YASKAWA AC SERVO DRIVES & CONTROLLERS

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1 YASKAWA AC SERVO DRIVES & CONTROLLERS Certified for ISO9001 and ISO14001

2 Trust Earned earned by Positive by Results positive results In 1958, Yaskawa first introduced the Minertia motor, which changed the world of servo systems. We continue to maintain a leading position in the global market for AC servo drives, and our long-standing positive results in product performance have earned the trust of the market. Yaskawa as Mechatronics Innovator Yaskawa Electric created the term mechatronics in the late 1960s. The term has received broad acceptance in the industry and is now used all over the world. This concept evolved when we combined our customer s machinery with Yaskawa s electronic products to create superior quality and function. Mechatronics enhances machinery performance by electronics and information technology to control machines. This innovative technology has been availed in introducing greater automation, efficiency and energy conservation in various industries. No limit for motion & control in industrial world The technologies and products of Yaskawa are used with outstanding results in semiconductor equipment, LCD manufacturing equipment, chip mounter, machine tools, and general-purpose machines. In recent years, they have been used in machinery that requires much more power, such as press machines and injection molding machines. They are also being used in new areas, such as in machine controllers that create high-value added machines and realize and support informatization, as well as in servomotors, which serve as the heart of many machines. Our unique mechatronic products and motion technologies are supported by our deep accumulation of expertise, and are making significant contributions in super high speed and high-precision controllers in various industries around the world. 3 -Mechatronics Based on the three I s of integration, intelligence, and innovation, Yaskawa will continue to meet your various needs by developing industry leading and revolutionary mechatronic products. The AC Servo Drive series, the first such device in Japan to achieve compliance with global safety standards, has become one shining example of this by achieving the highest performance in the industry. 2 3

3 YASKAWA AC Servo Drive Systems and Controller for Motion & Control Systems FA Computer Cell/Line Controls Real-Time Core Network Engineering Tool MPE720 P28 Machine Vision System MYVIS P29 Ethernet EtherNet/IP FL-net MP-Link MEMOBUS MP2000 Series Machine Controllers P26-27 Robot System Motion Controls Drivers Field Network AC Servo Drives P6-13 SERVOPACKs P14-19 AC Power Input DC Power Input JUNMA AC Servo Drives P24 Large-Capacity AC Servo Drives P25 AC Drives Robot Controller DX100 MOTOMAN-SDA10 I/O level data transfer MOTOMAN-VA1400 MECHATROLINK- MECHATROLINK- DeviceNet PROFIBUS-DP Position Control Speed Control A1000 V1000 Servomotors P20-21 SGMMV SGMJV SGMAV Actuators P22-23 Servomotors P20 Motors SGMPS μ SGMSV SGMGV SGMZS SGMMV Induction Motor Synchronous Motor (SPM Motor) Synchronous Motor (IPM Motor) Support for industrial standard networks for open system architecture We provide components compatible with common industrial standards, including real-time core networks to connect controllers, and field networks to connect equipment. Support for systems around the world through compliance with international standards. Support for multi-vendor system configurations. Real-time core network : Ethernet, MODBUS(MEMOBUS), FL-net, EtherNet/IP Field network : MECHATROLINK-, MECHATROLINK- (Contact your YASKAWA representative for information about support for other networks.) MECHATROLINK, the motion network from our motion control expertise Combined with our mechatronics components to assure optimum performance in a whole range of mechanical systems. Servo systems and input/output equipment necessary for modern machine systems can be easily connected, providing high-speed responses. 1 : n synchronous communication for high-precision motion control. Approved for SEMI E54.19 standards certification (sensor/actuator network communications standards for semiconductor equipment) Specifications MECHATROLINK- : Transmission speed:10 Mbps, Communication cycle: 250 s μ minimum, Transmission distance : Total 50 m max. MECHATROLINK- : Transmission speed:100 Mbps, Communication cycle: s μ minimum, Transmission distance: Between Stations 100 m max. 4 5

4 AC Servo Drives Sigma Five Superlative Performance Operate your machinery faster and with higher precision than ever! The delivers the highest performance in the industry. The best amplifier response in the industry slashes settling time. In-house comparison: 1/12 th Servo Adjustment Example: When the ball screw slider was run using a combination of the SGMJV-02ADA servomotor and SGDV-1R6A SERVOPACK. Outstanding 1.6 khz frequency response : Representative value when using a combination of the SGMAV-02ADA servomotor and SGDV-1R6A SERVOPACK at one time of the load moment of inertia ratio. Position Reference Speed Position Error Position Reference Speed Position Error Torque Reference Speed Reference Position Reference Position Control Section Speed Reference Speed - Frequency Characteristics Speed Control Section Torque Reference Current Control Section Servomotor M Positioning Completion Signal Settling Time Positioning Completion Signal Settling Time 0 to 4 ms ENC Enforced functions to suppress influence of vibration and friction Existing functions to minimize vibration have been enhanced, and new ones added, improving tracking and further reducing settling time. Vibration and noise during driving have also been cut, along with vibration at machine edges when stopping. Anti-resonance Control Without Anti-resonance Control Position Error Torque Reference Positioning Completion Signal Vibration Suppression Control Without Vibration Suppression Control Position Error Position Reference Speed Positioning Completion Signal Without Friction Compensation Reduces Vibration and Noise during Driving With Anti-resonance Control Position Error Torque Reference Positioning Completion Signal Reduces Vibration at Machine Edges when Stopping Position Reference Speed Positioning Completion Signal Compensation for changes in response speed due to friction is available as well. Changes in position errors by friction change from 0% to 30% With Vibration Suppression Control Position Error With Friction Compensation Changes in position errors by friction change from 0% to 30% Contributing to machine performance in conjunction with a medium-inertia motor Small Capacity SGMJV Series Low Heating Better Tact Time Ease of Use Encoder resolution 1,048,576 pulses/ revolution Medium Capacity SGMGV Series Compact Design Improved motor constants have reduced both losses and heating. Instantaneous peak torque has been boosted from 300% to 350%, contributing to shorter tact times. Moment of inertia ratio has been doubled in the same motor, reducing the moment of inertia ratio and boosting gain for faster settling. Smaller package and about 20% lighter, but with the same moment of inertia ratio as the conventional model. A small encoder connector is applied. Position Error Pulses Positioning Completion Signal 20 ms Difference Position Error Pulses Positioning Completion Signal 1 ms Difference Improved Vibration Resistance New coupling delivers typical 5G vibration resistance. 6

5 Outstanding Expandability Use servos that really fit into your system A rich selection of models and options to match your requirements Lineup with many reference types MECHATROLINK- communications reference MECHATROLINK- communications reference Compliant with applicable safety standards Easy compliance with machine safety standards Compliant with SEMI F47 standards for three-phase, 200-VAC SERVOPACKs Easy use with applications for semiconductors and LCD manufacturing equipment Note: SEMI F47 Standards: Specification for Semiconductor Processing Equipment Sag Immunity Extensive variety of motors to match any machine Medium-inertia servomotors Improved control stability Low-inertia servomotors High-speed acceleration and deceleration Selection of servo actuators Support for direct drive servomotors, linear servomotors, and linear sliders Wide selection of option modules for various communication interfaces and feedback Option Module Analog voltage and pulse train reference Command option attachable type SGDV SERVOPACKs Features a safety function equivalent to the STO (Safe Torque Off) function as defined in the international standard IEC This was a Japanese first (March 2007). Motor line-up to handle a wide range of markets and applications The first in the industry in Japan! With Safety Modules Features safety functions equivalent to the STO (Safe Torque Off), SS1 (Safe Stop 1), SS2 (Safe Stop 2), and SLS (Safely-Limited Speed) functions as defined in IEC This was a Japanese first (May 21, 2010). Resolution SGMAV (20 bit) SGMSV (20 bit) Low Inertia Semiconductors (Bonders) Electronic Components Semiconductors (Probes) LCD Scribers SGMJV (20 bit) SGMPS (17 bit) SGMGV (20 bit) Medium Inertia Machine Tools, MC Lathes/Grinders LCD Coater/ Dispensers Injection Molding Machines Metal Processing Linear (High resolution) Direct Drive Food Packaging Textiles Robot Articulated/ Scalar/Extraction Material Handling SGMJV (13 bit) Medium Inertia Moment of Inertia Ratio 7

6 AC Servo Drives Sigma Five Simple Start-up Making servo adjustment quick and simple Let the series simplify your life! Build the machine you ve dreamed of, today! Unpacking Installation and Wiring Basic Parameter Setting Trial Operation Gain and Filter Adjustment Operation Quick Setup SigmaWin Setup Wizard Simple parameter set-up with wizard-aided input Wiring Check Function The SigmaWin+ wiring check function checks your wiring in a single operation Simple Tuning Autotuning problems solved Get up and running quickly after hooking up the motor New Tuning-less Function Even without servo adjustment and with load changes, you can achieve oscillation-free and vibration-free drive within the allowable load moment of inertia. 1. There is no limitation in reference type, friction degree, or machine type. The allows stable operation even during load change operations, as in workpiece handling. 2. No tuning required. You can start or stop operation at any time, without setup and saving the parameters. Settling time: 100 to 150 ms level Minimize settling time with less vibration New Advanced Autotuning The feedback gain adjustment function has a new automatic feed forward gain adjustment for optimal adjustment performance. Friction Compensation Function automatically cancels out the effect of friction on machine characteristics. Automatic Load moment of inertia ratio calculation Maximum gain search Settling time: 10 ms level Manual adjustment required (earlier models) Notch filter setting No oscillation Feedback gain setting Feed forward gain setting USB1.1 Support Trace Function Real-time trace of adjustments through USB allows instant status check of adjustment. Fine-tuning is a must New One-parameter Tuning Fine tuning with the up and down key of the digital operator or with SigmaWin+ software can maximize machine performance. Notch filter Settling time: 0 to 4 ms level : Settling time varies depending on machine mechanism and rigidity. Speed loop gain Position loop gain Speed loop integral time constant Torque reference filter time constant Model gain Friction compensation One parameter adjustment range (earlier models) Setup time slashed by 90% (in-house comparison) 8 9

7 AC Servo Drives Sigma Five High-speed Digital Communication If you re looking for greater synchronization accuracy... MECHATROLINKhas a high performance solution. MECHATROLINK- brings you high-speed digital communication with a baud rate of 100 Mbps, by applying Ethernet technology. MECHATROLINK- controls 62 slaves in perfect synchronization, enabling the high-speed cyclic communication and high-capacity message communication required for motion control. System Configurations for MECHATROLINK- Communications Reference MECHATROLINK- supports a variety of system configurations through cascade connections or star connections using a hub. Setup Tool HMI Master Controller Master Controller Ethernet MP2300 MP2310 MP2300S MP2500 MECHATROLINK- 100 Mbps MECHATROLINK- MECHATROLINK- MECHATROLINK Hub Servo Drive I/O Temperature Controller AC Drive Stepping Motor Drive Slave Controller Sample system configuration with MP series PC MP2000 Series Real-time Core Network MP2200 Servo Servo Servo Servo 10

8 Master MECHATROLINK- Communications Reference Features Ultra high-speed communication at a baud rate of 100 Mbps and a minimum transmission cycle of 125 μs. A range of control data (including position data, 48-byte data length samples, with 8 monitors speed data, and I/O data) requiring real-time Command responses can be transmitted in large volumes and at Positioning Watchdog data high speeds. This enables high quality motion control Command control and reduced tact time. (See the table on the right.) The four-axis servomotor realizes a transmission cycle of 125 μs. The eight-axis servomotor reaches 250 μs. Example of transmission cycle at 125 μs Four-axis servomotor : 48 bytes Connects with up to 62 slave stations. Maximum distance between stations is 75 m. Minimum distance between stations is 20 cm. Maximum of 75 m between stations Minimum of 20 cm between stations Bytes to 7 8 to to to to to to Servo command control Servo command I/O signal Target position Response Positioning Watchdog data Command control status Servo command status Servo command I/O signal Monitor 1 Target speed Monitor 2 Acceleration Monitor 3 Deceleration Monitor 4 Torque limit Monitor 5 Subcommand Monitor 6 Monitor 7 Monitor 8 Slave No.1 Slave Slave Slave No.2 No.3 No.62 C1 master or C2 master can communicate with slaves by using message communication. Slaves can monitor the cyclic communication data of other slaves. Message communication can be performed from a C2 master. Communication between the master and slave devices can be monitored. C1 Master C2 Master (Tool) C1 Master Communications Data Monitoring Communications Data Slave Slave Slave Slave Slave Slave Note : The above specifications depend on the controllers used. For details of MECHATROLINK- Association website. communication specifications, please visit the MECHATROLINK Members 11

9 PC Software for AC Servo Drive Support SigmaWin+ Supported OS: Windows 2000/XP/Vista SigmaWin+ is a Windows-based engineering PC tool with various monitoring functions to make quick and easy adjustments to the settings for Yaskawa servo drives. Parameter Setting using Wizard SERVOPACK internal data can be displayed in the monitor just like an oscilloscope. Calculating Moment of Inertia and Measuring Vibration Frequency Alarm Display and Alarm Diagnostic Function Enhanced Engineering Tools MECHATROLINK- & communicate via the MP2000 series to allow servo adjustment without the need to change the SERVOPACK connection. The SigmaWin+ and the MPE720 engineering tool for the MP2000 series must be installed. Applicable versions are shown in the table below. Products SigmaWin+ MPE720 SERVOPACKs MP2000 Series Machine Controllers MP2000 Series Motion Control Modules MECHATROLINK Ver.5.30 or later Ver.6.23 or later 015 or later Ver.2.71 or later SVC-01: Ver.1.02 or later Ver.5.11 or later Ver.6.10 or later 011 or later Ver.2.66 or later SVB-01: Ver.1.25 or later Servo MP2000 Series MECHATROLINK- Servo Servo Laptop Computer MECHATROLINK-compatible MP2000 Models MP2200 (CPU03) MP2300S MP2310 MP2500 MP2400 MP2100 (PCI Bus) :Compatible MECHATROLINK 12

10 Servo Capacity Selection Software SigmaJunmaSize+ Supported OS: Windows 2000/XP/Vista SigmaJunmaSize is a Web-based software application used to easily select the optimal YASKAWA servo drives for your machinery. Available from our website at Features 1. A wide range of the latest information 2. A wizard system with a conversational mode to select optimal servo drives. 3. View SigmaJunmaSize in your browser wherever internet access is available. (Enhanced security measures with cryptographics) 4. Available to view and reuse previously input and stored data. Servo Selection Screen Application Selection Window Machine Information Input Window Velocity Diagram Input Window Operating Condition Selection Window Enhanced Engineering Tools Motor Selection Window SERVOPACK Selection Window 13

11 Introducing the newest addition to the lineup for the next step in the evolution of communication: MECHATROLINK- with a transmission speed of 100 Mbps. AC Servo Drive AC Power Input SERVOPACK RoHS compliant Easy to use with latest technology New Tuning-less Function means no adjustment is needed. Impressive load regulation with strengthened Vibration Suppression Function. Slashed setup time Setup wizard and wiring check function of engineering tool SigmaWin+ allow easy setup, just by watching the monitor. High response characteristics up to 1.6 khz New Advanced Autotuning realizes reduced positioning time through Model Following Control, and smooth machine control by Vibration Suppression Function. Compliant with applicable safety standards Easily comply with machine safety standards. Already compliant with IEC61508 series SIL 2, EN ISO :2008 category 3, IEC Stop category 0. Also safety features compliant with the STO (Safe Torque Off) function as defined in IEC Compliant with SEMI F47 standards (three-phase, 200 VAC SERVOPACKs) Ready to use for semiconductor and LCD manufacturing equipment because voltage sags are detected, torque is automatically lowered, and voltage sag immunity specifications for semiconductor processing equipment have been satisfied. With Rotary Servomotors With Linear Servomotors Control Method Torque, Speed, Position Control Method Force, Speed, Position Power Supply 100 V 200 V 400 V Power Supply 100 V 200 V 400 V Applicable Servomotor Capacity 50 W to 400 W 50 W to 15 kw 300 W to 15 kw Rated Force/ Peak Force(N) 12.5 to 140/ 40 to to 2000/ 40 to to 2000/ 220 to

12 Analog /Pulse Train Reference Input Reference Specifications Analog Reference Pulse Train Reference Speed Control Torque Control Position Control Reference Reference Reference Pulse Type Form Max. Input Pulse Frequency Max. input voltage: 12 V (forward speed reference with positive reference) Factory setting: 6 VDC at rated speed (Input gain setting can be changed.) Max. input voltage: 12 V (forward torque reference with positive reference) Factory setting: 3 VDC at rated torque (Input gain setting can be changed.) Select one of them: Sign + pulse train, CW + CCW pulse train, or two-phase pulse train with 90 phase differential For line driver, open collector Line driver Sign + pulse train, CW + CCW pulse train: 4 Mpps Open Collector Two-phase pulse train with 90 phase differential:1 Mpps Sign + pulse train, CW + CCW pulse train: 200 kpps Two-phase pulse train with 90 phase differential: 200 kpps Clear Signal (Position Error Clear) For line driver, open collector : If the maximum reference frequency exceeds 1 Mpps, use a shielded cable for I/O signals and ground both ends of the shield. Connect the shield at the SERVOPACK to the connector shell. MECHATROLINK- and Communications Reference Compatible with all features of the new Series Real-time communication A high transmission speed allows real-time transmission of various data required for control. Cost savings Multiple stations can be connected to a single MECHATROLINK transmission line, so wiring costs and time are greatly reduced. Also, only one signal connector is required on the host controller. And, the all-digital network eliminates the need for a converter to change speed/torque references from digital to analog and for a pulse generator to create position references. High-precision motion control The SGDV SERVOPACK when connected to the host controller in the MECHATROLINK- / network provides not only torque, position, and speed control but also synchronized phase control that requires advanced control technology. The control mode can be changed online so that the machine can move smoothly in complex motions with great efficiency. MECHATROLINK Communications Specifications Communications Protocol MECHATROLINK- Physical Layer Ethernet Baud Rate 100 Mbps Transmission Cycle 125 μs to 4 ms Number of Transmission Bytes 16 bytes/station, 32 bytes/station, 48 bytes/station Number of Slaves 62 max. Maximum Transmission Distance 75 m between stations Minimum Distance between Stations 20 cm Topology Cascade or star MECHATROLINK- Same as RS Mbps 250 μs to 4 ms 17 bytes/station, 32 bytes/station 30 max. 50 m total (100 m with Repeater) 50 cm Bus MECHATROLINK- Communications Reference MECHATROLINK- Communications Reference Command Option Attachable Type Compatible with all features of the new Series SERVOPACKs can interface with various communication formats by using attached command option modules. Note: Be sure to use command option modules for command option attachable type SERVOPACKs. These SERVOPACKs will not work without the modules. 15

13 With Option Module Optimal expandability can be achieved by attaching an option module to the SERVOPACK. SERVOPACKs and their compatible option modules SERVOPACK INDEXER Module : Compatible : Not Compatible Analog /Pulse Train Reference MECHATROLINK- Communications Reference MECHATROLINK- Communications Reference Command Option Attachable Type Note: Although more than one option module can be attached, certain combinations cannot be used. See the following table. Modules INDEXER Safety Fully-closed INDEXER Safety Fully-closed Option Module Fully-closed Module : Can be used together : Cannot be used together Safety Module Using Commands INDEXER Module Simple Interactive methods for everything from adjustment to programming are available with the setup support tool SigmaWin+ for Windows (Ver.5.30 or later). Simple connection to the host controller can be established with the I/O module. Smart Special languages are not required, because required operation patterns are easily made by simply setting the data for position and speed in program tables. Optimum operation method supports your application. For positioning, up to 256 steps can be programmed. <Operation>Program tables, Position and speed tables (station positioning), Registration (positioning by external signals), Serial communication Various functions, including external positioning, JOG table operation, homing, and programmable signal outputs are provided. Speedy Reliable high-speed, high-precision positioning when combined with high-performance series servo drives. Motion control is accomplished without using motion controllers. Specifications Function Stations for Program Table Operation JOG Speed Setting ZONE Signal Output Serial Communication Homing Methods Equally-dividing and Indexing Positioning (Station Positioning Command) Program Table Editing Window Specifications HR: ASCII; max. axes: 16 MEMOBUS: Binary 3 Rotary machine and tool setting Application Examples Point-to-point positioning (X-Y Table) Station positioning (Indexing) (Rotary Table) Feeding (Labeling Machine) 16

14 With Feedback Fully-closed Module High-precision and high-response positioning by using feedback from detector (such as an external encoder) installed on the machine. High resolution with external encoders (linear scales). : The serial converter unit is used with the linear scales made by HEIDENHAIN Corporation or Renishaw plc. The serial converter unit is not required if using the linear scales made by Magnescale Co., Ltd. or Mitutoyo Corporation. Servomotor Main Circuit Cable Cable for Connecting Serial Converter Unit Encoder Cable Serial Converter Unit External Encoder Cable External Encoder (Provided by users.) With Safety Functions Safety Module The Safety Module complies with EN ISO (the standards harmonized with EU Machinery Directive 2006/42/EC) and has safety functions equivalent to those stipulated in IEC By using the module in combination with SGDV SERVOPACKs, optimum safety designs can be created for mechanical systems to better meet the needs of the industry. The first product for AC servo drives in Japan that has safety functions equivalent to the following ones stipulated in the international standard IEC Safe Torque Off (STO) Safe Stop 1 (SS1) Safe Stop 2 (SS2) Safely Limited Speed (SLS) Two safety functions (A and B) are provided and stopping functions can be allocated individually to these safety functions. With the attachable Safety Modules for SERVOPACKs, system configurations are simplified and compact. Compliance with Safety Standards Safety Standards EN ISO :2008 Safety of EN Machinery Functional Safety EMC Applicable Standards IC IEC Series IEC IEC IEC SERVO PACK Products SERVOPACK + Safety Module With Functions Defined by IEC By using the Hard Wire BaseBlock function (HWBB) of SERVOPACKs, the following four safety functions can be achieved. Safety Function Safe BaseBlock Function (SBB function) Safe BaseBlock with Delay Function (SBB-D function) Safe Position Monitor with Delay Function (SPM-D function) Safely Limit Speed with Delay Function (SLS-D function) Description This safety function is equivalent to the STO function. It shuts OFF the power supply to the motor. This safety function is equivalent to the SS1 function. It shuts OFF the power supply to the motor after monitoring the deceleration of the motor for the specified length of time. This safety function is equivalent to the SS2 function. It monitors the deceleration of the motor for the specified length of time and the position after the motor has stopped. This safety function is equivalent to the SLS function. It monitors the deceleration of the motor for the specified length of time and the motor speed to make sure it is within the allowable range. SERVO PACK Products SERVOPACK + Safety Module 17

15 Introducing new compact design for DC power input SERVOPACK to save facility space. AC Servo Drive DC Power Input SERVOPACK RoHS compliant Designed for compactness This compact drive enables effective use of limited space, leaving more space for the controller and equipment. DC power input drive The compact, high-performance, DC power input type of SERVOPACK raises the standard for battery-driven systems such as clean handling robots and automatic guided vehicles (AGVs). The control power supply and the main circuit power supply run independently of each other, so the main circuit power supply can be shut off for easy troubleshooting when an alarm occurred. Either a 24 VDC or a 48 VDC power supply can be used for the main circuit. With a 48 VDC power supply, the motor s torque and speed characteristics can be further improved. The control power supply is always 24 VDC, regardless of the voltage for the main circuit power supply. The level at which these characteristic can be improved depends on the servomotor. High-performance and easy-to-use drive with cutting edge technologies New Advanced Autotuning Function helps you set your system to the optimal conditions in the minimum time. The following functions are also provided: Model Following Control to reduce positioning time, Vibration Suppression Function to minimize vibration, Friction Compensation Function to adapt the system to load changes, and New Tuning-less Function for system setup and for applications with large load changes. Analog Reference Pulse Train Reference MECHATROLINK-2 and 3 Communications Reference Control Method Speed, Torque Position Position, Speed, Torque Power Supply Main Circuit Control Circuit 24 VDC±15%/48 VDC±15% 24 VDC±15% Applicable Servomotor Capacity 3.3 W to 30 W 18

16 Analog Reference/ Pulse Train Reference Input Reference Specifications Analog Reference Pulse Train Reference Speed Control Torque Control Position Control Reference Reference Reference Pulse Type Form Max. Input Pulse Frequency Max. input voltage: 12 V (forward speed reference with positive reference) Factory setting: 6 VDC at rated speed (Input gain setting can be changed.) Max. input voltage: 12 V (forward torque reference with positive reference) Factory setting: 3 VDC at rated torque (Input gain setting can be changed.) Select one of them: Sign + pulse train, CW + CCW pulse train, or two-phase pulse train with 90 phase differential For line driver, open collector Line driver Sign + pulse train, CW + CCW pulse train: 4 Mpps Open Collector Two-phase pulse train with 90 phase differential:1 Mpps Sign + pulse train, CW + CCW pulse train: 200 kpps Two-phase pulse train with 90 phase differential: 200 kpps Clear Signal (Position Error Clear) For line driver, open collector : If the maximum reference frequency exceeds 1 Mpps, use a shielded cable for I/O signals and ground both ends of the shield. Connect the shield at the SERVOPACK to the connector shell. MECHATROLINK- and Communications Reference Compatible with all features of the new Series Real-time communication A high transmission speed allows real-time transmission of various data required for control. Cost savings Multiple stations can be connected to a single MECHATROLINK transmission line, so wiring costs and time are greatly reduced. Also, only one signal connector is required on the host controller. And, the all-digital network eliminates the need for a converter to change speed/torque references from digital to analog and for a pulse generator to create position references. High-precision motion control The SGDV SERVOPACK when connected to the host controller in the MECHATROLINK- / network provides not only torque, position, and speed control but also synchronized phase control that requires advanced control technology. The control mode can be changed online so that the machine can move smoothly in complex motions with great efficiency. MECHATROLINK Communications Specifications Communications Protocol MECHATROLINK- Physical Layer Ethernet Baud Rate 100 Mbps Transmission Cycle 125 μs to 4 ms Number of Transmission Bytes 32 bytes/station, 48 bytes/station Number of Slaves 62 max. Maximum Transmission Distance 75 m between stations Minimum Distance between Stations 20 cm Topology Cascade, star, or point-to-point MECHATROLINK- Same as RS Mbps 250 μs to 4 ms 17 bytes/station, 32 bytes/station 30 max. 50 m total (100 m with repeater) 50 cm Bus MECHATROLINK- Communications Reference MECHATROLINK- Communications Reference 19

17 A diverse motor line-up to meet the requirements of your machines, including our motor with the 20-bit encoder, the highest resolution in the industry. AC Servo Drive SERVOMOTOR RoHS compliant Refer to page 30 for applicable SERVOPACKs. SGMMV (Low Inertia, Ultra-Small Capacity) Ultra-small size and capacity ( 15 mm flange model: 3.3 W to 11 W, 25 mm flange model: 10 W to 30 W) Mounted with a 17-bit high-resolution serial absolute encoder which can be used as an incremental encoder. Realizes maximum speed of 6000 min -1. Application Examples Semiconductor equipment LCD manufacturing equipment Electronic part mounting machines and manufacturing equipment Metal processing machines Robots SGMJV (Medium Inertia, Small Capacity) Rated Output Rated Speed/ Max. Speed (min -1 ) For 24 VDC and 48 VDC 3.3 W to 30 W 3000/ VAC Option: Holding brake : 25 mm flange model only Assembling equipment Testing equipment and measuring instruments Clean systems Automatic guided vehicles (AGVs) Bio-medical equipment Instantaneous peak torque (350% of rated torque) Mounted high-resolution serial encoder: 13, 20 bits Application Examples Semiconductor equipment Chip mounters PCB drilling stations Robots Material handling machines Food processing equipment Rated Output Rated Speed/ Max. Speed (min -1 ) Options: Holding brake, gear 200 V 50 W to 750 W 3000/ SGMAV (Low Inertia, Small Capacity) Super high power rate Instantaneous peak torque (300% of rated torque) Mounted high-resolution serial encoder: 20 bits Application Examples Semiconductor equipment Chip mounters PCB drilling stations Robots Material handling machines Food processing equipment Rated Output Rated Speed/ Max. Speed (min -1 ) Options: Holding brake, gear 200 V 50 W to 1 kw 3000/6000

18 SGMPS (Medium Inertia, Small Capacity) Flat type Mounted high-resolution serial encoder: 17 bits Protective structure: IP55 Application Examples Semiconductor equipment Chip mounters PCB drilling stations Robots Material handling machines Food processing equipment Rated Output Rated Speed/ Max. Speed (min -1 ) 200 V 100 W to 1.5 kw 3000/6000 Options: Holding brake, gear, protective structure of IP67 compliance SGMGV (Medium Inertia, Medium Capacity) High-speed driving of feed shafts for various machines Mounted serial high-resolution encoder: 20 bits Protective structure: IP67 Application Examples Machine tools Transfer machines Material handling machines Food processing equipment Metal processing machines 200 V 400 V Rated Output 300 W to 7.5 kw 11 kw,15 kw 300 W to 7.5 kw 11 kw,15 kw Rated Speed/ 1500/ / / /2000 Max. Speed (min -1 ) Options: Holding brake, oil seal SGMSV (Low Inertia, Medium Capacity) Super high power rate Mounted serial high-resolution encoder: 20 bits Protective structure: IP67 Not including the IP22 compliant enclosure for the 7.0 kw motor) Application Examples Chip mounters PCB drilling stations Semiconductor equipment Robots Material handling machines Rated Output Rated Speed/ Max. Speed (min -1 ) Options: Holding brake, oil seal 200 V 400 V 1.0 kw 1.5 kw to 7.0 kw 1.0 kw 1.5 kw to 5.0 kw 3000/ / / /5000 SGMZS (Certified Explosion Proof) RoHs compliant only Usage Environment Explosion proof sign Explosion proof type: Flameproof enclosure Group: B (Applicable for explosive gasses of classifications A and B) Temperature class: T4 Compact and lightweight No connection required in the motor terminal box Explosion Proof Designation (Scope of Certification) Ex d B T4 Temperature Class (Maximum Motor Flame temperature: 100 C 135 C) T1 T2 T3 T4 T5 T6 Applicable range Rated Output Rated Speed/ Max. Speed (min -1 ) Gas and Vapor Classification 2.96 kw 2000/ V 0.2 kw to 2.97 kw 3000/5000 Options: Holding brake, oil seal (no oil seal option for 0.2-kW motor) Notes: 1 Use SERVOPACKs with three-phase 200 VAC input. 2 The 0.2-kW motor has a SERVOPACK that is powered by single-phase, 200 VAC input. Explosion Class A B Acetone, benzene, ammonia, methanol, ethane, toluene, Acrylonitrile, hydrogen cyanide, propane, methane, acetic acid cyclopropane, coke-oven gas Ethanol, butanol, butane, methyl methacrylate Gasoline, hexane, pentane Acetaldehyde, trimethylamine Nitrous ether Ethylene, ethylene oxide, ethyl acrylate Acrylic aldehyde, dimethyl ether Ethyl methyl ether, diethyl ether 21

19 We offer various types of actuators. AC Servo Drive ACTUATOR Refer to pages 31 and 32 for applicable SERVOPACKs. Direct Drive Servomotors SGMCS Directly couples to a load without any mechanical transmission such as a gear. Powerful and smooth running throughout all the low to high speed ranges High-resolution, 20-bit encoder for highly precise indexing Easy wiring and piping enabled by the hollow structure Application Examples Semiconductor equipment IC handlers LCD manufacturing equipment Inspection units for integrated circuits Units for inspection and testing Automated machines Chip mounter Robots Rated Torque / Peak Torque (N m) Rated Speed / Max. Speed (min -1 ) 2 to 16/ 6 to 48 10/ 30 17/ V 14/ to 110/ 135 to to 200/ 75 to / / / / / /250 Linear Servomotors SGLGW (Coreless type) Direct-feed mechanism for high-speed and high-precision positioning Lack of magnetic attraction force helps extend the life of linear motion guides and minimizes noise. Zero cogging for minimal force ripple Application Examples Feeders and loaders Semiconductor equipment LCD manufacturing equipment 22 Peak Speed (m/s) Rated Force/ Peak Force (N) Standard High Force 200 V 200 V 4 to to 750/ 57 to 255/ 40 to to 1080

20 SGLFW (With F-type iron core) Direct-feed mechanism for high-speed and high-precision positioning The large magnetic attraction force between the moving and stationary members can be used to effectively increase the rigidity by preloading the linear guide. The magnetic preloading on linear guide can help increase the system s frequency response, improving its damping and settling performances. Application Examples 200 V 400 V Feeders and loaders Peak Speed (m/s) 4.9 to to 5 Semiconductor equipment Rated Force/ LCD manufacturing equipment 25 to 1120/ 80 to 1120/ Peak Force (N) 86 to to 2400 SGLTW (With T-type iron core) Direct-feed mechanism for high-speed and high-precision positioning Yaskawa's unique construction principles of the SGLTW linear motors negate the effects of the magnetic attraction force between the relative motor members. Lack of magnetic attraction force helps extend the life of linear motion guides and minimizes noise. Very little cogging Applications Examples Feeders and loaders Mounters Peak Speed (m/s) Rated Force/ Peak Force (N) 200 V 2.5 to to 2000/ 380 to 7500 Standard 400 V to 2000/ 2600 to 7500 High-efficiency Type 200 V 3.1 to to 900/ 600 to V 4 to to 900/ 600 to 1800 SGLC ( - Stick : Cylinder type) Both magnetic ways supported, easy switching from ball screws Compared to ball screw systems, high-speed and high-precision positioning greatly reduces tact time. Unlike ball screws, no contact with machines, no lubrication oil, easy maintenance Application Examples Semiconductor equipment Electronic parts assembly Food packaging machines Metal processing machines General handling machines Peak Speed (m/s) Rated Force/ Peak Force (N) 200 V 4 17 to 180/60 to 840 Linear Sliders SGT( -Trac) SGTMM( -Trac- μ) SGTMF( -Trac-MAG) Application Examples Application Examples Application Examples LCD manufacturing equipment Semiconductor equipment Chip mounter Semiconductor equipment Chip mounter Equipment for biomedical Bonder machine Press feeder Alignment equipment Medical equipment For long strokes and high-speed, highprecision positioning (repetitive positioning accuracy less than ±1.0 m) μ Several tables can be mounted on one magnetic way, and each table can be driven independently. Standard and high-precision models are available. Rated Force (N) 47 to 560 Peak Force (N) 140 to 1200 Effective Stroke (mm) 70 to 1950 Ultra-flat profile reduces floorspace requirements. For applications requiring short strokes Vibration-free transmission device enables high-precision positioning with a repetitive positioning accuracy of ±0.5 μ m max. Locations of armature coils on the stator reduce the effects of heat on the table or workpiece. Rated Force (N) Peak Force (N) Effective Stroke (mm) 3.5, 7 10, to 65 Optimum drive for high-acceleration /deceleration and high-tact operations because of its lightweight moving member For applications requiring short strokes Cooling units (pipes, etc.) for forced-air or liquid cooling systems can be placed on the stator. Linear scale options: Incremental or absolute Improved stroke efficiency Ratio of effective stroke to the total length of drive system Rated Force (N) 90 to 200 Peak Force (N) 270 to 720 Effective Stroke (mm) 65 to

21 Completely automatic adjustment enables increased operability. It s as easy as operating a stepping motor. This compact and high torque AC servo drive can be used in any mechanism, and enables easy positioning. AC Servo Drive RoHS compliant Simple operation!! Completely automatic adjustment!! The state-of-the-art autotuning function provides top response without any adjustments. No need for parameter settings. All you have to do is to take it out of the box and connect it. This servo drive delivers a new concept that realizes maximum response and operability, making operation as easy as using a stepping motor. JUNMA can provide highly precise positioning with easy operability, as easy as using a stepping motor. It can be used for a variety of mechanisms. Horizontal Transfer Application Examples Unloader Horizontal Transfer Loader No step-out!! Low vibration!! The step-out that you may experience with stepping motors is absent in servomotors, even with a sharp acceleration or sudden load change. There is also none of the vibration that you experience with semi-closed loop type stepping motors. You can experience the uniquely smooth operation of a servo drive. Conveyer Conveyer Alignment Servomotors SERVOPACKs Pulse Train Reference MECHATROLINK- Communications Reference 200 V Power Supply Single-phase 200 V Rated Speed/ Max. Speed(min -1 ) 3000/4500 Applicable Servomotor Capacity 100 W to 750 W 24 Rated Output 100 W to 750 W Option: Holding brake

22 Superior performance, super compact size, ease of use and stellar reputation for boosting efficiency by reducing power consumption have always made the large-capacity drives the favorite choice for heavy-duty applications. The new line of servomotors now packs even more performance into smaller packages than ever. Look to the large-capacity to achieve new levels of performance with your heavy-duty machinery! AC Servo Drive Compact, low-inertia servomotors The new SGMVH models provide the ultimate combination in compactness and low inertia with rated outputs from 22 to 75 kw and at rated speeds of 1500/800 min -1. Compared with SGMBH servomotors: Moment of Inertia : 75 to 50% Mass : 60 to 80% High-precision, high-efficiency SERVOPACKs Our d-q conversion current control scheme improves torque control precision (repeatability) from ±5% to ±2%. Highspeed CPU processing and expanded control algorithms deliver extremely fast response to minimize tact time. Simple implementation The automatic motor identification function sets motor parameters for you, simplifying setup, and the following modules can be instantly connected to the SERVOPACK for quick network support (excluding 75-kW models). MECHATROLINK- : JUSP-NS115 module Fully-closed loop control:jusp-fc100 module Easy maintenance Just connect to a PC for simple parameter definition/change/ backup, trace functions and other tools to make motor adjustment simpler than ever. If an alarm is generated, only the main circuit power supply is cut. The monitor function makes it possible to diagnose faults and identify causes quickly for minimum downtime. Machine Tools Helps meet speed and capacity demands of feed and spindle motors in high-speed, heavyduty machining applications. Rotary Cutters Outstanding acceleration/deceleration torque for high-speed tracking LCD Manufacturing Equipment (photoresist spin coaters) Large-capacity servomotors deliver the acceleration/deceleration torque needed for high-precision, quick-settling speed control, spinning glass substrates for up to thousands of revolutions per minute. Transfer Presses The large-capacity servo drives bring new levels of performance to today s large, high-speed machinery, quieter than ever with digital technology. Chip Mounters Try the large-capacity for main spindle motors in advanced, high-speed systems, to achieve higher throughput. Servo Presses and Injection Molding Systems To attain cleaner and more efficient operation, presses are evolving from hydraulic to electric. The new large-capacity SGMVH servomotor improves the performance of the previous generation with extensive install base, delivering further improvements in productivity. Servomotors SERVOPACKs Application Examples Rated Speed/ Max. Speed (min -1 ) 200 V 400 V 800/ / / /2000 Rated Output 22 kw to 37 kw 22 kw to 37 kw 22 kw to 45 kw 22 kw to 75 kw Options: Holding brake, oil seal, dust seal, foot mounted type Control Method Power Supply Applicable Servomotor Capacity Speed, Torque, Position 200 V 22 kw to 37 kw 400 V 22 kw to 75 kw 25

23 High-speed multi-axis control with high level synchronicity makes an ideal module. Machine Controller RoHS compliant Flexible Machine Controller MP2200 The flagship of the MP2000 Series machine controllers, with a high-speed motion control cycle of only 0.5 ms. Up to 35 slots including up to 4 for EXIOIF modules can be added for optional modules. Customizable module type machine controller Wide selection of modules (motion control modules, I/O modules, communication modules) Maximum Number of Controllable Axes MP2200 Motion control module 16 (max.) CPU Modules for MP2200 Module Name CPU01 CPU02 CPU03 CPU04 MPU01 Description 256 axes Memory: 7.5 Mbytes CompactFlash card slot 1, USB port 1, Memory: 11.5 Mbytes CompactFlash card slot 1, Ethernet (100/10BASE-TX) port 1, Memory: 11.5 Mbytes Ethernet (100/10BASE-TX) port 1, Memory: 11.5 Mbytes MECHATROLINK- port 1, Memory: 11.5 Mbytes Execution Speed Comparison (CPU01 =1) All-in-one Type Machine Controller MP2310/MP2300S/MP2300 Slots for optional modules are provided for easy construction of various network systems and to allow expansion of I/O. Flexible system construction is possible. Wide selection of modules Simplified operation for startup Applicable for open networks (Ethernet, EtherNet/IP, CC-Link, DeviceNet, PROFIBUS, FL-net) With Ethernet port (100 Mbps) (MP2310/MP2300S) Synchronization of distributed systems with MECHATROLINK (MP2300S) 26 Maximum Number of Controllable Axes MP2310 MP2300S MP2300 MECHATROLINK- and Ethernet (100MB-TX) port + motion control module 3 (max.) MECHATROLINK- and Ethernet (100MB-TX) port + motion control module 1 (max.) MECHATROLINK- and I/O port + motion control module 2 (max.) 64 axes 32 axes 48 axes

24 Panel Type Machine Controller MP2500/MP2500M/MP2500B/MP2500MB An all-in-one machine controller that combines sequence control, motion control, and HMI in one panel computer to meet a wide range of applications. A controller with an integrated touch panel State-of-the-art functions Highly operable software Maximum Number of Controllable Axes Panelintegrated type Panelseparated type MP2500 MP2500M MP2500B MP2500MB MP2500B-OP MP2500MB-OP 16 axes 32 axes 16 axes 32 axes 16 axes + optional module 1 32 axes + optional module 1 Compact Unit Type Machine Controller MP2400 Ports for the MECHATROLINK and Ethernet (100BASE-TX) are a standard feature to help realize a stand-alone system that requires less space and less wiring. Simplified operation for startup Easy setup Free downloading of engineering tool MPE720 Maximum Number of Controllable Axes MP axes Board Type Machine Controller MP2100/MP2100M 51 motion Application Program Interfaces (APIs) are available to realize the motion control desire using your personal computer. Maximum Number of Controllable Axes MP axes Regular Motion API for easy programming MP2100M 32 axes speed of motion control MECHATROLINK- MP axes Up to 3 racks of MP2200 base units, which MP2101M 32 axes High can contain a total of 24 additional modules, MP2101T 16 axes speed MECHATROLINK- with the MP2100MEX on the MP2100M. MP2101TM 32 axes Selection of Modules Motion Control Modules Name Description SVC-01 MECHATROLINK- 1 channel SVB-01 MECHATROLINK- 1 channel SVA-01 Analog-output 2-axis servo control PO-01 Pulse-output 4-axis servo control Note: Up to 16 modules can be attached. I/O Modules Name Description Digital input: 16 points, LIO-01 Digital output: 16 points (sink output mode), Pulse input: 1 point Digital input: 16 points, LIO-02 Digital output: 16 points (source output mode), Pulse input: 1 point Digital input: 32 points, Digital output: 32 points LIO-04 (sink output mode) Digital input: 32 points, Digital output: 32 points LIO-05 (source output mode) Digital input: 8 points, Digital output: 8 points (sink output mode), Analog input: 1 channel, LIO-06 Analog output: 1 channel, Pulse counter: 1 channel DO-01 Digital output: 64 points (sink output mode) Name AI-01 AO-01 CNTR-01 Description Analog input: 8 channels Analog output: 4 channels Pulse-input counter Communication Modules Name 218IF IF IF IF IF IF IF AIF-01 MPLINK Description Ethernet (10BASE-T) port 1 RS-232C port 1 Ethernet (100BASE-TX) port 1 RS-232C port 1 RS-232C port 1 RS-422/485 port 1 DeviceNet port 1 RS-232C port 1 PROFIBUS port 1 RS-232C port 1 FL-net, (100BASE-TX) port 1 (10BASE-TX) port 1 EtherNet/IP, (100BASE-TX) port 1, (10BASE-TX) port 1 MPLINK communication/rs-232c 215AIF-01 CP-215 CP-215 communication/rs-232c Note: Up to 8 modules can be attached. Distributed I/O Modules for MECHATROLINK- Name Description 64-point input/64-point output IO2310 (sink output mode) 64-point input/64-point output IO2330 (source output mode) PL2900 Counter PL2910 Pulse output AN2900 Analog input AN2910 Analog output IO2900-E 16-point input module IO2910-E 16-point output module IO2920-E 8-point I/O module IO2950-E Relay output module Name MTD2310 MTA2900 MTA2910 MTP2900 MTP2910 Description 64-point input (sink/source mode input) 64-point output (sink mode output) Analog input: 8 channels Analog output: 4 channels Pulse input: 2 channels Pulse output: 4 channels Other Modules CC-Link (slave module), Anywire-DB (master module), A-net/A-Link (master module) 27

25 Integrated Engineering Tool for MP2000 Series MPE720 Ver.7 Compatible with Windows 7 64-bit edition Optimum engineering tools for motion control & dramatic increases in efficiency MPE720 Integration Integration SigmaWin+ DriveWizard Plus Evolution of an integrated engineering tool! One tool MPE720 Ver.7 replaces all of the servo drive and inverter adjustment tools needed for the engineering of an entire drive system. A single MPE720 can be used to view all data of servo system components for total management of servo system operations from setup to maintenance. Enhanced Engineering Tools Easy Programming for Motion Control Only two types of programs are needed to realize any type of motion control. Motion programs Use only one command for interpolated motion. Easy programming with a text-based language. Function for Programming with Variables New Equipped with a rich variety of input support functions, so you can easily create a program even if you are not familiar with MPE720 ver. 7. Online Help Simple Setup and Rich Variety of Debugging and Monitoring Functions Motion specialized functions for setup, debugging, and monitoring bring powerful support to your engineering. Axis setup wizard Wizard-aided input simplifies servo adjustment and machine configuration settings. Machine Configuration Settings Window Autotuning Window Ladder programs Command Input Assist Function Improved operability and visibility throughout the ladder editor grid. With a variety of input support functions, anyone can easily use the ladder programs. Trace motions & monitor axis status A variety of parameters, including command and feedback, can be easily traced. Mnemonics and function keys can be used. Trace Data in Trend Graph Trace Data in X-Y Graph Axis Monitor Complex arithmetic operations can be easily written in C-family language to slash programming time. The electronic cam data preparation tool allows you to freely create programs for synchronization control. Security Functions to Provide the Safest Environment Multi-level security functions, such as for the user, controller, project files, and programs, are provided to protect your intellectual property and confidential information. For programs: Password settings for each program Blocked Unauthorized access Electronic Cam Data Preparation Tool Authorized access 28

26 Machine Vision System MYVIS YV260 The MYVIS is a high-performance vision system that combines advanced image processing technologies with many of the servo-control technologies accumulated by Yaskawa over the years as a pioneer in the field of servo drives. With higher resolution and higher-speed processing in a new line of MYVIS products, more versatile applications are now possible. Unit type: 4 models 1 JEVSA-YV260A1-E (100/200 VAC, analog camera) 2 JEVSA-YV260A2-E (100/200 VAC, camera link) 3 JEVSA-YV260D1-E (24 VDC, analog camera) 4 JEVSA-YV260D2-E (24 VDC, camera link) and are CE standards compliant. All models are RoHS compliant. : 3 4 System Configuration Board type: 2 models 1 JAVSA-YV260S1-E (Analog camera) 2 JAVSA-YV260S2-E (Camera link) Specifications Monitor Track Ball Camera 1 Camera 2 Camera 3 Camera 4 MP2200 Machine Controller MECHATROLINK- MECHATROLINK- SGDV SGDV SGDV SGDV Item Number of cameras connected Analog Digital (camera link) Camera interface Preprocessing Monitor output External interface Simultaneous image capture External trigger input Field network Ethernet Serial communication Parallel I/O Track ball Program development Description 4 300,000 to 1,250,000 pixel ( ) 300,000 to 5,000,000 pixel ( ) 4 (2 for 5,000,000 pixel) 4 simultaneous or individual inputs Inter-frame operation, convolution filter (3 3), Morphology (Dilation / Erosion) VGA or XGA MECHATROLINK- 10BASE-T/100BASE-TX RS-232C 2 channels (115.2 kbps max.) General purpose output 16 points + alarm 2 points General purpose input 16 points + mode change 3 points + trigger input 1 points USB mouse interface C language (SH-C compiler Ver.9 or later) Instant Alignment (Positioning with No Retries Required) Precise Positioning with Single Image Capture The MYVIS positioning application software that is supported by Yaskawa considers total servo motion. The present positions of the servo's axes are constantly obtained and images are processed using the servo coordinates. This means that even if the center of the θ axis should move in the X- and Y-axis directions, accurate θ axis center coordinates are determined to achieve the target precision with a single positioning correction. Basic Positioning Calculation As shown in figure at right, two alignment mark coordinates are used to perform the calculation in units of servo axis movement. The inclination from the center of the θ axis is corrected to move the mark to the reference point (target position). Example : In the figure at right, the left mark is being centered in the search area of the left-side camera (camera 1). This enables various combinations of processing, including processing center position of the marks and processing with four cameras. Before positioning correction Camera 1 Camera 2 X Y 3 Y axis correction Reference point (target position) 3 1, 2, and are calculated simultaneously. θ Target object 2 X axis correction After positioning correction Camera 1 Camera 2 X Y 1 θ axis correction θ axis center Y θ Target object X 29

27 Series Combination Rotary Servomotors and AC Power Input SERVOPACKs Rotary Servomotor Model SGMMV (Low Inertia, Ultra-Small Capacity) SGMJV (Medium Inertia, Small Capacity) SGMAV (Low Inertia, Small Capacity) SGMPS (Medium Inertia, Small Capacity, Flat Type) SGMSV (Low Inertia, Medium Capacity) SGMGV (Medium Inertia, Medium Capacity) SGMZS (Certified Explosion Proof) SGMMV-A1A SGMMV-A2A SGMMV-A3A SGMJV-A5A SGMJV-01A SGMJV-C2A SGMJV-02A SGMJV-04A SGMJV-06A SGMJV-08A SGMAV-A5A SGMAV-01A SGMAV-C2A SGMAV-02A SGMAV-04A SGMAV-06A SGMAV-08A SGMAV-10A SGMPS-01A SGMPS-02A SGMPS-04A SGMPS-08A SGMPS-15A SGMSV-10 SGMSV-15 SGMSV-20 SGMSV-25 SGMSV-30 SGMSV-40 SGMSV-50 SGMSV-70A SGMGV-03 SGMGV-05 SGMGV-09 SGMGV-13 SGMGV-20 SGMGV-30 SGMGV-44 SGMGV-55 SGMGV-75 SGMGV-1A SGMGV-1E SGMZS-02A SGMZS-05A SGMZS-10A SGMZS-18A SGMZS-30A SGMZS-30A A A A A A B Capacity 10 W 20 W 30 W 50 W 100 W 150 W 200 W 400 W 600 W 750 W 50 W 100 W 150 W 200 W 400 W 550 W 750 W 1 kw 100 W 200 W 400 W 750 W 1.5 kw 1.0 kw 1.5 kw 2.0 kw 2.5 kw 3.0 kw 4.0 kw 5.0 kw 7.0 kw 300 W 450 W 850 W 1.3 kw 1.8 kw 2.9 kw 4.4 kw 5.5 kw 7.5 kw 11 kw 15 kw 200 W 500 W 1.0 kw 1.8 kw 2.97 kw 2.96 kw Rated Torque N m Instantaneous Peak Torque N m Rated Speed min -1 Max. Speed min : These amplifiers can be powered with single or three-phase. 2 : Single-phase, 200 VAC SERVOPACKs are also available (model: SGDV-120A A008000). 3 : The combination of the SGDV-200A SERVOPACK and the SGMGV-30A servomotor must be used at the following reduction ratings. SERVOPACK Model SGDV-200A Rated Current Arms Rated Torque N m Allowable Load Moment of Inertia Reduction Ratings times Ratings times SERVOPACK Model SGDV- Single-phase 100 VAC Three-phase 200 VAC Three-phase 400 VAC R90F R90F 2R1F R70F R90F 2R1F 2R1F 2R8F R70F R90F 2R1F 2R8F R90F 2R1F 2R8F R90A 1 R90A 1 1 6A 1 R70A 1 R90A 1 1R6A 1 1R6A 1 2R8A 1 5R5A 1 5R5A 1 R70A 1 R90A 1 1R6A 1 2R8A 1 5R5A 1 120A 2 R90A 1 2R8A 1 5R5A 1 120A 2 7R6A 120A 180A 200A 330A 550A 3R8A 7R6A 120A 180A 330A/200A 3 330A 470A 550A 590A 780A 1R6A 3R8A 7R6A 180A 200A 330A 3R5D 5R4D 8R4D 120D 170D 1R9D 3R5D 5R4D 8R4D 120D 170D 210D 260D 280D 370D 30

28 Rotary Servomotors and DC Power Input SERVOPACKs Rotary Servomotor Model SGMMV (Low Inertia, Ultra-Small Capacity) SGMMV-B3E SGMMV-B5E SGMMV-B9E SGMMV-A1E SGMMV-A2E SGMMV-A3E Capacity 3.3 W 5.5 W 11 W 10 W 20 W 30 W Rated Torque N m Instantaneous Peak Torque N m Rated Speed min Max. Speed min SERVOPACK Model SGDV- 24 VDC/48 VDC 1R7E 2R9E Direct Drive Servomotors and AC Power Input SERVOPACKs Direct Drive Servomotor Model SGMCS (Small Capacity) SGMCS (Medium Capacity) SGMCS-02B SGMCS-05B SGMCS-07B SGMCS-04C SGMCS-10C SGMCS-14C SGMCS-08D SGMCS-17D SGMCS-25D SGMCS-16E SGMCS-35E SGMCS-45M SGMCS-80M SGMCS-80N SGMCS-1AM SGMCS-1EN SGMCS-2ZN Capacity 42 W 105 W 147 W 84 W 209 W 293 W 168 W 356 W 393 W 335 W 550 W 707 W 1260 W 1260 W 1730 W 2360 W 3140 W Rated Torque N m Instantaneous Peak Torque N m Rated Speed min Max. Speed min SERVOPACK Model SGDV- Single-phase 100 VAC Three-phase 200 VAC 2R1F 2R8A 2R8F 5R5A 7R6A 120A 180A 200A 31

29 Series Combination Linear Servomotors and AC Power Input SERVOPACKs SGLGW (Coreless Type, with standard magnetic way) Linear Servomotor Model SGLGW (Coreless Type, with high-force magnetic way) SGLFW (With F-type Iron Core) SGLTW (With T-type Iron Core) SGLC ( -Stick) SGLGW-30A050C SGLGW-30A080C SGLGW-40A140C SGLGW-40A253C SGLGW-60A140C SGLGW-40A365C SGLGW-60A253C SGLGW-60A365C SGLGW-90A200C SGLGW-90A370C SGLGW-90A535C SGLGW-40A140C SGLGW-60A140C SGLGW-40A253C SGLGW-40A365C SGLGW-60A253C SGLGW-60A365C SGLFW A SGLFW A SGLFW A SGLFW A SGLFW B SGLFW B SGLFW-1Z 200B SGLFW-1Z 380B SGLTW-20A170A SGLTW-35A170A SGLTW H SGLTW H SGLTW-20A320A SGLTW-20A460A SGLTW-35A320A SGLTW H SGLTW H SGLTW-35A460A SGLTW B SGLTW B SGLTW B SGLTW B SGLC-D16A085 SGLC-D16A115 SGLC-D16A145 SGLC-D20A100 SGLC-D20A135 SGLC-D20A170 SGLC-D25A125 SGLC-D25A170 SGLC-D32A165 SGLC-D25A215 SGLC-D32A225 SGLC-D32A285 Rated Force N Reference value at speed control These amplifiers can be powered with single or three-phase. : 2 : Note: Values in parentheses are for three-phase, 400 VAC models. Peak Force N Rated Speed 1 m/s (1.5) 3.0 (1.5) 1.5 (1.5) (1.5) 2.0 (1.5) (1.5) (1.5) 1.5 Peak Speed m/s (4.5) 5.0 (5.0) 4.9 (5.0) (5.0) 3.2 (4.0) (5.0) 3.1 (4.0) (3.1) 2.5 (3.1) 4.0 SERVOPACK Model SGDV- Single-phase 100 VAC R70F R90F Three-phase 200 VAC R70A 2 R90A 2 Three-phase 400 VAC 2R1F 2R8F 2R1F 2R8F 2R1F R70F R90F 2R1F 2R8F 1R6A 2 2R8A 2 5R5A 2 120A 180A 200A 1R6A 2 2R8A 2 3R8A 7R6A 1R6A 2 3R8A 5R5A 2 120A 200A 3R8A 5R5A 2 7R6A 120A 180A 330A 550A R70A 2 R90A 2 1R6A 2 2R8A 2 1R6A 2 2R8A 2 5R5A 2 1R9D 3R5D 5R4D 120D 3R5D 8R4D 120D 170D 260D Linear Sliders ( -Trac) and AC Power Input SERVOPACKs SGT ( -Trac) SGTMM ( -Trac- ) μ SGTMF ( -Trac-MAG) Linear Slider Model SGT GD SGT GE SGT GG SGT GF SGT GH SGT GI SGT F3 SGT F4 SGT F9 SGT FA SGTMM01 SGTMM SGTMM SGTMF4A SGTMF4B SGTMF5A SGTMF5B Rated Force N Peak Force N Rated Speed m/s Peak Speed m/s SERVOPACK Model SGDV- Single-phase 100 VAC R90F 2R1F 2R8F 2R1F R70F R90F 2R1F Three-phase 200 VAC R90A 1R6A 2R8A 5R5A 1R6A 3R8A 5R5A 120A R70A R90A 1R6A 5R5A 32 Reference value at speed control :

30 Series Model Designation Rotary Servomotors SGMMV SGMMV A1 A 2 A 2 1 SGMMV Rated Output B3: 3.3W A1 : 10W B5: 5.5W A2 : 20W B9: 11W A3 : 30W Power Supply A : 200 VAC 1 E : 24 VDC/48 VDC 2 Serial Encoder 2 : 17-bit absolute Options 1 : Without options C : With holding brake (24 VDC) 1 Shaft End 2 : Straight standard A : Straight with a flat seat (optional) Design Revision Order A : Standard 1 : 25 mm flange model only 2 : For both 24 VDC and 48 VDC. The characteristic value changes according to the SERVOPACK circuit s voltage. SGMJV SGMAV Without Gears SGM V 01 A D A 2 1 SGMPS Without Gears SGMPS 01 A C A 2 1 E SGMJV SGMAV Rated Output A5 : 50W 04 : 400W 01 : 100W 06 1 : 600W C2: 150W 08 : 750W 02 : 200W 10 2 : 1.0kW 1 : 550W for SGMAV servomotors 2 : For SGMAV servomotor only Power Supply A: 200 VAC Serial Encoder 3 : 20-bit absolute (standard) D : 20-bit incremental (standard) A : 13-bit incremental (standard) : For SGMJV servomotor only Options 1 : Without options C : With holding brake (24 VDC) E : With oil seal and holding brake (24 VDC) S : With oil seal Shaft End 2 : Straight without key (standard) 6 : Straight with key and tap (optional) B : With two flat seats (optional) Design Revision Order A : Standard SGMPS Rated Output 01 : 100 W 02 : 200 W 04 : 400 W 08 : 750 W 15 : 1.5 kw Power Supply A: 200 VAC Serial Encoder 2 : 17-bit absolute (standard) C : 17-bit incremental (standard) RoHS Directive E : RoHS Compliant Options 1 : Without options C : With holding brake (24 VDC) E : With oil seal and holding brake (24 VDC) S : With oil seal Shaft End 2 : Straight without key (standard) 6 : Straight with key and tap (optional) Design Revision Order A : IP55 (standard) E : IP67 (optional) With Gears SGM V 01 A D A H With Gears SGMPS 01 A 2 A H B 0 1 E SGMJV SGMAV Rated Output (Same as for that without gears) Power Supply (Same as for that without gears) Serial Encoder (Same as for that without gears) Design Revision Order (Same as for that without gears) Gear Type H : HDS planetary low-backlash gear Options 1 : Without options C : With holding brake (24 VDC) Shaft End 0 : Flange output 2 : Straight without key 6 : Straight with key and tap Gear Ratio B : 1/11 (Not available: 50 W) C : 1/21 1 : 1/5 2 : 1/9 (Only 50 W) 7 : 1/33 SGMPS Rated Output (Same as for that without gears) Power Supply (Same as for that without gears) Serial Encoder (Same as for that without gears) Design Revision Order A: IP55 (standard) Gear Type H : HDS planetary low-backlash gear RoHS Directive E : RoHS Compliant Options 1 : Without holding brake C : With holding brake (24 VDC) Shaft End 0 : Flange output 2 : Straight without key 6 : Straight with key and tap (optional) Gear Ratio B : 1/11 C : 1/21 1 : 1/5 7 : 1/33 33

31 Series Model Designation Rotary Servomotors SGMGV SGMSV SGM V A D A 2 1 SGMZS SGMZS 05 A 2 A 2 1 A SGMGV SGMSV Rated Output SGMGV 03 : 300 W 05 : 450 W 09 : 850 W 13 : 1.3 kw 20 : 1.8 kw 30 : 2.9 kw 44 : 4.4 kw 55 : 5.5 kw 75 : 7.5 kw 1A : 11 kw 1E : 15 kw SGMSV 10 : 1.0 kw 15 : 1.5 kw 20 : 2.0 kw 25 : 2.5 kw 30 : 3.0 kw 40 : 4.0 kw 50 : 5.0 kw 70 : 7.0 kw (Available only for 200-VAC models) Options 1 : Without options B : With holding brake (90 VDC) C : With holding brake (24 VDC) D : With oil seal and holding brake (90 VDC) E : With oil seal and holding brake (24 VDC) S : With oil seal Shaft End 2 : Straight without key (standard) 6 : Straight with key and tap (optional) Design Revision Order A : Standard Serial Encoder 3 : 20-bit absolute (standard) D : 20-bit incremental (standard) Power Supply A : 200 VAC D : 400 VAC SGMZS Rated Output 02 : 0.2 kw 05 : 0.5 kw 10 : 1.0 kw 18 : 1.8 kw 30 : 2.97/2.96 kw A : Explosion-proof 200 V Encoder 1 2: 17-bit absolute encoder Rated Speed A : 3000 min -1 B : 2000 min -1 (for SGMZS-30 servomotor only) Cable Length A : 3 m D : 25 m B : 10 m E : 40 m C : 15 m F : 50 m Options 2 1 : Without options B : With holding brake (90 VDC) C : With holding brake (24 VDC) D : With oil seal and holding brake (90 VDC) E : With oil seal and holding brake (24 VDC) S : With oil seal Shaft End 2 : Straight without key 6 : Straight with key and tap 1 : Can be used as an incremental encoder by changing the SERVOPACK parameters. 2 : The SGMZS-02 servomotor does not have an oil seal option. Direct Drive Servomotors SGMCS SGMCS 04 C 3 A 1 1 Direct Drive Servomotors SGMCS Rated Torque Small capacity 02 : 2 N m 04 : 4 N m 05 : 5 N m 07 : 7 N m 08 : 8 N m 10 : 10 N m 14 : 14 N m 16 : 16 N m 17 : 17 N m 25 : 25 N m 35 : 35 N m Motor Outer Diameter B : 135 dia. mm E : 290 dia. mm C : 175 dia. mm M : 280 dia. mm D : 230 dia. mm N : 360 dia. mm Options 1 : Without options Flange Specifications Medium capacity 1 : C-face (Mounted Side: Non-load side) 45 : 45 N m 1 (Mounted Side: Load end) 80 : 80 N m 2 3 : C-face 1A : 110 N m 2 (Mounted Side: Non-load side) 4 : C-face 1E : 150 N m 1 (Mounted Side: Non-load side with 2Z : 200 N m cable on side) Design Revision Order A B Encoder Specifications 3 : 20-bit absolute 3 (standard) D : 20-bit incremental (optional) 1 : For small-capacity series only 2 : For medium-capacity series only 3 : Without multiturn data 34

32 Linear Servomotors SGLGW SGLFW SGLTW Moving Coil Linear Series Linear Servomotor Servomotor Type G: Coreless F : F-type iron core T : T-type iron core W : Moving Coil Magnet Height SGL W 30 A 050 C P A : 200 VAC D : 400 VAC (There is no 400-VAC SGLGW.) Length of Moving Coil Design Revision Order A B C H : High-Efficiency Type (Only for the SGLTW model) Hall Sensor/Cooling Method Code P C H Blank Specifications With hall sensor Forced cooling With hall sensor and forced cooling Without hall sensor Connector for Main Circuit Cable Code Specifications Connector by Blank Tyco Electronics AMP K.K. MS connector Connector by D Interconnectron GmbH Applicable Model SGLGW, SGLFW, SGLTW -20A, -35A, -50A SGLTW-40, -80 SGLGW-30A, -40A, -60A SGLFW-35, -50, -1Z SGLTW-35D, -50D Magnetic Way SGL M A Applicable Model All models SGLGW-40A, -60A, -90A All models -Stick Series SGLC Combination of Moving Coil and Magnetic Way SGL C D16 A 085 A P 750 A Linear Series Linear Servomotor Servomotor Model C : Cylinder type Outer Diameter of Magnetic Way D16 : 16 mm D20 : 20 mm D25 : 25 mm D32 : 32 mm A : 200 VAC Moving Coil SGL C W D16 A 085 A P Linear Series Linear Servomotor Servomotor Model C : Cylinder type W: Moving Coil Outer Diameter of Magnetic Way D16 : 16 mm D20 : 20 mm D25 : 25 mm D32 : 32 mm A : 200 VAC Design Revision Order of Magnetic Way A B Length of Magnetic Way Same as magnetic way model. Hall Sensor P : With hall sensor (all models) Design Revision Order of Moving Coil A B Length of Moving Coil Same as moving coil model. Hall Sensor P : With hall sensor (all models) Design Revision Order A B Length of Moving Coil Magnetic Way Outer Diameter Code D16 D20 D25 D32 Moving Coil Length Code Length of Moving Coil mm Linear Series Linear Servomotor Servomotor Type G: Coreless F : F-type iron core T : T-type iron core M : Magnetic Way Magnet Height Length of Magnetic Way Options Code Blank C -M Y Specifications Standard With magnet cover High force With base and magnet cover Applicable Model All models SGLFM, SGLTM SGLGM-40, -60 SGLTM-20, -35, -40, -80 : Except for SGLTM-35 H (high-efficiency type). Design Revision Order A B C C : Without mounting holes on the bottom (Only for the SGLGM model) CT : With mounting holes on the bottom (Only for the SGLGM-40 and -60 models) H : High efficiency type (Only for the SGLTM model) Magnetic Way SGL C M D A Linear Series Linear Servomotor Servomotor Model C : Cylinder type M : Magnetic Way Outer Diameter of Magnetic Way D16 : 16 mm D20 : 20 mm D25 : 25 mm D32 : 32 mm Design Revision Order A B Length of Magnetic Way Magnetic Way Magnetic Way Outer Diameter Length Code Code D16 D20 D25 D Length of Magnetic Way mm Note: The moving coil and magnetic way are sold as a set. If necessary to purchase the items separately, contact your Yaskawa representative. 35

33 Series Model Designation AC Power Input SERVOPACKs SGDV Without Option Module Series SGDV SERVOPACK Current 100 V 200 V 400 V Code R70 R90 2R1 2R8 R70 2 R90 2 1R6 2 2R8 2 3R8 5R5 2 7R R9 3R5 5R4 8R With Option Module Series SGDV SERVOPACK Current Code R70 R V 2R1 2R8 R70 2 R90 2 1R6 2 2R8 2 3R8 5R5 2 7R6 200 V R9 3R5 5R4 8R V SGDV R70 A 01 A Applicable Servomotor Max. Capacity kw F : Single-phase 100 VAC A : Three-phase 200 VAC D : Three-phase 400 VAC Options 1 Interface Code E1 SGDV ( Note) R70 A 01 A Applicable Servomotor Max. Capacity kw F : Single-phase 100 VAC A : Three-phase 200 VAC D : Three-phase 400 VAC Options (parameters) 0 : standard Options (software) 00 : standard Options (hardware) 4 Code Specifications 000 Base-mounted (standard) 001 Rack-mounted Varnished (Coating equivalent to HumiSeal) 003 Rack-mounted 5 and Varnished 004 Intensive vibration resistance 008 Single-phase 200 VAC input Model: SGDV-120A A Dynamic brake (DB) 6 Design Revision Order A B E5 Specifications Analog voltage/pulse train reference (for rotary servomotors) Analog voltage/pulse train reference (for linear servomotors) MECHATROLINK- communications reference (for rotary servomotors) MECHATROLINK- communications reference (for linear servomotors) MECHATROLINK- communications reference (for rotary servomotors) MECHATROLINK- communications reference (for linear servomotors) Command option attachable type 7 (for rotary servomotors) Command option attachable type 7 (for linear servomotors) (Under development) 1 : When there are no options, the model designation is 12 digits, ending with the Design Revision Order. 2 : These amplifiers can be powered with single or three-phase. 3 : Single-phase 200 VAC SERVOPACKs are also available. (Model: SGDV-120A A008000) 4 : Multiple options can be selected, but some can not be combined. 5 : Models with a capacity of 6 kw or more have ducts for ventilation. 6 : An internal resistor for the dynamic brake is not included. An external resistor for the dynamic brake can only be used with 400V SERVOPACKs. 7 : Be sure to use command option modules for the command option attachable type SERVOPACKs. They will not work without the modules. Option Modules 1 Option Modules Code Specifications 001 Fully-closed module 010 Safety module 100 INDEXER module 101 INDEXER + fully-closed modules Options (parameters) 0 : standard Options (software) 00 : standard Options (hardware) 4 Code Specifications 000 Base-mounted (standard) 001 Rack-mounted Varnished (Coating equivalent to HumiSeal) 003 Rack-mounted 5 and Varnished 004 Intensive vibration resistance 008 Single-phase 200 VAC input Model: SGDV-120A A Dynamic brake (DB) 6 Design Revision Order A B Interface Code E1 E5 Specifications Analog voltage/pulse train reference (for rotary servomotors) Analog voltage/pulse train reference (for linear servomotors) MECHATROLINK- communications reference (for rotary servomotors) MECHATROLINK- communications reference (for linear servomotors) MECHATROLINK- communications reference (for rotary servomotors) MECHATROLINK- communications reference (for linear servomotors) Command option attachable type 7 (for rotary servomotors) Command option attachable type 7 (for linear servomotors) (Under development) 36 Contact your Yaskawa representative for information regarding options. 1 : Although more than one option module can be attached, certain combinations cannot be used. 2 : These amplifiers can be powered with single or three-phase. 3 : Single-phase 200 VAC SERVOPACKs are also available. (Model: SGDV-120A A008000) 4 : Multiple options can be selected, but some can not be combined. 5 : Models with a capacity of 6 kw or more have ducts for ventilation. 6 : An internal resistor for the dynamic brake is not included. An external resistor for the dynamic brake can only be used with 400V SERVOPACKs. 7 : Be sure to use command option modules for the command option attachable type SERVOPACKs. They will not work without the modules. Note : The model number of a SERVOPACK with an option module is not hyphenated after SGDV.

34 DC Power Input SERVOPACKs SGDV Analog Reference/ Pulse Train Reference Series SGDV SERVOPACK Current Code 1R7 2R9 Applicable Servomotor Max. Capacity W E : 24 VDC/48 VDC 2 SGDV 2R9 E S1 A Interface Code Specifications S1 Analog voltage reference (for rotary servomotors) P1 Pulse train reference (for rotary servomotors) Options 1 Options (parameters) 0 : standard Options (software) 00 : standard Options (hardware) Code Specifications Encoder pulse dividing output: 000 Line driver (standard) Encoder pulse dividing output: 010 Open collector (only for pulse train reference type) Design Revision Order A B 1 : When there are no options, the model designation is 11 digits, ending with the Design Revision Order. 2 : The control power supply is 24 VDC. MECHATROLINK- and Series SGDV SERVOPACK Current Code 1R7 2R9 Applicable Servomotor Max. Capacity W E : 24 VDC/48 VDC 2 Communications Reference Options 1 SGDV 2R9 E 11 A Options (parameters) 0 : standard Options (software) 00 : standard Options (hardware) 000 : standard Design Revision Order A B Interface Code Specifications 11 MECHATROLINK- communications reference (for rotary servomotors) 21 MECHATROLINK- communications reference (for rotary servomotors) 1 : When there are no options, the model designation is 11 digits, ending with the Design Revision Order. 2 : The control power supply is 24 VDC. 37

35 Series Model Designation Option Module INDEXER module Fully-closed module Safety module SGDV-OCA03A SGDV-OFA01A SGDV-OSA01A Option Case Kit SGDV-OZA01A Note: One option case kit is required for each SERVOPACK if using option modules. Recommended Linear Scales Incremental Linear Scales Output Signal 1Vp-p Analog 1 Applicable for Yaskawa s Serial Interface 2 Manufacturer HEIDENHAIN Corporation Renishaw plc 4 Magnescale Co., Ltd. Scale Type Open Type Open Type Open Type Sealed Type Scale RGS20 SL7 0 LIDA48 LIDA18 LIF48 Sensor Head Model RGH22B SR75- LF SR75- MF SR85- LF SR85- MF Interpolator (serial converter unit) (JZDP-D003/-D006) (JZDP-G003/-G006) (JZDP-D003/-D006) (JZDP-G003/-G006) (JZDP-D003/-D006) (JZDP-G003/-G006) (JZDP-D005/-D008) (JZDP-G005/-G008) PL101-RY PL101 MJ620-T13 Scale Pitch μm Resolution nm Maximum Speed 3 m/s Hall Sensor Input Linear Motor 5 Fully-closed Loop Control Absolute Linear Scale Output Signal Applicable for Yaskawa s Serial Interface 2 Manufacturer Magnescale Co., Ltd. Mitutoyo Corporation Scale Type Sealed Type Open Type Scale Sensor Head Model SR77- LF SR77- MF SR87- LF SR87- MF ST781A ST782A ST783A ST784A ST788A ST789A 6 Interpolator (serial converter unit) Scale Pitch μm Resolution nm Maximum Speed 3 m/s Hall Sensor Input Linear Motor Fully-closed Loop Control Absolute Rotary Scale Output Signal Applicable for Yaskawa s Serial Interface Manufacturer Magnescale Co., Ltd. Scale Type Sealed Type Scale Sensor Head Model Interpolator (serial converter unit) RU ADF RU AFFT01 Scale Pitch μm Resolution bit/rev Maximum Speed 3 min Linear Motor Fully-closed Loop Control 1 : The use of Yaskawa serial converter units is required. Output signals are divided into 256 (8-bits multiplier) or 4096 (12-bits multiplier) in the serial converter units. 2 : Each linear scale has a different multiplier (number of divisions). Before use, write the parameters of the linear servomotors into the linear scales. 3 : The maximum speed shown is for the linear scale when combined with a Yaskawa SERVOPACK. Either the maximum speed of the linear servomotor or that of the linear scale in this table limits the maximum speed. 4 : If the zero-point signal is used with the Renishaw linear scale, the accuracy might be affected, and the zero point might be detected as being at a different position. If so, use BID and DIR signals to send the zero point in one direction. 5 : Contact your Yaskawa representative. 6 : For details, contact Mitutoyo Corporation. Note : Before using the linear scales, contact the manufacturer of the scale for specifications including accuracy, dimensions, and recommended operating conditions. 38

36 Global Service Network Yaskawa assists you in your global business with our worldwide network. YASKAWA NORDIC AB Sweden YASKAWA EUROPE GmbH YASKAWA ENGINEERING EUROPE GmbH Frankfurt YASKAWA ELECTRIC (SHENYANG) Co., Ltd. YASKAWA ELECTRIC KOREA Corp. YASKAWA ENGINEERING KOREA Corp. Y-TECH Corporation YASKAWA AMERICA INC. Chicago PILLAR MEXICANA, S.A. DE C.V. Mexico VARIADORES LTD.A. Colombia SHOUGANG MOTOMAN ROBOT Co., Ltd. YASKAWA ELECTRIC (SHANGHAI) Co., Ltd. Yaskawa Robotics India Limited Delhi LARSEN & TOUBRO LIMITED Mumbai Bangkok Bangalore YASKAWA Electric India Private Limited Singapore Beijing Shenyang Seoul Shanghai Fukuoka Taipei YASKAWA ELECTRIC (SINGAPORE) PTE. Ltd. Tokyo YATEC ENGINEERING Co. YASKAWA ELECTRIC TAIWAN Co. YASKAWA ELECTRIC (THAILAND) Co., Ltd. YASKAWA SIMENS AUTOMATION & DRIVES CORPORATION YASKAWA ELECTRIC CORPORATION YASKAWA ELECTRIC ENGINEERING CORPORATION YASKAWA ELECTRICO DO BRASIL LTDA. São Paulo ROBOTIC AUTOMATION Pty.Ltd. Sydney For a listing of YASKAWA s offices in it s sales and marketing network, see the Network in the Corporate Profile on YASKAWA s homepage