Bird Technologies The RF Experts Celebrating over 72 years of product leadership in RF Measurement and Management

Transcription

1 Bird Technologies The RF Experts Celebrating over 72 years of product leadership in RF Measurement and Management 2014 Bird Technologies

2 Company Overview Bird Technologies BEC TX RX X-COM DeltaNode Test & Measurement Equipment & Components RF Infrastructure, SOS Capture, Record, Storage, Playback and Analysis of RF Signals Fiber Optic DAS for PS/Cellular/ WIFI Platforms

3 Bird Electronic Brand Products

4 X-COM Systems Brand Products

5 DeltaNode Products

6 Services Product Service Centers (Calibration & Repair) Applications Engineering Education (GES) Retuning and Reconfiguration Site Optimization (SOS) Site Optimization Services (SOS), offers you experienced field service engineers and technicians to help support your on-site needs. Our engineers have resolved some of the most challenging interference problems in the world and our technicians are capable of tuning filters, duplexers, combiners, multicouplers, and signal boosters. Services include: Interference Mitigation, Site Monitoring, System Optimization, Retuning, and Reconfiguration, Electromagnetic Exposure (EME) Site Surveys, Intermod analysis and other engineering services

7 Bird Products for Semiconductor Processing Applications 2013 Bird Technologies Group

8 4421 and Power Sensors

9 4421 Multifunction Power Meter The 4421 is a precision RF Power Meter used in semiconductor processing applications.

10 4020 Series Power Sensors Bird' s 4020 Series Power Sensors offer costeffective accuracy for maintaining critical RF systems. Only four models are required to cover the frequency range of 1.8 MHz to 1 GHz and power range from 300mW - 10kW.

11 4020 Series Power Sensors Item Power Input/Rating 300 mw to 1 kw (1.2 kw max.) 300 mw to 1 kw (1.2 kw max.) 3 W to 10 kw (12 kw max.) 3 W to 10 kw (12 kw max.) Frequency Range MHz MHz MHz khz Insertion Loss (db) <0.05 Accuracy ± 3% of reading

12 4027A Series Power Sensors Model Power Range Frequency 4027A12M 300 mw - 1 kw MHz 4027A250K 3 W - 10 kw khz 4027A400K 3 W - 10 kw khz 4027A800K 3 W - 10 kw khz 4027A2M 3 W - 10 kw MHz 4027A4M 3 W - 10 kw 3-5 MHz 4027A10M 3 W - 10 kw MHz 4027A25M 3 W - 9 kw MHz 4027A35M 3 W kw MHz 4027A60M 3 W - 6 kw MHz 4027A100M 3 W - 5 kw MHz 4027A150M 3.75 W - 4 kw MHz

13 4027F Series Power Sensors Model Frequency Range RF Power Range Cal Freq. [MHz], Typ * Cal Power, Typical 4027F2M MHz kw 1.8, 2.0, kw 4027F10M MHz kw 4027F60M MHz kw 12.0, 12.5, 13.56, 14.0, , 58.5, 60.0, 61.5, kw 1.7 kw

14 4028A Series Power Sensors Model Freq. Range RF Power 4028A250K khz kw 4028A400K khz kw 4028A2M MHz kw 4028A3M MHz kw 4028A4M MHz kw 4028A10M MHz kw 4028A25M MHz kw 4028B3M MHz kw 4028B10M MHz kw 4028C10M MHz 500W - 50kW

15 Calibration Carts

16 Calibration Carts The Bird Calibration Cart is designed for immediate, effortless use. It has three primary components. The 4421 Multifunction Power Meter displays RF power. The 4020, 4027A, and 4027F Series Power Sensors are highly accurate sensors that measure RF power without requiring calibration or external couplers or attenuators. Bird Loads are low reflection 50 Ohm terminations that can dissipate 1 kw to 10 kw max., depending on the model. These components are installed on a cart for easy transportation and connected so that the only setup required is connecting AC and RF power. The cart is suitable for use in a clean room environment and is equipped with four swivel casters for maximum maneuverability.

17 SCC8 Calibration Carts The SCC8 Calibration Cart is designed for immediate, effortless use. It has three primary components. The 4421 Multifunction Power Meter displays RF power Series Power Sensors are highly accurate sensors that measure RF power without requiring calibration or external couplers or attenuators. Bird Moduloads are low reflection 50 Ohm terminations that can dissipate 25kW. These components are installed on a cart for easy transportation and connected so that the only setup required is connecting AC and RF power. The cart is suitable for use in a clean room environment and is equipped with four swivel casters for maximum maneuverability.

18 MSCC7 Multi-Sensor Calibration Carts The MSCC7 Series Calibration Cart is designed for immediate, effortless use. It has three primary components. The 4421 Multifunction Power Meter displays RF power. The 4020, 4027A and 4027F Series Power Sensors are highly accurate sensors that measure RF power without requiring calibration or external couplers or attenuators. Bird Loads are low reflection 50 Ohm terminations that can dissipate up to 10 kw max., depending on the model. These components are installed on a cart for easy transportation and connected so that the only setup required is connecting AC and RF power. The cart is suitable for use in a clean room environment and is equipped with four swivel casters for maximum maneuverability.

19 The Bird Diagnostic System (BDS) and Bird VIP system vs. Conventional VI Technology for Semiconductor Manufacturing 2013 Bird Technologies Group

20 BDS/VIP Receiver Technology Capture up to five (5) fundamental frequencies Select frequencies from the industry standard list Enter a custom generator frequency Select up to fifteen (15) harmonic components for each fundamental Harmonic components are individually selected for each fundamental Select up to six (6) intermodulation frequencies for each fundamental Various data capture method options are available 8-bit or 12-bit data capture mode selection Specify a data capture rate Data averaging options are available using an intelligent moving average window Measurement data can be de-embedded to improve the accuracy of measurement results.

21 RF Sensor Technology Sensor captures voltage and current waveforms of multiple frequencies up to 500 MHz Aids in developing repeatable process runs, troubleshooting components and identifying process drifts, for existing and new high frequency tools Sensor head retains memory of calibration constants Sensors are fully calibrated using accurate Impedance Standards Sensor can be used with any BDS receiver IR detector embedded in sensor Temperature compensation to assure accuracy

22 Interchangeability of BDS Components Each piece of the BDS system (receiver, cable, and probe) is characterized / calibrated as a separate component and the calibration is stored within the device. Each component has a memory device with the calibration constants stored. All parts are tested individually against a production standard to make sure that the calibration is within specifications. The components of the BDS system can be replaced individually and the system will still perform within the stated specifications of the system.

23 How Can the Final Waveform be Revealed? Conventional VI Systems: Limited power spectrum of the signal Lose relative phase relationships of all the harmonics Final waveform is lost! Bird s BDS and VIP Systems : Translates signal and all harmonics simultaneously Maintains correct harmonic relationship to the fundamental frequency The RF waveform is preserved!

24 Harmonics Play an Important Role in Process Repeatability Peak power is different when harmonics are included Wave shape as function of time is altered

25 BDS vs. VIP Comparisons BDS System Bird VIP System Frequency Range 1-500MHz MHz Frequency Resolution 100Hz 100Hz Frequency Accuracy +/-1kHz +/-1kHz Harmonics 15 Max, up to 500MHz 10 Max, up to 150MHz Number of Fundamentals(Fo) Max of 5 simultaneously Max of 3 simultaneously RF Power, Max 10kW or max for connector 10kW or max for connector RF Connector Custom or QC Custom or QC Receiver Operating +20 to +40 C +20 to +40 C Receiver Storage -20 to +80 C -20 to +80 C Cable Operating 0 to +100C 0 to +100C Cable Storage -20 to +100 C -20 to +100 C Sensor Operating/Storage Refer to Sensor Spec Refer to Sensor Spec Calibration Level: Components calibrated separately Components calibrated as a system Interchangeable Components? Yes No Arc Detection Capable? Yes No Pulse Mode Capable? Yes No Humidity, Max 85% non-condensing 85% non-condensing Air Pressure, min 745 mbar 745 mbar Operating Power Sensor: Provide by receiver Receiver: Vdc, 1.4-3A Sensor: Provide by receiver Receiver: Vdc, 1.4-3A

26 BDS vs. VIP Comparisons BDS System VIP System PARAMETER VOLTAGE CURRENT PHASE VOLTAGE CURRENT PHASE Measurement Vrms Arms -180 to Vrms Arms -180 to 180 Resolution IEEE 754 Single Precision Floating Point IEEE 754 Single Precision Floating Point Uncertainty: 0.3-1MHz NA NA NA for F, ± 0.5V or 1% of reading whichever is greater for Fn, ±1 V or 4% of reading, whichever is greater (95% confidence interval) for F,± 0.05 A or 1% of reading whichever is greater for Fn, ±0.1 A or 4% of reading, whichever is greater (95% confidence interval) Absolute Angle: for F > 10 V, 1 A: ±1 for F < 10 V, 1 A: ±4 for Fn > 10 V, 1 A: ±2 for Fn <10 V, 1 A: ±6 (95% confidence interval) Uncertainty: 1 100MHz for F, ± 0.2V or 2% of reading whichever is greater for Fn, ±0.4 V or 4% of reading, whichever is greater (95% confidence interval) for F,± 0.02 A or 2% of reading whichever is greater for Fn, ±0.04 A or 4% of reading, whichever is greater (95% confidence interval) Absolute Angle: for F > 10 V, 1 A: ±1 for F < 10 V, 1 A: ±4 for Fn > 10 V, 1 A: ±2 for Fn <10 V, 1 A: ±6 (95% confidence interval) for F, ± 0.1V or 1% of reading whichever is greater for Fn, ±0.2 V or 2% of reading, whichever is greater (95% confidence interval) for F,± 0.01 A or 1% of reading whichever is greater for Fn, ±0.02A or 2% of reading, whichever is greater (95% confidence interval) Absolute Angle: for F > 10 V, 1 A: ±1 for F < 10 V, 1 A: ±4 for Fn > 10 V, 1 A: ±2 for Fn <10 V, 1 A: ±6 (95% confidence interval) Uncertainty: MHz NA NA NA Uncertainty: MHz for F, ± 0.3 V or 3% of reading whichever is greater for Fn, ± 0.6 V or 6% of reading, whichever is greater (95% confidence interval) for F, ± 0.03 A or 3% of reading whichever is greater for Fn, ±0.06 A or 6% of reading, whichever is greater (95% confidence interval) Absolute Angle: for F > 10 V, 1 A: ±2 for F < 10 V, 1 A: ±8 for Fn > 10 V, 1 A: ±4 for Fn < 10 V, 1 A: ±12 (95% confidence interval) for F, ± 0.2V or 2% of reading whichever is greater for Fn, ±0.4 V or 4% of reading, whichever is greater (95% confidence interval) for F,± 0.02 A or 2% of reading whichever is greater for Fn, ±0.04 A or 4% of reading, whichever is greater (95% confidence interval) Absolute Angle: for F > 10 V, 1 A: ±1 for F < 10 V, 1 A: ±4 for Fn > 10 V, 1 A: ±2 for Fn <10 V, 1 A: ±6 (95% confidence interval) NA NA NA

27 BDS vs. VIP Comparisons VIP BDS Frequency Range 307kHz - 150MHz 1MHz -500 MHz Fundamental Frequencies 3 5 Harmonics for each Fundamental Accuracy 1%* 2% Waveform Reconstruction Yes Yes Pulse Mode No Yes Arc Detection No Yes Spectral Sweep No Yes Interchangeable Components No Yes * Calibration as a system (no interchangeability) allows for better accuracy

28 New BDS Cal Cart

29 Specs PARAMETER SPECIFICATION Frequency Range: 1 MHz MHz Calibrated Frequencies: 2 MHz, MHz, MHz, MHz, 60 MHz, 100 MHz Frequency Resolution: 100 Hz Frequency Accuracy: ± 1 khz Number of fundamentals (F0): Maximum of 5 simultaneously, selected by the User Update Rates: 60 Hz typical for 1 fundamental (Note 1) Load Options: or Impedance: 50 Ohm Power Levels: 10 kw

30 Cable Testing