SRX. General Description. Features. Module type High-speed Digital Controller SRX. Multi-Zone Space-Saving. High-speed Feedback Control

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Malcolm McCoy
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1 SX General Description The SX is a module type digital controller with a super high speed sampling of control updating cycle time of ms (0.0 sec). Dual loop control can be performed with a single compact module. A maximum of modules can be connected for -loop control. Power supply and communication lines are via a connector on the side, no wiring required. Distributed installation via S- is possible, enabling multi-zone distributed control system in a compact size. Features High-speed feedback control Multi-zone space-saving amp/soak program function High-speed Feedback Multi-Zone Space-Saving Dual loop control can be performed with a single compact module. Side connectivity for power supply and communications eliminates the need for wiring and offers close mounting. Distributed installation via S- is possible, enabling multizone distributed control system in a compact size. SX is a digital controller with a super high speed sampling of control updating cycle time of ms (0.0 sec). Supplied with high resolution and parameters settable in /00 sec. for process applications with fast response. Applications in TP (apid Thermal Process), TA (apid Thermal Anneal) and pulse heat temperature control of flip chip bonders in semiconductor manufacturing can be controlled by the SX. The high speed sampling function also makes it suitable for additional application requirements such as pressure and flow rate. mm ( C) 00ms sampling controller ( C) SX ms sampling controller 00mm 00 SV PV 00 SV PV (S-) Output Output Output Output sec sec asic module Extension module (S-) Power supply (DC V) Pulse heat temperature control of flip chip bonding. Power supply (DC V) connector Extension modules can be added to a basic module TP applications such as lamp annealing. SX_0E

2 90 90 Features amp/soak Program Function Compliance with Standards amp/soak program control of segments by patterns is supplied as standard. can be selected from a a standard fixed-setpoint control or ramp/soak program control. CE Mark UL ecognized CSA Certified C-Tick Mark patterns Temp. segments Time System Configuration Terminal base (Terminal unit) Host computer Communication (S-) asic Module. output.. output.. output. Expansion Module < When nd is used as a remote setpoint > output output Main unit Module connecting connector status lamp Communication send/receive lamp Event status lamp Module address setting rotary switch Power supply (DCV) Measured, Measured, Measured, Max. modules including a basic module emote * Each module can perform maximum -loop control. Measured * Expansion modules are powered from a basic module via a connector. * Communication of expansion modules is via a connector. * and output types can be freely specified for each module and channel. * Time signal outputs (in program control mode) are provided from a DO module (available soon) emote Measured Main unit can be easily removed from a terminal base unit. SX_0E

3 Specifications umber of s points nd can be used as a remote. a), DC low voltage group : K, J, E, T,, S,, (JIS/IEC) PLII (S), We/We(ASTM) impedance : Approx.MΩ Influence of external resistance : Approx. 0.µV/Ω break action : Up-scale DC low voltage : 0 to V DC, 0 to 00mV DC, 0 to 0mV DC break action : Up-scale (0 to 00mV, 0 to 0mV) Value around 0V (0 to V) b) TD group Pt00 (JIS/IEC), JPt00 (JIS) Influence of lead resistance : Approx. 0.0[%/Ω] of reading Maximum 0Ω per wire break action : Up-scale short action : Down-scale c) DC high voltage, DC current group DC high voltage : 0 to V DC, to V DC, 0 to 0V DC break action : Value around 0V DC current : 0 to 0mA DC, to 0mA DC break action : Value around 0V Sampling Time 0.0 sec. PV ias - span to +span (Within -999 to 9999) Digital Filter 0.0 to 0.00 sec. (OFF when 0 is set.) Performance Measuring Accuracy a) Type : K, J, T, E, PLII Less than -00 C (- F) : ±.0 C (±. F) -00 to 00 C (- to 9 F) : ±0. C (±0.9 F) More than 00 C (9 F) : ±(0.% of eading + digit) Type :, S,, We/We -0 to 000 C (- to F) : ±.0 C (±. F) More than 000 C ( F) : ±(0.% of eading + digit) Type : Less than 00 C ( F) : ±0.0 C (± F) 00 to 000 C ( to F) :.0 C (. F) More than 000 C ( F) : ±(0.% of eading + digit) Cold junction temperature compensation error ±.0 C (. F) [at C± C (. F±. F)] Within ±. C (±. F) [etween 0 and 0 C ( to F)] b) TD Less than 00 C (9 F) : ±0. C (±0. F) More than 00 C (9 F) : ±(0.% of eading + digit) c) DC voltage and DC current ±(0.% of span + digit) Insulation esistance More than 0MΩ (00V DC) between each isolation block Dielectric Strength More than 00V AC for one minute between each isolation block Method rilliant PID control (with autotuning) Direct action/everse action selectable. Major Setting ange Set value : Same as range. Proportional band : 0 to span or 0. to span (Temperature) 0.0 to 000.0% of span (Voltage, Current) (O/OFF action when P=0) Integral time : 0.0 to 0.00 sec. or 0. to 00.0 sec. Derivative time : 0.00 to 0.00 sec. or 0.0 to 00.0 sec. response : Slow, Medium, Fast Output limiter : -.0 to +0.0% (High/Low individual setting) Output change rate limiter : 0.0 to 00.0% / sec. Proportional cycle time : 0. to 0.0 sec. Level PID : sets of PID parameters can be assigned to set values at different points. Output elay output : Voltage pulse output : Current output : Form A contact, 0V AC A (resistive load) 0/V DC (Load resistance : More than 00Ω) 0 to 0mA, to 0mA DC (Load resistance : Less than 00Ω) Contimuous voltage output : 0 to V, 0 to 0V, to V DC (Load resistance : More than kω) Alarms Event (Alarm ) Output a) umber of alarm : Up to points/channel b) Type : Deviation High, Low, High/Low, and, Process High, Low Hold action is available except for and Alarm. c) Setting range : Deviation alarm : -span to +span Deviation High/Low, and : 0 to span Process alarm : Same as range d) Differential gap : 0 to 0 C ( F) or 0.0 to 0.0 C ( F) (Temperature ) 0 to 00 units (Voltage, Current ) e) Output : Communication data output Loop break alarm (LA) a) umber of alarm : points b) LA time setting : 0 to 00 sec. (LA is OFF when 0 is set) c) LA deadband : 0 to span d) Output : Communication data output Heater reak Alarm (HA) : (Optional) a) umber of alarm : points b) type : L--P- (0A), L--S-0L- (00A) (Specify when ordering) c) Display range : 0.0 to 00.0A d) Accuracy : ±% of value or ±A (whichever is larger) e) Output : Communication data output Program Storage Program Pttern : Max. patterns ( segments per pattern) Storage Segments : Program Setting : Setting ange : Program epeat : Time Accuracy : Start Mode : Functions : Mode : Max. segments ( patterns x segments) Level setting (Setting per channel) Segment time (Setting per channel) Level : Same as range Segment time : 0.00 to sec. / 0.0 to sec. / 0 to 0000 sec. / 0 to 0000 min (selectable) to 000 times (Continuous when 000 times is set) ± (0.0% of reading + digit) Zero start, Fixed time type PV start, Time shorting/constant slope type PV start (selectable) HOLD, STEP, WAIT eset, Program, Fixed, Manual Time Signal : points per pattern Contact outputs of time signals are provided from a DO module. (available soon) a) Communication method : ased on S- (-wire) b) Communication speed : 00, 900, 900, 00 PS c) Protocol : ASI X.(9). A MODUS d) it format Start bit : Data bit : or For MODUS bit only Parity bit : Without, Odd or Even Stop bit : e) Communication code : ASCII(JIS) -bit code f) Maximum connection : ( Address can be set from 0 to 99.) SX_0E

4 Specifications General Specifications Supply Voltage. to.v DC (ipple rate 0% p-p or less) [ ating : V DC ] Power Consumption asic module : Extension module : Maximum 0mA Maximum 0mA Power Failure Effect A power failure of 0 msec or less will not affect the control action. If power failure of more than 0 msec occurs, controller will restart. HOT or COLD start is selectable. Operating Environments : 0 to 0ºC [ to ºF], 0 to 0% H (on-condensing) Memory ackup : acked up by non-volatile memory (FAM). Data retaining period : Approx. 0 years. umber of writing : Approx. 0,000,000,000 times Depending on storage and operating conditions. et Weight asic module : Extension module : External Dimensions See external dimensions. Approx. 0g Approx. 90g Operating Environment Free from corrosive or flammable gas, and dust. Other Conditions Free from external noise, vibration, shock and exposure to direct sunlight. Compliance with Standards CE Mark UL ecognized CSA Certified C-Tick Mark SX_0E

5 Model and Suffix Code Specifications Model Type Measured (CH) Measured (CH) output (CH) output (CH) Current Transformer (CH) Current Transformer (CH) asic module Extension module See ange and Code Table See ange and Code Table elay output Voltage pules DC voltage : 0 to V DC voltage : 0 to 0V DC voltage : to V DC current : 0 to 0mA DC current : to 0mA elay output Voltage pules DC voltage : 0 to V DC voltage : 0 to 0V DC voltage : to V DC current : 0 to 0mA DC current : to 0mA ot supplied L--P- L--S-0L- ot supplied L--P- L--S-0L- Model and Suffix Code Extension module alone cannot be used. The second PV can be also used as a remote setpoint (voltage / current only). When a heater break alarm (HA) is used, please specify relay output or voltage pulse output for the relevant channel output. A M V M V PS P S ange and Table and Low voltage group TD group K J T E PLII S We/We 0 0mV DC 0 00mV DC 0 V DC Code K J T E A S W ange -00 C - 0 F C - 9 F C - F C - F 0 90 C F 0 00 C F -0 C F -0 C F 0 00 C 000 F 0 00 C 000 F (Programmable within 0,000 span) esolution C, 0. C, F, 0. F (Selectable), 0., 0.0, 0.00, (Programmable) Pt00 JPt00 0 V DC 0 0V DC V DC 0 0mA DC 0mA DC Code D P High voltage and Current group ange C - F C - F (Programmable within 0,000 span) esolution C, 0. C, F, 0. F (Selectable), 0., 0.0, 0.00, (Programmable) SX_0E

6 External Dimensions and Terminals Unit : mm asic Module Expansion Module Mounting brackets.±0. 0 ø.(m) ±0. ( when installed with screws ) * Mounting brackets Each module is supplied with one mounting brackets as a joint. Additional mounting brackets must be ordered separately. asic Module Expansion Module O O O O T/(A) SG S- T/() OUT elay contact OUT elay contact OUT elay contact OUT elay contact : CH : CH for heater break alarm OUT output (CH) OUT output (CH) : CH : CH for heater break alarm OUT output (CH) OUT output (CH) FG Ground 9 DCV Power supply 0 A TD TD TC I Measured (CH) 9 A TD TC TD I Measured (CH) A TD TD TC I Measured (CH) 9 A TD TC TD I Measured (CH) * nd can be used as a remote setpoint. (voltage/current only) In this setup, control output and are not available. * nd can be used as a remote setpoint. (voltage/current only) In this setup, control output and are not available. 0 9 SX_0E

Basic module X-TIO FAIL/RUN RX/TX EVENT1 EVENT2 EVENT3 EVENT4 X10 FAIL/RUN RX/TX EVENT1 EVENT2 EVENT3 EVENT4 X10. Communications (RS-485)

Basic module X-TIO FAIL/RUN RX/TX EVENT1 EVENT2 EVENT3 EVENT4 X10 FAIL/RUN RX/TX EVENT1 EVENT2 EVENT3 EVENT4 X10. Communications (RS-485) Module type High-speed Digital ler SRX SRX General Description The SRX is a module type digital controller with a super high speed sampling of control updating cycle time of ms (0.0 sec). Dual loop control