Three Laminar Profile Spherical Gratings for the Madison SGM Beamline. Technical Specification

Transcription

1 Three Laminar Profile Spherical Gratings for the Madison SGM Beamline Technical Specification Date: Copyright 2002, Canadian Light Source Inc. This document is the property of Canadian Light Source Inc. (CLS). No exploitation or transfer of any information contained herein is permitted in the absence of an agreement with CLS, and neither the document nor any such information may be released without the written consent of CLS. Canadian Light Source 107 North Road University of Saskatchewan Saskatoon, Saskatchewan Canada Signature Date Original on File Signed by: Author Reviewer #1 Reviewer #2 Approver I. Coulthard D. S. Lowe B. Yates E. Hallin

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3 REVISION HISTORY Revision Date Description Author A Original Draft I. Coulthard B Revisions Complete I. Coulthard Issued for use. I. Coulthard Three Laminar Profile Spherical Gratings for the Madison SGM Beamline Page iii

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5 TABLE OF CONTENTS 1. INTRODUCTION GRATING BLANK PARAMETERS REQUIREMENTS FOR 600 LINE / mm GRATING REQUIREMENTS FOR 1100 LINE / mm GRATING REQUIREMENTS FOR 1700 LINE / mm GRATING PERFORMANCE REQUIREMENTS SAFETY, ENVIRONMENTAL, AND RELIABILITY QUALITY ASSURANCE OTHER REQUIREMENTS REFERENCES Three Laminar Profile Spherical Gratings for the Madison SGM Beamline Page v

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7 1. INTRODUCTION 1.1 Purpose This document specifies the requirements for 3 laminar profile spherical gratings for the spherical grating monochromator (SGM) spectroscopy beamline that will be part of the Canadian Light Source (CLS) facility. 1.2 Scope The SGM beamline for the CLS requires high performance spherical gratings to satisfy the projected experimental needs of its users. This specification details the requirements for the design, fabrication, supply, and testing of the ruled gratings. This specification includes, but is not limited to: 3 laminar profile spherical gratings of 600,1100, and 1700 lines/mm functional and performance requirements delivery, and testing quality assurance and safety parameters of 4 flat grating blanks to be manufactured by McPherson Inc. and delivered to the proponent 1.3 Background The Canadian Light Source is a national facility under construction on the University of Saskatchewan campus in Saskatoon, Saskatchewan. This facility is a third generation synchrotron light source, which will produce a high intensity source of infrared, visible, ultraviolet, and x-ray radiation. Based upon the projected needs of the Canadian synchrotron community, it was determined that a high performance soft x-ray spherical grating monochromator beamline would be required to satisfy the needs of this community once the CLS becomes operational. The inherent power of a 3 rd generation synchrotron source required the fabrication of new internally cooled gratings Three Laminar Profile Spherical Gratings for the Madison SGM Beamline Page 1

8 2. GRATING BLANK PARAMETERS 2.1 There shall be four (4) flat grating blanks manufactured by McPherson Inc., 7A Stuart Road, Chelmsford, MA 01824, USA. All further parameters reference to Drawing 2A included in this specification. 2.2 The blanks shall be manufactured from a combination of Glidcop TM and copper. 2.3 The upper layer of Glidcop TM shall be brazed to the lower layer of copper. 2.4 The ends of each blank shall be supporting a single 1.33 inch Conflat TM flange water line connection. 2.5 Including water line connections, the dimension of the blanks shall be 207 x 42 x 40 mm (L x H x W). 2.6 Dimensions of the optical area of the grating blanks shall be 160 x 40 x 40 mm (L x H x W). 2.7 Tolerance for dimensions of the grating blanks shall be within standard tolerance quoted upon Drawing [1]. 2.8 The quoted height of the optical area of the substrate includes an extra mm of thickness as an extra allowance for machining of the optical figure. 2.9 The optical surface of the substrate shall be flat to 12.7 microns or less The proponent shall specify to the CLS in the bid, any post-manufacture procedures the proponent requires McPherson Inc. to perform on the grating blanks before shipment to the proponent The grating blanks shall be shipped to the successful proponent directly from McPherson Inc. The proponent shall inform CLS of any special shipping requirements for the grating blanks The proponent shall inspect and accept the McPherson blanks prior to any fabrication and confirm their acceptability in writing to the CLS The proponent shall return any unused blanks to the CLS Three Laminar Profile Spherical Gratings for the Madison SGM Beamline Page 2

9 3. REQUIREMENTS FOR 600 LINE / mm GRATING 3.1 The grating is being manufactured to operate in the photon energy range of ev. 3.2 The proponent shall machine the spherical optical figure into the flat grating substrate blanks. 3.3 The radius of curvature of the spherical optical figure shall be m within 0.5%. 3.4 RMS slope error on the entire optical surface prior to ruling shall be less than or equal to 0.2 arcsec. 3.5 RMS surface micro-roughness on the optical surface prior to ruling shall be less than or equal to 1.0 nanometer. 3.6 The spherical radius, RMS slope error and surface micro-roughness shall be measured and results sent to CLS for review and acceptance prior to ruling. The proponent shall describe in the bid statement, the measuring technique (s) to be used to verify these parameters 3.7 Ni shall be utilized as the reflective coating for this grating. The layer of Ni shall be sufficiently thick as to ensure that the grating interacts with the incoming photons as if the entire grating was Ni. 3.8 The nominal ruling density shall be 600 lines / mm to within 0.5% 3.9 The ruling density must be constant to within 0.01 lines / mm RMS along the length of the grating The ruling density on the grating surface shall be measured to determine actual ruling density and ruling density variation. These results shall be sent to the CLS for examination and acceptance before shipment of the final product. The proponent shall describe in the bid statement the measuring technique that shall be used to verify these parameters The ruling density shall be laminar in profile The grating shall be ruled to a groove depth of 18 nm with a land-to-groove width ratio of 25% Three Laminar Profile Spherical Gratings for the Madison SGM Beamline Page 3

10 4. REQUIREMENTS FOR 1100 LINE / mm GRATING 4.1 The grating is being manufactured to operate in the photon energy range of ev. 4.2 The proponent shall machine the spherical optical figure into the flat grating substrate blanks. 4.3 The radius of curvature of the spherical optical figure shall be m within 0.5%. 4.4 RMS slope error on the entire optical surface prior to ruling shall be less than or equal to 0.2 arcsec. 4.5 RMS surface micro-roughness on the optical surface prior to ruling shall be less than or equal to 1.0 nanometer. 4.6 The spherical radius, RMS slope error and surface micro-roughness shall be measured and results sent to CLS for review and acceptance prior to ruling. The proponent shall describe in the bid statement, the measuring technique (s) to be used to verify these parameters 4.7 Au shall be utilized as the reflective coating for this grating. The layer of Au shall be sufficiently thick as to ensure that the grating interacts with the incoming photons as if the entire grating was Au. 4.8 The nominal ruling density shall be 1100 lines / mm to within 0.5% 4.9 The ruling density must be constant to within 0.01 lines / mm RMS along the length of the grating The ruling density on the grating surface shall be measured to determine actual ruling density and ruling density variation. These results must be sent to the CLS for examination and acceptance before shipment of the final product. The proponent shall describe in the bid statement the measuring technique that shall be used to verify these parameters The ruling density shall be laminar in profile The grating shall be ruled to a groove depth of 9 nm with a land-to-groove width ratio of 30% Three Laminar Profile Spherical Gratings for the Madison SGM Beamline Page 4

11 5. REQUIREMENTS FOR 1700 LINE / mm GRATING 5.1 The grating is being manufactured to operate in the photon energy range of ev. 5.2 The proponent shall machine the spherical optical figure into the flat grating substrate blanks. 5.3 The radius of curvature of the spherical optical figure shall be m within 0.5%. 5.4 RMS slope error on the entire optical surface prior to ruling shall be less than or equal to 0.2 arcsec. 5.5 RMS surface micro-roughness on the optical surface prior to ruling shall be less than or equal to 1.0 nanometer. 5.6 The spherical radius, RMS slope error and surface micro-roughness shall be measured and results sent to CLS for review and acceptance prior to ruling. The proponent shall describe in the bid statement, the measuring technique (s) to be used to verify these parameters 5.7 Au shall be utilized as the reflective coating for this grating. The layer of Au shall be sufficiently thick as to ensure that the grating interacts with the incoming photons as if the entire grating was Au. 5.8 The nominal ruling density shall be 1700 lines / mm to within 0.5% 5.9 The ruling density must be constant to within 0.01 lines / mm RMS along the length of the grating The ruling density on the grating surface shall be measured to determine actual ruling density and ruling density variation. These results must be sent to the CLS for examination and acceptance before shipment of the final product. The proponent shall describe in the bid statement the measuring technique that shall be used to verify these parameters The ruling density shall be laminar in profile The grating shall be ruled to a groove depth of 6 nm with a land-to-groove width ratio of 38%. 6. PERFORMANCE REQUIREMENTS 6.1 The first order efficiency for all gratings shall be greater than or equal to 80 % of any theoretically calculated value in the operational energy range of each grating Three Laminar Profile Spherical Gratings for the Madison SGM Beamline Page 5

12 7. SAFETY, ENVIRONMENTAL, AND RELIABILITY 7.1 All handling of the gratings after final cleaning must be compliant with standard clean room procedures. 7.2 Talcum powder free clean room gloves must be used for handling of the gratings. 7.3 Oil, fingerprints, dust, and other contaminants must be kept off the gratings. 7.4 The gratings shall be used in an UHV environment (10-10 torr range) and must be compatible with this vacuum environment. 7.5 The proponent shall supply detailed documentation outline the proper handling and cleaning procedures for the gratings. 8. QUALITY ASSURANCE 8.1 The proponent shall maintain and apply a quality assurance program compliant with ISO-9001 for the design, ruling, and testing of the finished gratings. 9. OTHER REQUIREMENTS 9.1 Hermetically sealed packaging shall be used during shipping to protect the gratings from dust and other contamination. 9.2 The gratings shall be held securely in the shipping containers to prevent chafing that could damage the grating and / or generate contaminants. 9.3 The shipping containers shall be properly labelled in English to ensure proper care during shipment. 9.4 All documentation supplied to the CLS shall be in English. 9.5 Documentation supplied to the CLS shall be provided in hard copy in triplicate plus one electronic copy if available as per CLS document specifications [2]. 10. REFERENCES [1] McPherson Inc. Substrate, Cooled Grating, [2] D.S. Lowe. CLS Document Specification, Rev Dec Three Laminar Profile Spherical Gratings for the Madison SGM Beamline Page 6