Nanosurf Nanite. Automated AFM for Industry & Research.

Transcription

1 Nanosurf Nanite Automated AFM for Industry & Research

2 Multiple Measurements Automated Got work? Nanosurf has the solution! The Swiss-based innovator and manufacturer of the most compact and most easy-to-use SPMs on the market has applied its inventive designs to the challenge of multiple measurements. The result speaks for itself: The Nanite is a highly compact and robust atomic force microscope that was specifically designed with automated 3D surface inspections and serial measurements in mind. It is ready to take the workload off your shoulders. Its scripting capabilities and motorized X/Y/Z stages make it possible for you to prepare a series of routine measurements and leave the microscope to measure on its own, freeing your time and skills for other challenges. Intuitive AFM Easy Our industrial customers are deeply impressed when they experience the Nanite s potential and all the possibilities this automated AFM system opens up for them. The affordable and easy-to-use Nanite begs to be tested in your surface measurement application. Try it yourself and be surprised how effortlessly the Nanite system delivers the results you need, without the long learning curve you may anticipate for operating an AFM. Nanosurf has earned a world-wide reputation for producing easy-to-use Atomic Force Microscopes, and the brand new Nanite system is no exception. Probe exchange and AFM operation have never been this easy. High Tech for the Shop Floor Mountable The demands of modern industry to meet ever-tighter tolerances and to achieve international quality standards mean that precision counts in every production step. The Nanite scan head can easily be mounted on any large surface-modifying machine be in it multi-axial milling, turning, cutting, grinding, or polishing applications to monitor the results of the machine s operation, regardless of sample size. Nanosurf customers include companies in the watchmaking, imprinting, mechanical device manufacturing, and material processing industries. Let the best available surface measurement technology revolutionize your production, too! Industrial integration Small The unparalleled small footprint of the Nanite makes it the ideal AFM for integration into automated industrial environments. With a resolution below one nanometer, the Nanite is capable of detecting and visualizing even the smallest surface structures. Simple handling and a multitude of integration possibilities bring your Quality Control to a whole new level. Check your coatings for intended structures or irregularities alike, or use the additional measuring modes to detect features not visible in topography alone. Its ease-of-use and reproducibility make the Nanite the perfect QC tool for engineering R&D, biomaterials research, or semiconductor fabrication, just to name a few. Examples of the Nanite scan head mounted on different measurement stages: (left) custom industrial application, (right) standard workbench sample stage. Conclusion In a nutshell Dental ceramics, imaged with the Nanite B system in contact mode. Scan size 90 μm. Full color scale corresponds to 3 μm. Left: Topography image before polishing. Right: Topography image after polishing. The Nanite is your optimal and cost-effective AFM solution for inspection, measurement, and engineering challenges, with powerful features such as quick probe exchange, fully automated operation, and a minimal learning curve through Nanosurf s well known ease-of-use! 2

3 From Concept to Completion Nanite system with the large ATS C301 automated X/Y/Z Sample Stage Atomic Force Microscopy (AFM) is emerging as an essential tool in applied metrology. The high resolution and excellent metrological performance of Nanosurf s automated Nanite AFM system quickly made it the AFM of choice for industrial surface quality inspections and calibration applications. The Nanite offers a variety of measurement technologies and allows full automatic operation of your AFM measurements so that you can focus on other issues instead. Precision Mount Backside of Scan head with dove tail mount Scan head mounted on Sample Stage System with Micrometer Translation Stage 3

4 Nanosurf Nanite Akiyama-Probe Gentle The great advantages of this novel probe and its operation lie in the combination of the extremely stable resonance frequency of a tuning fork with the softer spring constant of a silicon cantilever. The immediate benefits that result from this are the much gentler scan characteristics of the probe. The resonance frequency of the tuning fork, which is different from the eigenfrequency of the cantilever, is tracked by a phase locked loop (PLL) and is kept at a specified setpoint by adjusting the vertical tip position via a feedback loop. Local material contrast properties can be imaged by measuring the amplitude controller s dissipation output signal. Akiyama-Probe (SEM Micrograph) Magnetic Probe Mount Extremely Easy Probe Exchange Quick Exchanging a probe doesn t get any easier than this! A magnetic probe mount allows the probe carrier to snap onto the AFM head, where it is self-centered by three electrical ball contacts. No further mechanical adjustment is required. This reduces downtime during measurements to an absolute minimum. Because of the self-sensing nature of the Akiyama- Probe, there is no need for laser adjustment either. Blood on an ultra-flat graphite substrate (HOPG), imaged with the Nanite A-Probe system. Scan size 100 μm. Left: Topography image. Full color scale corresponds to 850 nm. Right: Frequency-shift image, showing differences in elasticity. Unique Advantages No laser In addition to the unprecedented ease of probe exchange, the laser-free operation of the Akiyama-Probe allows AFM measurements in light-sensitive areas that are off-limits to conventional beam deflection AFM technology. One exciting possibility is the combination of Akiyama-Probe AFM and scanning electron microscopy. Contact us with your needs! Flexibility Stages The Nanite AFM system is the ideal tool for nanometer measurements and imaging in industry. The system provides three-dimensional data, which, in comparison to traditional line scans, offers additional morphological information at higher precision. AFM measurements are non-destructive and require no sample preparation. Moreover, the motorized stage allows multiple, pre-programmed measurements to be performed on different sample areas up to 180 millimeters in size with the large granite automated X/Y/Z sample stage, and on even larger areas with customized translation stage solutions. The Nanite is your ideal automated research AFM system, with its flexible design and easy operation. Changing the Akiyama-Probe with the Sensor Insertion Tool Summary Features & Benefits Choose your ideal sensor... A-Probe technology: Quickest probe exchange ever. Standard cantilever: Multiple measuring modes. Signal Module: A to extend analysis possibilities. Nanite When optical resolution is no longer sufficient! 4

5 Nanite Technical Data: SPM Controllers SPM Controller S50 S200 A100 Imaging Basic modes Dynamic modes Extended modes Frequency Modulation modes Channels Scan area and data points Scan modes Static Force (Contact): Constant Force, Constant Height. Dynamic Force (Intermittent Contact, etc.): Constant Amplitude, Constant Height. Static Force: Force Modulation, Spreading Resistance. Dynamic Force: Phase Contrast, Magnetic Force, Electrostatic Force. FM-AFM Frequency shift mode: Constant Frequency, Constant Height. In presence of Signal Module: A, depending on mode, up to... Individual width/height, up to points Forward & backward scan / frame up, down, or continuous / constant height Rotation and tilt 0-360, Hardware X/Y-slope compensation Data display Spectroscopy User definable profile and color map charts for all channels Basic modes Force-Distance, Force-Voltage Dynamic modes Amplitude-Distance Extended modes Phase-Distance, Current-Voltage, Current- Distance, etc. Frequency Modulation modes Measurement positions Channels Frequency-Distance, Dissipation-Distance Frequency-Voltage, Dissipation-Voltage, etc. Single X/Y point measurement or multiple measurements In presence of Signal Module: A, depending on mode, up to Data points and averaging Up to 2048 points, up to 1024 averages General Tip potential (resolution) ± 10 V (5 mv) Tip current (resolution) ± 100 μa (3 na) Dynamic frequency range (resolution) khz (< 0.1 Hz) Dynamic frequency modulation range (res.) khz (< 0.1 Hz) Phase Contrast range (res.) ± 90 (< 0.05 ) Phase reference range Video output PAL Video-S / Integrated USB2.0 frame grabber with WDM driver Programming interface Visual Basic Script and Windows COM-API Computer requirements Windows 2000/XP/Vista, USB2.0 Electronics size / weight mm / 3.3 kg Power supply V AC, 50/60 Hz, 30 W Signal Module: A (available as a separate option) Nanite Technical Data: Scan heads Beam Deflection Scan Heads (used with SPM S Controllers) large scan high resolution Maximum scan range 1) 3) 110 μm 10 μm Maximum Z-range 1) 22 μm 2.0 μm Drive resolution Z 0.34 nm nm Drive resolution XY 2) 1.7 nm 0.15 nm XY-linearity mean error < 0.6% < 0.6% Z-measurement noise level (RMS, Basic mode) Z-measurement noise level (RMS, Dynamic mode) Mounting Alignment of cantilever Automatic approach range Sample observation Sample illumination Video sample observation A-Probe Scan Heads (used with the SPM A100 Controller) large scan Maximum scan range 1) 3) 110 μm 10 μm Maximum Z-range 1) 22 μm 2.0 μm high resolution Drive resolution Z 0.34 nm nm Drive resolution XY 2) 1.7 nm 0.15 nm XY-linearity mean error < 0.6% < 0.6% Z-measurement noise level (RMS, Freq. Mod. mode) Mounting Alignment of cantilever Automatic approach range Sample observation Sample illumination Video sample observation 0.4 nm (max nm) 0.3 nm (max nm) 0.3 nm (max nm) 0.04 nm (max nm) Removable scan head ( mm) with 3-point quick-lock mounting plate Automatic self adjustment, compatible with sensor insertion tool 4.5 mm Dual lens system (top/side view) White LEDs (brightness 0-100%); axial illumination for top view Optional dual video camera 0.07nm (max. 0.2 nm) 0.04 nm (max nm) Removable scan head ( mm) with 3-point quick-lock mounting plate Automatic self adjustment 4.5 mm Dual lens system (top/side view) White LEDs (brightness 0-100%); axial illumination for top view Optional dual video camera 1) Manufacturing tolerances are ±10% for large scan heads and ±15 % for high resolution scan heads 2) Calculated by dividing the maximum range by 16 bits 3) Maximum scan range at 45 scan rotation Compatible sensors Cantilevers should have the following properties: Grooves compatible with the alignment chip used by NanoSensors, NanoWorld, Applied Nanostructures, BudgetSensors, and VISTAprobes A nominal length of 225 μm or more, and a width of 40 μm or more A coating on the backside of the cantilever to reflect infrared light 1) Manufacturing tolerances are ± 10% for large scan heads and ± 15% for high resolution scan heads 2) Calculated by dividing the maximum range by 16 bits 3) Maximum scan range at 45 scan rotation Additional signal modulation inputs/outputs All relevant scanner, approach, and tip signals (21 BNC connectors) Modulation range ± 10 V (excitation: ± 5 V) Free connectors User input / output Synchronization output 2 x Aux, connection made on user request 2 16 bit ADC / DAC converters, ± 10 V 1 x TTL: start/end/point sync for imaging and spectroscopy A-Probe Sensor Cantilever tip Spring constant Resonance frequency Mounting Package Nanosensors AdvancedTEC tip 3.5 N/m (typical) 50 khz (typical) Pre-mounted on triple pod ceramic plate Anti-static sensor box Specifications are subject to change without notice. 5

6 Nanite Technical Data: Automated Translation Stages Translation Stages ATS C301 ATS A100 Max. traverse path X/Y/Z 180/180/50 mm 25/25/25 mm Steps / revolution X/Y/Z 200 steps 1 mm 200 steps 0.7 mm Max resolution X/Y/Z 1) 0.5 μm 0.35 μm Repeatability / Absolute positioning ± 2 μm ± 1 μm Sample platform size Vibration isolation mm Massive stone table mm (detachable, three point fixation) Two-tier passive vibration isolation Limit / Reference switches Hall-sensors Micro-switches Size / Weight 1) With 1/10 micro-stepping mm / 47.5 kg mm / 6 kg Nanite Technical Data: Translation Stage Controller TSC 3000 Controller Number of axes drivers 3 Max speed 5000 Hz Max motor voltage/current 12 V / 2 A Motion control Synchronous 3D-vector movement with linear acceleration and deceleration Security / Emergency stop PC system requirements Electronics size / weight Power supply Batch Manager Software Batch measurement control Limit switches / External input Windows 2000 / XP / RS232-Serial port (optional USB-Adapter) mm / 3.3 kg V AC, 30 W, 50/60 Hz Automatic execution of AFM measurements at multiple stage locations Translation stage control Additional stage control Remote AFM control AFM Parameter settings Enhanced AFM/stage control Additional tools Automatic move to stored X/Y/Z-positions, manual cursor movement, numerical relative/absolute movements Reference search, move to sample load/unload position Automatic sensor approach/withdraw, automatic image scan, save measurement to disk Free definition of all AFM parameters for each measurement position (image size, setpoint, image offset,...) Integrated Visual Basic editor to define advanced data analysis, AFM control and report generation Automated measurement of image matrixes for very large AFM images; Algorithm for centering AFM on top of spherical samples; Report generation to Excel Specifications are subject to change without notice. Quantum dots, imaged in dynamic force mode. Scan size 1 μm. Full color scale corresponds to 4 nm. The quantum dots measured here have an average diameter of 30 nm. The mono-atomic terraces in the underlying surface are clearly visible and confirm the quality of the measurement. Microscopy Made Easy Nanosurf AG Grammetstrasse 14 CH-4410 Liestal / Switzerland Nanosurf, Inc Center Avenue, Suite 507 Fort Lee, NJ / USA Phone: Fax: Phone: Fax: Complete Nanite system with the small ATS A100 X/Y/Z stage and signal module interface Nanosurf and the Nanosurf Logo are trademarks of Nanosurf AG, registered and/or otherwise protected in various countries. Copyright 2008 Nanosurf AG, Switzerland. Graphic-Design: Hard-Drive Studio - BT02720