Table of Contents. ELVR - Analog and Digital Low Pressure Sensors Series. all sensors. Introduction. Page 1

Size: px

Start display at page:

Download "Table of Contents. ELVR - Analog and Digital Low Pressure Sensors Series. all sensors. Introduction. Page 1"

Collin French
5 years ago
Views:

Pressure Sensor Maximum Ratings............... Environmental Specifications...................... Analog Output (V) Specifications.

.......... IC Interface...........-9 Interface....... 0- How to Order Guide........... Dimensional Package Drawings Non-Barbed SIL, DIP and SMT.

.. The ELVR sensors can communicate directly with microcontrollers, eliminating the need for additional A/D converters.

The ELVR series provides a rapid update rate at multiple resolutions.

These calibrated and compensated sensors provide accurate, stable output over a wide temperature range.

A protective parylene coating is optionally available for moisture/ harsh media protection for pressure ranges 0 inho and above.

Refer to the product web page for a cross reference table: https://www.allsensors.

......................... The ELVR Series Mini Analog and Digital Output Sensor is based on CoBeam TM Technology.

1 Pressure Sensor Maximum Ratings Environmental Specifications Analog Output (V) Specifications Analog Output (V) Specifications Digital Output (V) Specifications Digital Output (V) Specifications Device Option Descriptions IC Interface Interface How to Order Guide Dimensional Package Drawings Non-Barbed SIL, DIP and SMT Barbed SIL, DIP and SMT Product Labeling... Suggested Pad Layouts... The ELVR sensors can communicate directly with microcontrollers, eliminating the need for additional A/D converters. ELVR series pressure sensors are available at V and V supply voltage. The ELVR series provides a rapid update rate at multiple resolutions. A wide range of miniature SIP and DIP package options allows for flexible and space-saving PCB-mounting. These calibrated and compensated sensors provide accurate, stable output over a wide temperature range. This series is intended for use with non-corrosive, non-ionic working fluids such as air and dry gases. A protective parylene coating is optionally available for moisture/ harsh media protection for pressure ranges 0 inho and above. The ELVR Series is a direct replacement to First Sensors HCLA product line. Refer to the product web page for a cross reference table: DS-0 Rev A Page f 0 09 Standard Pressure Ranges p 0 Features & Applications The ELVR Series Mini Analog and Digital Output Sensor is based on CoBeam TM Technology. This reduces package stress susceptibility, resulting in improved overall long term stability. The superior dual-die technology also vastly improves position sensitivity compared to single die devices. This technology breakthrough advances the state of the art for piezoresistive pressure sensors beyond what has been achieved for low pressure sensing using silicon based strain technology. a 0 Vineyard Blvd. Morgan Hill, CA 90 Introduction e all sensors ELVR - Analog and Digital Low Pressure Sensors Series

2 ELVR Series Analog & Digital Pressure Sensors Features Pressure Ranges from. mbar to mbar ( to 0 inho) Precision ASIC Conditioning Analog Output with Digital IC and Interface V and V Supply Voltage Pressure Sensor Maximum Ratings Supply Voltage () Analog-Output Current Sink Device Source Common Mode Pressure Standard Pressure Ranges. to. Vdc ma ma 000 mbar / 0 inho SMT Assembly Specifications Average preheating temperature gradient Soak Time Time above C Time above 0 C Time above 0 C. K/s ca. min 0 s 0 s s Peak Temperature 0 C Cooling Temperature Gradient Operating Range A -. K/s DS-0 Rev A Differential Proof Pressure Applications Medical Industrial mbar inho mbar inho mbar inho ELVR-L0D ±. ± ELVR-L0D ±. ± ELVR-L0D ± ± ELVR-L0D ± 0 ± ELVR-L0D ± ± ELVR-L0G ELVR-L0G ELVR-L0G ELVR-L0G ELVR-L0G Note A: Operating range in inho is expressed as an approximate value. ELVR series is calibrated to mbar pressure units. Environmental Specifications Temperature Ranges Compensated: Commercial 0 C to 0 C Industrial -0 C to C Operating - C to C Storage -0 C to C Humidity Limits (non condensing) IC Equivalent Circuit + GND See package drawings for pinouts. Differential Burst Pressure 0 to 9% RH + SS GND Page a 0 Vineyard Blvd. Morgan Hill, CA 90 p 0 f 0 09 e all sensors

3 Performance Characteristics for ELVR Series Amplified Low Pressure Sensors All parameters are measured at.0 volt excitation and C unless otherwise specified. Pressure measurements are with positive pressure applied to PORT B Parameter Minimum Nominal Maximum Units Specification Notes Full Scale Span (FSS).9.0. V Full Scale Output (FSO) Span Temperature Shift Offset zero differential pressure Offset Temperature Shift Offset Warm-up Shift Offset Long Term Drift (one year) Analog Performance Characteristics Min Pressure 0. V Max Pressure. V L0x - - ± %FSS L0x though L0x - - ± %FSS LxxD... V - LxxG V - L0x - - ±. %FSS L0x - - ± %FSS L0x through L0x - - ±0. %FSS L0x - ±0 - mv L0x thorugh L0x - ± - mv L0x - ± - mv - L0x thorugh L0x - ± - mv - Linearity, Hysteresis error (all products) - ±0.0 ±0. %FSS Response Delay ms D/A Resolution - - bit - Current Consumption (no load) ma - Specification Notes Note : For any pressure applied the output response time to reach 90% of pressure applied. Note : Shift is relative to C between standard or industrial compensated temperature range endpoints. Note : Shift is within the first hour of excitation applied to the device. Note : Measured at one-half full scale rated pressure using best straight line curve fit. Note : The span is the algebraic difference between full scale output voltage and the offset voltage. Note : Parameter is characterized and not 00% tested. ELVR Series Analog & Digital Pressure Sensors Page

4 Performance Characteristics for ELVR Series Amplified Low Pressure Sensors All parameters are measured at.0 volt excitation and C unless otherwise specified. Pressure measurements are with positive pressure applied to PORT B Analog Performance Characteristics Parameter Minimum Nominal Maximum Units Specification Notes Full Scale Span (FSS) V Full Scale Output (FSO) - Min Pressure 0. V Max Pressure. V Span Temperature Shift L0x - - ± %FSS L0x though L0x - - ± %FSS Offset zero differential pressure LxxD... V - LxxG V - Offset Temperature Shift L0x - - ±. %FSS L0x - - ± %FSS L0x through L0x - - ±0. %FSS Offset Warm-up Shift L0x - ±0 - mv L0x thorugh L0x - ± - mv Offset Long Term Drift (one year) L0x - ± - mv - L0x thorugh L0x - ± - mv - Linearity, Hysteresis error (all products) - ±0.0 ±0. %FSS Response Delay ms D/A Resolution - - bit - Current Consumption - - ma a 0 Vineyard Blvd. Morgan Hill, CA 90 p 0 f 0 09 e all sensors DS-0 Rev A Page

5 Performance Characteristics for ELVR Series Amplified Low Pressure Sensors All parameters are measured at.0 volt excitation and C unless otherwise specified. Pressure measurements are with positive pressure applied to PORT B Parameter Minimum Nominal Maximum Units Specification Notes Full Scale Span (FSS) - - Decimal Full Scale Output (FSO) Span Temperature Shift Offset zero differential pressure Offset Temperature Shift Offset Warm-up Shift Offset Position Sensitivity (± g) Offset Long Term Drift (one year) Digital Performance Characteristics in Decimal Min Pressure Decimal Max Pressure Decimal L0x - - ± %FSS L0x though L0x - - ± %FSS LxxD Decimal - LxxG 9 9 Decimal - L0x - - ±. %FSS L0x - - ± %FSS L0x through L0x - - ±0. %FSS L0x - - Decimal L0x thorugh L0x - - Decimal L0x Decimal - L0x thorugh L0x - - Decimal - L0x - - Decimal - L0x thorugh L0x - - Decimal - Linearity, Hysteresis error (all products) - ±0.0 ±0. %FSS Response Delay 0. ms A/D Resolution - - bit - Current Consumption - - ma ELVR Series Analog & Digital Pressure Sensors Page

6 Performance Characteristics for ELVR Series Amplified Low Pressure Sensors All parameters are measured at.0 volt excitation and C unless otherwise specified. Pressure measurements are with positive pressure applied to PORT B Digital Performance Characteristics in Decimal Parameter Minimum Nominal Maximum Units Specification Notes Full Scale Span (FSS) 99 9 Decimal Full Scale Output (FSO) Min Pressure - - Decimal Max Pressure - - Decimal Span Temperature Shift L0x - - ± %FSS L0x though L0x - - ± %FSS Offset zero differential pressure LxxD Decimal - LxxG Decimal - Offset Temperature Shift L0x - - ±. %FSS L0x - - ± %FSS L0x through L0x - - ±0. %FSS Offset Warm-up Shift L0x - - Decimal L0x thorugh L0x - - Decimal Offset Position Sensitivity (± g) L0x Decimal - L0x thorugh L0x - - Decimal - Offset Long Term Drift (one year) L0x - - Decimal - L0x thorugh L0x - - Decimal - Linearity, Hysteresis error (all products) - ±0.0 ±0. %FSS Response Delay ms A/D Resolution - or - bit - Current Consumption - - ma a 0 Vineyard Blvd. Morgan Hill, CA 90 p 0 f 0 09 e all sensors DS-0 Rev A Page

7 Device Options The following is a list of factory programmable options. Consult the factory to learn more about the options. Interface IC and interfaces are available with eight () lead packages only. Supply Voltage Devices are characterized at either.0v or.0v depending on the options selected. It is suggested to select the option that most closely matches the application supply voltage for best possible performance. Speed/Power There are two options of Speed/Power. These are Fast(F) and High Resolution(H). Fast Mode(F) Is the fastest operating mode where the device operates with continuous sampling at the fastest internal speed bit resolution, 0.ms update rate. High Resolution(H): Also operates with continuous samples however the ADC is set for longer duration for higher resolution. The conversion times are resultantly longer than the Fast(F) mode with ms update rate. Coating Parylene Coating: Parylene coating provides a moisture barrier and protection form some harsh media. Consult factory for applicability of Parylene for the target application and sensor type. This option is not available for pressure ranges below 0 inho. ELVR Series Analog & Digital Pressure Sensors Page

8 IC Interface Introduction The ELVR is capable of producing a digital output signal. The device runs a cyclic program, which will store a corrected pressure value with or bit resolution about every 0µs within the output registers of the internal ASIC. In order to use the sensor for digital signal readout, it should be connected to a bidirectional IC-bus. According to the IC-bus specification, the bus is controlled by a master device, which generates the clock signal, controls the bus access and generates START and STOP conditions. The ELVR is designed to work as a slave, hence it will only respond to requests from a master device. Digital IC interface The ELVR complies with the following protocol in Figure. Bus not busy : During idle periods both data line () and clock line () remain HIGH. START condition (S) : HIGH to LOW transition of line while clock () is HIGH is interpreted as START condition. START conditions are always generated by the master. Each initial request for a pressure value has to begin with a START condition. STOP condition (P) : LOW to HIGH transition of line while clock () is HIGH determines STOP condition. STOP conditions are always generated by the master. More than one request for the current pressure value can be transmitted without generation of intermediate STOP condition. START condition Data valid Data allowed to change S Slave Address R/W A Data Byte A Data Byte Figure : I²C bus protocol Read out of first pressure value generated by master generated by slave S = START condition A = Acknowledge P = STOP condition DATA valid (D): State of data line represents valid data when, after START condition, data line is stable for duration of HIGH period of clock signal. Data on line must be changed during LOW period of clock signal. There is one clock pulse per bit of data. Acknowledge (A): Data is transferred in pieces of bits ( byte) on serial bus, MSB first. After each byte the receiving device whether master or slave is obliged to pull data line LOW as acknowledge for reception of data. Master must generate an extra clock pulse for this purpose. When acknowledge is missed, slave transmitter becomes inactive. Master must then either send last command again or generate STOP condition in that case. Slave address: The IC-bus master-slave concept requires a unique address for each device. The ELVR has a preconfigured slave address, see table. The sensor will then listen to both slave addresses. After generating a START condition the master sends the address byte containing a bit address followed by a data direction bit (R/W). A "0" indicates a transmission from master to slave (WRITE), a "" indicates a data request (READ). DATA operation : The sensor starts to send data bytes containing the current pressure value as a bit value placed in the output registers. A Data Byte STOP condition Read out of n pressure values (optional) Data Byte = High Byte (MSB first) Data Byte = Low Byte (LSB last) P a 0 Vineyard Blvd. Morgan Hill, CA 90 p 0 f 0 09 e all sensors DS-0 Rev A Page

9 I C BUS INTERFACE (Cont'd) I C Interface Parameters Parameter Symbol Minimum Nominal Maximum Unit Input High Level % of Input Low Level % of Output Low Level % of Pull-Up Resistor Ω Load C pf Input / C IC_IN pf Signal Clock Frequency F 00* - 00 khz Bus Free Time Between STOP and START Condition t BUF. - - µs Hold Time (Repeated) START Condition, to First Clock Pulse t HD.STA µs Low Period of t Low. - - µs High Period of t High µs Setup Time Repeated START Condition t SU.STA - - µs Note: recommends communication speeds of at least 00 khz (max. 0 khz). Please contact your nearest sales office for further information. ts U;DAT thd;dat ts U;S TA thd;sta tr tf S CL S DA thigh tlow tsu;sto tbuf thd;s TA S CL S DA Figure. Timing Characteristics ELVR Series Analog & Digital Pressure Sensors Page 9

10 - SERIAL PERIPHERAL INTERFACE Introduction The ELVR series is capable of producing a digital output signal. The device runs a cyclic program, which will store a corrected sensor value with or bit resolution about every 9 ms within the output registers of the internal ASIC. This cyclic program runs independent from the bus communication. In order to use the pressure sensor for digital signal readout, it should be connected to a Master device. specifies four signals: The clock () is generated by the master and input to all slaves. carries data from master to slave. carries data from slave back to master. A slave select line (SS) allows individual selection of a slave device. Modes A pair of parameters called clock polarity (CPOL) and clock phase (CPHA) determine the edges of the clock signal on which the data are driven and sampled. Each of the two parameters has two possible states, which allows for four possible combinations, all of which are incompatible with one another. SCK Cycle SCK (CPOL=0) SS Sampling MSB MSB Figure : Example of a standard byte data transfer for CPHA=0 and CPOL=0 Figure : Data Byte The ELVR series supports all clock phase (CPHA)=0 and polarity (CPOL)=0. CPOL which means that data transmission starts with the rising first clock edge (see Figure ). Slave select The falling edge of the SS line indicates the beginning of the transfer. Additionally the SS line must not be negated and reasserted between the three bytes to be transmitted. Data operation The line should always be set to high level. So there is no data transmission from master to slave. Because of internal configuration the slave will answer the first byte with an FFxh. The second and third byte contain the bit pressure information (see Figure ). Data Byte Data Byte X X X X X X X X X PPP P P0 P9 P P P P P P P P P0 Relevant data byte data stream between ELVR sensor and master containing the pressure value as a bit value. LSB LSB a 0 Vineyard Blvd. Morgan Hill, CA 90 p 0 f 0 09 e all sensors DS-0 Rev A Page 0

11 - SERIAL PERIPHERAL INTERFACE (Cont'd) Interface Parameters Parameter Symbol Minimum Nominal Maximum Unit Input High Level % of Input Low Level % of Output Low Level % of Pull-Up Resistor Ω Load C pf Input Each C _IN pf Signal Clock Frequency f SCK 00* - 0 khz Hold Time after SCK Sample Slope t _HD_ ns Setup Time Before SCK Sample Slope t _SU_ /f /SS Setup Time Before SCK Sample Slope t _SU_SS ns /SS Hold Time After SCK Sample Slope t _HD_SS /f Note: recommends communication speeds of at least 00 khz (max. 0 khz). Please contact your nearest sales office for further information. SCK (CPOL=0) t _SU_SS t _SU_ t _HD_ t _HD_SS SS Figure : Timing characteristics ELVR Series Analog & Digital Pressure Sensors Page

How to Order Refer to Table for configuring a standard base part number which includes the pressure range, package and temperature range. Table shows the available configuring options.

12 How to Order Refer to Table for configuring a standard base part number which includes the pressure range, package and temperature range. Table shows the available configuring options. The option identifier is required to complete the device part number. Refer to Table for the available device package options. Example P/N with options: ELVR-L0D-FRS-C-NIF Table - How to configure a base part number ORDERING INFORMATION Table - How to configure an option identifier Example N I F TABLE : Available Configurations Port Orientation Dual Port Same Side Single Port SERIES PRESSURE RANGE PACKAGE TEMPERATURE RANGE Base Port Orientation Lid Style Lead Type ID ID Description ID ID Description ID Description ID Description ID Description ELVR L0D ± inho F Dual Port Same Side R Long Non-Barbed T SIL (see note ) C Commercial L0D ± inho N Single Port S Long Barbed D DIP I Industrial L0D ±0 inho J J-Lead SMT L0D ±0 inho L L-Lead SMT L0D ±0 inho L0G 0 to inho L0G 0 to inho L0G 0 to 0 inho L0G 0 to 0 inho L0G 0 to 0 inho Example ELVR - L0D - F R S - C ORDERING INFORMATION DIGITAL RESOLUTION, COATING INTERFACE SUPPLY VOLTAGE UPDATE RATE ID Description ID Description Address ID Description ID Description N No Coating A Analog Only (see note ) N/A.0V F Fast Mode P Parylene Coating (see note ) I IC & Analog 0x.0V (bit, 0.ms) S Option- & Analog N/A Option- IC & Analog 0x H High Resolution Option- IC & Analog 0x (bit, ms) Option- IC & Analog 0x Option- IC & Analog 0x Option- IC & Analog 0x Non-Barbed Lid Lead Style Barbed Lid Lead Style SIL DIP SMT-J SMT-L SIL DIP SMT-J SMT-L FRT FRD FRJ FRL FST FSD NOT OFFERED FSL FNRT FNRD FNRJ FNRL FNST FNSD FNSJ FNSL Specification Notes (Cont.) note : LEADFRAME T HAS ONLY ANALOG OUTPUT CAPABILITY. ALL LEAD TYPES EXCEPT FOR T HAVE SIMULTANEOUS DIGITAL AND ANALOG OUTPUT CAPABILITY. note : PARYLENE COATING NOT OFFERED IN J-LEAD SMT CONFIGURATION. PARYLENE COATING IS NOT OFFERED FOR PRESSURE RANGES BELOW 0 INHO. a 0 Vineyard Blvd. Morgan Hill, CA 90 p 0 f 0 09 e all sensors DS-0 Rev A Page

13 Package Drawings A Port Low Pressure Do not connect ) Dimensions are in inches [mm]. ) For suggested pad layout, see drawing: PAD FRT Package Do not connect ) Dimensions are in inches [mm]. ) For suggested pad layout, see drawing: PAD FNRT Package ELVR Series Analog & Digital Pressure Sensors Page

14 Package Drawings (Cont d) IC ) Dimensions are in inches [mm]. ) For suggested pad layout, see drawing: PAD A Port Low Pressure ) Dimensions are in inches [mm]. ) For suggested pad layout, see drawing: PAD SS FRD Package IC SS FNRD Package a 0 Vineyard Blvd. Morgan Hill, CA 90 p 0 f 0 09 e all sensors DS-0 Rev A Page

15 Package Drawings (Cont d) A Port Low Pressure IC SS ) Dimensions are in inches [mm]. ) For suggested pad layout, see drawing: PAD FRJ Package IC SS ) Dimensions are in inches [mm]. ) For suggested pad layout, see drawing: PAD FNRJ Package ELVR Series Analog & Digital Pressure Sensors Page

16 Package Drawings (Cont d) IC A Port Low Pressure ) Dimensions are in inches [mm]. ) For suggested pad layout, see drawing: PAD ) Dimensions are in inches [mm]. ) For suggested pad layout, see drawing: PAD FRL Package IC SS SS FNRL Package a 0 Vineyard Blvd. Morgan Hill, CA 90 p 0 f 0 09 e all sensors DS-0 Rev A Page

17 Package Drawings (Cont d) A Port Low Pressure Do not connect ) Dimensions are in inches [mm]. ) For suggested pad layout, see drawing: PAD FST Package Do not connect ) Dimensions are in inches [mm]. ) For suggested pad layout, see drawing: PAD FNST Package ELVR Series Analog & Digital Pressure Sensors Page

18 Package Drawings (Cont d) ) Dimensions are in inches [mm]. ) For suggested pad layout, see drawing: PAD A Port Low Pressure ) Dimensions are in inches [mm]. ) For suggested pad layout, see drawing: PAD IC SS FSD Package IC SS FNSD Package a 0 Vineyard Blvd. Morgan Hill, CA 90 p 0 f 0 09 e all sensors DS-0 Rev A Page

19 Package Drawings (Cont d) A Port Low Pressure IC SS ) Dimensions are in inches [mm]. ) For suggested pad layout, see drawing: PAD FSL Package IC SS ) Dimensions are in inches [mm]. ) For suggested pad layout, see drawing: PAD FNSL Package ELVR Series Analog & Digital Pressure Sensors Page 9

20 Package Drawings (Cont d) IC ) Dimensions are in inches [mm]. ) For suggested pad layout, see drawing: PAD FNSJ Package SS a 0 Vineyard Blvd. Morgan Hill, CA 90 p 0 f 0 09 e all sensors DS-0 Rev A Page 0

21 Product Labeling ELVR-L0D- FRS-C- NIF RD- Company Part Number Lot Number Example Device Label Suggested Pad Layouts 0.0~0.09 inch (Finished Size).0~.09 inch (Finished Size) 0 (typ.). 0.0 PAD (typ.) (typ.) PAD-0 0 (typ.) PAD- PAD-9 reserves the right to make changes to any products herein. does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. ELVR Series Analog & Digital Pressure Sensors Page

SQ277 Series Miniature amplified pressure sensors

SQ277 Series Miniature amplified pressure sensors FEATURES 0... 1.5 to 0... 7, 0... ±1.5 to 0... ±7, absolute, differential or gage Barometric pressure ranges Output: 0.5...4.5 V and I C-bus (SPI and switching outputs optional) Precision ASIC conditioning