USCi MOSFET progress (ARL HVPT program) L. Fursin, X. Huang, W. Simon, M. Fox, J. Hostetler, X. Li, A. Bhalla Aug 18, 2016
Contents USCi product line 1200V MOSFET progress 10kV IGBT and MPS progress 2
USCI Released Products JBS Diodes 650V 1200V Normally-on JFET 1200V Cascode co-pack 1200V Best in class VF-Qc Excellent UIS and Surge Die suitable for 250C Lowest RdsA 1200V switch Excellent Short circuit Robust UIS Die suitable for 250C Replaces IGBT+FRD Or MOSFET+JBS 0 to 12V gate drive Excellent Diode behavior Excellent Short circuit Robust UIS Custom 10KV diodes Custom 300 o C Diodes
Overview of USCI Transistor Technologies Normally-on Trench Vertical JFET Normally-off Trench Vertical JFET SiC Planar MOSFET Circuit Protection -Current limiter -SSPC -SCCB Switching: Cascode TO247 650V <50m 1200V 1700V Tj>200C switching applications. All Vds ratings Tj<200C switching applications. >1.7KV (Planar) >650V Trench Switching: Super cascode 6.5KV 10KV 1200V RdsA-1.75mΩ-cm 2 650V RdsA 0.75mΩ-cm 2 1200V RdsA 3mΩ-cm 2 *Target 1200V RdsA* 4-5mΩ-cm 2
1200V MOSFET Development Status
LMOSFET wafer & forward IV characteristics (6-inch X-fab)
1200V 40mOhm MOSFET in TO-247 (6-inch X-fab): static characteristics 1 st engineering lot: performance to be further optimized Edge-termination and passivation are ok!
Inductive Load Switching Performance of the 1200V 40mOhm MOSFET in TO-247 (1 st Enginneering Lot) Normal Switching Characteristics Oscillations caused by the testing setup Turn-on: t r =44ns, Eon =538µJ Turn-off: t f =28ns, Eoff=201µJ Switching loss can be reduced by decreasing external gate resistor R G of the MOSFET.
1200V 40mOhm MOSFET in TO-247: preliminary reliability assessment Test stress condition duration sample size status HTGB VGS=+20V, VDS=0, Ta=150C 1000hrs 77 Pass HTGB VGS=-10V, VDS=0, Ta=150C 1000hrs 77 Pass HTRB VDS=960V, VGS=0, Ta=150C 1000hrs 77 Pass AC Tamb=121ºC, 100% RH, 205 Kpa, 96 Hrs 77 Pass
1200V 40mOhm MOSFET in TO-247: preliminary reliability assessment 1000 hr HTRB @ VDS=960V, VGS=0, Ta=150C UJM1204K HTRB 0hrs UJM1204K HTRB 1000hrs UJM1204K HTRB 0hrs UJM1204K HTRB 1000hrs 1.8 250 T5 Vthr @ 10mA (Vdc) 1.6 1.4 1.2 1 0.8 0.6 0.4 T9 Idsx @ 1.2kV,-5Vg (ua) 200 150 100 50 0.2 0 1 5 9 13 17 21 25 29 33 37 41 45 49 53 57 61 65 69 73 77 81 SN# 0 1 5 9 13 17 21 25 29 33 37 41 45 49 53 57 61 65 69 73 77 81 SN#
1200V 40mOhm MOSFET in TO-247: preliminary reliability assessment 1000 hr HTGB @ Vgs=+20/-10V, Vds=0V, Ta=150C HTGB (Vgs=+20V), 150 C HTGB (Vgs=-10V), 150 C UJM1204K HTGB +20VGS 0hrs UJM1204K HTGB +20VGS 1000hrs UJM1204K -10V HTGB 0hrs UJM1204K -10V HTGB 1000hrs 1.8 1.8 1.6 1.6 T5 Vthr @ 10mA (Vdc) 1.4 1.2 1 0.8 0.6 0.4 T5 Vthr @ 10mA (Vdc) 1.4 1.2 1 0.8 0.6 0.4 0.2 0.2 0 1 5 9 13 17 21 25 29 33 37 41 45 49 53 57 61 65 69 73 77 81 SN# 0 1 5 9 13 17 21 25 29 33 37 41 45 49 53 57 61 65 69 73 77 81 SN#
1200V 40mOhm MOSFET in TO-247: preliminary reliability assessment Autoclave @ Ta=121C, Rh=100%, P=205kPa Pre AC Test Post AC Test Pre AC Test Post AC Test 250 1.8 1.6 200 1.4 IDSX2 @1200V, ua 150 100 50 VTH-5.0 @ 10mA, V 1.2 1 0.8 0.6 0.4 0.2 0 1 5 9 13 17 21 25 29 33 37 41 45 49 53 57 61 65 69 73 77 81 SN# 0 1 5 9 13 17 21 25 29 33 37 41 45 49 53 57 61 65 69 73 77 81 SN#
1200V 40mOhm MOSFET in TO-247: preliminary UIS robustness evaluation Source metal Vgs=+12V Ohmic contact ILD Poly gate Ohmic contact Id=20A Vds~1700V P++ pbase N+ gate oxide N+ N CS-layer P++ pbase Vgs=-5V N- drift layer Vds=0V 150 μm N+ substrate drain metal Avalanche is clamped within each active cell L=5mH, E=1.4J Optimization of unit cell has been implemented in a new lot in order to suppress electric field in gate oxide and further improve UIS robustness
1200V 40mOhm MOSFET in TO-247: preliminary short-circuit capability assessment V DS = 600V I D 8us V GS = -5V to +15V 10us Device ID#: A23 External Rg = 22Ω Device ID#: A23 External Rg = 22Ω Two devices tested: Device #A23: Pass 8us SC testing, fail 10us SC testing Device #A26: Pass 8us and 10us SC testing
1200V 40mOhm MOSFET in TO-247: preliminary short-circuit capability assessment Device #A26: pass 10μs SC test Device #A23: fail at 10μs SC test Device unit cell layout will be optimized in a new lot; Vt increased in a new 1200V-40mOhm lot; SC-capability will be re-evaluated; 3300V SC-robust MOSFET lot is in the line;
Threshold Voltage Verification of the 2nd Engineering 1200V 40mOhm MOSFET Lot 1st Engr. Lot 2 nd Engr. Lot Wafer ID# The threshold voltage of the second qualification lot is basically in the target range. Threshold voltage, VTH (V)
10kV IGBT and MPS Development Status
USCi 10kV IGBT approach (4-inch fab) Emitter metal Emitter metal Ohmic contact ILD Poly gate Ohmic contac Ohmic contact ILD Poly gate Ohmic contac P++ pbase N+ gate oxide N+ N CS-layer P++ pbase P++ pbase N+ gate oxide N+ N CS-layer P++ pbase 150μm N-drift layer 150μm N-drift layer Standard N+ substrate N field-stop layer P+ injector collector metal After top-side MOS structure is formed, substrate is completely grinded away, N-type field-stop layer and P+ injector are ion-implanted, and laser-activated.
Laser-activated PN junction on Si-face Starting Epi: 11um of 8E15cm -3 N type (Si-face). Blanket nitrogen and aluminum co-implants Laser-assisted P & N dopant activation Diode mesa isolation and contact metal deposition (inset) Diode singulation, packaging and testing RT Qrr observed even at 50C; Increases with temperature Laser-activated PN diode have been formed!
First IGBT results (4-inch fab) Laser backside activated PN-junction knee voltage is present; C-face may be a challenge; P+ ohmiccontact may be poor; Narrow process window for laser activation;
High-voltage MPS diodes MPS diodes with 22mm 2 active area: bipolar operation is present, but diode performance on 150um (free-standing epi) has significant die-to-die and wafer-towafer variation 100um epi on standard N+ substrate, 8 kv 150um freestanding epi, 10 kv wafer vendor 1 wafer vendor 2 100um epi on standard N+ substrate, 8 kv wafer vendor 1 150um freestanding epi, 10 kv wafer vendor 2
10kV IGBT/MPS module design USCi in-house packaging low-cost and short lead time Voltage rating up to 10kV Small change to 15kV One solder joint chip to DBC Pressfit Power Leads Replaceable leads 60A max continuous 20A per pin Tjmax=175C ~ 200C Al wire bond 58 mm 66 mm 57 mm 22
Summary Established a 6-inch platform for large area 1200V MOSFETs targeting power modules New 1200V 40 mohm MOSFET lot is in the line (6-inch): Optimized unit cell structure and device layout expecting target performance; Process tuned; Increased Vt; Reduced Idsx leakage and improved shielding of gate oxide; Expect improved UIS and SC capability; 3300V SC-robust MOSFET lot is in the line (6-inch) Ion-implanted and laser-activated PN junction demonstrated on Si-face, although process is not reproducible and so far not successful on C-face IGBT process baseline demonstrated at 4-inch fab, including substrate removal, backside ion implantation and laser-anneal, although major technological challenges are unresolved Thick epi wafer warpage, LTV, TTV, and surface roughness are problematic on 4-inch; Laser-activation of p- and n-type dopants and ohmic contact formation on C-face of a free-standing low doped epi was not successful we may have to abandon original IGBT approach; New combined 6.5kV and 10kV IGBT/MOSFET lot is in the line (4-inch) Life-time enhancement; Optimized unit cell structure; Improved shielding of gate oxide; To be completed and tested;