distance Distance Diameter Length Part Number Length CA WD BFD D L Positive Achromats HAP HAP HAP HAP HAP HAP HAP HAP HAP HAP Negative Achromats Antireflection Coating Transmitted Wavefront Distortion Damage Threshold R 0.5% per surface at 1064nm and 633nm λ/2 p-v over 85% of CA at 633nm 4J/cm 2, 20ns, 20Hz at 1064nm HAN HAN HAN HAN HAP 134 HAN Americas (505) Europe +44 (0) Asia +82 (0) Order now at

9 IntroYAP, YAN1064/532nm Air-Spaced Laser Achromats Substrate Material BK7 and SF11 glass Surface Quality per MIL-PRF-13830B Housing Tolerance ± Windows YAP Series Positive Laser Achromats YAN Series Negative Laser Achromats Chromatic focal shift vs. wavelength for YAP /532 achromat. Dual wavelength beamsteering applications Same focal length for 1064nm and 532nm Air-spaced design for high energy laser applications All surfaces AR coated for both 1064nm and 532nm Antireflection Coating Transmitted Wavefront Distortion Damage Threshold R < 0.3% per surface at 1064nm and R < 0.6% per surface at 532nm λ/2 p-v over 85% of CA at 633nm 4J/cm 2, 20ns, 20Hz at 1064nm These lenses are achromatized for 1064nm and 532nm. They are air-spaced and all surfaces are coated with double- V AR coatings that have anti-reflection of less than 0.6% at both 1064nm and 532nm. These lenses can be used to focus Nd:YAG and doubled Nd:YAG beams simultaneously or to form a beam expander that is concurrently collimated for Nd:YAG and doubled Nd:YAG. OPD shows the fans for this lens at the best common focus. Both wavelengths are theoretically less than λ/20 peak-to-valley transmitted wavefront distortion. Prisms Lenses Mirrors Beamsplitters Waveplates Polarizers Ultrafast 1064/532nm Air-Spaced Laser Achromats Clear Working Back Focal Outside Focal Aperture Distance Distance Diameter Length Part Number Length CA WD BFD D L Positive Achromats YAP YAP YAP YAP YAP YAP YAP YAP YAP YAP Negative Achromats YAN YAN YAN YAN YAP Americas (505) Europe +44 (0) Asia +82 (0) Order now at YAN 135 Etalons Filters Interferometer Mounts Appendix

10 Mirrors Lenses Prisms Windows Intro Beamsplitters Polarizers Waveplates Visible Laser Aplanats LAP Series Positive Laser Aplanats LAN Series Negative Laser Aplanats Applications: Beam handling, interferometers, material ablation & cutting systems Air-spaced design for medium to high energy applications Diffraction limited performance Lens Part Number Substrate Material Surface Quality Design Wavelength SF11 glass All surfaces per MIL-PRF-13830B except for LAP , which is nm Housing Tolerance ± Antireflection Coating Transmitted Wavefront Distortion Damage Threshold Aplanats correct for spherical aberration and coma. The LAP and LAN are ideal for general purpose use in the visible and near- IR regions. For energies above 4J/cm 2 or for UV applications, the LAPQ and LANQ Wavelength of AR Coating (nm) l LAP, LAN R 0.25% per surface, user specified λ/4 p-v over 85% of CA at 633nm 4J/cm 2, 20ns, 20Hz at 1064nm are recommended. Parts are marked with an arrow on the barrel that points to the collimated light l 129. Other focal lengths are available. Contact CVI for pricing and delivery information. How To Order LAP Filters Etalons Ultrafast Interferometer Appendix Mounts Visible Laser Aplanats Focal Clear Working Back Focal Outside Length Aperture Distance Distance Diameter Length Part Number at 633nm CA WD BFD D L Positive Laser Aplanats LAP LAP LAP LAP LAP LAP LAP LAP LAP LAP LAP LAP LAP Negative Laser Aplanats LAN LAN LAN LAN LAN LAP 136 LAN Americas (505) Europe +44 (0) Asia +82 (0) Order now at

11 APM Aplanatic Meniscus Lenses Intro Use in combination with LAP to obtain f/3.3 relative aperture Air-spaced design for medium to high energy VIS-NIR laser applications Mounts easily into mirror mount, call for details Lens Part Number Substrate Material BK7 glass Surface Quality per MIL-PRF-13830B Design Wavelength 633nm Housing Tolerance ± Antireflection Coating Transmitted Wavefront Distortion Damage Threshold The CVI APM Series aplanatic meniscus lenses shorten the focal length of the LAP Series positive laser aplanats while maintaining the minimization of the aberrations inherent in the LAP Series lenses. An LAP/APM combination is an f/3.3 focal system made up of reasonably priced standard components. The APM lens acts to shorten the combined focal length of the system without introducing additional coma or spherical aberration. To introduce no spherical aberration or coma, the APM lens design must be matched to the spherical wavefront R 0.25% per surface, user specified λ/2 p-v over 85% of CA at 633nm 4J/cm 2, 20ns, 20Hz at 1064nm generated by the preceding LAP lens. This requirement determines the front and back radii and center thickness of the meniscus lens. Also, the APM lens must be properly spaced from its companion laser aplanat. Therefore, APM and LAP lenses are used in pairs. CVI provides each APM lens premounted in a housing that assures proper spacing and orientation with its paired LAP lens. APM lenses can be ordered with their companion laser aplanats or separately. This gives you the ability to change the focal length of an existing system at a later time. How To Order APM Windows Prisms Lenses Mirrors Beamsplitters Waveplates Polarizers Ultrafast Etalons Wavelength of AR Coating (nm) l Aplanatic Meniscus Lenses Combined Clear Working Outside Companion Focal Aperture Distance Combined Diameter Length Part Number Laser Aplanatic Length CA WD BFD D L APM LAP APM LAP APM LAP APM LAP APM LAP APM LAP APM LAP APM LAP APM LAP Filters Interferometer Mounts Appendix Americas (505) Europe +44 (0) Asia +82 (0) Order now at APM 137

12 Mirrors Lenses Prisms Windows Intro Beamsplitters Polarizers Waveplates High Energy / UV Laser Aplanats LAPQ Positive High Energy / UV Laser Aplanats LANQ Negative High Energy / UV Laser Aplanats Beam handling, interferometers, material ablation & cutting systems Air-spaced fused silica design for high energy or UV applications Diffraction limited aplanats corrected for spherical aberration and coma Lens Part Number Substrate Material UV grade fused silica Surface Quality All surfaces 10-5 CVI Laser Quality defined on page 430 Design Wavelength 248nm Housing Tolerance ± Antireflection Coating Transmitted Wavefront Distortion LAPQ, LANQ Damage Threshold Also used as excimer focusing lenses, aplanats correct for spherical aberration and coma. Air-spaced fused silica design provides for significantly higher energy damage threshold performance. Parts How To Order LAPQ Wavelength of AR Coating (nm) l R 0.25% per surface, user specified λ/4 p-v over CA at 248nm 15J/cm 2, 20ns, 20Hz at 1064nm are marked with an arrow on the barrel that points to the collimated light l 129. Other focal lengths are available. Contact CVI for pricing and delivery infromation. Filters Etalons Ultrafast Interferometer Appendix Mounts High Energy / UV Laser Aplanats Focal Focal Clear Working Back Focal Outside Length Length Aperture Distance Distance Diameter Length Part Number at 248nm at 1064nm CA WD BFD D L Positive UV Laser Aplanats LAPQ LAPQ LAPQ LAPQ LAPQ LAPQ LAPQ LAPQ LAPQ LAPQ LAPQ LAPQ LAPQ Negative UV Laser Aplanats LANQ LANQ LANQ LANQ LANQ LAPQ 138 LANQ Americas (505) Europe +44 (0) Asia +82 (0) Order now at

13 APMQ UV Aplanatic Meniscus Lenses Intro Use in combination with LAPQ to obtain f/3.3 relative aperture Air-spaced design for high power and UV laser applications Excimer focusing triplet lens Mounts easily into mirror mount, call for details Substrate Material UV grade fused silica Surface Quality 10-5 CVI Laser Quality defined on page 430 Design Wavelength 248nm Housing Tolerance ± Antireflection Coating R 0.25% per surface, user specified Transmitted Wavefront Distortion λ/2 p-v over 85% of CA at 248nm Damage Threshold 15J/cm 2, 20ns, 20Hz at 1064nm The CVI APMQ Series aplanatic meniscus the spherical wavefront generated by the lenses shorten the focal length of the preceding LAPQ lens. This requirement LAPQ Series positive laser aplanats while determines the front and back radii and maintaining the minimization of the center thickness of the meniscus lens. aberrations inherent in the LAPQ Series Also, the APMQ lens must be properly lenses. An LAPQ/APMQ combination is an spaced from its companion laser aplanat. f/3.3 focal system made up of reasonably Therefore, APMQ and LAPQ lenses are priced standard components. used in pairs. CVI provides each APMQ lens pre-mounted in a housing that assures The APMQ lens acts to shorten the proper spacing and orientation with its combined focal length of the system paired LAPQ lens. APMQ lenses can without introducing additional coma be ordered with their companion laser or spherical aberration. To introduce aplanats or separately. This gives you the no spherical aberration or coma, the ability to change the focal length of an APMQ lens design must be matched to existing system at a later time. Windows Prisms Lenses Mirrors Beamsplitters Waveplates Polarizers Ultrafast How To Order APMQ Lens Part Number Etalons UV Aplanatic Meniscus Lenses Wavelength of AR Coating (nm) l Combined Clear Working Outside Companion Focal Aperture Distance Combined Diameter Length Part Number Laser Aplanatic Length CA WD BFD D L APMQ LAPQ APMQ LAPQ APMQ LAPQ APMQ LAPQ APMQ LAPQ APMQ LAPQ APMQ LAPQ APMQ LAPQ APMQ LAPQ Filters Interferometer Mounts Appendix Americas (505) Europe +44 (0) Asia +82 (0) Order now at APMQ 139

14 Mirrors Lenses Prisms Windows Intro Beamsplitters Polarizers Waveplates Filters Etalons Ultrafast Interferometer Appendix Mounts UV and Excimer Focusing Lenses Beam handling, interferometers, material ablation & cutting systems Air-spaced fused silica design for high energy or UV applications All CVI AR coating available l Use the 33-UVAP lens mount holder l 396 Singlet Specifications Outside Diameter (D) Center Thickness (TC) Clear Aperture (CA) 63.5mm 8.0mm 50.0mm CVI has designed this series of lenses for focusing large diameter excimer laser beams and for other monochromatic ultraviolet imaging applications. They are used in beam delivery systems for excimer laser photoablation and also in excimer and Raman-shifted-excimer LIDAR setups. This series should be considered whenever diffraction limited performance in the ultraviolet is needed at a modest f/#. UV and Excimer Laser Focusing Lenses Doublet Specifications Outside Diameter (D) CVI can help quantify the performance at wavelengths other than 248nm. All but the three fastest singlets are diffraction limited at full clear aperture (CA) at 248nm. The criterion we use is the wavefront error. At a peak-to-valley Length (L) Clear Aperture (CA) 63.5mm 25.4mm 50.0mm UVAP Substrate Material UV grade fused silica Surface Quality 10-5 CVI Laser Quality defined on page 430 Focal Length Tolerance ± 0.5% Clear Aperture 50.0mm Housing Tolerance ± Transmitted Wavefront Distortion Lens Part Number Damage Threshold Wavelength of AR Coating (nm) l see table below 1J/cm 2, 20ns, 20Hz at 248nm Triplet Specifications Outside Diameter (D) wavefront error of < λ/4, more than 68% of the focused energy is contained within the Airy disk. This compares favorably with diffraction limited systems where 84% of the energy appears inside the first dark ring of the Airy pattern. Length (L) Clear Aperture (CA) 63.5mm 25.4mm 50.0mm How To Order UVAP Focal Length BFD Wavefront Error Part Number Lens Type at 248nm f/d at 248nm at 248nm (λ) PLCX UV Singlet PLCX UV Singlet PLCX UV Singlet PLCX UV Singlet UVAP Doublet UVAP Doublet UVAP Doublet UVAP Triplet UVAP Americas (505) Europe +44 (0) Asia +82 (0) Order now at

15 UVO UV Objective Lenses Intro Perfect for micromachining, laser scribing, and microlithography Air-Spaced Doublet or Triplet design for maximum UV transmission Infinite conjugate ratio design High damage threshold makes this ideal for micromachining applications. We offer these lenses in a black anodized aluminum barrel alone or in the convenience of a microscope objective style housing. The housing has standard Royal Microscope Society screw threads [0.8 x 36TPI]. For higher damage threshold, it is recommended to use a narrowband antireflection coating (V-coat). Call CVI for pricing and delivery. Product Code Substrate Material UV grade fused silica Design Wavelength Focal Length in mm Housing Antireflection Coating Transmitted Wavefront Distortion Clear Aperture Diameter in mm 355nm Black anodized barrel or mounted into a microscope objective style stainless steel housing User specified, R avg 0.5% per surface 3/4 λ p-v at 633nm Damage Threshold 500mJ/cm 2, 20ns, 20Hz at 355nm How To Order UVO Windows Prisms Lenses Mirrors Beamsplitters Waveplates Polarizers Ultrafast Wavelength Range of AR Coating in nm Etalons UV Objective Lenses Focal Magnification BBAR Part Number Length f/# NA (170mm/fl) BFD WD CA Coating (nm) UVO UVO UVO UVO UVO UVO UVO UVO UVO UVO UVO UVO Filters Interferometer Mounts Appendix Americas (505) Europe +44 (0) Asia +82 (0) Order now at UVO 141

16 Mirrors Lenses Prisms Windows Intro Beamsplitters F-Theta Lenses Provides a flat field at the image plane of the scan Image velocity is proportional to the angular velocity of the scanning mirror FTL Substrate Material SF11 and BK7 glass Design Wavelength 1064nm Antireflection Coating R < 0.5% per surface Transmitted Wavefront Distortion λ/4 p-v at 633nm per MIL-PRF-13830B Clear Aperture 90% Damage Threshold 1J/cm 2, 8nsec pulse; 1MW/cm 2, CW at 1064nm Polarizers Waveplates EFL BFL SL Effective Focal Length Back Focal Length Scan Length Filters Etalons Ultrafast F-Theta lenses are commonly used in conjunction with galvonometer scanning mirrors in laser marking, engraving, and cutting systems along with Nd:YAG or Fiber Laser Sources. F-Theta lenses provide a flat image field at the plane of interest. CVI designs have been developed for common wavelengths and focal lengths. for high damage threshold, anti-reflection coatings on all surfaces, and M85x1 screw thread for easy fixturing. In addition to the lenses shown below, CVI designs custom lenses for other OEM applications, specifications levels or price ranges. Please contact a CVI application BD Beam Diameter θ Scan Angle (±) IPS Image Point Size (µm) D Overall Diameter Standard features include air-spaced design engineer for further information. Appendix Mounts Interferometer F-Theta Lenses Back Scan Entrance Image Effective Focal Length Beam Scan Point Mirror Assembly Focal Length Size Diameter Angle (±) Size (µm) Distance Diameter Part Number Wavelength Length (BFL) (SL) (BD) θ (IPS) (a 1 /a 2 ) (D) FTL nm µm 38/ FTL nm µm 38/ FTL nm µm 39.5/ FTL Americas (505) Europe +44 (0) Asia +82 (0) Order now at