(51) Int Cl.: H02N 2/06 ( ) H01L 41/09 ( )

Transcription

1 (19) TEPZZ_76974B_T (11) EP B1 (12) EUROPEAN PATENT SPECIFICATION (4) Date of publication and mention of the grant of the patent: Bulletin 2013/01 (21) Application number: (22) Date of filing: (1) Int Cl.: H02N 2/06 ( ) H01L 41/09 ( ) (86) International application number: PCT/FI200/00199 (87) International publication number: WO 200/ ( Gazette 200/1) (4) ENERGY SAVING DRIVING CIRCUIT FOR PIEZOELECTRIC MOTOR ENERGIESPARENDE ANSTEUERSCHALTUNG FÜR EINEN PIEZOELEKTRISCHEN MOTOR CIRCUIT DE PILOTAGE POUR MOTEUR PIÉZOÉLECTRIQUE, ÉCONOMISANT DE L ÉNERGIE (84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR (30) Priority: FI (43) Date of publication of application: Bulletin 2007/14 (73) Proprietor: Nokia Corporation 020 Espoo (FI) (72) Inventor: OLLILA, Mikko 3380 TAMPERE (FI) (74) Representative: Kalliola, Sanna Marketta et al Espatent Oy Kaivokatu D 000 Helsinki (FI) (6) References cited: WO-A1-94/11907 US-A US-A US-A US-A US-A US-A US-A US-B CAMPOLO D ET AL: "Efficient Charge Recovery Method for Driving. Piezoelectric Actuators with Quasi-Square Waves", IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS AND FREQUENCY CONTROL, IEEE, US, vol. 0, no. 3, 1 March 2003 ( ), pages , XP , ISSN: , DOI: DOI:.19/TUFFC CAMPOLO D ET AL: Efficient Charge Recovery Method for Driving. Piezoelectric Actuators with Quasi-Square Waves. IEEE TRANS. ON ULTRASONICS, FERROELECTRICS AND FREQUENCY CONTROL. vol. 0, no. 3, March 2003, pages , XP EP B1 Note: Within nine months of the publication of the mention of the grant of the European patent in the European Patent Bulletin, any person may give notice to the European Patent Office of opposition to that patent, in accordance with the Implementing Regulations. Notice of opposition shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention). Printed by Jouve, 7001 PARIS (FR)

2 Description FIELD OF THE INVENTION [0001] The present invention relates to a piezo-element driving device and a method for driving piezo-elements, in which two piezo-element driving voltages are provided, said driving voltages being in different phases with respect to each other. The present invention relates also to a mobile device comprising a piezo-element driving device BACKGROUND OF THE INVENTION [0002] Piezo-electric actuators are used in imaging systems to adjust the positions of zoom and focusing lens systems. Piezo-electric actuators are also used in other systems to move small objects. Driving devices providing suitable driving voltages are required to operate said piezo-electric actuators. Piezo-electric actuators are implemented by using one or more piezo-elements, which are deflected, expanded or contracted when coupled to an activating voltage. [0003] Energy consumption related to the driving of piezo-elements is a problem especially in mobile systems. In mobile systems, the available power supply is typically a battery with a limited capacity. A piezo-element comprises a substantial internal capacitance and consequently it stores a certain amount of energy when it is coupled to a driving voltage. In order to improve the energy efficiency of a mobile device, it is advantageous to recover the capacitive energy stored in the piezo-elements. [0004] Another aspect in mobile devices is that the voltage of an available power supply is typically lower than the optimum driving voltage of the piezo-elements. Driving voltages higher than the power supply voltage are typically generated using step-up means. [000] US patent 6,63,21 discloses a driving device for an actuator having a capacitive motor phase, said driving device comprising a set of voltage sources, switching means connecting said voltage sources to said capacitive motor phase, one at a time, and a capacitive voltage step-up device, supporting or being itself said voltage sources. [0006] The article "Efficient Charge Recovery Method for Driving Piezoelectric Actuators with Quasi-Square Waves", D.Campolo & al., IEEE Transactions on ultrasonics, ferroelectrics, and frequency control, Vol. 0 No. 3, March 2003, discloses a driving circuit for two piezo-elements, said driving circuit comprising an inductive element arranged to transfer a charge from a first piezo-element to a second piezo-element. The energy stored in the piezo-elements is partly recovered and re-used by means of said inductive element. [0007] WO (A1) discloses according to its abstract a method and a circuit arrangement (1) for charging and discharging a load (4) with a capacitive component, having an energy source (3) which provides a direct voltage between a positive (+) and a negative (-) or earth terminal, a charging circuit and a discharging circuit, each of which has a coil (6, 9), and switching means (7, 8, 12, 13) controlled by a controlling system (2). The charging and discharging of the load (4) is intended to be controlled in an improved manner with a method and a circuit arrangement of that kind. For that purpose the controlling system (2) compares a report-back signal (C, H, K, L) from the circuit arrangement, or a signal derived therefrom, with an external desired value signal (Vin), and actuates the switching means (7, 13, 8, 12) as a function of a difference in the two signals. The charge is supplied to or down from the load in the form of quanta, the magnitude of the quanta being variable. SUMMARY OF THE INVENTION 4 0 [0008] It is an object of the present invention to provide an energy-saving device and method for driving piezo-elements. A further object of the present invention is to provide a mobile device comprising an energy-saving piezo-element driving device. [0009] To attain these objects, the devices and the method according to the present invention are primarily characterized in what will be presented in the independent claims. Further details related to the invention are presented in the dependent claims. [00] The devices and the method according to the present invention are used to provide at least two driving voltages for driving at least two piezo-elements, said driving voltages being in different phases with respect to each other. The devices and the method according to the present invention are mainly characterized in that two inductive elements are used to transfer energy between said at least two piezo-elements, and that said inductive elements are also used to provide a voltage which substantially exceeds the voltage of an available power supply voltage. In other words the piezoelement driving device according to the present invention comprises inductive step-up means, which are implemented using said inductive elements. [0011] According to the present invention, piezo-elements can be operated with a good energy efficiency and using a low voltage power supply. The number of required inductive elements can be minimized. Consequently, also space requirements are reduced. Furthermore, the shielding of components against electromagnetic interference originating 2

3 from the inductive elements becomes easier. [0012] The embodiments of the invention and their benefits will become more apparent to a person skilled in the art through the description and examples given herein below, and also through the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS [0013] In the following examples, the embodiments of the invention will be described in mode detail with reference to the appended drawings, in which Figs. 1a-1d show different operating phases of a piezo-electric actuator based on two independently deflectable piezo-elements, Fig. 2. shows the diagram of a piezo-element driving device according to the present invention, Fig. 3 shows the diagram of a piezo-element driving device according to the present invention, in which diagram inductive step-up means have been indicated, Fig. 4 shows by way of example the timing chart of the piezo-element driving device according to Fig. 2, and 20 Fig. shows by way of example the resulting voltage waveforms at the outputs of the piezo-element driving device according to Fig. 2, 2 Fig. 6 shows the diagram of a piezo-element driving device according to the present invention, in which diagram switching means coupling inductive elements between the outputs of the piezo-element driving device have been indicated, and Fig. 7 shows a mobile device comprising a piezo-element driving device according to the present invention DETAILED DESCRIPTION OF THE INVENTION [0014] Referring to Fig. 1a, a piezo-electric actuator 0 may comprise two independently deflectable piezo-elements, 20, which have been connected together. A protrusion 30 is attached near the connection point of said two piezoelements, 20. The piezo-elements, 20 are supported by a support 40, which allows the deflection of said piezoelements, 20. The degree of deflection of each piezo-element, 20 is changed when a voltage is applied between voltage terminals 11,12, 21, 22 of said piezo-elements, 20. The piezo-elements, 20 may be designed and optimized to be operated using unipolar voltages, i.e. with voltages in the range from zero voltage to a maximum voltage. Preferably, the piezo-electric actuator 0 is implemented using deflectable piezo-elements known as bimorphs by the person skilled in the art. [00] The degree of deflection of said two piezo-elements is changed in a cyclic manner when alternating voltages are coupled to the voltage terminals 11, 12, 21, and 22. The tip of the protrusion 30 moves along a closed path CP when there is a phase difference between the alternating voltages coupled to the two piezo-elements. Preferably, the phase difference should be 90 degrees. Figs. 1 a to 1 d illustrate four different operating phases of the actuator 0. The closed path CP has been omitted in Fig. 1c to avoid the blurring of the drawing. When the tip of the protrusion 30 is positioned near an object (not shown), it may contacts said object at least in the phase shown in Fig. 1c, and moves said object to the direction h. The direction of the motion may be changed by reversing the sign of the phase difference, i.e. from 90 degrees to minus 90 degrees. [0016] In an ideal case the driving waveforms would be sinusoidal. However, the piezo-elements, 20 are typically driven with voltages waveforms, which deviate considerably from the sinusoidal form. The phase difference may also deviate considerably from 90 degrees. The phase difference refers herein to a situation in which two voltages reach their maximum value and minimum values at different instants of time. It is emphasized, that the use of the expression phase difference does not require herein that the waveforms of said two voltages must be identical. [0017] Referring to Fig. 2, the piezo-element driving device 0 comprises a first inductive element LA, a second inductive element LA, a first comparator block 73, a second comparator block 74, ten switches S1, S2, S3, S4, S, S6, SAH, SAL, SBH, SBL, a first diode DA, a second diode DB, a first three-input-and-gate 7, a second three-input-andgate 76, a control logic 80 and a power input 4. The power input 4 is coupled to a power supply (not shown), which provides a voltage VS. [0018] The control logic 80 controls the switches S1, S3, S4, S6, SAH, SAL, SBH, SBL. The control logic 80 is also coupled to the inputs G2 and G of the three-input-and-gates 7, 76. The connections between the control logic 80, 3

4 the switches S1, S3, S4, S6, SAH, SAL, SBH, SBL and the inputs G2, are not shown in Fig. 2. [0019] The first piezo-element of the piezo-electric actuator 0 is coupled to a first output 1 and the second piezoelement of the piezo-electric actuator 0 is coupled to a second output 2. Each piezo-element, 20 constitutes a substantially capacitive load. However, due to losses and the actual work performed by the actuator 0, the load comprises also a resistive component. The inductance of the inductive element LA is preferably substantially equal to the inductance of the inductive element LB and the capacitance of the second piezo-element 20 is preferably substantially equal to the capacitance of the first piezo-element. [0020] The comparator blocks 73, 74 are implemented using voltage dividers comprising resistors R and comparators 71. The comparator 73 is arranged to switch its output state from high to low when the voltage of the output 1 substantially exceeds two times VS. The comparator 74 is arranged respectively with regard to the second output 2. [0021] Referring to Fig. 3, the piezo-element driving device 0 comprises also two inductive voltage step-up means 61, 62. The components constituting a first inductive step-up means 61 are enclosed by a dotted boundary. The first inductive step-up means 61 comprises the first inductive element LA, the diode DA, the comparator block 73, the threeinput-and-gate 7, the switch S2 and the clock CLK. The components constituting a second inductive step-up means 62 are enclosed by a dot-dash-line. The clock CLK is common to the both step-up means. [0022] Fig. 4. shows the timing chart of the switches S1, S3, S4, S6, SAH, SAL, SBH and SBL. Fig. 4. shows also the timing chart of the input G2 of the three-input-and-gate 7 and of the input G of the three-input-and-gate 76. The curves exhibit two values: a high state and a low state. A high state is associated with a closed switch and a low state is associated with an open switch. In case of the gate inputs G2 and G, the high state refers to the true state and the low state refers to the false state. The markings ta and tb indicate the starting times of the operation of the inductive stepping-up means 61, 62. [0023] Fig.. shows the resulting voltage waveforms at the outputs 1, 2 of the piezo-element driving device 0. [0024] The operation of the piezo-element driving device 0 is now described referring to six operating steps, which are repeated in a cyclic way. Unless mentioned, the switches S1, S2, S3, S4, S, S6, SAH, SAL, SBH, SBL are in the open (non-conducting) state. [002] In the first step the control logic 80 sends a command to close the switches SAH and SBL. The output 1 is thus coupled to the power supply voltage VS and the output 2 is coupled to the ground GND. [0026] In the second step the control logic 80 closes the switches SBH and S1 and sets the input G2 of the first threeinput-and-gate 7 to the high state. The beginning of the second step is indicated by the marking ta in Figs. 4 and. The switch SBH couples the second output 2 to the power supply voltage VS. The switch S2 is controlled by the first three-input AND-gate 7. The other inputs of said first three-input-and-gate 7 are coupled to the first comparator 73 and to the clock CLK. The voltage of the first output 1 is substantially lower than two times VS, and consequently the switch S2 opens and closes several times following the state of the clock CLK. When the switch S2 is closed, the first inductive element LA is coupled between the power input 4 and the ground GND, and energy is stored in the magnetic field in said first inductive element LA. When the switch S2 opens, the energy is transferred from the first inductive element LA to the first piezo-element. Consequently, the voltage of the first output 1 is increased. The diode DA prevents the discharging of the first piezo-element. The switch S2 is opened and closed several times until the first comparator block 73 detects that the voltage of the first output 1 has substantially reached a voltage, which is two times VS. In other words, a piezo-element driving voltage substantially higher than the power supply voltage VS is generated. In the end of the second step the voltage of the second output 2 is still equal to VS. [0027] In the 3rd step the control logic closes the switch S3, which couples the second inductive element LB between the first piezo-element and the second piezo-element 20. There is an initial voltage difference between the first output 1 and the second output 2, said voltage difference being substantially equal to VS. Charge is transferred from the first piezo-element to the second piezo-element 20 through the switch S3, the second inductive element LB and the second diode DB., Basic circuit theory shows that after a time period τ, the voltages of the two outputs 1 and 2 are reversed, assuming that the internal capacitances of the piezo-elements, 20 are substantially equal. The time period τ is given by 0 in which L is the inductance of the inductive elements LA, LB and C is the capacitance of the piezo-elements, 20. In an ideal case and after the time period τ, the voltage at the first output 1 is near VS and the voltage at the second output 2 is near two times VS. In reality the reached voltages deviate from the ideal values for example due to the voltage drop over the diode and the losses in the switch S3. [0028] In the fourth step the voltage deviations are remedied. The beginning of the fourth step is indicated by the marking tb in Figs. 4 and. The switch S4 is closed and the gate input G is set to the high state to start the operation 4

5 of the second stepping-up means 62. The second stepping-up means 62 operates until the voltage of the second output 2 substantially reaches two times VS. The first output 1 is also coupled to the power supply voltage VS by the switch SAH. [0029] In the fifth step the switch SAL is closed and the first output 1 is coupled to the ground GND, i.e. the voltage of the first output 1 becomes zero. Also the switch SBH is closed and the second output 2 is coupled to the power supply voltage VS. [0030] In the sixth step, the switch S6 is closed, and charge is transferred from the second piezo-element 20 to the first piezo-element. After a time period τ, the voltage of the second output 2 is near zero and the voltage of the first output 1 is near the power supply voltage VS. However, there is a voltage deviation due to losses. [0031] Now, the cycle described above repeats itself starting again from the first step, in which the first output 1 is again coupled to the power supply voltage VS by the switch SAH and the second output 2 is coupled to the ground GND by the switch SBL. [0032] The direction of movement associated with the operation of the piezo-electric actuator 0 can be reversed by repeating the above-mentioned six steps, but replacing the role played by the switch S1 with role played by the switch S4, and replacing the role played by the switch S4 with role played by the switch S1. Further, the roles of the switches S3 and S6, of the switches SAH and SBH, of the switches SAL and SBL, and of the signals G2 and G should also be interchanged, respectively. [0033] Preferably, the comparators 73, 74 are implemented in such a way that they exhibit hysteresis. Said hysteresis is advantageous because it reduces switching noise and electromagnetic interference. [0034] In practise, the power supply voltage VS may be rather noisy. Therefore an advantageous option is to use a further device to provide the required reference voltage for the comparator blocks 73, 74. For example, a bandgap voltage reference may be used to provide the reference voltage. [003] The switches, comparators, three-input-and-gates, the clock and the control logic may be implemented using various semiconductor-based technologies and devices known by the person skilled in the art. The switches may be implemented using, for example, metal oxide semiconductor field effect transistors or bipolar transistors. [0036] The timing of the switches may be optimized according to the intended speed of the piezo-electric actuator 0. The control logic 80 may also monitor the voltages of the outputs 1, 2 in order to optimize the timing of the switches according to the response of the piezo-elements. [0037] Referring to Fig. 6, the inductive elements LA, LB are coupled between the outputs 1, 2 by the switching means 67, 68. The switching means 67 comprises the switch S3 and the diode DA. The switching means 68 comprises the switch S6 and the diode DB, respectively. In a further embodiment, also further switches S7, S8 may be used to bypass the diodes DA, DB during the third and the sixth operating steps during which charge is transferred between the piezo-elements, 20. The advantage is that the use of the further switches S7, S8 reduces voltage losses and energy dissipation. [0038] Referring to Fig. 7, the piezo-element driving device 0 may be used in a mobile device 300, in which a piezoelement driving circuit 0 is connected to a piezo-actuator 0. The piezo-actuator is preferably implemented using bimorphs in a way described in the patent application PCT/US03/ A control unit 200 is coupled to the control logic input 82 to control the direction and the speed of the actuator 0. The mobile device 300 may be for example a portable optical imaging system. In that case the mobile device 300 may comprise several piezo-element driving circuits 0 and piezo-actuators 0 to adjust the positions of several lens systems and optical components, in order to adjust the image magnification (zoom), the focus distance and the aperture of said portable optical imaging system. The use of the piezoelement driving circuit 0 according to the present invention is especially advantageous in mobile devices 300, because the piezo-elements, 20 can be driven at a voltage, which exceeds the available power supply voltage, energy is saved and the number of inductive elements (LA, LB) is minimized. [0039] The use of the piezo-element driving device 0 and the method according to the present invention is not limited to the driving of deflectable piezo-elements but may also be applied to drive expanding and contracting piezoelements such as disclosed, for example, in US Patent 6,703,762. [0040] For the person skilled in the art, it will be clear that modifications and variations of the device and method according to the present invention are perceivable. The particular embodiments described above with reference to the accompanying drawings and tables are illustrative only and not meant to limit the scope of the invention, which is defined by the appended claims. Claims 1. A piezo-element driving device (0) comprising at least: - a power input (4) connectable to a power supply,

6 - a first output (1) connectable to a first piezo-element () and arranged to provide a first driving voltage (VA), - a second output (2) connectable to a second piezo-element (20) and arranged to provide a second driving voltage (VB), said driving voltages (VA, VB) having a mutual phase difference, - two inductive elements (LA, LB), - first switching means (3, 6; 67, 68) to couple at least one of the two inductive elements (LA, LB) between said outputs (1, 2) to transfer charge between said two outputs (1, 2), and - two voltage step-up means (61, 62) each implemented using one of the two inductive elements (LA, LB) to provide a charging voltage to one of said first piezo-element () and said second piezo-element (20), which charging voltage is substantially higher than the voltage of said power input (4), wherein said second driving voltage (VB) has a maximum voltage, and said piezo-element driving device (0) further comprises: - second switching means (SBH) adapted to discharge said second piezo-element (20) from said maximum voltage by coupling the second output (2) to the voltage of said power input (4) such that the two inductive elements (LA, LB) are disconnected from between said first output (1) and said second output (2) during said discharging The device according to claim 1, wherein said first switching means (67, 68) further comprises for at least one of the two inductive elements (LA, LB) a diode (DA, DB) coupled in series with the respective inductive element (LA, LB) and a further switch (S7, S8) arranged to bypass the diode (DA, DB) during said transfer of charge between said two outputs (1, 2) The device according to claim 1 or 2, wherein each of said two voltage step-up means (61, 62) comprises a third switch (S2, S) configured to connect the corresponding inductive element to ground (GND), said third switch (S2, S) being controlled by an AND-gate (7, 76) with three inputs, the inputs of said AND-gate (7, 76) being coupled to a clock (CLK), to a comparator (73, 74) and to a control logic (80), said comparator 73, 74) being arranged to stop the operation of said inductive step-up means (61, 62) when the voltage of said output (1, 2) reaches a predetermined target voltage. 4. The device according to claim 3, wherein said comparator (73, 74) is arranged to exhibit hysteresis, when the voltage of said output (1, 2) is in the vicinity of said predetermined target voltage. 3. A method to drive a first piezo-element () and a second piezo-element (20), wherein said first piezo-element () is driven with a first driving voltage (VA) and said second piezo-element (20) is driven with a second driving voltage (VB), said driving voltages (VA, VB) having a mutual phase difference, said method comprising at least: receiving an input voltage from a power input (4) connectable to a power supply; - transferring a charge between said first piezo-element () and said second piezo-element (20) by coupling at least one of the two inductive elements (LA, LB) between said first piezo-element () and said second piezoelement, and - charging, with each of two voltage step-up means (61, 62) implemented using one of the two inductive elements (LA, LB), one of said first piezo-element () and said second piezo-element (20) to a voltage that is substantially higher than the voltage (VS) of the power input (4), wherein said second driving voltage (VB) has a maximum voltage, the method further comprising discharging said second piezo-element (20) from said maximum voltage such that said two inductive elements (LA, LB) are disconnected from between said first piezo-element () and said second piezo-element (20) during said discharging. 6. The method according to claim, wherein said one of the two inductive elements (LA, LB) is connected in series with a diode (DA, DB), which diode (DA, DB) is bypassed during said transfer of charge by a further switch (S7, S8). 7. The method according to claim or 6, wherein each of the two voltage step-up means (61, 62) comprises a third switch (S2, S) to connect the corresponding inductive element to ground (GND), said third switch (S2, S) being controlled by an AND-gate (7, 76) with three inputs, the inputs of said AND-gate (7, 76) being coupled to a clock (CLK), to a comparator (73, 74) and to a control logic (80), said comparator 73, 74) being arranged to stop the operation of said inductive step-up means (61, 62) when the voltage of said inductive step-up means (61, 62) reaches 6

7 a predetermined target voltage. 8. The method according to claim 7, wherein said comparator (73, 74) exhibits hysteresis, when the voltage of said inductive step-up means is in the vicinity of said predetermined target voltage. 9. A device (300) comprising at least one piezo-element driving device according to claim 1 and at least one piezoelectric actuator (0).. The device (300) according to claim 9, wherein said device (300) is a mobile device. 11. The device (300) according to claim 9 or, wherein said at least one piezo-electric actuator (0) comprises at least two bimorphs (, 20). 12. The device according any of the foregoing claims 9 through 11, wherein said at least one piezo-electric actuator (0) is arranged to adjust the position of a focusing or zoom lens system. Patentansprüche Ansteuervorrichtung (0) für Piezoelemente, wenigstens umfassend: ein an eine Stromversorgung anschließbaren Stromeingang (4), ein an ein erstes Piezoelement () anschließbarer erster Ausgang (1), der ausgelegt ist, eine erste Ansteuerspannung (VA) bereitzustellen, - ein an ein zweites Piezoelement (20) anschließbarer zweiter Ausgang (2), der ausgelegt ist, eine zweite Ansteuerspannung (VB) bereitzustellen, wobei die Ansteuerspannungen (VA, VB) eine gegenseitige Phasendifferenz haben, - zwei induktive Elemente (LA, LB), - erste Schaltmittel (S3, S6; 67, 68), um wenigstens eines der zwei induktiven Elemente (LA, LB) zwischen die Ausgänge (1, 2) zu koppeln, um Ladung zwischen den zwei Ausgängen (1, 2) zu übertragen, und - zwei Spannungssteigerungsmittel (61, 62), jeweils unter Verwendung eines der zwei induktiven Elemente (LA, LB) implementiert, um einem aus dem ersten Piezoelement () und dem zweiten Piezoelement (20) eine Ladespannung bereitzustellen, welche wesentlich höher ist als die Spannung des Stromeingangs (4), wobei die zweite Ansteuerspannung (VB) eine maximale Spannung hat, und die Ansteuervorrichtung (0) für Piezoelemente ferner umfasst: - zweite Schaltmittel (SBH), die geeignet sind, das zweite Piezoelement (20) von der maximalen Spannung zu entladen, indem sie den zweiten Ausgang (2) an die Spannung des Stromeingangs (4) koppeln, so dass die zwei induktiven Elemente (LA, LB) zwischen dem ersten Ausgang (1) und dem zweiten Ausgang (2) während der Entladung getrennt sind. 2. Vorrichtung nach Anspruch 1, wobei die ersten Schaltmittel (67, 68) ferner für wenigstens eines der zwei induktiven Elemente (LA, LB) eine in Reihe mit dem jeweiligen induktiven Element (LA, LB) gekoppelte Diode (DA, DB) umfassen, und einen weiteren Schalter (S7, S8), der ausgelegt ist, die Diode (DA, DB) während der Übertragung von Ladung zwischen den zwei Ausgängen (1, 2) zu umgehen. 3. Vorrichtung nach Anspruch 1 oder 2, wobei jedes der zwei 1 Spannungssteigerungsmittel (61, 62) einen dritten Schalter (S2, S) umfasst, der ausgelegt ist, das entsprechende induktive Element mit der Erde (GND) zu verbinden, wobei der dritte Schalter (S2, S) durch ein UND-Gatter (7, 76) mit drei Eingängen gesteuert wird, und die Eingänge des UND-Gatters (7, 76) an eine Uhr (CLK), einen Komparator (73, 74) und eine Steuerungslogik (80) gekoppelt sind, wobei der Komparator (73, 74) ausgelegt ist, den Betrieb der induktiven Steigerungsmittel (61, 62) anzuhalten, wenn die Spannung des Ausgangs (1, 2) eine vorbestimmte Zielspannung erreicht. 4. Vorrichtung nach Anspruch 3, wobei der Komparator (73, 74) ausgelegt ist, eine Hysterese zu zeigen, wenn die 7

8 Spannung des Ausgangs (1, 2) in der Nähe der vorbestimmten Zielspannung ist.. Verfahren, um ein erstes Piezoelement () und ein zweites Piezoelement (20) anzusteuern, wobei das erste Piezoelement () mit einer ersten Ansteuerspannung (VA) angesteuert wird und das zweite Piezoelement (20) mit einer zweiten Ansteuerspannung (VB) angesteuert wird, wobei die Ansteuerspannungen (VA, VB) eine gegenseitige Phasendifferenz haben, wenigstens umfassend: - Empfangen einer Eingangsspannung von einem an eine Stromversorgung anschließbaren Stromeingang (4); - Übertragen einer Ladung zwischen dem ersten Piezoelement () und dem zweiten Piezoelement (20), indem wenigstens eines der zwei induktiven Elemente (LA, LB) zwischen das erste Piezoelement () und das zweite Piezoelement (20) gekoppelt wird, und - Laden eines aus dem ersten Piezoelement () und dem zweiten Piezoelement (20) auf eine Spannung, die wesentlich höher ist, als die Spannung (VS) des Stromeingangs (4) mit jedem von zwei Spannungssteigerungsmitteln (61, 62), die unter Verwendung eines der zwei induktiven Elemente (LA, LB) implementiert werden, 20 wobei die zweite Ansteuerspannung (VB) eine maximale Spannung hat, das Verfahren umfasst ferner ein Entladen des zweiten Piezoelements (20) von der maximalen Spannung, so dass die zwei induktiven Elemente (LA, LB) zwischen dem ersten Piezoelement () und dem zweiten Piezoelement (20) während der Entladung getrennt sind Verfahren nach Anspruch, wobei das eine der zwei induktiven Elemente (LA, LB) in Reihe mit einer Diode (DA, DB) geschaltet ist, wobei die Diode (DA, DB) während der Übertragung von Ladung durch einen weiteren Schalter (S7, S8) umgangen wird. 7. Verfahren nach einem der Ansprüche oder 6, wobei jedes der zwei Spannungssteigerungsmittel (61, 62) einen dritten Schalter (S2, S) umfasst, um das entsprechende induktive Element mit der Erde (GND) zu verbinden, wobei der dritte Schalter (S2, S) durch ein UND-Gatter (7, 76) mit drei Eingängen gesteuert wird, und die Eingänge des UND-Gatters (7, 76) an eine Uhr (CLK), an einen Komparator (73, 74) und an eine Steuerlogik (80) gekoppelt sind, wobei der Komparator (73, 74) ausgelegt ist, den Betrieb der induktiven Steigerungsmittel (61, 62) anzuhalten, wenn die Spannung der induktiven Steigerungsmittel (61, 62) eine vorbestimmte Zielspannung erreicht Verfahren nach Anspruch 7, wobei der Komparator (73, 74) eine Hysterese zeigt, wenn die Spannung der induktiven Steigerungsmittel in der Nähe der vorbestimmten Zielspannung ist. 9. Vorrichtung (300), umfassend wenigstens eine Steuervorrichtung für Piezoelemente gemäß Anspruch 1 und wenigstens einen piezoelektrischen Aktuator (0). 40. Vorrichtung (300) nach Anspruch 9, wobei die Vorrichtung (300) eine mobile Vorrichtung ist. 11. Vorrichtung (300) nach Anspruch 9 oder, wobei der wenigstens eine piezoelektrische Aktuator (0) wenigstens zwei Bimorphe (, 20) umfasst Vorrichtung nach einem der vorangehenden Ansprüche 9 bis 11, wobei der wenigstens eine piezoelektrische Aktuator (0) ausgelegt ist, die Position einer fokussierenden oder einer Zoom-Optik anzupassen. Revendications 0 1. Dispositif d excitation d élément piézoélectrique (0) comprenant au moins : - une entrée d alimentation (4) pouvant être raccordée à une alimentation, - une première sortie (1) pouvant être raccordée à un premier élément piézoélectrique () et configurée pour fournir une première tension d excitation (VA), - une deuxième sortie (2) pouvant être raccordée un deuxième élément piézoélectrique (20) et configurée pour fournir une deuxième tension d excitation (VB), lesdites tensions d excitation (VA, VB) ayant un déphasage mutuel, - deux éléments inductifs (LA, LB), 8

9 - des premiers moyens de commutation (S3, S6 ; 67, 68) pour coupler au moins un des deux éléments inductifs (LA, LB) entre lesdites sorties (1, 2) pour transférer une charge entre lesdites deux sorties (1, 2), et - deux moyens d élévation de tension (61, 62) chacun mis en oeuvre en utilisant un des deux éléments inductifs (LA, LB) pour fournir une tension de charge à l un dudit premier élément piézoélectrique () et dudit deuxième élément piézoélectrique (20), ladite tension de charge étant sensiblement plus élevée que la tension de ladite entrée d alimentation (4), 20 2 ladite deuxième tension d excitation (VB) ayant une tension maximale, et ledit dispositif d excitation d élément piézoélectrique (0) comprenant en outre : - des deuxièmes moyens de commutation (SBH) adaptés pour décharger ledit deuxième élément piézoélectrique (20) à partir de ladite tension maximale par couplage de la deuxième sortie (2) à la tension de ladite entrée d alimentation (4) de sorte que les deux éléments inductifs (LA, LB) sont déconnectés d entre ladite première sortie (1) et ladite deuxième sortie (2) pendant ladite décharge. 2. Dispositif selon la revendication 1, dans lequel lesdits premiers moyens de commutation (67, 68) comprennent en outre pour au moins un des deux éléments inductifs (LA, LB) une diode (DA, DB) couplée en série avec l élément inductif respectif (LA, LB) et un autre commutateur (S7, S8) configuré pour dériver la diode (DA, DB) pendant ledit transfert de charge entre lesdites deux sorties (1, 2). 3. Dispositif selon la revendication 1 ou 2, dans lequel chacun desdits deux moyens d élévation de tension (61, 62) comprend un troisième commutateur (S2, S) configuré pour connecter l élément inductif correspondant à la terre (GND), ledit troisième commutateur (S2, S) étant commandé par une porte ET (7, 76) avec trois entrées, les entrées de ladite porte ET (7, 76) étant couplées à une horloge (CLK), à un comparateur (73, 74) et à une logique de commande (80), ledit comparateur (73, 74) étant configuré pour arrêter le fonctionnement desdits moyens d élévation inductifs (61, 62) lorsque la tension de ladite sortie (1, 2) atteint une tension cible prédéterminée Dispositif selon la revendication 3, dans lequel ledit comparateur (73, 74) est configuré pour présenter une hystérésis, lorsque la tension de ladite sortie (1, 2) est à proximité de ladite tension cible prédéterminée.. Procédé pour exciter un premier élément piézoélectrique () et un deuxième élément piézoélectrique (20), dans lequel ledit premier élément piézoélectrique () est excité avec une première tension d excitation (VA) et ledit deuxième élément piézoélectrique (20) est excité avec une deuxième tension d excitation (VB), lesdites tensions d excitation (VA, VB) ayant un déphasage mutuel, ledit procédé comprenant au moins : - la réception d une tension d entrée depuis une entrée d alimentation (4) pouvant être raccordée à une alimentation ; - le transfert d une charge entre ledit premier élément piézoélectrique () et ledit deuxième élément piézoélectrique (20) par couplage d au moins un des deux éléments inductifs (LA, LB) entre ledit premier élément piézoélectrique () et ledit deuxième élément piézoélectrique, et - la charge, avec chacun des deux moyens d élévation de tension (61, 62) mis en oeuvre en utilisant un des deux éléments inductifs (LA, LB), l un dudit premier élément piézoélectrique () et dudit deuxième élément piézoélectrique (20) à une tension qui est sensiblement plus élevée que la tension (VS) de l alimentation d entrée (4), ladite deuxième tension d excitation (VB) ayant une tension maximale, le procédé comprenant en outre la décharge dudit deuxième élément piézoélectrique (20) depuis ladite tension maximale de sorte que lesdits deux éléments inductifs (LA, LB) soient déconnectés d entre ledit premier élément piézoélectrique () et ledit deuxième élément piézoélectrique (20) pendant ladite décharge. 6. Procédé selon la revendication 6, dans lequel ledit un des deux éléments inductifs (LA, LB) est connecté en série avec une diode (DA, DB), ladite diode (DA, DB) étant dérivée pendant ledit transfert de charge par un autre commutateur (S7, S8). 7. Procédé selon la revendication ou 6, dans lequel chacun des deux moyens d élévation de tension (61, 62) comprend un troisième commutateur (S2, S) pour connecter l élément inductif correspondant à la terre (GND), ledit troisième commutateur (S2, S) étant commandé par une porte ET (7, 76) avec trois entrées, les entrées de ladite porte ET (7, 76) étant couplée à une horloge (CLK), à un comparateur (73, 74) et à une logique de commande (80), ledit 9

10 comparateur (73, 74) étant configuré pour arrêter le fonctionnement desdits moyens d élévation inductifs (61, 62) lorsque la tension desdits moyens d élévation inductifs (61, 62) atteint une tension cible prédéterminée. 8. Procédé selon la revendication 7, dans lequel ledit comparateur (73, 74) présente une hystérésis, lorsque la tension desdits moyens d élévation inductifs est à proximité de ladite tension cible prédéterminée. 9. Dispositif (300) comprenant au moins un dispositif d excitation d élément piézo-électrique selon la revendication 1 et au moins un actionneur piézo-électrique (0).. Dispositif (300) selon la revendication 9, ledit dispositif (300) étant un dispositif mobile. 11. Dispositif (300) selon la revendication 9 ou, dans lequel ledit au moins un actionneur piézo-électrique (0) comprend au moins deux bimorphes (, 20). 12. Dispositif selon l une quelconque des revendications précédentes 9 à 11, dans lequel ledit au moins un actionneur piézo-électrique (0) est configuré pour ajuster la position d un système d objectif de mise ou point ou de zoom

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18 REFERENCES CITED IN THE DESCRIPTION This list of references cited by the applicant is for the reader s convenience only. It does not form part of the European patent document. Even though great care has been taken in compiling the references, errors or omissions cannot be excluded and the EPO disclaims all liability in this regard. Patent documents cited in the description US B [000] WO A1 [0007] US W [0038] US B [0039] Non-patent literature cited in the description D.CAMPOLO. Efficient Charge Recovery Method for Driving Piezoelectric Actuators with Quasi-Square Waves. IEEE Transactions on ultrasonics, ferroelectrics, and frequency control, March 2003, vol. 0 (3 [0006] 18