SEMATECH Symposium Japan September 15, 2010 Accelerating Manufacturing Productivity ISMI Industry Productivity Driver Scott Kramer VP Manufacturing Technology SEMATECH Copyright 2010 SEMATECH, Inc. SEMATECH, and the SEMATECH logo are registered servicemarks of SEMATECH, Inc. International SEMATECH Manufacturing Initiative, ISMI, Advanced Materials Research Center and AMRC are servicemarks of SEMATECH, Inc. All other servicemarks and trademarks are the property of their respective owners.
ISMI - Focus on semiconductor manufacturing productivity The productivity challenge How to determine, achieve, and maintain world class fab productivity How to increase productivity today and into the future The cost reduction challenge How to continuously reduce costs in today s fabs How to manage ever-increasing capital, manufacturing, and R&D costs The sustainability challenge How to reduce our environmental footprint Good for the environment, good for business 2
Manufacturing solutions to improve productivity and reduce cost Benchmarking and shared learning forums for continuous productivity improvement of existing factories and equipment Industry standards and guidelines for manufacturing excellence in next generation factories and equipment Environment, safety, and health technology for resource conservation and manufacturing sustainability Development and evaluation of applications for advanced metrology technology Realization of a cost-effective 450 mm transition SECS/GEM Port Control Interface A Port Data Councils and Forums Continuous Improvement Manufacturing Capabilities ESH Technology Metrology Technology 450 mm Transition 3
ISMI members 4
ISMI focus areas Mature Fabs Manufacturing Capabilities Program ESH Technology Center Metrology 450mm Transition Five operations councils Seven business Councils Fab productivity workshops Equipment productivity workshops (150mm, 200mm and 300mm) Alternate source spare parts Factory productivity improvement Factory cost analysis Enhanced equipment quality assurance Equipment performance improvement ESH global Strategies ESH resource Conservation ESH technology Environmental Research center (ERC) ESH advanced technology assessments Defect Metrology Lithography Metrology Films Metrology 450mm silicon readiness 450mm test wafer generation 450mm equipment demonstration 450mm ESH challenges 450mm factory readiness / ITB Manufacturing Excellence Installed based equipment forums 5
Mature Fabs 6
ISMI councils Manufacturing Methods Council Facilities Council Yield Council Operations Councils Wafer Probe Council Test Council Assembly - Package Council Critical Materials Council Reliability Council Quality Council Business Councils Statistics Council Failure Analysis (FA) Council Semiconductor Logistics Forum Equipment Procurement Council 7
ISMI councils Benchmarking: know where you stand Identify best-in-class Share best practices Communicate requirements to suppliers Percent 20 10 3.4 4.3 5.2 6.5 6.7 Example: Facilities cost survey Allocated facilities spending as a percent of total fab operations spending 7 7.9 9.4 9.6 9.9 11.3 11.5 11.6 11.6 11.7 11.7 12.3 13 13 14 15.5 16 16.4 17.2 17.7 18.2 20.1 21 24.1 0 Member Fabs Surveyed 8
ISMI Equipment Productivity Forums A series of workshops - equipment suppliers, component suppliers, and fab equipment owners - collaborate to improve the productivity of installed base equipment 2010 Equipment Productivity Forums: Thermal (RTP and furnace) March 2010 Ion Implant April 2010 CVD (single wafer) June 2010 Dry Etch July 2010 Litho (exposure) Sept 2010 Wet Process Sept 2010 Metrology Oct 2010 PVD Oct 2010 CMP Nov 2010 Typical Equipment Productivity Forum agenda 9
ISMI Mature Fabs roadmap Current Fab Manufacturing Methods Operations cost reduction Equipment throughput Maintenance practices Facilities operations Quality Reliability Supply chain management Probe and test development Fab, probe and final test Yield Probe card Materials Logistics Supplier relations Statistics New Add new topic spaces for the mature fabs market: Manufacturing cost benchmarking Manufacturing Execution Systems (MES) and AEC/APC for mature fabs Automated Material Handling (AMHS) Broader OEM focus for equipment productivity improvements Non-Product Wafer (NPW) and engineering lot handling R&D management and manufacturability of new technologies Equipment alarms and message management 10
ESH Technology Center 11
ISMI - Focus on semiconductor manufacturing productivity The productivity challenge How to determine, achieve, and maintain world class fab productivity How to increase productivity today and into the future The cost reduction challenge How to continuously reduce costs in today s fabs How to manage ever-increasing capital, manufacturing, and R&D costs The sustainability challenge How to reduce our environmental footprint Good for the environment, good for business 12
ISMI ESH Technology Center Project areas ESH global strategies Understand impacts of current and emerging global ESH regulations Assist our industrial membership with response to global regulatory initiatives ESH resource conservation and manufacturing sustainability Reduce manufacturing environmental footprint Influence suppliers to reduce resources (energy, chemicals, water) ESH technology and assessments Emerging technologies assessments, e.g., EUV, TSV, nano-particles Greenhouse gas emissions University R&D on SC manufacturing sustainability, e.g., nano-particle exposure/toxicity 13
ISMI ESH Technology Center How we work Information meetings Technical projects Benchmarking and surveys Collaboration among IC makers Collaboration among IC makers and suppliers Develop guidelines and specifications University research ISMI ESH Technology Center Technical project presentations, workshop, and working group meetings Technical projects as requested by member companies Detailed surveys as requested by member companies Collaboration focused on technical projects Collaboration among IC makers, and equipment and materials suppliers on technical projects Guidelines, state of technology reports Industry guidance of University research for semiconductor sustainability 14
ISMI ESH Technology Center Component improvements 15
ISMI ESH Technology Center Fab-specific green building initiatives Green Fab Working Group established to apply green building principles to high tech manufacturing Fab-specific LEED workshops presented and online training developed Promotes adoption of fab-specific credits into the LEED rating system LEED Application guide for high tech facilities developed ISMI Member network currently includes 13 LEED projects, many others planned Texas Instruments RFAB, LEED Gold Certified 16
450 mm Transition 17
Wafer size the great cost equalizer 200mm 300mm 450mm ~1992 2000 >2012 History shows that increasing wafer surface area by ~2.25X yields a 30% cost reduction and enables the inexpensively part of Moore s Law 18
ISMI 450 mm program mission and organization ISMI s 450 mm mission statement Enable a cost-effective 450 mm transition through coordination and development of infrastructure, guidance, and industry readiness ISMI 450 mm organization 450 mm transition program Supplier engagement Factory integration readiness Test wafer operations Starting materials Vacuum platform development Equipment test methods and metrics 19
450 mm progress 2009 thru 2010 Wafer Inventory Process and Metrology Equipment Factory Integration Standards and Guidelines Jul-2009 Single crystal wafers available for development 1 st 450 mm equipment ordered Multiple carriers, loadports and EFEMS in testing. Mech. Wfr standard passed Jul-2010 ~440 wafers loaned to 25 suppliers 450mm Particle inspection, wafer edge inspection, wet cleaning, lot sorter, and ellipsometer equipment installed and operational Experiments started for thermal oxidation and oxide deposition/etch. 450 mm EHS Guidelines Defined 450 mm Factory Integration is reasonably mature ISMI ITB is nearing completion AMHS pilot lines exist, and are under evaluation FOUP and Loadport standards completed Developmental wafer Standard completed 20
ISMI s unique value proposition Members determine programs and deliverables Industry wide benchmarking Critical mass of industry participants Provides a legal safe haven for competitive benchmarking Tried and true methods and procedures Facilitate shared learning Group discussions produce new and best known methods Learn from another company's ingenuity Share business process methodologies and approaches Secure member website for 24/7 IP access Peer networking Create structured interactions for value creation Industry experts Key industry supply base 21
SEMATECH/ISMI model for participation SEMATECH membership Members participate in all programs ISMI membership International SEMATECH Manufacturing Initiative Members participate only in manufacturing programs Program membership Members participate in individual programs Membership open to chipmakers and equipment/material suppliers Project/council membership Members participate in individual projects or business councils Supplier participate by invitation in council and workshop sessions 22
Summary ISMI is an industry driver for productivity Cost reduction Productivity improvement Projects cover all facets of semiconductor manufacturing Many ways to participate join us! 23
Accelerating the next technology revolution Research Development Manufacturing 24