Direct deposition of surface acoustic wave sensors by aerosol jet printing technique
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1 OPTOMEC EU UGM Direct deposition of surface acoustic wave sensors by aerosol jet printing technique Denis VANDORMAEL, SIRRIS (Belgium) - le centre collectif de l industrie technologique belge
2 Content Introduction : Surface acoustic wave (SAW) Experimental: Aerosol Jet Printing (AJP) of SAW sensors Characterization Results and Discussion Conclusions sirris info@sirris.be 2
3 Introduction Surface acoustic wave (SAW) Longitudinal waves travelling along the surface of a material Strong coupling with material Sensitive to mass and mechanical properties Application domains: - filters (electronics) - torque, pressure, environmental sensors - thin film characterization sirris info@sirris.be 3
4 Introduction Surface acoustic wave (SAW) Generation by InterDigital Transducers (IDT) deposited on piezo material 2 overlapping metal comb-shaped electrodes e Principle: mechanical electrical energy conversion sirris info@sirris.be 4
5 Introduction Surface acoustic wave (SAW) Generation by InterDigital Transducers (IDT) deposited on piezo material e sirris info@sirris.be 5
6 Introduction Surface acoustic wave (SAW) Generation by InterDigital Transducers (IDT) deposited on piezo material e + oscillating voltage U(t) Local oscillating field at the surface sirris info@sirris.be 6
7 Introduction Surface acoustic wave (SAW) Generation by InterDigital Transducers (IDT) deposited on piezo material e + oscillating voltage U(t) Local oscillating stress at the surface (compression/expansion) Movement SAW generation in X1- and X2-directions sirris info@sirris.be 7
8 Introduction Surface acoustic wave (SAW) - High frequency (> 10 MHz) penetration depth << surface propagation only Sensing of the characteristics of the surface travelled by the wave Several tens of high aspect ratio electrodes (50<w/e<100) e sirris info@sirris.be 8
9 Introduction Surface acoustic wave (SAW) - High frequency (> 10 MHz) penetration depth << surface propagation only Sensing configuration: INPUT / OUTPUT Transducers ~ LOAD INPUT e OUTPUT Piezo sirris info@sirris.be 9
10 Introduction Surface acoustic wave (SAW) Manufacturing (classical process): Surface preparation (substrate polishing) Photoresist coating Exposure through a mask Metal coating Lift-off Clean room process Multi-steps Not suitable for all materials Proposed alternative based on Aerosol Jet Printing technique sirris info@sirris.be 10
11 Experimental Aerosol Jet Printing - Introduction (1) Aerosol origination - Ultrasonic - Pneumatic (2) Aerosol transportation (3) Jet collimation and deposition Optomec/Sirris Optomec AJ300CE sirris info@sirris.be 11
12 Experimental Aerosol Jet Printing Key-features high-resolution: 10µm min. feature size maskless direct writing, time and material saving compatible with flexible or even 3D substrates local laser sintering compatible with a very large range of inks (from 1 up to 2500 cp), conductive, dielectrics, semi-conductive or even bio-materials sirris info@sirris.be 12
13 Experimental Sensor printing CAD design Preliminary settings on glass Fine tuning on actual substrate 20µm-width x 1.8µm-thick. Ag lines on glass sirris info@sirris.be 13
14 Experimental Sensor printing CAD design Preliminary settings on glass Fine tuning on actual substrate Materials 20µm-width x 1.8µm-thick. Ag lines on glass Substrate material : PZT (K 2 = 2.2%) and LiNbO3 (K 2 = 5.3%) Printed material: Cabot CSD-32 Ag nano-dispersion sirris info@sirris.be 14
15 Experimental Sensor printing Deposition of continuous lines Main issue: roughness and porosity of PZT R a, PZT between 0.5 µm and 1.5µm Single-pass layer not continuous Multilayer 20 µm width, 1.0 µm thick tracks sirris info@sirris.be 15
16 Experimental Sensor printing Deposition of continuous lines Main issue: roughness and porosity of PZT R a, PZT between 0.5 µm and 1.5µm - 1st layer ~ «planarization» - Subsequent ones fully functional 20 µm width, 2.5 µm thick tracks sirris info@sirris.be 16
17 Experimental Sensor printing Conductivity improvements Metallic nano-inks sintering for best conductivity Specimen maintained at 100 C during printing process (hot plate) Under investigation: T substrate =100 C (during printing process) + laser post-sintering sirris info@sirris.be 17
18 Experimental Sensor printing 2 x 25 interdigited tracks printed with Ag on PZT substrate each track is 20 µm width x 2.5 µm thickness 40µm-period sirris info@sirris.be 18
19 Tests and validation Electrical and acoustical characterization principle Theoretical Dispersion Curves (Phase Velocity/Frequency) Wavelength (characteristic of the electrodes) Propagation modes (depend on substrate, coating, ) Generated SAW: - Frequency - Velocity sirris info@sirris.be 19
20 Tests and validation Electrical and acoustical characterization setup Electrical characterization Acoustical characterization e Interfero Impedance probe measurements Resonance Frequency Displacement measured at several points Velocity sirris info@sirris.be 20
21 Tests and validation Electrical and acoustical characterization results Electric reflection coefficient Frequency =22.58MHz. Measured Displacement Velocity = 2014 m/s Consistent with theory! sirris info@sirris.be 21
22 Tests and validation IDT SAW as a sensor IN interfero Read-OUT Illustration with LiNbO 3 substrate sirris info@sirris.be 22
23 Conclusions 20µm-width / 40µm-period IDT structures directly printed on PZT by AJP Validation as SAW transducer and sensor (22.58 MHz), Aerosol Jet Printing: promising alternative to conventional process (photolitho) maskless, high-resolution printing (10 µm) flexibility, compatible with many substrates (even not-clean-room-friendly materials) sirris info@sirris.be 23
24 Acknowledgements Thanks for their financial support: Nord-Pas-de-Calais Region, Walloon Region (DGO6), European Union through: Interreg IV PRISTIMAT program PIµI MIFADEMA (FEDER funds) program. Thanks to my co-authors: IEMN: Marc Duquennoy, Mohammadi Ouaftouh, Julien Deboucq, Fréderic Jenot SIRRIS: Olivier Rigo, Laurent Seronveaux, Daniel Monnoye, Eric Beeckman, Thierry Dormal sirris 24
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