miniature pressure sensors

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1 miniature pressure sensors Prime Grade Pressure Sensors Features General Description 0 to 0.3 to 0 to 15 Pressure Ranges % linearity...highest accuracy version Temperature Compensated Calibrated Zero and Span The Miniature series pressure sensors are based upon a proprietary technology to reduce the size of the sensor and yet maintain a high level of performance. This model provides a calibrated millivolt output with superior output characteristics. In addition the sensor utilizes a silicon, micromachined, stress concentration enhanced structure to provide a very linear output to measured pressure. These calibrated and temperature compensated sensors give an accurate and stable output over a wide temperature range. This series is intended for use with non-corrosive, non-ionic working fluids such as air, dry gases and the like. The PRIME GRADE is the highest accuracy version of the millivolt output pressure sensors. The output of the device is ratiometric to the supply voltage and operation from any D.C. supply voltage up to +7 V is acceptable. Physical Dimensions Applications Medical Instrumentation Environmental Controls HVAC No Pressure Port Single Pressure Port a 6296 San Ignacio, Suite E & F, San Jose, CA p f e all sensors Dual Pressure Port all sensors 01

2 Pressure Sensor Characteristics Ratings Environmental Specifications Supply Supply Voltage VS 16 Vdc Temperature Ranges Common-mode pressure 50 psig Compensated 0 to 70 C Lead Temperature (soldering 2-4 sec.) 250 C Operating Storage -25 to 85 C -40 to 125 C Humidity Limits 0 to 95% RH (non condensing) Standard Pressure Ranges No Prssure Port Single Pressure Port Dual Pressure Port Operating Pressure Proff Pressure 0.3 -G-PRIME-MINI GF-PRIME-MINI 0.3 -D-PRIME-MINI 3 10 INCH-G-PRIME-MINI 0-10 H2O 10 INCH-GF-PRIME-MINI 10 INCH-D-PRIME-MINI 5 1 -G-PRIME-MINI GF-PRIME-MINI 1 -D-PRIME-MINI G-PRIME-MINI GF-PRIME-MINI 5 -D-PRIME-MINI A-PRIME-MINI 0-15 A 15 -AF-PRIME-MINI 60 Performance Characteristics for 0.3 -G-PRIME-MINI ±0.3 ±250 uv 0.1 Performance Characteristics for 10 INCH-G-PRIME-MINI 10.0 H2O ±0.3 ±250 uv miniature prime grade pressure sensors

3 Performance Characteristics for 1 -G-PRIME-MINI Performance Characteristics for 5 -G-PRIME-MINI 59.4 Performance Characteristics for 15 -A-PRIME-MINI Operating Range, absolute pressure Specification Notes NOTE 1: ALL PARAMETERS ARE MEASURED AT 12.0 VOLT EXCITATION, FOR THE NOMINAL FULL SCALE PRESSURE AND ROOM TEMPERATURE UNLESS OTHERWISE SPECIFIED. PRESSURE MEASUREMENTS ARE WITH POSITIVE PRESSURE APPLIED TO PORT B. NOTE 2: SHIFT IS RELATIVE TO 25 C. NOTE 3: SHIFT IS WITHIN THE FIRST HOUR OF EXCITATION APPLIED TO THE DEVICE. NOTE 4: MEASURED AT ONE-HALF FULL SCALE RATED PRESSURE USING BEST STRAIGHT LINE CURVE FIT. NOTE 5: THE VOLTAGE ADDED TO THE OFFSET VOLTAGE AT FULL SCALE PRESSURE ±0.3 ± ±0.3 ±250 All Sensors reserves the right to make changes to any products herein. All Sensors does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others ±0.3 ±250 uv uv A uv a 6296 San Ignacio, Suite E & F, San Jose, CA p f e all sensors all sensors 03

4 Equivalent Circuit Input Resittance Output Resistance 5.0 k ohm 3.0 k ohm 04 miniature prime grade pressure sensors

5 miniature pressure sensors H-Grade Pressure Sensors Features General Description 0 to 0.3 to 0 to 100 Pressure Ranges % linearity...high accuracy version Temperature Compensated Calibrated Zero and Span The Miniature series pressure sensors are based upon a proprietary technology to reduce the size of the sensor and yet maintain a high level of performance. This model provides a calibrated millivolt output with superior output offset characteristics. Output offset errors due to change in temperature, stability to warm-up, stability to long time period, and position sensitivity are all significantly reduced when compared to conventional compensation methods. In addition the sensor utilizes a silicon, micromachined, stress concentration enhanced structure to provide a very linear output to measured pressure. These calibrated and temperature compensated sensors give an accurate and stable output over a wide temperature range. This series is intended for use with non-corrosive, non-ionic working fluids such as air, dry gases and the like. The H-GRADE is a high accuracy version of the millivolt output pressure sensors. The output of the device is ratiometric to the supply voltage and operation from any D.C. supply voltage up to +7 V is acceptable. Physical Dimensions Applications Medical Instrumentation Environmental Controls HVAC No Pressure Port Single Pressure Port a 6296 San Ignacio, Suite E & F, San Jose, CA p f e all sensors all sensors Dual Pressure Port 01

6 Pressure Sensor Characteristics Ratings Environmental Specifications Supply Supply Voltage VS 16 Vdc Temperature Ranges Common-mode pressure 50 psig Compensated 0 to (50)70 C Lead Temperature (soldering 2-4 sec.) 250 C Operating Storage -25 to 85 C -40 to 125 C Humidity Limits 0 to 95% RH (non condensing) Standard Pressure Ranges No Prssure Port Single Pressure Port Dual Pressure Port Operating Pressure Proff Pressure 4 INCH-G-HGRADE-MINI 0-4 H2O 4 INCH-GF-HGRADE-MINI 4 INCH-D-HGRADE-MINI G-HGRADE-MINI GF-HGRADE-MINI 0.3 -D-HGRADE-MINI 3 10 INCH-G-HGRADE-MINI 0-10 H2O 10 INCH-GF-HGRADE-MINI 10 INCH-D-HGRADE-MINI 5 1 -G-HGRADE-MINI GF-HGRADE-MINI 1 -D-HGRADE-MINI G-HGRADE-MINI GF-HGRADE-MINI 5 -D-HGRADE-MINI A-HGRADE-MINI 0-15 A 15 -AF-HGRADE-MINI 60 Performance Characteristics for 4 INCH-G-HGRADE-MINI 4.0 H2O Offset Temperature Shift (0 C-50 C), note 2 Full Scale Shift (0 C-50 C), note 2 Performance Characteristics for 10 INCH-G-HGRADE-MINI 10.0 H2O miniature h-grade pressure sensors

7 Performance Characteristics for 0.3 -G-HGRADE-MINI Performance Characteristics for 1 -G-HGRADE-MINI Parameter, Operating Range, note 1 differential pressure Operating Output Span, Range, note differential 5 pressure Output Offset Voltage Span, zero 5 differential pressure Offset Voltage zero Shift differential (0 C-70 C), pressure note 2 Offset Linearity, Temperature hysteresis Shift error, (0 C-70 C), note 4 note 2 Linearity, Full Scale hysteresis Shift (0 C-70 C), error, note 42 Specification Notes Performance Characteristics for 5 -G-HGRADE-MINI NOTE 1: ALL PARAMETERS ARE MEASURED AT 12.0 VOLT EXCITATION, FOR THE NOMINAL FULL SCALE PRESSURE AND ROOM TEMPERATURE UNLESS OTHERWISE SPECIFIED. PRESSURE MEASUREMENTS ARE WITH POSITIVE PRESSURE APPLIED TO PORT B. NOTE 2: SHIFT IS RELATIVE TO 25 C. NOTE 3: SHIFT IS WITHIN THE FIRST HOUR OF EXCITATION APPLIED TO THE DEVICE. NOTE 4: MEASURED AT ONE-HALF FULL SCALE RATED PRESSURE USING BEST STRAIGHT LINE CURVE FIT. NOTE 5: THE VOLTAGE ADDED TO THE OFFSET VOLTAGE AT FULL SCALE PRESSURE All Sensors reserves the right to make changes to any products herein. All Sensors does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others a 6296 San Ignacio, Suite E & F, San Jose, CA p f e all sensors all sensors 03

8 Performance Characteristics for 15 -A-HGRADE-MINI Operating Range, absolute pressure 15.0 A Specification Notes NOTE 1: ALL PARAMETERS ARE MEASURED AT 12.0 VOLT EXCITATION, FOR THE NOMINAL FULL SCALE PRESSURE AND ROOM TEMPERATURE UNLESS OTHERWISE SPECIFIED. PRESSURE MEASUREMENTS ARE WITH POSITIVE PRESSURE APPLIED TO PORT B. NOTE 2: SHIFT IS RELATIVE TO 25 C. NOTE 3: SHIFT IS WITHIN THE FIRST HOUR OF EXCITATION APPLIED TO THE DEVICE. NOTE 4: MEASURED AT ONE-HALF FULL SCALE RATED PRESSURE USING BEST STRAIGHT LINE CURVE FIT. NOTE 5: THE VOLTAGE ADDED TO THE OFFSET VOLTAGE AT FULL SCALE PRESSURE. All Sensors reserves the right to make changes to any products herein. All Sensors does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. Equivalent Circuit Input Resittance Output Resistance 5.0 k ohm 3.0 k ohm 04 miniature h-grade pressure sensors

9 miniature pressure sensors C-Grade Pressure Sensors Features General Description 0 to 0.3 to 0 to 100 Pressure Ranges 1 % linearity version Temperature Compensated Calibrated Zero and Span The Miniature series pressure sensors are based upon a proprietary technology to reduce the size of the sensor and yet maintain a high level of performance. This model provides a calibrated millivolt output with superior output offset characteristics. Output offset errors due to change in temperature, stability to warm-up, stability to long time period, and position sensitivity are all significantly reduced when compared to conventional compensation methods. In addition the sensor utilizes a silicon, micromachined, stress concentration enhanced structure to provide a very linear output to measured pressure. These calibrated and temperature compensated sensors give an accurate and stable output over a wide temperature range. This series is intended for use with non-corrosive, non-ionic working fluids such as air, dry gases and the like. The C-GRADE is a lowest cost version of the millivolt output pressure sensors. The output of the device is ratiometric to the supply voltage and operation from any D.C. supply voltage up to +7 V is acceptable. Physical Dimensions Applications Medical Instrumentation Environmental Controls HVAC No Pressure Port Single Pressure Port a 6296 San Ignacio, Suite E & F, San Jose, CA p f e all sensors Dual Pressure Port all sensors 01

10 Pressure Sensor Characteristics Ratings Environmental Specifications Supply Supply Voltage VS 16 Vdc Temperature Ranges Common-mode pressure 50 psig Compensated 0 to 70 C Lead Temperature (soldering 2-4 sec.) 250 C Operating Storage -25 to 85 C -40 to 125 C Humidity Limits 0 to 95% RH (non condensing) Standard Pressure Ranges No Prssure Port Single Pressure Port Dual Pressure Port Operating Pressure Proff Pressure 4 INCH-G-CGRADE-MINI 0-4 H2O 4 INCH-GF-CGRADE-MINI 4 INCH-D-CGRADE-MINI G-CGRADE-MINI 0 - O GF-CGRADE-MINI 0.3 -D-CGRADE-MINI 3 10 INCH-G-CGRADE-MINI 0-10 H2O 10 INCH-GF-CGRADE-MINI 10 INCH-D-CGRADE-MINI 5 1 -G-CGRADE-MINI GF-CGRADE-MINI 1 -D-CGRADE-MINI G-CGRADE-MINI GF-CGRADE-MINI 5 -D-CGRADE-MINI A-CGRADE-MINI 0-15 A 15 -AF-CGRADE-MINI 60 Performance Characteristics for 4 INCH-G-CGRADE-MINI 4.0 H2O Offset Temperature Shift (0 C-50 C), note 2.5 Full Scale Shift (0 C-50 C), note 2 ±2 Performance Characteristics for 10 INCH-G-CGRADE-MINI 10.0 H2O ±2 02 miniature c-grade pressure sensors

11 Performance Characteristics for 0.3 -G-CGRADE-MINI Performance Characteristics for 1 -G-CGRADE-MINI Specification Notes Performance Characteristics for 5 -G-CGRADE-MINI NOTE 1: ALL PARAMETERS ARE MEASURED AT 12.0 VOLT EXCITATION, FOR THE NOMINAL FULL SCALE PRESSURE AND ROOM TEMPERATURE UNLESS OTHERWISE SPECIFIED. PRESSURE MEASUREMENTS ARE WITH POSITIVE PRESSURE APPLIED TO PORT B. NOTE 2: SHIFT IS RELATIVE TO 25 C. NOTE 3: SHIFT IS WITHIN THE FIRST HOUR OF EXCITATION APPLIED TO THE DEVICE. NOTE 4: MEASURED AT ONE-HALF FULL SCALE RATED PRESSURE USING BEST STRAIGHT LINE CURVE FIT. NOTE 5: THE VOLTAGE ADDED TO THE OFFSET VOLTAGE AT FULL SCALE PRESSURE ±2 All Sensors reserves the right to make changes to any products herein. All Sensors does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others ±2 63 ±2 a 6296 San Ignacio, Suite E & F, San Jose, CA p f e all sensors all sensors 03

12 Performance Characteristics for 15 -A-CGRADE-MINI Operating Range, absolute pressure 15.0 A Offset zero absolute pressure ±2 Specification Notes NOTE 1: ALL PARAMETERS ARE MEASURED AT 12.0 VOLT EXCITATION, FOR THE NOMINAL FULL SCALE PRESSURE AND ROOM TEMPERATURE UNLESS OTHERWISE SPECIFIED. PRESSURE MEASUREMENTS ARE WITH POSITIVE PRESSURE APPLIED TO PORT B. NOTE 2: SHIFT IS RELATIVE TO 25 C. NOTE 3: SHIFT IS WITHIN THE FIRST HOUR OF EXCITATION APPLIED TO THE DEVICE. NOTE 4: MEASURED AT ONE-HALF FULL SCALE RATED PRESSURE USING BEST STRAIGHT LINE CURVE FIT. NOTE 5: THE VOLTAGE ADDED TO THE OFFSET VOLTAGE AT FULL SCALE PRESSURE. All Sensors reserves the right to make changes to any products herein. All Sensors does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. Equivalent Circuit Input Resittance Output Resistance 5.0 k ohm 3.0 k ohm 04 miniature c-grade pressure sensors

BLC Series Low Pressure Compact Sensors

BLC Series Low Pressure Compact Sensors n Fi Applications Original On File General Description The BLC Series Basic Low Pressure Compact Sensor is based on CoBeam 2 TM Technology. The device provides a high output signal at a low operating voltage