MEMS Based Resonators and Oscillators are Now Replacing Quartz
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1 MEMS Based Resonators and Oscillators Dr. Aaron Partridge SiTime Corp. ISSCC February 20, 2012
2 My purpose is to convince you that MEMS timing is here now. MEMS will replace quartz oscillators in most applications. The value add is strong enough to transform an industry. 2 of 16
3 Ecliptek Quartz Oscillators: o Ceramic/metal package o Quartz plate and driver circuit o Dedicated factories MEMS Oscillators: o Plastic QFN package o Silicon MEMS die and CMOS die o Standard IC fabs 3 of 16
4 Corner Center Edge o Like a 2D bell held in the center with its outer edges ringing. Motion is a few nanometers. o Buried inside the chip, not on the surface. 4 of 16
5 o khz MEMS tuning forks for apps now served by 32kHz quartz tuning forks. o Driven with sub microamp supply currents. 5 of 16
6 Chip Surface Encapsulation Resonator 6 of 16
7 MEMS Resonator CMOS Circuits Prog &OE I/O Config PROM Sustaining Amp Regs Vcc GND Temp Sensor Control Frac PLL Dvr Clk 7 of 16
8 8 of 16
9 o Tremendous Flexibility o New features o Delivered performance o Short lead times o Exceptional quality and reliability o Low cost, high value 9 of 16
10 10 of 16
11 Frequency Variation (ppm) TCXO Frequency v. Temperature 1977 units, 5 lots 50 to +90C ±2.5pp m Temperature (degc) 11 of 16
12 f carrier = MHz Int jitter (12k 20MHz) no spurs = 493fs w/ spurs = 689fs 125dBc/rtHz 152dBc/rtHz 12k 20MHz 12 of 16
13 Vibratiion Spur Value (dbc) Vibration Induced Spur vs. Acceleration f vibration = 100Hz Competitive S. MEMS Vibration Acceleration (g) 13 of 16
14 Int Phase Jitter (ps, 12k 20MHz) Phase Jitter Without and With EMI Interference S. MEMS No Interference Problematic for electrostatic discharge Competitive Interference of 16
15 Units (MU Recognized) Unit Shipments 4 of the top 5 Computer Makers 3 of the top 5 Consumer Electronics 3 of the top 5 Contract Manufacturers 5 of the top 5 ODMs Year 15 of 16
16 o Technology has fundamentally helped Humanity. o Engineers make small contributions that are multiplied countless times. o What you do matters to Billions of people! Dorothea Lang, Migrant Mother of 16
17 Thank You 17 of 16
18 Abstract The first commercial MEMS based timing devices shipped in In just five years they are transforming the timing industry. The first parts offered XO stability and various advantages like programmability, but lacked the signal quality to support more than the basic applications. Recent parts are dramatically improved, offering TCXO stability, subpicosecond integrated jitter, high frequency differential outputs, low phase noise for RF applications, low power for portable applications, and ultra low power for real time clock applications. Production rates are increasing exponentially with over 50 million units sold as of June How does this stuff work? Where will the technology go? Will MEMS replace quartz? What will MEMS timing do for the electronics industry? What will MEMS timing do for Humanity? 18 of 16
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SiT2020B -55 C to +125 C, Single-Chip, One-Output Clock Generator
, 2 Features Any frequency between 1 MHz to 110 MHz accurate to 6 decimal places of accuracy Operating temperature from -55 C to 125 C Excellent total frequency stability as low as ±20 ppm Low power consumption