Reliable measurements for any material

Transcription

1 Reliable measurements for any material ZW-7000/5000 Series Confocal Fiber Displacement Sensor Measure shiny objects with an inclination of ±25 ±0.5 μm or less linearity for various materials Sampling rate as fast as 20 μs

2 Confocal Fiber Displacement Sensor Beyond laser displacement sensors A non-contact optical probe, better than a laser White light confocal principle Measures while in motion Detects spectral differences (colors) using a white LED * Conceptual illustration 2 2 White light confocal displacement sensor Traditional laser displacement sensor Errors when measuring between different materials Error when measuring a slope Impossible to measure narrow gaps Error when measuring a rough surface Error when measuring a rough surface Impossible to measure a curved surface Profile obtained using different objects made of various materials and shapes while in motion * This graph represents a result of measurement under specific conditions. Before final installation, test the sensor required for the application to validate the desired measurements are obtained.

3 Measures from any mounting position (vertical or horizontal, facing up/down or sideways) Three new advantages to meet the needs of innovative manufacturing Accurate measurement Accurate measurements of inclined or curved surfaces Reliable measurements of different materials Stable measurements of smooth or rough surfaces Side-by-side mounting Small size allows for multiple sensors to be mounted side-by-side Sensor s light weight greatly reduces settling time when in motion No need to change the sensor head direction even if the part being tested changes direction Rapid set-up No need to change the sensor when changing material No laser safety measures required No need for EMC or thermal countermeasures; sensor head has no electronic components DLL files provide quick integration into machine HMI P.4 P.6 P.8 Lineup expansion ZW-5000 SEMI/FPD industry Minimum spot diameter of 10 μm or less Fulfills the demand of the SEMI/FPD industry for more precise profile reproduction in detecting the position of minute wafer street width, the alignment of laminating thin liquid crystal films. ZW-7000 ZW-5000 Installation into a large machine Longer fiber cables 10, 20 and 30 m cables now available. Up to 30 m 3

4 Confocal Fiber Displacement Sensor Measure accurately For all quality inspections, from components to finished products Strict quality control, demands for appearance inspection and production speed are constantly increasing. To meet these demands, stable quality inspection measurements during movement, without compromising manufacturing speed, is required. Harnessing the benefits of the white light confocal principle, the ZW-7000/5000 Series can provide stable measurements for different materials (glass, metal, plastic, etc.) and shapes (round, flat, uneven and more). Profile measurement Small laser spot for accurate measurement When measuring a profile variation with a traditional laser displacement sensor, reflection from multiple surfaces could result in an imprecise edge detection profile. The ZW-5000, with a minimum spot diameter of 9 μm, eliminates multiple surface reflections. The result is a sharp profile, which leads to improved position detection. ZW-5000 Traditional laser displacement sensor White light confocal displacement sensor Measurement value Laser beam Large spot diameter Measurement value ZW-5000 Small spot diameter Minimum spot diameter 9 μm 4

5 P.13 Angle characteristic Actual value Measurement value ZW-7000 ZW-5000 White light confocal displacement sensor Displacement (μm) Omron's, unique white light confocal displacement sensor provides higher resolution measurements of angled, curved and shiny surfaces than traditional laser displacement sensors. Traditional laser displacement sensor Displacement (μm) Inclined or curved surfaces Actual value Measurement value Angle characteristic ± Angle ( ) 5 15 for shiny surfaces *1 25 Angle ( ) (ZW-7010) Traditional laser displacement sensor Different materials ZW-7000 ZW-5000 Mirror SUS White ceramic Error (μm) Error (μm) With traditional laser displacement sensors, retuning is required when the sensor head direction is changed to accommodate a different material. Our white light confocal displacement sensor can measure different materials while moving, without needing to retune the sensor, change the sensor head or adjust the installation direction. White light confocal displacement sensor Mirror, installation for regular reflection SUS, installation for regular reflection White ceramic, installation for diffuse reflection μm or less ±0.5 linearity for different materials *1-0.3 Height (mm) Height (mm) (ZW-7010) Our white light confocal displacement sensors provide accurate flatness measurement by tracing an object. Measurement is not affected by excessive reflection, sensor head direction or the grain of the material, which are difficult to track with a traditional laser displacement sensor. Installation direction 90 Installation direction 0 Actual value ZW Travel distance (μm) Stable measurements of rough surfaces 90 Displacement (μm) 0 30 Deviation from actual value Micron accuracy White light confocal displacement sensor Installation direction 90 Installation direction 0 Actual value Travel distance (μm) (ZW-7020) High-speed sampling for accurate shape measurements Using traditional laser sensors, the measurement accuracy for a moving target can be achieved by increasing the averaging times. ZW-7000 acquires a sharp profile by a single sampling as fast as 20 μs without averaging. Traditional laser displacement sensor (Averaged) White light confocal displacement sensor (Not averaged) Object profile (Black line) ZW-7000 Minimum sampling period Height Height P Displacement (μm) Traditional laser displacement sensor Flatness of rough surfaces *2 20 μs Measurement value (Red line) Travel distance Travel distance *1. Typical value of the ZW-S7010 sensor head *2. Objects with machining marks or grain patterns Note. All measurement graphs represent typical examples. Measurement may be affected by the shape or material of an object. Before final installation, preliminary testing must be done to validate expected performance. 5

6 Confocal Fiber Displacement Sensor Measure more product Increase manufacturing speed Robots and stages are used for assembly and inspection to increase productivity. Manufacturers require measuring devices that are simple to integrate into small-sized machines and easy to maneuver at high speeds. Laser displacement sensor mm 30 mm Approx. 180 g 30 mm 30 mm Increase throughput: Multiple sensor heads Space restrictions prevent side-by-side installation of many traditional laser displacement sensors. Compact ZW-7000/5000 sensor heads can be installed side-by-side to obtain multiple measurements simultaneously, reducing measurement time. Traditional laser displacement sensor Restrictions on installation limit improvement in cycle time White light confocal displacement sensor Side-by-side installation reduces measurement time Measurement cycle time reduced by 60 % or more* * Performance comparison with previous Omron products Reduce settling time When power cylinders are used, the decreased weight of the sensor head reduces oscillation, resulting in faster measurements. Move Stop White light confocal displacement sensor Degree of oscillation Traditional laser displacement sensor Time 6

7 Save time and money: no need to rotate the sensor A traditional laser displacement sensor measures the height of an object based on the position of the spot on the receiver. The machine requires an extra step to rotate the sensor according to the object shape or movement direction. Our white light confocal displacement sensor can measure from the same installation position while moving in any direction. Traditional laser displacement sensor Flexible fiber cable The controller connects to the sensor head through a 3 mm diameter flexible fiber cable. An extension fiber cable can be used to extend the distance to up to 7 m, and the cable can be installed in a cable carrier. White light confocal displacement sensor R Measurement cycle time reduced by up to 25 %* Omron's bending test condition 3,000,000 bends to a 20 mm bending radius * Calculated when an object with an irregular surface was measured in both vertical and horizontal directions P.13 Direction-free Extension fiber cable lineup expansion A new extension fiber cable, up to 30 m long, can be used to extend the fiber distance up to 32 m, supporting flexible wiring within a large machine. P.19 Type/standard price cable Standard fiber cable 0.3/2 m Extension fiber cable Up to 30 m Sensor head Connecting adapter Controller 7

8 Confocal Fiber Displacement Sensor Rapid set-up Easy to integrate The ZW-7000/5000 uses the white light confocal principle to significantly reduce set-up time. Easy device selection There is no need to select different sensor heads for different objects, which saves time when purchasing and designing. This reduces set-up work and inventory costs. Traditional laser displacement sensor White light confocal displacement sensor Sensor head for fine surfaces Sensor head for mirror surfaces Sensor head for coarse surfaces Same sensor head for different objects * Common to NPN/PNP type controller Glass SUS Mirror Substrate White ceramic No thermal design or EMC measures required Electronic or magnetic noise will not affect measurement values. Thermal fluctuations due to the sensor's operation are also minimized. Traditional laser displacement sensor White light confocal displacement sensor Traditional laser displacement sensor White light confocal displacement sensor Electronic parts Fiber cable No electronic parts Change in temperature after 1.5 hours of operation +2 Change in temperature after 1.5 hours of operation +0 Electromagnetic noise is emitted from the sensor and cable No noise is emitted Measurement value Measurement values are affected by ambient noise Measurement value Measurement remains stable without being affected by ambient noise Ambient noise Time Measures must be taken against noise generated by electronic parts Ambient noise Time No measures against noise are required Reduced work for installation and tuning of sensor heads The white light confocal principle allows stable measurements without fine tuning. Traditional laser displacement sensor Fine angle adjustment required White light confocal displacement sensor Easy installation without fine tuning 8

9 Multiple sensor set-up Sysmac Studio allows you to program all connected devices via EtherCAT. Copying program data to integrate several sensors, or programming activity between sensors, is quick and easy. Sysmac Studio Sensor 1 Increased efficiency by copying settings Sensor 2 Efficient setting of measurement conditions for many sensors DLL Quick integration into machine HMI DLL files easily display ZW-7000/5000 setting screens and measurement results. No laser safety measures required A white LED light source eliminates the need to implement laser safety measures and additional training. Provided DLL * Settings and measurement conditions reference Acquiring measurement values Acquiring light received waveforms Logging control When a laser displacement sensor is used, a shield around the machine for safety is required and workers must be trained for safe operation. The use of eye protection is required * If you register as a member after purchasing the product, you can download DLL free of charge. Refer to the member registration sheet that is enclosed with the product for details. Further benefits of white light confocal No Discrepancy in the Measurement Point Traditional laser displacement sensor White light confocal displacement sensor With traditional laser displacement sensors, the measurement position and spot size vary with the height. This means there are times when the position cannot be measured with high resolution due to warping and inclination. With the white light confocal displacement sensor used in the ZW-7000/5000 Series, the measurement point remains the same at any position in the measuring range so that precise measurements can always be made. Measurement position varies with the height No discrepancy in the measurement position Measurement in narrow area and by the wall When the traditional laser displacement sensor measures the inside of a narrow tube or the height of a small depression, the wall often obstructs the reflected light, and the orientation of the sensor and workpiece must be adjusted many times. The ZW-7000/5000 Series using the white light confocal displacement sensor can measure the points in narrow spaces or small objects, without changing its installation orientation, because the emitted light and reflected light are positioned along the same axis. Failure to measure due to obstruction of the reflected light by the wall. The reflected light is not obstructed by the wall. 9

10 Confocal Fiber Displacement Sensor Technical explanation New technologies Key components have been improved to achieve high speed, precision measurements and machine compatibility. High-speed Precision Compatibility Photoconductivity Patent Pending Precise Core Array Fiber Specially designed fiber transmits LED light efficiently for precise measurement. High-speed Precision Compatibility Small size Compact Design Solves installation issues caused by larger laser displacement sensor heads. Low aberration Advanced OCFL Module High-speed Precision Compatibility The OCFL *1 module s multi-lens structure reduces aberrations, allowing for high-resolution measurements without compromising its compact design. *1. OCFL : Omron Chromatic Focus Lens High-speed Precision Compatibility 25 times faster High-Speed Processor Increase processing speed for precision measurements, from LED emission through sensing and processing, to data logging. * Conceptual illustration 10

11 High-speed Precision Compatibility High-contrast display White 11-Segment Display The high-contrast, white, 11-segment display improves visibility and usability. High-speed Precision Compatibility Exceptional brightness Ultra-Power White LED The new LED provides rapid responses and measurements of low-reflective objects. Additionally, extended LED life reduces downtime. * Conceptual illustration High-speed Precision Compatibility Excellent resolution Advanced Spectrograph The Spectrograph 7000 converts color wavelength into distance, offering increased waveform resolution and enables precise measurements. High-speed Precision Compatibility Upgraded memory Mega Logging Log, process and store up to 2,000,000 values. * Measurement values, emitted light amounts, or received light amounts can be logged. Enhanced sensitivity High-Speed CMOS High-speed Precision Compatibility The CMOS is optimized to measure any object precisely and reliably. * Conceptual illustration 11

12 Confocal Fiber Displacement Sensor Technical explanation Stable, accurate measurement while moving The new white light confocal principle provides stable measurements, even in applications where robots and stages move rapidly. Our unique design allows continuous measurement of diffused, curved, inclined, translucent and mirrored surfaces, including narrow gaps, while the head or the object is in motion. Pinhole White LED New white light confocal principle The emitted white light is focused at different points for each color (wavelength). This principle measures height based on the color of the returned light. This coaxial illumination provides precise measurements of the returned light wavelengths from the object through the same optical path. Spectroscope Receiver Received reflected light Pinhole Received light waveform White light Stable measurements of rough surfaces Only the light reflected from the measurement point enters the pinhole, even if excessive light is reflected from the object during movement. Laser triangulation principle In typical laser triangulation, multiple light reflections may be received simultaneously. Pinhole Received light waveform White lightt OCFL module Multiple reflections on rough surface The waveform is not distorted, which means only the color of the measurement point is received. P.5 Flatness of rough surfaces Laser diode Lens Far Receiver Lens Near Light received Reflected from light measurement point Height detected by sensor 12

13 Angle characteristic The light traveling through the optical path is not widely diffused at the workpiece. The wavelength (position) can be obtained by receiving a portion of the light, even if the reflected light amount is reduced. This ensures accurate height measurements. Laser triangulation principle Curved surface Curved surface Measures by receiving a portion of the light Received light waveform No light received Emitted light Reflected light Stably receives light P.5 Sloped or curved surfaces Because the emitter is fixed at an angle relative to the workpiece, the ability to measure a steep angle of inclination is lost. Inclined surface Measures by receiving a portion of the light Received light waveform Inclined surface Emitted light Reflected light Unstable Stably receives light Even if the light can be received, the waveform may be distorted due to lens aberration. Rotation independent The direction of movement does not affect workpiece measurement results, even in narrow gaps. Laser triangulation principle Depending on the installation direction, the sensor cannot measure the object because the reflected light is blocked. P.7 No need to rotate a sensor 13

14 Confocal Fiber Displacement Sensor Applications Synchronize motion and measurement The ZW-7000/5000 series links motion and measurement to provide high-precision results. Moving measurement linked to a stage Linking encoder positions to sensor measurement values allows accurate shape measurement without being affected by conveyor acceleration/deceleration. Linking glass height and XY coordinates EtherCAT cycle Encoder input (XY) Sensor measurement (Z) EtherCAT cyclecle Encoder input (XY) Sensor measurement (Z) Timing chart Previous EtherCAT communications Acquires the immediately preceding values Different timing between XY and Z New EtherCAT communication Refreshed every cycle Same timing Differences between XY coordinates (position) and Z coordinate (height) occur due to fluctuations of EtherCAT cycles cles of 125 ns to several μs The XY coordinates (position) and Z coordinate (height) can be acquired at the same time by refreshing every cycle. Multiple sensor synchronization For thickness or flatness measurements, heights are measured simultaneously. Thickness measurements of sheets for lithium batteries Sensor 1 Sensor 2 Sync signal via EtherCAT A Sensor 1 measurement Sensor 2 measurement EtherCAT cycle Sensor 1 measurement Sensor 2 measurement Previous synchronous measurements Refreshed once Synchronization signals must be input periodically due to accumulated timing differences. Different timing New synchronous measurements Refreshed every cycle Same timing No differences occur because timing is refreshed every cycle. Precise triggering When the external trigger point occurs, the timing task is consistent for precise positional measurement. Height measurements of small electronic parts ON Trigger OFF Sensor measurement Previous trigger measurement Different measurement positions Positional repeatability is compromised. New trigger measurements ON Trigger OFF Sensor measurement Always same The same position can always be measured at regular intervals after trigger inputs. 14

15 Encoder System configurations Synchronous measurements using EtherCAT Encoder NJ/NX Machine Automation Controller Sysmac Studio Function Blocks Omron offers Function Blocks to make programming for system link applications easier*. Synchronous measurements using triggers instead of EtherCAT are possible. Function Block Examples Thickness Encoder Encoder Counter Level Difference Peak/ Valley Warp Flatness Average Distortion NJ/NX Machine Automation Controller The Sysmac Library is a collection of software functional components that can be used in programs for the NJ/NX Machine Automation Controllers. The Sysmac Library is available to download from the Omron website omron247.com. Install the Sysmac Library for use in Sysmac Studio. downloads Trigger input sensor * This functionality is available on the firmware version 2.10 or later. The latest firmware for the controller is available free of charge. Refer to the registration sheet that is enclosed with the product for details. 15

16 Confocal Fiber Displacement Sensor Applications High-speed/high-accuracy SEMI/FPD Smartphone (component process) Abrasion profile Rolled glass curvature Casing warpage ZW-5000 Case flatness Wafer height Chip gap width and profile ZW-5000 Cover glass flatness Camera module grooves Chip mounter Z-axis adjust ZW-5000 Solder on substrate profile Battery sheet thickness Battery flatness Silicon profile ZW-5000 ZW-5000 Film lamination position LED potting shape Connector pin coplanarity 16

17 Smartphone (assembly process) Automotive parts Pharmaceuticals Assembled part heights Hole depth on metal Clutch profile Lens thickness Case width Motor core thickness Motor eccentricity Liquid level within small-diameter vessels Level difference between buttons and case Surface deflection of rotary parts Transmission part flatness Glass surface curvature Logo height difference Profile of sealing materials ECU board assembly inspection Relay operation inspection 17

18 Confocal Fiber Displacement Sensor ZW-7000/5000 Series Reliable measurements for any material and surface types Measuring shiny objects with an inclination of ±25 ±0.5 μm or less linearity for various materials Sampling rate as fast as 20 μs Small spot diameter of 10μm or less Note: Angle characteristic, linearity, sampling period and spot diameter given in the cover differ among models. Please ask OMRON sales representative for details. System Configuration EtherCAT connections Basic Configuration Controller ZW-7000 / 5000 Series Sensor Head S70 0/ S50 0 Other EtherCAT Slaves Calibration ROM (included with Sensor Head) EtherCAT Cable (RJ45/RJ45) EtherCAT Cable (RJ45/RJ45) EtherCAT Cable (Select the cable that matches the Slave's connector.) EtherCAT Cable (RJ45/RJ45) EtherCAT Master Setting Software Machine Automation Controller NJ/NX/NY series Ethernet *2 /USB Sysmac Studio Standard Edition SYSMAC-SE20 Analog, EtherNet/IP, Ethernet, RS-232C and Parallel connections Basic Configuration Controller ZW-7000 / 5000 Series Sensor Head S70 0/ S50 0 Calibration ROM (included with Sensor Head) Switching Hubs Analog, RS-232C and Parallel EtherNet/IP TM, Ethernet Control PLC Setting Software Sysmac Studio Measurement Sensor Edition SYSMAC-ME00 L * Obtain a commercially available Ethernet cable satisfying the following requirements: Category 5e or more, 30 m or less RJ45 connector (8-pin modular jack) For direct connection: Select cross cable. For connection through an industrial switching hub: Select straight cable. 18

19 Order Information ZW-7000 Sensor Head Appearance Measuring range Spot diameter Static resolution * Cable length Model 0 mm 9.5 mm 10 mm 10.5 mm Measuring range 10±0.5 mm 50 μm dia μm 2 m ZW-S7010 2M 0.3 m ZW-S M 0 mm 19 mm 20 mm 21 mm * Values when the controller ZW-7000T is used. Controller with EtherCAT Measuring range 20±1mm 0 mm 28 mm 30 mm 32 mm Measuring range 30±2mm Appearance Power supply Output type Model 70 μm dia μm 100 μm dia μm 2 m ZW-S7020 2M 0.3 m ZW-S M 2 m ZW-S7030 2M 0.3 m ZW-S M 24VDC NPN/PNP ZW-7000T Cable Appearance Item Cable length Model Extension Fiber Cable (from Sensor Head to Controller), (Fiber Adapter ZW-XFCM is included) 2 m ZW-XF7002R 5 m ZW-XF7005R 10 m ZW-XF7010R 20 m ZW-XF7020R 30 m ZW-XF7030R Fiber Adapter (used between Sensor Head prewired cable and Extension Fiber Cable) ZW-XFCM ZW-5000 Sensor Head Appearance Measuring range Spot diameter Static resolution * Cable length Model 0mm 9.5mm 10mm 10.5mm Measuring range 10±0.5 mm 9 μm dia μm 2 m ZW-S5010 2M 0.3 m ZW-S M 0mm 0mm 19mm 20mm 21mm * Values when the controller ZW-5000T is used. Controller with EtherCAT Measuring range 20±1mm 28mm 30mm 32mm Measuring range 30±2mm Appearance Power supply Output type Model 13 μm dia μm 18 μm dia μm 2 m ZW-S5020 2M 0.3 m ZW-S M 2 m ZW-S5030 2M 0.3 m ZW-S M 24VDC NPN/PNP ZW-5000 T Cable Appearance Item Cable length Model Extension Fiber Cable (from Sensor Head to Controller), (Fiber Adapter ZW-XFC2 is included) 2 m ZW-XF5002R 5 m ZW-XF5005R 10 m ZW-XF5010R 20 m ZW-XF5020R 30 m ZW-XF5030R Fiber Adapter (used between Sensor Head pre-wired cable and Extension Fiber Cable) - ZW-XFC2 19

20 ZW-7000/5000 Series Common cables Appearance Item Cable length Model Parallel caable for ZW-7000T/5000T 32-pole (included with Controller ZW-7000T/5000T) 2 m ZW-XCP2E RS-232C Cable for personal computer 2 m ZW-XRS2 RS-232C Cable for PLC/programmable terminal 2 m ZW-XPT2 Recommended EtherCAT Communications Cables Use Straight STP (shielded twisted-pair) cable of category 5 or higher with double shielding (braiding and aluminum foil tape) for EtherCAT. Cable with Connectors Item Appearance Recommended manufacturer Cable length(m) *1 Model Standard type 0.3 XS6W-6LSZH8SS30CM-Y Cable with Connectors on Both Ends 0.5 XS6W-6LSZH8SS50CM-Y (RJ45/RJ45) 1 XS6W-6LSZH8SS100CM-Y Wire Gauge and Number of Pairs: OMRON AWG26, 4-pair Cable 2 XS6W-6LSZH8SS200CM-Y Cable Sheath material: LSZH *2 3 XS6W-6LSZH8SS300CM-Y Cable color: Yellow *3 5 XS6W-6LSZH8SS500CM-Y Rugged type Cable with Connectors on Both Ends (RJ45/RJ45) Wire Gauge and Number of Pairs: AWG22, 2-pair Cable Rugged type Cable with Connectors on Both Ends (M12 Straight/RJ45) Wire Gauge and Number of Pairs: AWG22, 2-pair Cable Rugged type Cable with Connectors on Both Ends (M12 Right-angle/RJ45) Wire Gauge and Number of Pairs: AWG22, 2-pair Cable OMRON OMRON OMRON Note: For details, refer to Cat.No.G019. Standard type cables length 0.2, 0.3, 0.5, 1, 1.5, 2, 3, 5, 7.5, 10, 15 and 20m are available. Rugged type cables length 0.3, 0.5, 1, 2, 3, 5, 10 and 15m are available. The lineup features Low Smoke Zero Halogen cables for in-cabinet use and PUR cables for out-of-cabinet use. Cables colors are available in blue, yellow, or Green Cables / Connectors Wire Gauge and Number of Pairs: AWG24, 4-pair Cable Cables RJ45 Connectors Panduit Corporation MPS588-C * We recommend to use above cable and connector together. Wire Gauge and Number of Pairs: AWG22, 2-pair Cable Cables 0.3 XS5W-T421-AMD-K 0.5 XS5W-T421-BMD-K 1 XS5W-T421-CMD-K 2 XS5W-T421-DMD-K 5 XS5W-T421-GMD-K 10 XS5W-T421-JMD-K 0.3 XS5W-T421-AMC-K 0.5 XS5W-T421-BMC-K 1 XS5W-T421-CMC-K 2 XS5W-T421-DMC-K 5 XS5W-T421-GMC-K 10 XS5W-T421-JMC-K 0.3 XS5W-T422-AMC-K 0.5 XS5W-T422-BMC-K 1 XS5W-T422-CMC-K 2 XS5W-T422-DMC-K 5 XS5W-T422-GMC-K 10 XS5W-T422-JMC-K Item Appearance Recommended manufacturer Model Hitachi Metals, Ltd. NETSTAR-C5E SAB 0.5 4P * Kuramo Electric Co. KETH-SB * SWCC Showa Cable Systems Co. FAE-5004 * Item Appearance Recommended manufacturer Model Kuramo Electric Co. KETH-PSB-OMR * JMACS Japan Co.,Ltd. PNET/B * RJ45 Assembly Connector OMRON XS6G-T421-1 * Note: Connect both ends of cable shielded wires to the connector hoods. We recommend to use above cable and connector together. 20

21 ZW-7000/5000 Series Industrial switching hubs for Ethernet Appearance Number of ports Failure detection Current consumption Model 3 None 0.22A W4S1-03B Note: Industrial switching hubs are cannot be used for EtherCAT. EtherCAT junction slaves 5 None Supported 0.22A W4S1-05B W4S1-05C Appearance Number of ports Power supply voltage Current consumption Model Note: to 28.8 VDC (24 VDC -15 to 20%) Please do not connect EtherCAT junction slave with OMRON position control unit, Model CJ1W-NC 81/ EtherCAT junction slaves cannot be used for EtherNet/IP TM and Ethernet. Automation Software Sysmac Studio Please purchase a DVD and required number of licenses the first time you purchase the Sysmac Studio. DVDs and licenses are available individually. Each model of licenses does not include DVD. Multiple licenses are available for the Sysmac Studio (3, 10, 30, or 50 licenses). ZW-series is supported by Sysmac Studio version 1.18 or higher. Fiber Cleaner Place orders in units of boxes (contacting 10 units). Contacts Japan: NTT Advanced Technology Corporation TEL: China: GUANGZHOU LI CHENG OPTOELECTRONIC CO.,LTD. TEL: Hong Kong: ComStar Communications Ltd. TEL: Taiwan: Global Science Instruments Co., Ltd. TEL: Ext. 33 India: Aishwarya Telecom Ltd. TEL: Singapore: Masstron Pte Ltd TEL: (65) Malaysia: Masstron Communication Solutions Sdn Bhd TEL: (603) Thailand: Masstron (Thailand) Co.,Ltd TEL: (66-2) /6 Vietnam: Masstron Pte Ltd (Singapore) TEL: (65) Germany: AMS Technologies AG TEL: +49 (0) France: AMS Technologies S.A.R.L. TEL: +33 (0) Italy: AMS Technologies S.r.l. TEL: Spain: AMS Technologies S.L. TEL: Netherlands: AMS Technologies AG (Germany) TEL: +49 (0) USA: AFL Telecommunications TEL: +1 (800) A GX-JC A GX-JC06 Item Specifications Model Standards Number of licenses Media Sysmac Studio Standard Edition Ver.1 *2 Sysmac Studio Measurement Sensor Edition Ver.1. The Sysmac Studio is the software that provides an integrated environment for setting, programming, debugging and maintenance of machine automation controllers including the NJ/NX-series CPU Units, NY-series Industrial PC, EtherCat Slave, and the HMI. Sysmac Studio runs on the following OS. Windows 7 (32-bit/64-bit version)/windows 8 (32-bit/64-bit version)/windows 8.1 (32-bit/64- bit version)/windows 10(32-bit/64-bit version) This software provides functions of the Measurement Sensor Edition. Refer to Sysmac Catalog (P072) for details such as supported models and functions. Sysmac Studio Measurement Sensor Edition is a limited license that provides selected functions required for ZW-series Displacement Sensor settings. Because this product is a license only, you need the Sysmac Standard Edition DVD media to install it. (Media only) DVD SYSMAC-SE200D 1 license*1 SYSMAC-SE201L 1 license SYSMAC-ME001L 3 license SYSMAC-ME003L Applicable Model Item Recommended manufacturer Model Contacts ZW-7000 ZW-5000 Fiber Connector Cleaner *1 OMRON ZW-XCL Yes Yes OMRON NEOCLEAN-M NTT Advanced ATC-NE-M1 Yes No *2 OPTIPOP R1 Technology Corporation ATC-RE-01 No Yes (Sensor Head only) 21

22 ZW-7000/5000 Series Specifications Sensor Head Specifications Item ZW-S7010 ZW-S7020 ZW-S7030 ZW-S5010 ZW-S5020 ZW-S5030 Sensor controller ZW-7000T ZW-5000T Measurement center distance 10 mm 20 mm 30 mm 10 mm 20 mm 30 mm Measuring range ±0.5 mm *1 ±1 mm*1 ±2 mm*1 ±0.5 mm ±1 mm ±2 mm Static resolution * μm Linearity *3 ±0.45 μm ±0.9 μm ±2.0 μm ±0.45 μm ±0.9 μm ±2.0 μm Spot diameter (Total measurent range) *4 50 μm dia. 70 μm dia. 100 μm dia. 9 μm dia. 13 μm dia. 18 μm dia. Measurement cycle *5 20 μs to 400 μs 80 μs to 1600 μs Operating ambient illumination Ambient temperature range Ambient humidity range Degree of protection Vibration resistance (destructive) Shock resistance (destructive) Temperature characteristic *6 LED Safety Material Fiber cable length Fiber cable minimum bend radius Insulation resistance (Calibration ROM) Dielectric strength (Calibration ROM) Weight Accessories Illumination on object surface max.30000: (incandescent light) Operation: 0 to 50 C, Storage: -15 to 60 C (No freezing and condensation) Operation/storage: 35 or 85%RH (No condensation) IP40 (IEC60529) 10 to 150 Hz (half amplitude 0.35 mm), 80 mins in each of X/Y/Z directions 150 m/s 2, 6 direction, 3 times each (up/down, left/right, forward/backward) 0.6 μm/ C 1.1 μm/ C 1.8 μm/ C 0.6 μm/ C 1.1 μm/ C 1.8 μm/ C Risk Group 3 (IEC62471) Chassis: aluminum die cast Fiber cable sheath: PVC Calibration ROM: PC 0.3 m, 2 m (flex-resistant cable) 20 mm Between case and all terminals: 20 MΩ (by 250 VDC) Between case and all terminals: 1000 VAC, 50/60 Hz, 1 min Fiber cable length 0.3m Approx. 170g Fiber cable length 2m Approx. 180g Calibration ROM fixing screws (M2) Fiber protection cap Strap 2 Instruction Manual Precautions Calibration ROM fixing screws (M2) Fiber protection cap Strap 1 Instruction Manual Precautions The measurement range is higher 28 μs than measurement cycle. Capacity value when OMRON standard mirror surface target is measured at the measurement center distance as the average of 16,384 times The value when the controller ZW-7000T/5000T is connected Material setting for the OMRON standard mirror surface target: Error from an ideal straight line when measuring on mirror surface. Capacity value defined by 1/e 2 (13.5%) of the peak optical intensity of the measurement wavelength. When an extension fiber cable of 5 m or longer is connected, the setting rage of the measurement cycle (exposure time) changes. Capacity value of temperature characteristic at the measurement center distance when fastened with an aluminum jig between the Sensor Head and the target and the Sensor Head and the Sensor Controller are set in the same temperature environment. 22

23 ZW-7000/5000 Series Controller Item Specifications ZW-7000T ZW-5000T Input/output type NPN/PNP dual type Number of connected sensor heads 1 Sensor head compatibility ZW-S70 ZW-S50 Light source for measurement White LED LED Safety Risk Group 3 (IEC62471) Segment Main display 11-segment white display, 6 digits Display Sub-display 11-segment green display, 6 digits LED display Status indicators HIGH (orange), PASS (green), LOW (orange), STABILITY (green), ZERO (green), ENABLE (green), THRESHOLD-H (orange), THRESHOLD-L (orange), RUN (green) EtherCAT indicator ECAT RUN (green), L/A IN (Link/Activity IN) (green), L/A OUT (Link/Activity OUT) (green), ECAT ERR (red) Ethernet 100BASE-TX/10BASE-T, Non-procedure (TCP/UDP), EtherNet/IP EtherCAT EtherCAT exclusive protocol 100BASE-TX RS-232C Max. 115,200 bps Analog output Analog voltage output (OUT V) -10 V to +10 V, output impedance: 100 Ω terminal block Analog current output (OUT A) 4 ma to 20 ma, max. load resistance: 300 Ω Judgment output (HIGH/PASS/LOW) Busy output (BUSY) Alarm output (ALARM) Transistor output system Enable output (ENABLE) Output voltage: 21.6 to 30 VDC Sync flag output (SYNFLG) Load current: 50 ma or less Trigger busy output (TRIGBUSY) Residual voltage when turning ON: 2 V or less Logging state output (LOGSTAT) Leakage voltage when turning OFF: 0.1 ma or less Logging error output (LOGERR) Stability output (STABILITY) External I/F Task state output (TASKSTAT) LIGHT OFF input (LIGHT OFF) Main functions Rating Environmental resistance Grounding Material Weight Accessories 32-pole expansion connector Zero reset input (ZERO) Timing input (TIMING) Reset input (RESET) Sync input (SYNC) Trigger input (TRIG) Logging input (LOGGING) Bank Currently selected bank output (BANK_OUT 1 to 3) Bank Selection input (BANK_SEL 1 to 3) DC input system Input voltage: 24 VDC ± 10% (21.6 to 26.4 VDC) Input current: 7 ma Type. (24 VDC) ON voltage/on current: 19 V/3 ma or less ON voltage/on current: 5 V/1 ma or less Transistor output system Output voltage: 21.6 to 30 VDC Load current: 50 ma or less Residual voltage when turning ON: 2 V or less Leakage voltage when turning OFF: 0.1 ma or less DC input system Input voltage: 24 VDC ± 10% (21.6 to 26.4 VDC) Input current: 7 ma Type. (24 VDC) ON voltage/on current: 19 V/3 ma or more OFF voltage/off current: 5 V/1 ma or less Automatic/Fixed Exposure time Measuring cycle *1 20 μs to 400 μs 80 μs to 1600 μs Material setting Standard/Mirror/Rough surfaces Measurement item Height/Thickness of transparent object/calculation Filtering Median/Average/Differentiation/High pass/low pass/band pass Output Scaling/Different holds/zero reset/logging for a measured value Measured value/threshold value/analog output voltage or current value/ Display Judgment result/resolution/light power/internal logging condition /Peak amount of received light Number of configurable banks Task process System Power supply voltage Current consumption Insulation resistance Dielectric strength Degree of protection Vibration resistance (destructive) Shock resistance (destructive) Ambient temperature range Ambient humidity range Max. 8 banks Multi-task (up to 4 tasks per bank) Save/Initialization/Display measured information/communication settings/ Sensor head calibration/key-lock/zero reset memory/timing input 21.6 to 26.4 VDC (including ripple) 800 ma max. Across all lead wires and FG terminal: 20 MΩ (by 250 VDC) Between all lead wires and FG terminal: 500 VAC, 50/60 Hz, 1 minute IP20 (IEC60529) 10 to 55 Hz (half amplitude 0.35 mm), 50 mins in each of X/Y/Z directions 150 m/s 2, 6 direction, 3 times each (up/down, left/right, forward/backward) Operation: 0 to 40 C, Storage: -15 to +60 C (No freezing and condensation) Operation/storage: 35 to 85%RH (No condensation) D-type grounding (grounding resistance of 100 Ω or less) Note: For conventional Class D grounding Chassis: PC Approx. 900g (main unit only), Approx. 150 g (Parallel cable) Parallel cable (ZW-XCP2E) 10 Fiber cleaners (ZW-XCL) Instruction Manual Member registration sheet Note: The Export Trade Control Order compatible Controller (ZW-7000T/5000T) is available. When using this Controller, the minimum resolution is 0.25 μm regardless of the connected Sensor Head and setting conditions. When an extension fiber cable of 5 m or longer is connected, the setting rage of the measurement cycle (exposure time) changes. Parallel cable (ZW-XCP2E) 10 Fiber cleaners (ZW-XCL) Fiber adapter cap, Strap 1 Instruction Manual, Member registration sheet 23

24 ZW-7000/5000 Series EtherCAT Communications Specifications Item Communications standard Physical layer Connectors Communications media Communications distance Process data Mailbox (CoE) Distributed clock Automation Software Sysmac Studio IEC61158 Type12 100BASE-TX(IEEE802.3) RJ45 2 ECAT IN: EtherCAT input ECAT OUT: EtherCAT output Note about Sysmac Studio compatible operating systems: The required system and hard disk capacity differs according to the system environment. Separate logging memory is required to use the file logging function. Describes System Requirements and notes of Sysmac Studio Measurement Sensor Edition. For detail of System Requirements and notes of Sysmac Studio Measurement Sensor Edition, refer to Sysmac Studio Version 1 Operation Manual. For information on how to connect a personal computer with the controller or other hardware and information on required cables, refer to manuals for each hardware. Version Information ZW-7000/5000 Series and Sysmac Studio Use the latest version of Sysmac Studio Standard Edition/Measurement Sensor Edition. Specification Category 5 or higher (cable with double, aluminum tape and braided shielding) is recommended. Distance between nodes: 100 m max. Variable PDO mapping Emergency messages, SDO requests, SDO responses, and SDO information Synchronization in DC mode. LED display L/A IN (Link/Activity IN) 1, AL/A OUT (Link/Activity OUT) 1, AECAT RUN 1, AECAT ERR 1 Item Operating environment *3 Operating system (OS) *1 CPU Windows 7 (32-bit/64-bit version)/windows 8 (32-bit/64-bit version)/windows 8.1 (32-bit/64-bit version)/ Windows 10(32-bit/64-bit version) Windows computers with Intel Celeron processor 540 (1.8 GHz) or faster CPU. Intel Core i5 M520 processor (2.4 GHz) or equivalent or faster recommended. Main memory 2 GB min. 4 GB min. recommended Hard disk Minimum 4.6 GB of Hard disk space is required to install. *2 Display Disk drive XGA , 16 million colors. WXGA min. recommended DVD-ROM drive Communications ports USB port corresponded to USB 2.0, or Ethernet port *4 Supported languages Japanese, English, German, French, Italian, Spanish, simplified Chinese, traditional Chinese, Korean ZW Series Version of Controller Corresponding version of Sysmac Studio Standard Edition/Measurement Sensor Edition ZW-7000 Ver.2.03 Supported by version 1.15 or higher. ZW-5000 Ver.2.10 Supported by version 1.18 or higher. 24

25 External Dimensions Sensor Head ZW-S7010 M/S7020 M/S7030 M ZW-7000/5000 Series (Unit: mm) Type W.D. M ZW-S ZW-S ZW-S (STANDARD SURFACE) (STANDARD SURFACE) 4-M dia. (MOUNTING HOLES) STANDARD SURFACE STANDARD SURFACE 46.7± ± ± ±0.1 MOUNTING SCREW HOLES (7.7) Length L 0.3 m (300) 2 m (2000) M (*1) M (*1) CENTER LIGHTENING & RECEIVING AXIS Measurement end Measurement center Measurement end FIBER CABLE (3.0 dia.) FIBER CONNECTOR (40) L (*2) (12.6) W.D. (*1) STANDARD SURFACE ZW-S5010 M/S5020 M/S5030 M Type W.D. M ZW-S ZW-S ZW-S (STANDARD SURFACE) (STANDARD SURFACE) dia. (MOUNTING HOLES) STANDARD SURFACE STANDARD SURFACE 4-M3 46.7± ± ± ±0.1 MOUNTING SCREW HOLES Length L 0.3 m (300) 2 m (2000) M (*1) M (*1) CENTER LIGHTENING & RECEIVING AXIS Measurement end Measurement center Measurement end W.D. (*1) STANDARD SURFACE LABEL CAUTION FIBER CABLE (3.0 dia.) FIBER CONNECTOR (40) L (*2) (50) (40) (62) (10dia.) 25

26 ZW-7000/5000 Series Controller ZW-7000T SCREW HOLE FOR CONNECTING ROM M2 DEPTH 2.0 MAX. SCREW FOR CONNECTING FRAME GROUND TERMINAL M4 LENGTH6 SCREW HOLE FOR CONNECTING FRAME GROUND TERMINAL M4 DEPTH 7.0 MAX SLIDER FOR MOUNTING DIN-RAIL dia ±0.1 MOUNTING SCREW HOLES 4-M4 DEPTH6.0MAX ±0.1 MOUNTING SCREW HOLES ZW-5000T 140 SCREW HOLE FOR CONNECTING ROM M2x0.4 DEPTH 2.0MAX SCREW FOR CONNECTING FRAME GROUND TERMINL M4x0.7 LENGTH6.0 SCREW HOLE FOR CONNECTING FRAME GROUND TERMINL M4x0.7 DEPTH 7.0MAX SLIDER FOR MOUNTING DIN-RAIL dia ±0.1 MOUNTING SCREW HOLES 4-M4x0.7 DEPTH6.0MAX ±0.1 MOUNTING SCREW HOLES 26

27 ZW-7000/5000 Series Extension Fiber Cable ZW-XF7002R/XF7005R/XF7010R/XF7020R/XF7030R dia dia dia. (12.6) (7.7) (25) (40) (30) (40) (25) (25.4) (60) (7.7) (12.6) dia. The following table lists cable lengths per models. Type Specification L ZW-XF7002R 2 m /0 ZW-XF7005R 5 m /0 ZW-XF7010R 10 m /0 ZW-XF7020R 20 m /0 ZW-XF7030R 30 m /0 ZW-XF5002R/XF5005R/XF5010R/XF5020R/XF5030R The following table lists cable lengths per models. Type Specification L ZW-XF5002R 2 m /0 ZW-XF5005R 5 m /0 ZW-XF5010R 10 m /0 ZW-XF5020R 20 m /0 ZW-XF5030R 30 m /0 Related Manuals Man.No. Model number Manual Z362 ZW-7000 /5000 Displacement Sensor ZW-7000/5000 User s Manual Z363 ZW-7000 /5000 Displacement Sensor ZW-7000/5000 User s Manual for Communications Settings W504 SYSMAC-SE2 Sysmac Studio Version 1 Operation Manual 27

28 OMRON AUTOMATION AMERICAS HEADQUARTERS Chicago, IL USA OMRON CANADA, INC. HEAD OFFICE Toronto, ON, Canada OMRON ELECTRONICS DE MEXICO HEAD OFFICE México DF OMRON ELECTRONICS DE MEXICO SALES OFFICE Apodaca, N.L OMRON ARGENTINA SALES OFFICE Cono Sur OMRON CHILE SALES OFFICE Santiago OTHER OMRON LATIN AMERICA SALES OMRON ELETRÔNICA DO BRASIL LTDA HEAD OFFICE São Paulo, SP, Brasil OMRON EUROPE B.V. Wegalaan 67-69, NL-2132 JD, Hoofddorp, The Netherlands. +31 (0) Authorized Distributor: Automation Control Systems Machine Automation Controllers (MAC) Programmable Controllers (PLC) Operator interfaces (HMI) Distributed I/O Software Drives & Motion Controls Servo & AC Drives Motion Controllers & Encoders Temperature & Process Controllers Single and Multi-loop Controllers Sensors & Vision Proximity Sensors Photoelectric Sensors Fiber-Optic Sensors Amplified Photomicrosensors Measurement Sensors Ultrasonic Sensors Vision Sensors Industrial Components RFID/Code Readers Relays Pushbuttons & Indicators Limit and Basic Switches Timers Counters Metering Devices Power Supplies Safety Laser Scanners Safety Mats Edges and Bumpers Programmable Safety Controllers Light Curtains Safety Relays Safety Interlock Switches The angle characteristic and linearity, described in the front cover, are the typical values of the ZW-S7010 Sensor Head. EtherCAT is registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany. EtherNet/IP is a trademark of ODVA. Sysmac is a trademark or registered trademark of OMRON Corporation in Japan and other countries for OMRON factory automation products. Windows is a registered trademark of Microsoft Corporation in the USA and other countries. Other company names and product names mentioned in this document are the trademarks or registered trademarks of their respective companies. Microsoft product screen shot(s) are reprinted with permission from Microsoft Corporation. Q250-E1-02 Note: Specifications are subject to change Omron. All Rights Reserved. Printed in U.S.A. Printed on recycled paper.