International Distinguished Lecturer Program

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1 U International Distinguished Lecturer Program Ken-ya Hashimoto Chiba University Sponsored by The Institute of Electrical and Electronics Engineers (IEEE) Ultrasonics, Ferroelectrics and Frequency Control (UFFC) Society

2 SAW Wireless Sensors Ken-ya Hashimoto Chiba University

3 Thanks to Prof. Leo Reindl of University of Freiburg, Germany for Supplying Most of All Viewgraph Data Note: My Contribution is Negligible to This Topic!

4 Contents! Why Acoustic Sensors?! SAW ID Tags! Wireless, Battery Less SAW Sensors

5 Contents! Why Acoustic Sensors?! SAW ID Tags! Wireless, Battery Less SAW Sensors

6 Quartz Micro-Balance (QMB) Mass Loading AT-cut Quartz! Temperature Stability! Phase (or Frequency) Output High Resolution! Low Price Sensor Applications: Physical (Film Thickness, Pressure), Chemical(Gas, Liquid), Bio

7 Why Acoustic Sensors?! Temperature Stability 1 sec. Wrist Watch 10 ppm 1 day Compare: Si Circuit 3000ppm/ o C! Mass Production

8 SAW Sensor IDT V in SAW V out Piezo-Substrate! High f ( f = K f 02 m) High Sensitivity! Moderate Temperature Stability! Surface Protection (Packaging)? Area 1 mm 2 & f 0 =1 GHz give K f 0 ~ 10 7 / kg 1 ppm of f deviation=resolution 0.1 pg.

9 SAW Sensor Configuration Frequency Detection f ~ m Phase Detection φ~ m

10 SAW Chemical Sensor Frequency Deviation [Hz] Time [min] Content [ppm]! Sensitive Layer: A calixarene (10 nm)! Object: tetrachloroethene! f 0 : 434 MHz

11 Pattern Recognisition with Sensor Array Sensor Array A B C D p-xylene m-xylene humidity Sensor : Sensitive Film A Calix[4]resorcinearene 1 B Calix[4]resorcinearene 2 C Cyclodextrine-functiona- D lized polymer 1 Cyclodextrine-functionalized polymer 2

12 Contents! Why Acoustic Sensors?! SAW ID Tags! Wireless, Battery Less SAW Sensors

13 What is SAW ID-TAG? Antenna Transceiver! Wireless, Batteryless! Large Group Delay (Separation with Environmental Echoes)

14 Schematic layout of a SAW ID tag with several transducers wired together with a common bus bar in transponder antenna transducer SAW out Good for quartz and substrates with a small dielectric and piezoelectric constants

15 Schematic layout of a reflective SAW tag in transponder antenna transducer reflectors out SAW Good for LiNbO 3, and substrates with a high dielectric and piezoelectric constants, half the chip size!

16 Separation of SAW Signal in Time Domain Excited Signal RF Response Environmental Echo Sensor Echo time

17 Accesible Distance Radar Equation Ps G1 G2 λ r = n E( S / N) IL Typical Wavelength@ 2.45 GHz λ = 0.12 m Transmittor Output P S = -2 dbm Antenna Gain of Transceiver G 1 = 12 dbi Antenna Gain of Sensor G 2 = 2 dbi Insertion Loss of Sensor IL = 60 db Detector S/N S/N = 15 db Minimum Sensitivity E = -145 dbm Number of Accumulation n = 5 Accesible Distance r = 3.7 m Blue: Spec Dependent

18 Which Frequency? 5.2 GHz (ISM Band) Wideband (100MHz), Short Accessible Distance (<1m), Hard to Realize SAW Devices 2.45 GHz (ISM Band) Wideband(22MHz), Short Accessible Distance (2-3m), Price of SAW Devices? MHz (RKE Band) Narrowband(1.7MHz), Long Accessible Distance (>10m), Low SAW Device Cost

19 SAW ID tag where all reflectors are arranged in same acoustic track +Small insertion loss -close multi reflection occur

20 Typical transducers for SAW ID Tags uniform transducer split finger transducer unidirectional transducer pitch: λ/4 pitch: λ/8 pitch: λ/4 and λ/8

21 Multiple Reflection Resulting in Delayed Spurious Signal N= n l m i x

22 SAW ID tag with every reflector arranged in a separate track +No close multi reflections +No dependence of actual bit level on precursors - need reflectors with high reflectivity need a transducer with a huge aperture

23 IL of ID-tag vs. No. of Reflectors in a Track Design parameter: Amplitude weighting (ON/OFF) 33 bits dynamic (IL(ON)/IL(OFF)>20dB) propagation loss between two contiguous reflectors 0.38dB loss due to passing twice a reflector 0.75dB

24 Coding Schemas! Amplitude Coding (ON/OFF) + insensitive on small velocity variations + temperature effects can be eliminated using a start- and stop bit ± problems with the uniformity can be avoided by using special OFF structures with the same damping but no reflective properties than ON structures " high IL due to large No. of reflectors (and also due to OFF structures)! Phase Coding + 2PSK: lower bit error rate by using 2-PSK coding than by ON/OFF-amplitude coding at same SNR + 4-PSK and higher coding are possible, reducing total No. of reflectors/symbols " very sensitive on small velocity variations " temperature effects have to be cancelled very carefully! Pulse Position Coding + higher coding schemas are possible + insensitive on small velocity and temperature variations + small insertion loss due to small No. reflectors

25 SAW ID Tag with 33 reflectors in 4 tracks (f 0 = 2.45 GHz) (Amplitude Coded) Measurements: 8 "ON", 8 "OFF", 8 "ON, 8 "OFF", 1 "ON

26 SAW ID Tag with 5 reflectors in one track (f 0 = 2.45 GHz) using pulse position coding Pulse position coding schema Antenna Possible coding position of 1st reflector Possible coding position of 2nd reflector Tag by 1st reflecor 2nd reflector

27 Pulse position coding schema request signal start bit for temperature calibration code signals stop bit Check sum Signal strength initial delay NOISE 1st 2nd n-1 n 3 blocks 0 T 1 T 2 T (n-1) T n Time T 0 # n blocks # p positions per block { Code range p n

28 Baumer Ident (2.45 GHz ISM) OIS - W

29 Semi-Active SAW ID Tag Piezo Substrate IDT Input Signal Output Signal Antenna Switch Circuit SAW Device hybrid RF Switch Controller Memory Buttery Powered by RF Rectification

30 Response of Switchable SAW ID Tag S 11 [db] all "ON" S 11 [db] time [µs] all IDT reflectors "OFF" time [µs] 3 "ON" S 11 [db] time [µs]

31 OFW ID System SOFIS installed on Munich SAW ID-Tag mounted on each subway car S-Bahn antenna of the 2.45 GHz interrogation unit Tag

32 Contents! SAW Sensors! SAW ID Tags! Wireless, Battery Less SAW Sensors

33 Photo of SAW radio readable temp. sensor Time domain response Amplitude [db] j 4-1 Time [ms] j 2-1 j 3-1 Interdigital Transducer bonding wires reflectors LiNbO3 chip phases in a polar chart

34 Brake temperature of a train entering a station reader antenna 100,00 Brake (with attached SAW temperature transponder, not seen) Temperature C 90,00 80,00 70,00 60,00 Time

35 SAW Temp. Sensor at Surge Arrestor of High Voltage Transformer Station (Brunsbüttel) antenna of reader unit surge arrestor reader unit Temperature [ C] Upper Conductor Lower Conductor Outside Temperature Date (January)

36 High Temp. SAW Sensors with Pt Electrodes on Langasite Insesion loss [db] frequency [MHz] Test chip at room temperature Test chip at 1000 C C 25 C

37 With an additional seismic mass, a radio requestable SAW accelerometer can be attained SAW accelerometer configurations: SAW chip Acceleration Proof mass Circular diaphragm Tensioned cantilever beam Flextured cantilever beam

38 Wirelessly Readable Passive Sensors for Force & Mechanical Displacement force IDT reflectors displacement phase shift [deg.] displacements [µm]

39 SAW sensor seismic mass Wireless Measurement of Deceleration viscous damping deceleration arriving at PE wooden back plane invading time Passive SAW sensor fixed to Dart arrow, invading target

40 SAW Torque Sensor Rx antennas Tx antennas phase difference in deg strain in SAW sensors measurement set-up rotating shaft The dynamic range of monitoring the torque with SAW can be up to several tenths of khz

41 Torque Measurement of a 4-Pole 11 kw Asynchronous Motor 100 Torque [%] SAW Reference sensor Time [s] Step Response to to Inverter Input

42 Combination with External Sensor RF Signal RF Response IDT Antenna G Piezo-Substrate IDT Z Load Impedance (Switch)! Sensor Isolation from SAW Device! Various Sensors Applicable

43 antenna SAW pressure sensor diaphragm adhesive cover-plate closed cavity with reference-pressure pressure [Bar] :30:55 14:30:59 14:31:04 14:31:09 14:31:13 14:31:18 Two Track Railway Crossing 14:31:22 14:31:27 Adjacent Water Channel 14:31:32 14:31:36 time 14:31:41

44 Intelligent Tyre thread element SAW sensor element SAW bending beam cover for SAW chip force acceptor Sensing Friction Coefficient Between Car Tire and Road Surface $ artificial sense in run sole

45 SAW sensor for tyre friction control bristle model profile element Free rolling propulsion breaking Deformation Deformation dry road surface wet road surface time / 25 ms time / 25 ms

46 Resolution of SAW Passive Wireless Remote Sensing measurand physical effect resolution identitification analysis of signal 32 Bit temperature variation of SAW velocity 0.1 K mechatronic measurands (pressure, torque, acceleration, tire-road friction) variation of elastic constants 1% of full scale impedance sensors variation of amplitude and phase of reflected signal 5% of full scale distance signal delay 20cm relative position continuous measurement of 2cm Doppler phase angular positioning measurement of Doppler phase 3 degrees

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