Gen 2 SiC MOSFETs Extends the Benefits of Silicon Carbide in Industrial Applications

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Gen 2 SiC MOSFETs Extends the Benefits of Silicon Carbide in Industrial Applications Dr. Vladimir Scarpa, Salvatore La Mantia Michele Macauda, Luigi Abbatelli December 4 th 2018

Contents 2 Silicon Carbide at STMicroelectronics SiC MOSFET - Technology roadmap Gen 2 SiC MOS Technology STGAP2S Isolated Gate Driver Practical Example

Contents 3 Silicon Carbide at STMicroelectronics SiC MOSFET - Technology roadmap Gen 2 SiC MOS Technology STGAP2S Isolated Gate Driver Practical Example

20 Years of ST SiC History 4 April 1998 1st contract on SiC with CNR-IMETEM (Dr. V. Raineri) November 2003 First ST internal product request May 2004 Schottky Diode Demonstrator (ST line) March 2009 Power MOSFET 3" Demonstrator September 2014 1 st Gen MOSFET Start Production June 1996 Collaboration with Physics Dept. (Prof. G. Foti) February 2003 ETC Epitaxial reactor prototype installed in ST May 2002 Schottky Diode Demonstrator (CNR line) December 2005 Schottky Diode Mat 20 October 2007 1 st Gen Diode Start Production May 2012 2 nd Gen Diode Start Production September 2013 1.2kV Diode Start June 2014 Production 3 rd Gen 3 Diode Start Production June 2017 2 nd Gen MOSFET AG 6" Start Production 1996 1998 2000 2002 2004 2006 2008 2010 2012 2014 2016 June 2003 2" ST line June 2006 3" ST line June 2011 4" ST line June 2016 6" ST line Pioneers.....to mass production

ST SiC Manufacturing 5 Normalized to capacity in 2017 4 Silicon Carbide manufacturing line growth 3 2 1 185% 235% 285% 335% 375% 100% 0 2017 2018 2019 2020 2021 2022

Contents 6 Silicon Carbide at STMicroelectronics SiC MOSFET - Technology roadmap Gen 2 SiC MOS Technology STGAP2S Isolated Gate Driver Practical Example

SiC MOSFET Technology RoadMAP 7 From Planar to Trench -44% -28% -30% In Production New! In Development 20V 18V 18V 15V

SiC MOSFET Benchmark Parameter: R DS,ON x Area 8 Gen1 (2014) Gen2 (2018) Comp. 1 Comp.2 Gen3 (2020+) Trench technology Comp. 3 ST Gen2 as good as today s Trench MOSFETs

Contents 9 Silicon Carbide at STMicroelectronics SiC MOSFET - Technology roadmap Gen 2 SiC MOS Technology STGAP2S Isolated Gate Driver Practical Example

V DS [V] 650 R DS (on) typ @ 18V, 25ºC [mω] 18 90 23 100 SiC MOSFET Gen 2 Planned Portfolio Id Package P/N HiP247 H2PAK-7 HiP247-4L H2PAK-7 HiP247 Bare die SCTW90N65G2V SCTH90N65G2V-7 SCTW90N65G2V-4 SCTH100N65G2-7AG SCTW100N65G2AG SCT100N65G2D2AG Automotive Grade Packages T j.max =200 C 10 1200 55 45 H2PAK-7 SCTH35N65G2V-7AG 55 45 25 80 30 80 70 45 75 40 HiP247 H2PAK-7 HiP247-4 HiP247 H2PAK-7 H2PAK-7 HiP247 dice HiP247 H2PAK-7 H2PAK-7 HiP247 V DS [V] R DS (on) @ 25ºC [mω] SCTW35N65G2V SCTH35N65G2V-7 SCTW35N65G2V-4 SCTW70N120G2V SCTW70N120G2V-4 SCTH70N120G2V-7 SCTH100N120G2-AG SCTW100N120G2AG SCT100N120G2D2AG SCTW40N120G2V SCTH40N120G2V-7 SCTH40N120G2V7AG SCTW40N120G2VAG Id P/N HiP-247 (STD & LL) TM SMD H2PAK 2 and 7 leads Kelvin Source + T j.max =200 C 650 55 50 SCTW35N65G2V-4 18 110 SCTW90N65G2V-4 1200 25 90 SCTW70N120G2V-4

SiC MOSFETs Qualification Status 11 Same qualification path than Silicon parts; Temperature increased to T j =200 C for HiP247 Package

Advantages Static Parameters Low temperature dependency of R ds,on 12 1200V Devices 650V/900V Devices Up to 200 C! Up to 200 C! Lowest temperature dependancy among SiC MOSFETs in the market; Lower risk of thermal runaway even at very high temperature operation.

Relevant Parameters for Safe Gate Driving 1) Miller Capacitance SCTW90N65G2V 13 C rss =C GD C iss =C GS //C GD C GS C oss =C GD //C DS Weak capacitive coupling through Miller Capacitance. Low risk of parasitic turn-on. Operation inside SOA, no gate oxyde degradation.

Relevant Parameters for Safe Gate Driving 2) Gate Voltage SOA V gs+,max +25V +20V V gs+,op Gen 1 Gen 2 +22V +18V 14 V gs-,op V gs-,min -5V -5V -10V -10V Wide negative range. Flexibility in design. Low risk of parasitic turn-on.

Contents 15 Silicon Carbide at STMicroelectronics SiC MOSFET - Technology roadmap Gen 2 SiC MOS Technology STGAP2S Isolated Gate Driver Practical Example

STGAP2S 8 1700 V, 4A gate drivers Up to 26 V supply voltage Miller CLAMP pin option Propagation delay < 100 ns CMTI > 100V/ns Galvanic isolation 1.7 kv in SO-8 package 6 kv in SO-8W package SO-8N SO-8W In Production 2019

120 V/ns 129 V/ns test vehicle: EVALSTGAP2SCM STGAP2S CMTI test results @1500V 17 Test equipment DPO 7104C 1 GHz Oscilloscope IsoVu 1 GHz isolated differential probe 4 kv single-ended probe with GND clip DC linear power supply (+1500 V) GNDISO vs GND GON-GOFF vs GNDISO

1700 V, 4A gate drivers In Production STGAP2S 8 Recommended for SiC MOSFETs Option 1: Single output and Miller CLAMP Option 2: Separated sink\source outputs

Effectiveness of Active Miller Clamp Tests in a Half-Bridge Inverter 19 Circuit block diagram Expected Waveforms in LS Switch Assuming positive current Gate driver S1 FILTER V ds S2 V ds S1 V ds S2 V IN I C -CURRENT PROBE Gate driver S2 V DS VOLTAGE PROBE V OUT =110V AC Dead-time V gs S2 Device V GS - VOLTAGE PROBE Description V gs S1 V gs S1 S1 & S2 SCTW35N65G2V (55 mω, 650 V SiC MOS) Gate Driver STGAP2S, in both versions AMC and SO Risk of Parasitic turn-on. Operation outside SOA.

SCTW35N65G2V 55 mω, 650 V SiC MOSFET Active Miller Clamp 20 20 Positive Glitch Negative Glitch 20 15 10 Vgs with S-OUT Vgs with AMC 15 10 Vgs off with AMC Vgs off with S-OUT Vgs [V] 5 0 Vgs [V] 5 0-5 -5-10 -10-15 2,11E-05 2,13E-05 2,15E-05 2,17E-05 2,19E-05 2,21E-05 Time [sec] -15 1,96E-05 1,97E-05 1,98E-05 1,99E-05 2,00E-05 2,01E-05 2,02E-05 2,03E-05 Time [sec] Legend of driver configuration S-Out: separated output AMC: Active Miller Clamp Vgs-on=+18V Vgs-off= -5V

SCTW35N65G2V 70 mω, 650 V SiC MOSFET Negative Deactivation Voltage 21 Negative Glitch Positive Glitch 20 20 15 Vgs_off=-5V 15 Vgs_off=-2.5V 10 Vgs_off=-2.5V Vgs_off=0V 10 Vgs_off=-5V Vgs_off=0V Vgs [V] 5 0 Vgs [V] 5 0-5 -5-10 1,94E-05 1,96E-05 1,98E-05 2,00E-05 2,02E-05 2,04E-05-10 1,96E-05 1,97E-05 1,98E-05 1,99E-05 2,00E-05 2,01E-05 2,02E-05 2,03E-05 2,04E-05 2,05E-05 Time [sec] Time [sec]

Contents 22 Silicon Carbide at STMicroelectronics SiC MOSFET - Technology roadmap Gen 2 SiC MOS Technology STGAP2S Isolated Gate Driver Practical Example

Application Example DC Chargers for Electrical Vehicles 23 Parameter Symbol Value Input voltage V in 230V ac Ph-N 400V ac ph-ph Max. Input Current I in.max 32A/ph Max Power P in.max 7.36 kw/ph 22 kw total DC Link Voltage V DC 400..1000Vdc Output Voltage V out 200..500Vdc Configuration Device R ds,on.typ @ Tj=25 C Package Number in parallel Conf. 1 SCT50N120 52 mω @ V gs =20V HiP247 2x Conf. 2 SCTW70N120G2V-4 25 mω @ V gs =18V TO-247-4 (Kelvin Source) 1x

Comparison on Device Level 24 Parameter Conditions SCT50N120 (x2) SCTW70N120G2V-4 R ds,on V gs = V g,op, I d =I d,nom, T j =25 C 52 mω (26 mω) 25 mω R th,j-c --- 0.55 K/W (0.27 K/W) 0.45 K/W R th,c-h --- ~ 1 K/W (~0.5 K/W) ~ 1K/W Dynamic Improvements must compensate thermal disadvantages of Conf. 2! Parameter Conditions SCT50N120 (x2) SCTW70N120G2V-4 C iss Conf. 1 Conf. 2 1900 pf (3800 pf) 3500 pf C oss Vds= 800V, Vgs=0, f=1mhz 170 pf (340 pf) 180 pf C rss 30 pf (60 pf) 30 pf

Experimental Results Comparison Gen 1 vs. Gen 2 SiC MOS 25 +2% R g,on = R g,off =3 Ω Parameter Advantages on System Level Gain Amount of switch devices 50% less Heat-sink size 40% smaller PCB area 26% smaller Commutation loop size 43% smaller

Summary 26 Gen 2 SiC MOSFETs Based on planar structure, Gen 2 is a large improvement step in SiC MOSFET technology. Product portfolio includes 650V and 1200V voltage classes, with very low R ds,on and innovative packages, like TO-247 4pin and D2PAK 7pin. The combination of low Miller capacitance and extended negative gate voltage range enables fast and safe commutation. Results in EV charger demonstrates the possibility to build up systems above 20 kw without the need of paralleling devices.

New! STPower TM 27 www.st.com\stpower

28 Thank you! Questions?