attocube systems Probe Stations for Extreme Environments CRYOGENIC PROBE STATION fundamentals principles of cryogenic probe stations

Transcription

1 PAGE 88 & PRODUCT CATALOG CRYOGENIC PROBE STATION fundamentals principles of cryogenic probe stations attocps I ultra stable cryogenic probe station attocps II highly flexible cryogenic probe station attocube systems explore your nanoworld

2 PAGE 89 & PRODUCT CATALOG Many optical devices, as well as samples in Nanoelectronics, Photonic Storage, NEMS / MEMS and other nanoscaled structures must be tested in a closed chamber under controlled conditions such as low temperature or high or ultra high vacuum. Analytical probing of various devices under these conditions poses many challenges. attocube systems provides now versatile cryogenic micro-manipulated probe stations used for non-destructive testing of these devices. HF Probe suitable for non-destructive, cryogenic testing. CCD image showing four HF probes touching a Copper plate.

3 PAGE 90 & PRODUCT CATALOG Cryogenic Probe Stations fundamentals :... attocube systems now offers a range of cryogenic and high vacuum probe systems which reflects the know-how of the company as a leading supplier of equipment for low temperature and vacuum microscopy. Our systems are known for modularity and flexibility, and are always customized to the needs of the user. In perfect accordance, the nanopositioning stages of attocube systems are designed for these extreme conditions and were optimized for applications in cryogenic probing. Dependent on your needs, we offer complete systems elective with He-bath cryostat/dewar or low-vibration, cryogen-free pulse-tube cooler, and optional superconducting magnet up to 15+ T. The outstanding design allows ultra high stability facilitating a variety of electrical measurements over a wide temperature and high magnetic field range. For sensitive probing, smooth, fine probe tips are used to ensure a non-destructive contact as well as precise positioning. Up to four three-axes probe heads can be operated using our reliable, nano-precise and backlash-free positioning stages. A CCD camera on the top of the instrument captures the image of the samples under investigation. The integrated optics can be adjusted to view any part of the sample at different zoom levels. PRODUCT OPTIONS > integration of up to four ultra high resolution three-axes stages > variable probe design - e.g. optical fiber tips, DC tips, HF tips > system can be ordered without a magnet, and can be upgraded at a later point of time > probe station design can be combined with scanning probe microscopy methods - e.g. Scanning Near Field Microscopy (SNOM) > Variable Temperature Insert (VTI) and sample heater available for continuous temperature control Probe station top view with 3 ANPxyz50 nanopositioning stacks controlling the measurement tips. PRODUCT ATTRIBUTES > probing under low temperature, high vacuum and high fields (up to 15 T) > non-destructive device testing > integrated optics and video system > probes fully cooled to the device temperature > no thermal gradients > substrate sizes for samples up to 13 mm > high modularity, system customized to user s needs > fast cool-down and warm-up cycles, fast thermal stabilization > stable, well-defined temperature > low (or even no) coolant consumption > complete software control damping [db] Comparison of conventional wire bonding with attocube systems probe station attocps attocps conventional wire bonding temp.: 4 K magnetic field: 12T frequency [Hz] Comparison of conventional wire bonding with attocube systems probe station attocps. Measurement conditions: 4 K, 12 T. attocube systems explore your nanoworld

4 PAGE 91 & PRODUCT CATALOG... Close-up photo of two DC probes. CCD image showing the contact pads (footprint: 50 x 50 μm) of the sample and one HF probe. Illustration of a customized probe station applying two HF probes and one Scanning Optical Near Field (SNOM) tip.

5 PAGE 92 & PRODUCT CATALOG attocps I ultra stable cryogenic probe station :... In the attocps I probe station configuration, four nanomanipulated probe arms realized with attocube systems unique nanopositioning devices offer highest positioning accuracy over mm range. Thus, the probes can be positioned accurately on the desired sample contact pad. The sample is fixed and thus enables additional contacting via high frequency coaxial wires if desired. Optical inspection of the sample / probes is provided via a CCD camera and sample illumination via IR-LED. This innovative system enables multiple device testing within one cooling cycle, supporting our customers to produce scientific results reliably and time efficient. CCD Vacuum Window Thin-Walled Stainless Steel Vacuum Tube COMPATIBLE COOLING SYSTEMS (see page 6) > LTSYS-He4 > LTSYS-Cc PRODUCT KEY FEATURES > multiple device-testing within one cooling cycle > temperature range K > 4 probes with 12 axes control > fast & reliable probe and sample positioning > compatible with high magnetic field (15+T) > optical sample / probe inspection x-axis x-axis y-axis y-axis z-axis z-axis liquid He Superconducting Magnet (optional) Sample attocube systems Positioning Stages Liquid He Dewar (optional) EXAMPLE APPLICATIONS > electrical and electro-optical measurements over a wide temperature range > semiconductor device characterization > quantum wires and dots investigations Schematic drawing of the low temperature attocps I system. attocube systems explore your nanoworld Schematic drawing of an exemplary probe station using four three-axes probe heads in combination with one three-axes positioning unit for the sample alignment.

6 PAGE 93 & PRODUCT CATALOG... The attocps I prober head.

7 PAGE 94 & PRODUCT CATALOG attocps II highly flexible cryogenic probe station :... In comparison with the attocps I where the sample is fixed, the attocps II offers the possibility to move the sample in addition to up to four xyz tip manipulators. The sample can be positioned in x,y and z direction as well as rotated by 360. This setup is particularly useful for multiple device testing with identical contact pad spacing. The probes are adjusted in the right pattern once, and subsequently the sample can be moved from one device to the next allowing time efficient multiple device testing within one cooling cycle. Optical inspection of the sample / probes is provided via a CCD camera and sample illumination via IR-LED. CCD Vacuum Window Thin-Walled Stainless Steel Vacuum Tube COMPATIBLE COOLING SYSTEMS (see page 6) > LTSYS-He4 > LTSYS-Cc PRODUCT KEY FEATURES > multiple device-testing within one cooling cycle > temperature range K > 4 probes with 12 axes control > sample motion in xyz and rotation > fast & reliable probe and sample positioning > compatible with high magnetic field (15+T) > optical sample / probe inspection > available for He-bath cryostats or cryogen-free pulse-tube coolers EXAMPLE APPLICATIONS > electrical and electro-optical measurements over a wide temperature range > semiconductor device characterization > quantum wires and dots investigations z-axis y-axis x-axis x-axis y-axis z-axis z-axis y-axis x-axis liquid He Superconducting Magnet (optional) Sample attocube systems Positioning Stages Liquid He Dewar (optional) Schematic drawing of the low temperature attocps II system. attocube systems explore your nanoworld Schematic drawing of an exemplary probe station using four three-axes probe heads in combination with one three-axes positioning unit for the sample alignment.

8 PAGE 95 & PRODUCT CATALOG... The attocps II prober head.